CN220318032U - Curing tooling for cylindrical product preform of carbon-carbon composite material for monocrystalline silicon drawing furnace - Google Patents
Curing tooling for cylindrical product preform of carbon-carbon composite material for monocrystalline silicon drawing furnace Download PDFInfo
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- CN220318032U CN220318032U CN202321691450.0U CN202321691450U CN220318032U CN 220318032 U CN220318032 U CN 220318032U CN 202321691450 U CN202321691450 U CN 202321691450U CN 220318032 U CN220318032 U CN 220318032U
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- fixedly connected
- single crystal
- furnace body
- carbon
- servo motor
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 24
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 239000011203 carbon fibre reinforced carbon Substances 0.000 title claims abstract description 15
- 239000002131 composite material Substances 0.000 title claims abstract description 15
- 239000013078 crystal Substances 0.000 claims abstract description 88
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 22
- 239000010439 graphite Substances 0.000 claims abstract description 22
- 239000007789 gas Substances 0.000 claims description 18
- 239000011261 inert gas Substances 0.000 claims description 15
- 238000004321 preservation Methods 0.000 claims description 8
- 238000004033 diameter control Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000003610 charcoal Substances 0.000 claims description 5
- 238000009417 prefabrication Methods 0.000 claims description 5
- 238000007711 solidification Methods 0.000 claims description 5
- 230000008023 solidification Effects 0.000 claims description 5
- 238000007599 discharging Methods 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a curing tool for a cylindrical product of a carbon-carbon composite material for a monocrystalline silicon drawing furnace, which relates to the field of processing of monocrystalline furnaces and comprises a monocrystalline furnace body, wherein a gas pipe is fixedly connected to the center of the top of the monocrystalline furnace body, a first servo motor is fixedly connected to the center of the top of the gas pipe, a rotating shaft is fixedly connected to the bottom of the first servo motor through a coupler, a seed crystal clamping assembly is fixedly connected to the bottom of the rotating shaft, a graphite supporting plate is movably connected to an inner cavity of the monocrystalline furnace body, a crucible is fixedly connected to the inner cavity of the graphite supporting plate, electrodes are symmetrically and fixedly connected to the left side and the right side of the bottom of the monocrystalline furnace body, and an exhaust pipe is fixedly connected to the right side of the bottom of the monocrystalline furnace body. The curing fixture for the cylindrical product preform of the carbon-carbon composite material for the monocrystalline silicon drawing furnace is convenient for clamping crystals, is convenient for discharging and inputting gas, and has a good monitoring sensor, so that the curing precision can be improved.
Description
Technical Field
The utility model relates to the field of processing of single crystal furnaces, in particular to a curing tool for a cylindrical product preform of a carbon-carbon composite material for a single crystal silicon drawing furnace.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a direct-faradic method in an environment with inert gases including nitrogen and helium as the main materials, wherein polycrystalline materials such as polycrystalline silicon and the like are melted by using a graphite heater.
When the monocrystalline silicon drawing furnace is used for processing, a prefabricated body tool of a barreled product of the monocrystalline silicon drawing furnace lacks a better auxiliary component to help the precision of a finished product of the monocrystalline silicon drawing furnace to be improved, and the working condition inside the monocrystalline silicon drawing furnace cannot be monitored.
Therefore, it is necessary to provide a curing tool for a cylindrical product of a carbon-carbon composite material for a single crystal silicon drawing furnace to solve the above problems.
Disclosure of Invention
The utility model mainly aims to provide a curing tool for a cylindrical product preform of a carbon-carbon composite material for a monocrystalline silicon drawing furnace, which can effectively solve the problems in the background art.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
the utility model provides a charcoal combined material tubular product prefabrication body solidification frock for single crystal silicon draws stove, includes the single crystal stove body, the centre at single crystal stove body top is fixedly connected with gas pipe, the centre at gas pipe top is fixedly connected with first servo motor, the bottom of first servo motor is fixedly connected with the axis of rotation through the shaft coupling, the bottom of axis of rotation is fixedly connected with seed crystal clamping assembly;
the inner cavity of the single crystal furnace body is movably connected with a graphite supporting plate, the inner cavity of the graphite supporting plate is fixedly connected with a crucible, the left side and the right side of the bottom of the single crystal furnace body are symmetrically and fixedly connected with electrodes, and the right side of the bottom of the single crystal furnace body is fixedly connected with an exhaust pipe.
Preferably, the top on gas pipe right side fixedly connected with inert gas intake pipe, the centre flange of inert gas intake pipe outer wall is connected with first valve, the bottom on single crystal growing furnace body right side fixedly connected with vacuum pump, the gas pipe communicates with each other with the inner chamber of single crystal growing furnace body.
Preferably, the seed crystal clamping assembly is of a cavity structure with the bottom communicated with the outside, the rotating shaft and the seed crystal clamping assembly are movably connected in the inner cavities of the gas pipe and the single crystal furnace body, the middle of the front surface and the back surface of the seed crystal clamping assembly are symmetrically and fixedly connected with fixing blocks, and the front surface and the back surface of the inner cavity of the seed crystal clamping assembly are symmetrically and movably connected with arc-shaped clamping blocks.
Preferably, two the positive symmetrical fixedly connected with second servo motor of fixed block opposite side, two the positive through first pivot symmetrical fixedly connected with threaded rod of opposite side of second servo motor, two the positive symmetrical fixedly connected with spliced pole of arc grip block opposite side, two the spliced pole is cavity structure, two spliced pole symmetrical threaded connection is in the outer wall of two threaded rods, spliced pole and threaded rod set up in the inner chamber of fixed block and seed crystal centre gripping subassembly.
Preferably, the right side fixedly connected with temperature sensor at single crystal growing furnace body top, the left side fixedly connected with diameter control sensor at single crystal growing furnace body top, the left top fixedly connected with inlet pipe of single crystal growing furnace body, the centre flange joint of inlet pipe outer wall has the second valve.
Preferably, the inner wall fixedly connected with heat preservation wall of single crystal growing furnace body, the inner wall fixedly connected with graphite heater of heat preservation wall, the centre of graphite layer board bottom is through second pivot fixedly connected with third servo motor, the bottom fixedly connected with of third servo motor is in the bottom of single crystal growing furnace body inner chamber.
Advantageous effects
Compared with the prior art, the utility model has the following beneficial effects:
this charcoal combined material tubular product prefabrication body solidification frock for single crystal silicon draws stove through the inert gas intake pipe that sets up, can be with inert gas leading-in to the inner chamber of single crystal furnace body through the gas pipe, through the vacuum pump that sets up, can play the effect of evacuation, through the seed crystal clamping assembly that sets up, can carry out the centre gripping work to the crystal, the cooperation starts the first servo motor that sets up, can drive it through the axis of rotation and rotate.
This monocrystalline silicon draws charcoal combined material tubular product prefabrication body solidification frock for stove through the second servo motor that starts the setting, can drive the threaded rod and rotate for the spliced pole can with threaded rod threaded connection, can drive the arc grip block and remove this moment, can play centre gripping work to the crystal this moment, with this convenience dismantles and installs the crystal.
This charcoal combined material tubular product prefabrication body solidification frock for single crystal silicon draws stove through temperature sensor and the diameter control sensor that sets up, at single crystal stove body during operation, can monitor the processing to the temperature of its inner chamber and the diameter of finished product, through the blast pipe that sets up, makes things convenient for the single crystal stove body to carry out the exhaust work, can prevent thermal loss at single crystal stove body during operation through the heat preservation wall that sets up, can play the heating effect through the graphite heater that sets up.
Drawings
FIG. 1 is a schematic view of the front face of the present utility model;
FIG. 2 is a bottom view of the seed holder assembly of the present utility model;
FIG. 3 is a top view of the body of the single crystal furnace of the present utility model;
fig. 4 is a bottom view of the body of the single crystal furnace of the present utility model.
In the figure: 1. a single crystal furnace body; 2. a gas pipe; 3. an inert gas inlet pipe; 4. a vacuum pump; 5. a first valve; 6. a temperature sensor; 7. a diameter control sensor; 8. a first servo motor; 9. a rotating shaft; 10. a seed crystal clamping assembly; 11. a fixed block; 12. a second servo motor; 13. a threaded rod; 14. a connecting column; 15. an arc-shaped clamping block; 16. a feed pipe; 17. a second valve; 18. an electrode; 19. a thermal insulation wall; 20. a graphite heater; 21. a third servo motor; 22. a graphite pallet; 23. a crucible; 24. and an exhaust pipe.
Description of the embodiments
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in figures 1-2, the curing fixture for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace comprises a single crystal furnace body 1, wherein the center of the top of the single crystal furnace body 1 is fixedly connected with a gas pipe 2, the center of the top of the gas pipe 2 is fixedly connected with a first servo motor 8, the bottom of the first servo motor 8 is fixedly connected with a rotating shaft 9 through a coupler, the bottom of the rotating shaft 9 is fixedly connected with a seed crystal clamping assembly 10, the top of the right side of the gas pipe 2 is fixedly connected with an inert gas inlet pipe 3, the center flange of the outer wall of the inert gas inlet pipe 3 is connected with a first valve 5, the bottom of the right side of the single crystal furnace body 1 is fixedly connected with a vacuum pump 4, the gas pipe 2 is communicated with the inner cavity of the single crystal furnace body 1, the seed crystal clamping assembly 10 is of a cavity structure with the bottom communicated with the outside, the rotating shaft 9 and the seed crystal clamping assembly 10 are movably connected in the inner cavities of the gas pipe 2 and the single crystal furnace body 1, the center of the front and back sides of the seed crystal clamping component 10 are symmetrically and fixedly connected with a fixed block 11, the front and back sides of the inner cavity of the seed crystal clamping component 10 are symmetrically and movably connected with arc clamping blocks 15, the center of the back side of the two fixed blocks 11 is symmetrically and fixedly connected with a second servo motor 12, the center of the opposite side of the two second servo motors 12 is symmetrically and fixedly connected with a threaded rod 13 through a first rotating shaft, the center of the back side of the two arc clamping blocks 15 is symmetrically and fixedly connected with a connecting column 14, the two connecting columns 14 are of cavity structures, the two connecting columns 14 are symmetrically and spirally connected with the outer walls of the two threaded rods 13, the connecting columns 14 and the threaded rod 13 are arranged in the inner cavities of the fixed block 11 and the seed crystal clamping component 10, and inert gas can be led into the inner cavity of the single crystal furnace body 1 through the arranged inert gas inlet pipe 3, through the vacuum pump 4 that sets up, can play the effect of evacuation, through seed crystal clamping assembly 10 that sets up, can carry out centre gripping work to the crystal, the cooperation starts the first servo motor 8 that sets up, can drive it through axis of rotation 9 and rotate, through the second servo motor 12 that starts the setting, can drive threaded rod 13 and rotate for spliced pole 14 can with threaded rod 13 threaded connection, can drive arc grip block 15 and remove this moment, can play centre gripping work to the crystal, with this convenience dismantles and installs the crystal.
As shown in fig. 1, 3 and 4, a curing tool for a cylindrical product of a carbon-carbon composite material for a single crystal silicon drawing furnace is characterized in that a graphite supporting plate 22 is movably connected in an inner cavity of a single crystal furnace body 1, a crucible 23 is fixedly connected in the inner cavity of the graphite supporting plate 22, electrodes 18 are symmetrically and fixedly connected on the left side and the right side of the bottom of the single crystal furnace body 1, an exhaust pipe 24 is fixedly connected on the right side of the bottom of the single crystal furnace body 1, a temperature sensor 6 is fixedly connected on the right side of the top of the single crystal furnace body 1, a diameter control sensor 7 is fixedly connected on the left side of the top of the single crystal furnace body 1, a feeding pipe 16 is fixedly connected on the left side of the single crystal furnace body 1, a second valve 17 is connected on a middle flange of the outer wall of the feeding pipe 16, the inner wall fixedly connected with heat preservation wall 19 of single crystal growing furnace body 1, the inner wall fixedly connected with graphite heater 20 of heat preservation wall 19, the centre of graphite layer board 22 bottom is through second pivot fixedly connected with third servo motor 21, the bottom fixed connection of third servo motor 21 is in the bottom of single crystal growing furnace body 1 inner chamber, through temperature sensor 6 and diameter control sensor 7 that set up, at single crystal growing furnace body 1 during operation, can monitor the temperature of its inner chamber and the diameter of finished product and handle, through blast pipe 24 that sets up, make things convenient for single crystal growing furnace body 1 to carry out the exhaust work, can prevent thermal loss at single crystal growing furnace body 1 during operation through the heat preservation wall 19 that sets up, can play the heating effect through graphite heater 20 that sets up.
The utility model relates to a curing tool for a cylindrical product of a carbon-carbon composite material for a single crystal silicon drawing furnace, which is characterized in that raw materials are poured into an inner cavity of a crucible 23 through a feeding pipe 16 when in use, a second valve 17 is closed, a first valve 5 is opened, inert gas is input into the inner cavity of a gas pipe 2 through an inert gas inlet pipe 3, so that the inert gas can be mixed with the raw materials, a second servo motor 12 is started, a threaded rod 13 is driven to rotate, a connecting column 14 can be in threaded connection with the threaded rod, an arc-shaped clamping block 15 is driven to clamp crystals, after clamping is finished, a first servo motor 8 and a third servo motor 21 are started, the crystals and the crucible 23 are driven to rotate, an electrode 18 is started, a graphite heater 20 is heated, the graphite heater can work at the moment, and a temperature sensor 6 and a diameter control sensor 7 can monitor the internal state of the graphite heater.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a single crystal silicon draws charcoal combined material tubular product prefabrication body solidification frock for stove, includes single crystal furnace body (1), its characterized in that: the single crystal furnace comprises a single crystal furnace body (1), wherein a gas pipe (2) is fixedly connected to the center of the top of the single crystal furnace body (1), a first servo motor (8) is fixedly connected to the center of the top of the gas pipe (2), a rotating shaft (9) is fixedly connected to the bottom of the first servo motor (8) through a coupler, and a seed crystal clamping assembly (10) is fixedly connected to the bottom of the rotating shaft (9);
the single crystal furnace comprises a single crystal furnace body (1), wherein a graphite supporting plate (22) is movably connected in an inner cavity of the single crystal furnace body (1), a crucible (23) is fixedly connected in the inner cavity of the graphite supporting plate (22), electrodes (18) are symmetrically and fixedly connected on the left side and the right side of the bottom of the single crystal furnace body (1), and an exhaust pipe (24) is fixedly connected on the right side of the bottom of the single crystal furnace body (1).
2. The curing tooling for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace, which is disclosed in claim 1, is characterized in that: the top fixedly connected with inert gas intake pipe (3) on gas pipe (2) right side, the centre flange joint of inert gas intake pipe (3) outer wall has first valve (5), the bottom fixedly connected with vacuum pump (4) on single crystal growing furnace body (1) right side, gas pipe (2) communicate with each other with the inner chamber of single crystal growing furnace body (1).
3. The curing tooling for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace, which is disclosed in claim 2, is characterized in that: the seed crystal clamping assembly (10) is of a cavity structure with the bottom communicated with the outside, the rotating shaft (9) and the seed crystal clamping assembly (10) are movably connected in the inner cavities of the gas pipe (2) and the single crystal furnace body (1), the front surface and the back surface of the seed crystal clamping assembly (10) are symmetrically and fixedly connected with the fixing blocks (11), and the front surface and the back surface of the inner cavity of the seed crystal clamping assembly (10) are symmetrically and movably connected with the arc clamping blocks (15).
4. The curing tooling for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace, which is characterized in that: two the centre symmetry fixedly connected with second servo motor (12) of fixed block (11) opposite side, two the centre of the opposite side of second servo motor (12) is through first pivot symmetry fixedly connected with threaded rod (13), two the centre symmetry fixedly connected with spliced pole (14) of arc grip block (15) opposite side, two spliced pole (14) are cavity structure, two spliced pole (14) symmetry threaded connection is in the outer wall of two threaded rods (13), spliced pole (14) and threaded rod (13) set up in the inner chamber of fixed block (11) and seed crystal centre gripping subassembly (10).
5. The curing tooling for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace, which is disclosed in claim 1, is characterized in that: the temperature sensor (6) is fixedly connected to the right side of the top of the single crystal furnace body (1), the diameter control sensor (7) is fixedly connected to the left side of the top of the single crystal furnace body (1), the feeding pipe (16) is fixedly connected to the left side of the top of the single crystal furnace body (1), and the second valve (17) is connected to the middle flange of the outer wall of the feeding pipe (16).
6. The curing tooling for the cylindrical product preform of the carbon-carbon composite material for the single crystal silicon drawing furnace, which is disclosed in claim 1, is characterized in that: the inner wall fixedly connected with heat preservation wall (19) of single crystal growing furnace body (1), the inner wall fixedly connected with graphite heater (20) of heat preservation wall (19), the centre of graphite layer board (22) bottom is through second pivot fixedly connected with third servo motor (21), the bottom fixed connection of third servo motor (21) is in the bottom of single crystal growing furnace body (1) inner chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321691450.0U CN220318032U (en) | 2023-06-30 | 2023-06-30 | Curing tooling for cylindrical product preform of carbon-carbon composite material for monocrystalline silicon drawing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321691450.0U CN220318032U (en) | 2023-06-30 | 2023-06-30 | Curing tooling for cylindrical product preform of carbon-carbon composite material for monocrystalline silicon drawing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220318032U true CN220318032U (en) | 2024-01-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321691450.0U Active CN220318032U (en) | 2023-06-30 | 2023-06-30 | Curing tooling for cylindrical product preform of carbon-carbon composite material for monocrystalline silicon drawing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220318032U (en) |
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2023
- 2023-06-30 CN CN202321691450.0U patent/CN220318032U/en active Active
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