CN2425475Y - High-pressure microwave plasma excitation device - Google Patents
High-pressure microwave plasma excitation device Download PDFInfo
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- CN2425475Y CN2425475Y CN 00211865 CN00211865U CN2425475Y CN 2425475 Y CN2425475 Y CN 2425475Y CN 00211865 CN00211865 CN 00211865 CN 00211865 U CN00211865 U CN 00211865U CN 2425475 Y CN2425475 Y CN 2425475Y
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- microwave plasma
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- 230000005284 excitation Effects 0.000 title abstract description 10
- 239000004020 conductor Substances 0.000 claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 16
- 230000005855 radiation Effects 0.000 claims description 22
- 238000009738 saturating Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 3
- 238000012423 maintenance Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 238000004845 hydriding Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- -1 polytetrafluoroethylene Polymers 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 238000002679 ablation Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
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- 239000003345 natural gas Substances 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Abstract
The utility model relates to a high-pressure microwave plasma excitation device. The utility model is characterized in that the microwave plasma excitation device is composed of a coaxial waveguide conversion mechanism, a wave penetrating gas seal window, a coaxial open circuit resonant cavity with a strip off segment and a radiated open circuit coaxial cavity; an external conductor of a coaxial line of the coaxial waveguide conversion mechanism is connected with an external conductor of the coaxial open circuit resonant cavity through the wave penetrating gas seal window; an internal conductor of the coaxial line of the coaxial waveguide conversion mechanism couples microwave energy to the coaxial open circuit resonant cavity by a capacitor through the wave penetrating gas seal window; the radiated open circuit coaxial cavity is coaxially arranged in the interior of the coaxial open circuit resonant cavity. The utility model can realize plasma excitation and maintenance under the condition of high pressure, and the microwave energy does not leak fundamentally with high conversion efficiency; simultaneously, the device self has longer service life.
Description
The utility model relates to the microwave plasma body technique, provides a kind of especially and can stablize the device that excites and keep high-pressure microwave plasma.
Microwave plasma is compared with conventional direct-current arc, high-frequency plasma, has characteristics such as electrodeless pollution, the active height of plasma reaction, capacity usage ratio height, is the desirable means of carrying out chemical synthesis, material surface modifying.Microwave plasma can be divided into two kinds of low pressure (less than 760Torr) and hyperbars (greater than 760Torr) by its operating pressure.The low pressure microwave plasma has obtained in fields such as thin film deposition, plasma etchings to use widely.Large-scale plasma chemistry is synthetic in order to satisfy, the needs of development new type light source, people have invented the exciting technique of multiple high-pressure microwave plasma in 20 years in the past, summarize and get up to mainly contain following several scheme: the exciting technique (CMP) of (1) capacitive coupling microwave plasma; (2) exciting technique (Surfatron) of coaxial base table ground roll microwave plasma; (3) exciting technique of waveguide-based surface wave microwave plasma (Surfaguide); (4) exciting technique of TM010 resonant cavity (MIP) microwave plasma.
The capacitive coupling microwave plasma exciter is the capacitor of forming by a hollow circular-tube and the stick electrode of the heart of being placed in one, and microwave energy is coupled to the gas in the quartz ampoule, makes gas ionization and forms CMP." ignition in hydriding could form the CMP that controls oneself, and the shortcoming of CMP discharge is the leakage of microwave energy and the ablation of interior electrode but it must use high-frequency spark.
Surfatron is by coaxial loading gap capacitance, forms axial high field intensity; Outer conductor effectively seals energy of electromagnetic field, and the aperture on top, gap is drawn for plasma column, surface wave continuation and keep plasma.Though this device does not have the leakage of microwave energy, but must keep plasma by quartzy or other high temperature resistant wave-permeable medium tube, this plasma chemistry of inhaling the ripple medium for height is synthetic unfavorable, in case inhale the ripple media attachment on medium tube, plasma extinguishes very soon, the plasma resistant ablation property of medium tube also influences the stability of plasma in addition, so plasma can not long-term stable operation be the subject matter that Surfatron exists.
Surfaguide is the improved form of Surfatron, the narrow limit of rectangular waveguide is dwindled as far as possible or uses the reentry post to compress narrow limit, replaces coaxial loading capacitance, causes and keeps plasma by surface wave.Compare the Surfaguide function with Surfatron substantially identical but have bigger power capacity.
The MIP microwave plasma exciter is that the microwave cavity of dwindling as far as possible increases field intensity from dwindling and accumulating two angles, and surface wave excitation and continuation plasma by medium tube, general MIP device needs high-frequency spark, and " ignition in hydriding, power capacity are also less.
The purpose of this utility model is to provide a kind of high-pressure microwave plasma exciter, it can be realized plasma excitation and keep under high barometric information, and microwave energy does not leak the conversion efficiency height substantially, and device itself has long useful life simultaneously.
The utility model provides a kind of high-pressure microwave plasma exciter, it is characterized in that: this microwave plasma exciter is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity (4) of section waveguide-coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band; The outer conductor of waveguide-coaxial switching mechanism (1) coaxial line links to each other with the outer conductor of coaxial open circuit resonant cavity (3) by wave-permeating gas hermetyic window (2), the inner wire of waveguide-coaxial switching mechanism (1) coaxial line is coupled microwave energy to coaxial open circuit resonant cavity (3) through electric capacity (5) by wave-permeating gas hermetyic window (2), the coaxial inside that is installed in coaxial open circuit resonant cavity (3) of radiation open circuit coaxial cavity (4).
The hermetyic window of wave-permeating gas described in the utility model (2) is the annulus of a saturating ripple, is embedded between waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor; Described electric capacity (5) is capacitance sheet or the electric capacity circle that centers on coaxial open circuit resonant cavity (3) inner wire; The inner wire of described coaxial open circuit resonant cavity (3), coaxial open circuit resonant cavity (3) all are adjustable by short-circuit plunger, the inner wire of radiation open circuit coaxial cavity (4), the radiation open circuit coaxial cavity (4) of end by the short-circuit plunger of end.
The inner wire of waveguide described in the utility model-coaxial switching mechanism (1) coaxial line is a water-cooling structure; The material of described wave-permeating gas hermetyic window (2) is selected from a kind of of polytetrafluoroethylene, nylon, quartz, boron nitride or high purity aluminium oxide; Described waveguide-coaxial switching mechanism (1) coaxial line is through twice or repeatedly changeover portion conversion.
The utlity model has following characteristics:
1. adopt waveguide-coaxial conversion and the measure of central inner conductor water-cooled, improved the power of device
Capacity; Power capacity can reach more than the 20KW
2. with the exciting and keep structure and organically combine of plasma, avoided normal on the one hand
The electrode erosion problem of rule CMP is sealed electromagnetic field effectively by section on the other hand, avoids
The leakage of microwave energy, thereby can not need the external world " to realize under the condition of ignition in hydriding etc.
The exciting and keeping of gas ions.
3. adopt the ripple hermetyic window to make the working gas kind of plasma to transfer arbitrarily as required
Whole, thus range of application of the present utility model increased.
4. because coaxial transmission line uses same impedance conversion, make this energy regenerative structure be suitable for any size
Microwave cavity, simultaneously because coaxial cavity has the frequency band of broad, of the present utility model establishing
Meter thought can be suitable for metric wave, decimeter wave and centimeter wave.
In a word, the utility model is on the basis of CMP, improve the power capacity of device by waveguide-coaxial conversion, with radiation open a way coaxial cavity (4) with the band by the section coaxial open circuit resonant cavity (3) organically combine, radiation open circuit coaxial cavity (4) coupling microwave energy from coaxial open circuit resonant cavity (3), utilize open end gap capacitance " ignition in hydriding plasma; coaxial open circuit resonant cavity (3) accumulates microwave energy effectively; strengthen field intensity; seal electromagnetic field effectively by section simultaneously; avoided the leakage of microwave energy, thus can not need the external world " to realize exciting and keeping of plasma under the condition of ignition in hydriding.Because the utility model device adopts waveguide-coaxial conversion Transmission Microwave energy, with the exciting and keep and combine of plasma, " ignition in hydriding or media table ground roll cause and keep plasma not need outer boundary high frequency.And have gas sealing structure, thus can be under the condition of various hyperbar protective atmospheres, atmospheric flow, high power capacity, safety, stable operation.The utility model device can be applicable to chemical synthesis (as: cracking of natural gas, the preparation of ozone, superfine ceramic powder synthetic etc.), the surface modification of material and processing (as: surface hardening of depositing of thin film, metal material and cut), novel plasma light source and plasma propeller.By embodiment in detail the utility model is described in detail below in conjunction with accompanying drawing.
Accompanying drawing 1 is the high-pressure microwave plasma exciter structural representation.
Accompanying drawing 2 is waveguide-coaxial switching mechanism part-structure schematic diagram.
Accompanying drawing 3 is a wave-permeating gas hermetyic window part-structure schematic diagram.
Accompanying drawing 4 is radiation open circuit coaxial cavity part-structure schematic diagram.
Accompanying drawing 5 is coaxial open circuit resonant cavity part-structure schematic diagram.
Embodiment 1
As shown in Figure 1, excitation apparatus is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity parts such as (4) of section waveguide-coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band.
Waveguide-the major function of coaxial switching mechanism (1) is that the rectangular waveguide transfer transition is transmitted to coaxial line, the size of coaxial transmission inner and outer conductor can be amplified or dwindle as required, but must have one section changeover portion this moment, to guarantee the impedance matching of transmission line.This installs all designing impedance matching and all adopts 50 ohm of normal impedances.After adopting waveguide-coaxial conversion, device can be worked in the power bracket of 0～20KW, and the maximum temperature of plasma can reach more than the 2000K.
Wave-permeating gas hermetyic window (2): the saturating ripple medium that adopts low-k as: polytetrafluoroethylene, nylon, quartz, boron nitride or high purity aluminium oxide etc. are as wave-permeating gas hermetyic window (2), sealing between wave-permeating gas hermetyic window (2) and waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor can be adopted wiper seal or sealed with brazing according to selected hermetyic window material.For the introducing that makes wave-permeating gas hermetyic window (2) does not influence the transmission performance of coaxial line, also to carry out impedance conversion in the position of wave-permeating gas hermetyic window (2).Be to guarantee safety, the steady operation of hermetyic window, inner wire adopts water-cooled inner wire temperature when preventing high-power operation to raise, and causes the damage of wave-permeating gas hermetyic window (2).
The band that is made of coaxial open circuit resonant cavity (3) internal and external conductor and short-circuit plunger is the chamber of keeping of plasma by the coaxial open circuit resonant cavity (3) of section.Waveguide-the outer conductor of coaxial switching mechanism (1) coaxial transmission line links to each other with the outer conductor of coaxial open circuit resonant cavity (3), and the inner wire of waveguide-coaxial switching mechanism (1) coaxial transmission line is coupled microwave energy to coaxial open circuit resonant cavity (3) by a capacitance sheet or around the electric capacity circle of resonant cavity inner wire.The resonance frequency of the length decision resonant cavity of coaxial open circuit resonant cavity (3) inner wire.Adopt leakage maximum to be no more than 0.01mW/cm by coaxial open circuit resonant cavity (3) back microwave
2
Coaxial open circuit resonant cavity (3) inner wire constitutes a radiation open circuit coaxial cavity (4) as the outer conductor of radiation open circuit coaxial cavity (4) metal bar and the short-circuit plunger inner with it simultaneously, and the size of radiation open circuit coaxial cavity also is as the criterion to satisfy the open circuit condition of resonance.The function of radiation open circuit coaxial cavity (4) is to realize exciting of microwave plasma, and its operation principle is similar to CMP.The size of cavity should satisfy the condition of open circuit resonance.
The operation principle of whole device is as follows: waveguide-coaxial switching mechanism (1) coaxial transmission line is transferred to coaxial open circuit resonant cavity (3) with microwave energy, adjusting by short-circuit plunger and inner wire makes fully energy storage in the coaxial open circuit resonant cavity (3), radiation open circuit coaxial cavity (4) makes its resonance frequency identical with microwave source frequency by the length of regulating inner wire, capacitance gap at open end causes plasma, plasma excites chamber radiation open circuit coaxial cavity (4) in case form i.e. disengaging, enter coaxial open circuit resonant cavity (3), radiation open circuit coaxial cavity (4) quits work automatically, and plasma is kept in coaxial open circuit resonant cavity (3).Thereby avoided the ablation problem of electrode in the similar conventional CMP microwave plasma exciter.Adjusting by short-circuit plunger and coaxial open circuit resonant cavity (3) inner wire can make the microwave energy full consumption on plasma.On the one hand seal electromagnetic field effectively by section, avoided the leakage of microwave energy, improved the quality factor of cavity on the other hand, make the exciting and keep to become and be more prone to of plasma.
Particularly, be the microwave of 2450MHZ for operating frequency, the size of excitation apparatus is as follows: d
1=10～43mm, d
2=23～100mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～30mm, d
7=4～39mm, d
8=2～17mm, d
9=10～90mm, d
10=5～40mm, l
1=30.6～150mm, l
2=30.6～150mm, l
3=40～80mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.D wherein
1Be waveguide-former coaxial inner conductor external diameter of coaxial switching mechanism (1), d
2Be waveguide-former coaxial outer conductor internal diameter of coaxial switching mechanism (1), d
3Be waveguide-coaxial switching mechanism (1) conversion back coaxial inner conductor external diameter, d
4Be waveguide-coaxial switching mechanism (1) conversion back coaxial outer conductor internal diameter, δ is coaxial switching mechanism (a 1) transition section length, d
7Be the external diameter of radiation open circuit coaxial cavity (4), d
8Be the internal diameter of radiation open circuit coaxial cavity (4), l
1For the chamber of radiation open circuit coaxial cavity (4) long, d
9Be the external diameter of coaxial open circuit resonant cavity (3), d
10Be the internal diameter of coaxial open circuit resonant cavity (3), l
2Be the length of coaxial open circuit resonant cavity (3) inner wire, l
2+ l
3For the chamber of coaxial open circuit resonant cavity (3) long, d
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
Embodiment 2
For operating frequency is the microwave of 915MHZ, and the size of excitation apparatus is as follows: d
1=10～108mm, d
2=23～250mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～50mm, d
7=7～107mm, d
8=3～47mm, d
9=23～250mm, d
10=10～108mm, l
1=80～200mm, l
2=80～200mm, l
3=80～250mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.
Embodiment 3
For operating frequency is the microwave of 314MHZ, and the size of excitation apparatus is as follows: d
1=10～130mm, d
2=23～300mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～80mm, d
7=7～128mm, d
8=3～127mm, d
9=23～300mm, d
10=10～130mm, l
1=140～600mm, l
2=240～450mm, l
3=240～500mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.
Embodiment 4
Other are as embodiment 1, d when hermetyic window is boron nitride
5=4～20mm, d
6=21～106mm.
Embodiment 5
Other are as embodiment 1, d when hermetyic window is quartzy
5=4～20mm, d
6=17～89mm.
Embodiment 6
Other are as embodiment 1, d when hermetyic window is aluminium oxide
5=4～20mm, d
6=47～236mm.
Claims (6)
1, a kind of high-pressure microwave plasma exciter is characterized in that: this microwave plasma exciter is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity (4) of section waveguide one coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band; The outer conductor of waveguide one coaxial switching mechanism (1) coaxial line links to each other with the outer conductor of coaxial open circuit resonant cavity (3) by wave-permeating gas hermetyic window (2), the inner wire of waveguide one coaxial switching mechanism (1) coaxial line is coupled microwave energy to coaxial open circuit resonant cavity (3) through electric capacity (5) by wave-permeating gas hermetyic window (2), the coaxial inside that is installed in coaxial open circuit resonant cavity (3) of radiation open circuit coaxial cavity (4).
2, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: wave-permeating gas hermetyic window (2) is the annulus of a saturating ripple, is embedded between waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor.
3, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: described electric capacity (5) is capacitance sheet or the electric capacity circle that centers on coaxial open circuit resonant cavity (3) inner wire.
4, by the described high-pressure microwave plasma exciter of claim 2, it is characterized in that: the inner wire of described coaxial open circuit resonant cavity (3), coaxial open circuit resonant cavity (3) all are adjustable by short-circuit plunger, the inner wire of radiation open circuit coaxial cavity (4), the radiation open circuit coaxial cavity (4) of end by the short-circuit plunger of end.
5, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: the inner wire of described waveguide-coaxial switching mechanism (1) coaxial line is a water-cooling structure.
6, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: described waveguide-coaxial switching mechanism (1) coaxial line is through twice or repeatedly changeover portion conversion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00211865 CN2425475Y (en) | 2000-05-17 | 2000-05-17 | High-pressure microwave plasma excitation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00211865 CN2425475Y (en) | 2000-05-17 | 2000-05-17 | High-pressure microwave plasma excitation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2425475Y true CN2425475Y (en) | 2001-03-28 |
Family
ID=33578490
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00211865 Expired - Fee Related CN2425475Y (en) | 2000-05-17 | 2000-05-17 | High-pressure microwave plasma excitation device |
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| Country | Link |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291922A (en) * | 2011-07-22 | 2011-12-21 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN102598205A (en) * | 2009-08-05 | 2012-07-18 | 塞拉维申有限公司 | Light source |
| CN103155095A (en) * | 2010-07-13 | 2013-06-12 | 塞拉维申有限公司 | Plasma light source |
| CN104393387A (en) * | 2014-12-08 | 2015-03-04 | 电子科技大学 | Hole coupling and tuning device for utilizing sliding piston to conduct tuning |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净***科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
-
2000
- 2000-05-17 CN CN 00211865 patent/CN2425475Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102598205A (en) * | 2009-08-05 | 2012-07-18 | 塞拉维申有限公司 | Light source |
| CN102598205B (en) * | 2009-08-05 | 2015-11-25 | 塞拉维申有限公司 | Light source |
| CN103155095A (en) * | 2010-07-13 | 2013-06-12 | 塞拉维申有限公司 | Plasma light source |
| CN103155095B (en) * | 2010-07-13 | 2016-03-16 | 塞拉维申有限公司 | Plasma source |
| CN102291922A (en) * | 2011-07-22 | 2011-12-21 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN102291922B (en) * | 2011-07-22 | 2013-03-20 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN104393387A (en) * | 2014-12-08 | 2015-03-04 | 电子科技大学 | Hole coupling and tuning device for utilizing sliding piston to conduct tuning |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净***科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
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| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |