CN1152455C - Transverse pulse pre-ionized gas laser with longitudinal discharge - Google Patents
Transverse pulse pre-ionized gas laser with longitudinal discharge Download PDFInfo
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- CN1152455C CN1152455C CNB011187239A CN01118723A CN1152455C CN 1152455 C CN1152455 C CN 1152455C CN B011187239 A CNB011187239 A CN B011187239A CN 01118723 A CN01118723 A CN 01118723A CN 1152455 C CN1152455 C CN 1152455C
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Abstract
The present invention relates to a transverse pulse pre-ionized gas laser with longitudinal discharge, which comprises a discharge tube 31, a high-voltage electrode 33, a grounding electrode 34, a cooling tube 35, a full-reflection mirror 36 and an output coupling mirror 37. Transverse pulse pre-ionized electrodes 321, 322 are relatively arranged on the periphery of the discharge tube 31, and the upper pre-ionized electrode 321 and the lower pre-ionized electrode 322 are respectively connected with the high-voltage end and the low-voltage end of a pulse generator. The novel pulse gas laser with discharge of the present invention has the advantages of low working voltage, favorable discharge stability and high electro-optical conversion efficiency. The present invention is suitable for various gas lasers, such as CO2 lasers, He-Xe lasers, excimer lasers, chemical lasers with discharge initiation, etc.
Description
Technical field
The invention belongs to laser, particularly a kind of longitudinal discharge pulsed gas laser that adopts transverse pulse preionization.
Background technology
The gas laser of longitudinal pulsed discharge is owing to its good beam quality, pulse recurrence rate advantages of higher are subject to people's attention.The impulse preionization technology is to improve a kind of effective means of pulsed discharge laser performance.Impulse preionization is exactly before the main pulse discharge or in the starting stage of main pulse discharge the laser discharge district to be carried out " preionization " pulsed discharge, the electro-optical efficiency that this will improve the stability of " main pulse " discharge greatly and improve laser.Prior art as shown in Figure 1, at the outer bread of discharge tube 11 with metallic sheath 12, this metallic sheath links to each other and ground connection with anode 13 in the discharge tube on electricity, when pulse high-voltage is added on the negative electrode 14 of discharge tube, negative electrode 14 and outside highfield between the metallic sheath 12 at first caused near the gas discharge the negative electrode, promptly near negative electrode, produced strong " preionization ", preionization has reduced the puncture voltage between the anode and negative electrode in the discharge tube, has formed discharge i.e. " main discharge " after therefore following preionization closely between anode and negative electrode.The major defect of this device be the preionization major limitation near the cathodic region, whole region of discharge (laser gain medium district) is not carried out preionization.(see the article of author D.A Orchard and R.C Hollins: " A high pulse repet-ition ratehelium-xenon laser " S PIE Vol.3092 (1997) P82-85)
Second prior art is the Chinese patent application of examining " the vertical impulse preionization laser device of a kind of multistage ", and number of patent application is 01202113.x.As shown in Figure 2, its main feature is anode 23, negative electrode 24, coolant jacket 25, total reflection end mirror 26 and the output coupling mirror 27 that comprises discharge tube 21, discharge tube, it is characterized in that a plurality of annular pre-ionization electrodes 22 closely are enclosed in discharge tube 21 peripheries, preionization round loop electrode 22 and respectively link to each other with low-pressure end with the high-pressure side of pulse generator; The major defect of this device except structure than the complexity, a little less than the strength ratio of preionization is of the present invention.
Summary of the invention
The present invention proposes a kind of new impulse preionization laser device---the longitudinal discharge pulsed gas laser of transverse pulse preionization.At the whole region of discharge (gain medium district) of longitudinal discharge laser thus carry out the operating voltage that the preionization pulsed discharge has reduced the laser discharge, improved the electro-optical efficiency of laser.
For achieving the above object, main feature of the present invention is to comprise discharge tube 31, high-field electrode 34, grounding electrode 33, cooling water pipe 35, completely reflecting mirror 36 and output coupling mirror 37, transverse pulse pre-ionization electrode 321 and 322 relatively places discharge tube 31 peripheries, and last pre-ionization electrode 321, following pre-ionization electrode 322 link to each other with low-pressure end with the high-pressure side of pulse generator respectively.
The novel pulsed discharge gas laser of the present invention operating voltage is lower, and discharge stability is better, and electro-optical efficiency is higher, is applicable to CO
2Laser, He-Xe laser, excimer laser, the multiple gases lasers such as chemical laser that discharge causes.In laser acquisition, laser processing, applications such as photochemistry have wide practical use.
Description of drawings
For further specifying feature of the present invention and structure, the present invention is described in detail below in conjunction with accompanying drawing.
Fig. 1 is the structural representation of the longitudinal pulsed discharge gas laser of prior art.
Fig. 2 is the multistage impulse preionization laser device structural representation of second prior art.
Fig. 3 is a laser structure schematic diagram of the present invention.
Fig. 4 is the structural representation of series resistor between main electrode and pre-ionization electrode.
Fig. 5 is the structural representation of serial connection electric capacity between main electrode and pre-ionization electrode.
Fig. 6 is a spiral transverse pulse preionization laser structural representation.
Embodiment
As shown in Figure 3, the shared high-voltage pulse generator of preionization and main discharge.When pulse voltage is added on the high-pressure side electrode, at first cause impulse preionization discharge (pre-ionization electrode that is positioned at the discharge tube both sides then discharges with corresponding main discharge electrode) in the gas between pre-ionization electrode, preionized discharge has been full of the whole discharge tubes zone between negative electrode and the anode.Strong preionization causes puncture voltage decline between negative electrode and the anode, and after the preionization, following hard on is main discharge.
If negative electrode and anode spacing are L, the discharge tube external diameter is D, and ribbon pre-ionization electrode width is that then the pre-ionization electrode spacing is between 0.5D and 2D between the π D/10-π D/3.Because L＞＞D, so when high pressure was added on the corresponding electrode, the electric field strength between pre-ionization electrode was far longer than the electric field strength between the main electrode, the ratio of its electric field strength is L/D in theory.The voltage high fdrequency component of preionization pulsed discharge is coupled in the discharge tube by discharge vessel wall, and the steepness of its coupling efficiency and potential pulse rising front and the size of the coupling capacitance between pre-ionization electrode and the discharge tube are relevant.Owing to have voltage drop inevitably on the coupling capacitance, therefore above-mentioned ratio should be less than L/D.Coupling capacitance numerical value between pre-ionization electrode and the discharge tube is very little, and preionized discharge only takes place in the very short time before the pulse voltage rising edge is main discharge, so preionized discharge only consumes the very little part in total discharge energy.Can change the numerical value of coupling capacitance by the area that changes pre-ionization electrode, the material of discharge tube, the thickness of discharge vessel wall.Serial connection electric capacity or resistance also can be regulated the energy that is coupled in the preionization between main electrode and pre-ionization electrode.Impulse preionization has two aspect effects: the first has reduced the puncture voltage of main discharge, makes the easier puncture of discharge.It two is the E/P values (ratio of electric field strength and air pressure) that reduced main discharge.Lower E/P value is corresponding to lower Electron energy distribution.In many cases, for example at CO
2In the laser, low E/P value helps the pumped gas molecule to excitation state, thereby helps improving the electro-optical efficiency of laser; Higher E/P value then helps gas and produces ionization in the preionization process, for thereafter main discharge provides enough initiating electron concentration, thereby realizes stable main discharge, increases discharging current and is injected into energy in the gaseous medium.So in certain supply voltage scope, can select suitable L, D value that the E/P value in main discharge and the preionized discharge all is near the optimum value, maximally utilise laser medium, to obtain higher electro-optical efficiency and specific output energy.Pulse laser of the present invention can turn round under high-repetition-rate.When repetition rate was very high, laser also can carry out the transition to continuous running.Fig. 4 is identical with Fig. 3 with other parts among Fig. 5, except between main electrode and pre-ionization electrode respectively series resistor and the electric capacity.
Fig. 6 is a kind of remodeling of the present invention, be called helical form transverse pulse preionization laser, two ribbon metal formings 621 and 622 shape in the shape of a spiral are close to the outer wall of discharge tube 61 as pre-ionization electrode, as the DNA chain of the gene of human body, at two pre-ionization electrodes of each cross section all over against parallel.Thereby this structure makes preionization more evenly can further improve the laser beam quality of output on spatial distribution.Other parts are with shown in Figure 3 identical.
Claims (8)
1. the longitudinal discharge gas laser of a transverse pulse preionization, comprise discharge tube 31, high-field electrode 34, grounding electrode 33, cooling water pipe 35, completely reflecting mirror 36 and output coupling mirror 37, it is characterized in that transverse pulse pre-ionization electrode 321 and 322 relatively places discharge tube 31 peripheries, last pre-ionization electrode 321, following pre-ionization electrode 322 link to each other with low-pressure end with the high-pressure side of pulse generator respectively.
2. by the described laser of claim 1, it is characterized in that described transverse pulse pre-ionization electrode is a helical form.
3. by the described laser of claim 1, it is characterized in that described transverse pulse pre-ionization electrode is a ribbon.
4. by claim 1 or 2 described lasers, it is characterized in that ribbon pre-ionization electrode width between π D/10-π D/3, the pre-ionization electrode spacing is between 0.5D and 2D.
5. by claim 1 or 2 described lasers, it is characterized in that main discharge and preionized discharge adopt the same pulse power.
6. by claim 1 or 2 described lasers, it is characterized in that main discharge and preionized discharge adopt the pulse power separately respectively.
7. by claim 1 or 2 described lasers, it is characterized in that series resistor between main electrode and the pre-ionization electrode.
8. by claim 1 or 2 described lasers, it is characterized in that being connected in series electric capacity between main electrode and the pre-ionization electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011187239A CN1152455C (en) | 2001-06-07 | 2001-06-07 | Transverse pulse pre-ionized gas laser with longitudinal discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011187239A CN1152455C (en) | 2001-06-07 | 2001-06-07 | Transverse pulse pre-ionized gas laser with longitudinal discharge |
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| Publication Number | Publication Date |
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| CN1391320A CN1391320A (en) | 2003-01-15 |
| CN1152455C true CN1152455C (en) | 2004-06-02 |
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| CNB011187239A Expired - Fee Related CN1152455C (en) | 2001-06-07 | 2001-06-07 | Transverse pulse pre-ionized gas laser with longitudinal discharge |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102025094B (en) * | 2009-09-23 | 2012-06-06 | 中国科学院电子学研究所 | Transverse discharge device for pulsed gas laser |
| CN102035132B (en) * | 2009-09-28 | 2012-05-23 | 中国科学院电子学研究所 | Hot capacity gas laser |
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