CN2470821Y - 基片检验装置 - Google Patents

基片检验装置 Download PDF

Info

Publication number
CN2470821Y
CN2470821Y CN01208700U CN01208700U CN2470821Y CN 2470821 Y CN2470821 Y CN 2470821Y CN 01208700 U CN01208700 U CN 01208700U CN 01208700 U CN01208700 U CN 01208700U CN 2470821 Y CN2470821 Y CN 2470821Y
Authority
CN
China
Prior art keywords
substrate
mentioned
verified
light
testing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN01208700U
Other languages
English (en)
Chinese (zh)
Inventor
藤崎畅夫
永见理
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Application granted granted Critical
Publication of CN2470821Y publication Critical patent/CN2470821Y/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Nonlinear Science (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN01208700U 2000-09-05 2001-03-26 基片检验装置 Expired - Fee Related CN2470821Y (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP268945/2000 2000-09-05
JP2000268945A JP2002082067A (ja) 2000-09-05 2000-09-05 基板検査装置

Publications (1)

Publication Number Publication Date
CN2470821Y true CN2470821Y (zh) 2002-01-09

Family

ID=18755644

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB011120509A Expired - Fee Related CN1179206C (zh) 2000-09-05 2001-03-26 基片检验装置
CN01208700U Expired - Fee Related CN2470821Y (zh) 2000-09-05 2001-03-26 基片检验装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CNB011120509A Expired - Fee Related CN1179206C (zh) 2000-09-05 2001-03-26 基片检验装置

Country Status (4)

Country Link
JP (1) JP2002082067A (ja)
KR (1) KR100885560B1 (ja)
CN (2) CN1179206C (ja)
TW (1) TW493071B (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100456087C (zh) * 2005-12-29 2009-01-28 乐金显示有限公司 用于检查平板显示器件的装置及其检查方法
CN102393576A (zh) * 2011-08-03 2012-03-28 深圳市华星光电技术有限公司 液晶显示器中玻璃基板的目视检查机及检查方法
CN102565091A (zh) * 2010-07-26 2012-07-11 东芝移动显示器有限公司 检查装置及检查方法
CN103837552A (zh) * 2014-03-14 2014-06-04 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测***
US8854616B2 (en) 2011-08-03 2014-10-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof
CN104297259A (zh) * 2014-11-04 2015-01-21 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测方法
CN104977306A (zh) * 2014-04-08 2015-10-14 上海微电子装备有限公司 一种表面缺陷检测***及方法
CN105783795A (zh) * 2016-04-15 2016-07-20 中国科学院上海光学精密机械研究所 大型环抛机抛光胶盘平面度的测量装置及其测量方法
CN106646957A (zh) * 2017-03-14 2017-05-10 惠科股份有限公司 一种显示单元制程控制方法及***

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100576030C (zh) * 2002-02-26 2009-12-30 乐金显示有限公司 检查液晶板的设备和制作液晶显示器的方法
KR100898781B1 (ko) * 2002-06-14 2009-05-20 엘지디스플레이 주식회사 외관검사장치 및 이를 이용한 액정표시장치의 제조방법
KR100853775B1 (ko) * 2002-06-14 2008-08-25 엘지디스플레이 주식회사 테이블 손상 위치 검출 지그
US7272254B2 (en) * 2003-07-09 2007-09-18 General Electric Company System and method for analyzing and identifying flaws in a manufactured part
JP2006049384A (ja) * 2004-07-30 2006-02-16 Laserfront Technologies Inc ガントリー型ｘｙステージ
KR100599060B1 (ko) * 2004-08-31 2006-07-12 주식회사 디이엔티 평판 표시패널 검사용 광조사방법 및 광조사장치
KR100596333B1 (ko) * 2004-09-22 2006-07-06 주식회사 에이디피엔지니어링 기판 외관 검사 장치
JP4653500B2 (ja) 2005-01-18 2011-03-16 オリンパス株式会社 座標検出装置及び被検体検査装置
JP2006266748A (ja) * 2005-03-22 2006-10-05 Mitsutoyo Corp 画像測定装置
KR100688985B1 (ko) * 2005-08-05 2007-03-08 삼성전자주식회사 기판검사장치 및 그의 제어방법
CN1987436B (zh) * 2006-12-27 2010-04-21 友达光电股份有限公司 基板检测设备及玻璃基板检测设备
TWI409499B (zh) * 2007-10-19 2013-09-21 Hon Hai Prec Ind Co Ltd 顯微鏡用載物台
KR101011721B1 (ko) * 2008-07-25 2011-01-28 한국에너지기술연구원 집광용 반사판 시험장치
KR200461270Y1 (ko) * 2010-01-20 2012-07-03 한화폴리드리머 주식회사 스마트 윈도우용 검사장치
EP2847541B1 (de) * 2012-08-07 2016-05-18 Carl Zeiss Industrielle Messtechnik GmbH KOORDINATENMESSGERÄT MIT WEIßLICHTSENSOR
CN102997795B (zh) * 2012-12-03 2015-10-21 京东方科技集团股份有限公司 一种摩擦装置和整机设备
CN103604815B (zh) * 2013-11-26 2016-01-13 上海海事大学 玻璃晶片检测装置与标定方法
CN104765172A (zh) * 2015-04-27 2015-07-08 京东方科技集团股份有限公司 一种检测液晶屏的设备和方法
CN107664646A (zh) * 2016-07-29 2018-02-06 上海微电子装备（集团）股份有限公司 一种全自动外观缺陷检查装置及方法
CN107064173A (zh) * 2017-01-03 2017-08-18 中国科学院上海光学精密机械研究所 大型平面光学元件表面疵病的检测装置和检测方法
JP2019169608A (ja) * 2018-03-23 2019-10-03 株式会社ディスコ 研削装置
CN111487035B (zh) * 2019-01-25 2022-02-01 舜宇光学（浙江）研究院有限公司 一种用于近眼检测***的对准方法及其***
CN112129775B (zh) * 2020-09-23 2023-03-24 哈尔滨工业大学 一种匀光棒条形光源及基于该光源的光学元件损伤检测装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715167A (ja) * 1993-06-21 1995-01-17 Sharp Corp 挿入位置指示器
JPH0735701A (ja) * 1993-07-23 1995-02-07 Sharp Corp パターン目視検査装置
JPH10325780A (ja) * 1997-05-23 1998-12-08 Matsushita Electric Ind Co Ltd ディスプレイ画面検査装置
KR19990025834A (ko) * 1997-09-18 1999-04-06 윤종용 반도체 소자 검사 장치의 검사기판용 지지대
JP4166340B2 (ja) * 1997-09-24 2008-10-15 オリンパス株式会社 基板検査装置
JP4385419B2 (ja) * 1998-11-30 2009-12-16 株式会社ニコン 外観検査方法及び外観検査装置

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100456087C (zh) * 2005-12-29 2009-01-28 乐金显示有限公司 用于检查平板显示器件的装置及其检查方法
CN102565091A (zh) * 2010-07-26 2012-07-11 东芝移动显示器有限公司 检查装置及检查方法
US8854615B2 (en) 2010-07-26 2014-10-07 Japan Display Inc. Inspection apparatus and inspection method
CN102565091B (zh) * 2010-07-26 2015-05-20 株式会社日本显示器 检查装置及检查方法
CN102393576A (zh) * 2011-08-03 2012-03-28 深圳市华星光电技术有限公司 液晶显示器中玻璃基板的目视检查机及检查方法
US8854616B2 (en) 2011-08-03 2014-10-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof
CN103837552A (zh) * 2014-03-14 2014-06-04 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测***
CN104977306A (zh) * 2014-04-08 2015-10-14 上海微电子装备有限公司 一种表面缺陷检测***及方法
CN104297259A (zh) * 2014-11-04 2015-01-21 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测方法
CN105783795A (zh) * 2016-04-15 2016-07-20 中国科学院上海光学精密机械研究所 大型环抛机抛光胶盘平面度的测量装置及其测量方法
CN106646957A (zh) * 2017-03-14 2017-05-10 惠科股份有限公司 一种显示单元制程控制方法及***
CN106646957B (zh) * 2017-03-14 2018-07-20 惠科股份有限公司 一种显示单元制程控制方法及***
WO2018166140A1 (zh) * 2017-03-14 2018-09-20 惠科股份有限公司 一种显示单元制程控制方法及***
US10180589B2 (en) 2017-03-14 2019-01-15 HKC Corporation Limited Display unit process control method and system

Also Published As

Publication number Publication date
JP2002082067A (ja) 2002-03-22
KR20020019376A (ko) 2002-03-12
CN1179206C (zh) 2004-12-08
CN1341853A (zh) 2002-03-27
TW493071B (en) 2002-07-01
KR100885560B1 (ko) 2009-02-24

Similar Documents

Publication Publication Date Title
CN2470821Y (zh) 基片检验装置
CN1808055A (zh) 坐标检测装置及被检测体检查装置
CN100516846C (zh) 玻璃基板的切断面检查装置
CN1990154A (zh) 激光加工机的光路轴的调节装置
CN110657946B (zh) 屏幕缺陷检测***、屏幕检测线以及屏幕缺陷检测方法
CN1582393A (zh) 基板检查装置
CN101052857A (zh) 透光性面板的透视变形检测装置以及检测方法
CN104483617A (zh) 一种倒装led芯片在线检测装置
CN101038377A (zh) 外观检查装置
CN1834787A (zh) 接近型曝光装置
JP4956289B2 (ja) 微細粒子のスクリーニング装置および微細粒子のスクリーニング方法
CN1538157A (zh) 自准直仪
CN107796829A (zh) 检查装置
CN214174184U (zh) 一种缺陷检测成像装置
CN101061380A (zh) 检查用光学装置、以及具有该光学装置的检查装置和检查方法
CN1959505A (zh) 用于糊状物分配器的头部单元
CN1272624C (zh) 外观检查用投光装置
CN1645189A (zh) 微小图案观察装置及采用该装置的微小图案修正装置
CN108613691B (zh) 一种分离反光式元件背光成像方法及装置
JP2020096116A (ja) ロータリーヘッド、部品搭載装置
CN1637409A (zh) 平板显示器的检验装置
JP2008292494A (ja) 基板検査装置
CN1619256A (zh) 电路板钻孔用钻针检验仪器的全向自动调整装置及进料装置
JP7266514B2 (ja) 撮像装置及び表面検査装置
CN1379286A (zh) 曝光装置

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee