CN102619863B - Single crystal furnace driving shaft and manufacturing method thereof - Google Patents
Single crystal furnace driving shaft and manufacturing method thereof Download PDFInfo
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- CN102619863B CN102619863B CN201210099126.XA CN201210099126A CN102619863B CN 102619863 B CN102619863 B CN 102619863B CN 201210099126 A CN201210099126 A CN 201210099126A CN 102619863 B CN102619863 B CN 102619863B
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- axis body
- stove
- transmission shaft
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- power connection
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Abstract
The invention discloses a single crystal furnace driving shaft with good heat preservation performance and a manufacturing method thereof. The single crystal furnace driving shaft comprises a shaft body (1), and through holes (2) are arranged in the shaft body (1). The single crystal furnace driving shaft is characterized in that the shaft body (1) or a driving part connecting the shaft body (1) with an outer part of the single crystal furnace is made of carbon/carbon composites by processes of blank making, densifying, machining and purifying, or by processes of blank making, densifying, machining, stack mounting and purifying. The single crystal furnace driving shaft is simple in product structure, mechanics performance is greatly improved by utilizing the carbon/carbon composites, heat consumption of the single crystal furnace is reduced by 3% -10% simultaneously and manufacturing cost is lowered.
Description
Technical field
The present invention relates to a kind of High Temperature Furnaces, specifically a kind of single crystal growing furnace, particularly relate to a kind of single crystal growing furnace transmission shaft and production method thereof.
Background technique
Single crystal growing furnace is a kind of in inert gas environment, with graphite heater by polycrystalline material fusings such as polysilicons, with the equipment of Grown by CZ Method dislocation-free monocrystalline.During single crystal growing furnace pulling monocrystal silicon rod; the quartz crucible of the raw materials such as splendid attire polysilicon block is put into and is positioned at graphite on crucible holder or C/C crucible; heat fused (in stove, maximum temperature is up to about 1600 DEG C) in protective atmosphere; regulation and control are after technological temperature; seed crystal inserts seeding in melting polysilicon liquid through guide shell; crucible is placed in crucible holder and is together rotated by the transmission shaft drive under it; simultaneously; seed crystal also counter-rotating upwards promoting, makes polysilicon liquid become single crystal silicon rod by the silicon atom of the seed crystal crystallization and freezing that puts in order.In single crystal silicon rod pulling process, transmission shaft is positioned at bottom of furnace body, plays a part the raw material and the transferring power that carry crucible and splendid attire thereof.
At present, single crystal growing furnace transmission shaft adopts graphite material to make usually, for ease of single crystal growing furnace transmission shaft is fixed in the conical seat of power system, when production and processing, often have through hole at the center of transmission shaft, during installation, clamping bolt is put into and is screwed into the tapped hole of the conical seat of power system from through hole, single crystal growing furnace transmission shaft is fastened on the conical seat of power system, makes single crystal growing furnace transmission shaft operationally remain the state of geo-stationary with the conical seat of power system.Because graphite mechanical property is poor, suffer external force collision easy damaged, so it is more to add man-hour consumptive material; Simultaneously the axial wall of transmission shaft made of graphite material is relatively thick, and through hole internal diameter is little, is generally less than 25 ㎜, and graphite material heat-conducting property is better, and in stove, heat is easily delivered to outside stove by transmission shaft, increases energy consumption, causes enterprise's cost of production to increase.If fill insulant material in through hole, then can play and reduce the effect of heat loss, but because of hole little, do not put how many thermal insulating materials, and operation is also not quite convenient, there is no and put thermal insulating material in work, so just a formation passage, heat is easy to lost.
Carbon/carbon compound material is a kind of net tire of being made by carbon fiber and net tire or carbon cloth and carbon cloth or net tire and carbon cloth compound, again through the carbon/carbon compound material of density, carbonization and graphitization processing, there is high specific strength, high ratio modulus, high temperature resistant, resistance to ablation, little, the resistance to rapid heat cycle of thermal expansion coefficient and indeformablely do not ftracture and have the premium properties such as certain heat insulation effect concurrently, be adapted to high-temperature field especially, now become or by progressively becoming one of the important foundation material in the fields such as Aero-Space, metallurgy, new energy, be the ideal substitute of graphite product.
Summary of the invention
The object of this invention is to provide a kind of single crystal growing furnace transmission shaft and production method thereof of good heat insulating.
The present invention adopts following technological scheme to realize its goal of the invention, a kind of single crystal growing furnace transmission shaft, and it comprises axis body, is provided with through hole in axis body, and described axis body adopts carbon/carbon compound material to make.
The external diameter of axis body of the present invention is 70 ㎜ ~ 150 ㎜, and the diameter of described through hole is 40 ㎜ ~ 100 ㎜.
The gas effusion that the present invention at high temperature produces for ease of the thermal insulating material in through hole, described axis body is provided with the vent communicated with through hole.
A production method for single crystal growing furnace transmission shaft described above, it comprises the following steps:
(1) base: it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3transmission shaft precast body;
(2) density: by the transmission shaft precast body of step (1) gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3transmission shaft base substrate;
(3) machining: the transmission shaft base substrate of step (2) gained is machined to required shape and size;
(4) purifying: the transmission shaft base substrate of step (3) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C, and holding time is 2h ~ 5h.
A kind of single crystal growing furnace transmission shaft, it comprises axis body, through hole is provided with in axis body, described axis body comprises crucible attachment portion and axis body and the outer power connection of stove in axis body and stove and divides, in axis body and stove, crucible attachment portion adopts graphite material to make, and axis body and the outer power connection of stove divide and adopt carbon/carbon compound material to make.
Axis body of the present invention and crucible attachment portion in stove and axis body are divided into the outer power connection of stove and are threaded or mortise-tenon joint.
The external diameter of axis body of the present invention is 70 ㎜ ~ 150 ㎜, and the diameter of the through hole that axis body and the outer power connection of stove divide is 40 ㎜ ~ 100 ㎜.
The gas effusion that the thermal insulating material in through hole at high temperature produces is convenient in the present invention, and described axis body is provided with the vent communicated with through hole.
A production method for single crystal growing furnace transmission shaft described above, it comprises the following steps:
(1) base:
1. the making of crucible attachment portion in axis body and stove: manufacture crucible attachment portion in the axis body of graphite material and stove by tratitional technology;
2. the making that divides of the outer power connection of axis body and stove: it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3axis body and the outer power connection of stove divide precast body;
(2) density: (1) the axis body of gained and the outer power connection of stove divide precast body by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density by step, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3axis body and the outer power connection of stove divide base substrate;
(3) machining: by step (2) the axis body of gained and the outer power connection of stove divide base substrate to be machined to required shape and size, the axis body obtaining carbon/carbon compound material and stove outward power connection divide;
(4) combine installation: divided by the outer power connection of axis body and stove of step (3) gained carbon/carbon compound material to adopt with axis body and the crucible attachment portion in stove of step (1) gained graphite material and to be threaded or mortise-tenon joint becomes transmission shaft finished product;
(5) purifying: the transmission shaft finished product of step (4) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C, and holding time is 2h ~ 5h.
Owing to adopting technique scheme, the present invention achieves goal of the invention preferably, and product structure is simple, the carbon/carbon compound material adopted substantially increases the mechanical property of product, decrease the thermal losses of single crystal growing furnace, energy consumption reduces 3 ﹪ ~ 10 ﹪, reduces cost of production simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention 1;
Fig. 2 is the structural representation of the embodiment of the present invention 2;
Fig. 3 is the structural representation of the embodiment of the present invention 3.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
embodiment 1:
As shown in Figure 1, a kind of single crystal growing furnace transmission shaft, it comprises axis body 1, is provided with through hole 2 in axis body 1, and described axis body 1 adopts carbon/carbon compound material to make.
The length of axis body 1 of the present invention is 660 ㎜ ~ 900 ㎜ (the present embodiment is 660 ㎜), and external diameter is 70 ㎜ ~ 150 ㎜ (the present embodiment is 80 ㎜), and the diameter of described through hole 2 is 40 ㎜ ~ 100 ㎜ (the present embodiment is 52 ㎜).The present invention adopts carbon/carbon compound material due to axis body 1, and therefore, the diameter of described through hole 2, compared with use graphite material, can do larger, so that fill insulant material.
The gas effusion that the present invention at high temperature produces for the ease of the thermal insulating material (the present embodiment fill for soft carbon felt) in through hole 2, described axis body 1 is provided with the vent 3 communicated with through hole 2.
A production method for single crystal growing furnace transmission shaft described above, it comprises the following steps:
(1) base: it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3(the present embodiment is 0.4g/ ㎝
3) transmission shaft precast body;
(2) density: by the transmission shaft precast body of step (1) gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3(the present embodiment is 1.38g/ ㎝
3) transmission shaft base substrate;
(3) machining: the transmission shaft base substrate of step (2) gained is machined to required shape and size;
(4) purifying: the transmission shaft base substrate of step (3) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C (the present embodiment is 2100 DEG C), and holding time is 2h ~ 5h(the present embodiment is 2h).
When the present invention uses, axis body 1 is fixed in the conical seat of power system by fastening piece, and crucible is placed in crucible holder, drives crucible holder to rotate by the axis body 1 under it, thus drives crucible together to rotate.
The carbon/carbon compound material that the present invention adopts substantially increases the mechanical property of product, comparatively graphite material is poor for the heat-conducting property of simultaneously carbon/carbon compound material, and the thermal insulating material of filling in through hole 2 decreases heat loss, the energy consumption of single crystal growing furnace reduces 3 ﹪ ~ 10 ﹪, decreases enterprise's cost of production.
embodiment 2:
As shown in Figure 2, for cost-saving, a kind of single crystal growing furnace transmission shaft, it comprises axis body 1, through hole 2 is provided with in axis body 1, described axis body 1 comprises crucible attachment portion 4 and axis body and the outer power connection of stove in axis body and stove and divides 5, and axis body adopts graphite material to make with crucible attachment portion 4 in stove, and axis body and stove outward power connection divide 5 employing carbon/carbon compound materials to make.
Axis body of the present invention divides 5 for being threaded or mortise-tenon joint (the present embodiment is for being threaded) with crucible attachment portion 4 in stove and axis body with the outer power connection of stove, and sense of rotation when thread rotary orientation works with transmission shaft is contrary.
The length of axis body 1 of the present invention is 660 ㎜ ~ 900 ㎜ (the present embodiment is 810 ㎜), external diameter is 70 ㎜ ~ 150 ㎜ (the present embodiment is 90 ㎜), its central axis and the outer power connection of stove divide the length of 5 sections to be 625 ㎜, and axis body and the outer power connection of stove divide the diameter of the through hole 2 of 5 sections to be 40 ㎜ ~ 100 ㎜ (the present embodiment is 58 ㎜).
The present invention divides 5 employing carbon/carbon compound materials due to the outer power connection of axis body and stove, and therefore, axis body and the outer power connection of stove divide the diameter of the through hole 2 of 5 sections compared with use graphite material, can do larger, so that fill insulant material.
The gas effusion that the present invention at high temperature produces for the ease of the thermal insulating material (the present embodiment fill for soft carbon felt) in through hole 2, described axis body 1 is provided with the vent 3 communicated with through hole 2.
A production method for single crystal growing furnace transmission shaft as above, it comprises the following steps:
(1) base:
1. the making of crucible attachment portion 4 in axis body and stove: manufacture crucible attachment portion 4 in the axis body of graphite material and stove by tratitional technology;
2. axis body and the outer power connection of stove divide the making of 5: it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3(the present embodiment is 0.5g/ ㎝
3) axis body and the outer power connection of stove divide 5 precast bodies;
(2) density: (1) the axis body of gained and the outer power connection of stove divide 5 precast bodies by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density by step, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3(the present embodiment is 1.49g/ ㎝
3) the outer power connection of axis body and stove divides 5 base substrates;
(3) machining: by step (2) the axis body of gained and the outer power connection of stove divide 5 base substrates to be machined to required shape and size, the axis body obtaining carbon/carbon compound material and stove outward power connection divide 5;
(4) combine installation: divided by the outer power connection of axis body and stove of step (3) gained carbon/carbon compound material 5 to adopt with axis body and the crucible attachment portion in stove 4 of step (1) gained graphite material and to be threaded or mortise-tenon joint (the present embodiment is for being threaded) becomes transmission shaft finished product, before connection, outside first thermal insulating material (the present embodiment is soft carbon felt) being filled in axis body and stove, power connection divides in the through hole 2 of 5;
(5) purifying: the transmission shaft finished product of step (4) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C (the present embodiment is 2000 DEG C), and holding time is 2h ~ 5h(the present embodiment is 3h).
Remaining with embodiment 1.
embodiment 3:
As shown in Figure 3, in axis body of the present invention and stove, crucible attachment portion 4 and axis body and the outer power connection of stove divide 5 for mortise-tenon joint.
The present invention is in order to improve soundness, and in described axis body and stove, crucible attachment portion 4 and axis body and the outer power connection of stove divide the joint of 5 to be provided with pin 6.
Remaining with embodiment 1, embodiment 2.
Claims (2)
1. the production method of a single crystal growing furnace transmission shaft, described single crystal growing furnace transmission shaft it comprise axis body (1), through hole (2) is provided with in axis body (1), described axis body (1) is provided with the vent (3) communicated with through hole (2), it is characterized in that described axis body (1) adopts carbon/carbon compound material to make; The external diameter of described axis body (1) is 70 ㎜ ~ 150 ㎜, and the diameter of described through hole (2) is 40 ㎜ ~ 100 ㎜; It comprises following preparation process:
(1) base: it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3transmission shaft precast body;
(2) density: by the transmission shaft precast body of step (1) gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3transmission shaft base substrate;
(3) machining: the transmission shaft base substrate of step (2) gained is machined to required shape and size;
(4) purifying: the transmission shaft base substrate of step (3) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C, and holding time is 2h ~ 5h.
2. the production method of a single crystal growing furnace transmission shaft, described single crystal growing furnace transmission shaft it comprise axis body (1), through hole (2) is provided with in axis body (1), described axis body (1) is provided with the vent (3) communicated with through hole (2), it is characterized in that described axis body (1) comprises crucible attachment portion (4) and axis body and the outer power connection of stove in axis body and stove and divides (5), axis body and crucible attachment portion (4) in stove and axis body and stove outward power connection divide (5) for being threaded or mortise-tenon joint; In axis body and stove, crucible attachment portion (4) adopts graphite material to make, and axis body and the outer power connection of stove divide (5) to adopt carbon/carbon compound material to make; The external diameter of described axis body (1) is 70 ㎜ ~ 150 ㎜, and axis body and the outer power connection of stove divide the diameter of the through hole (2) of (5) to be 40 ㎜ ~ 100 ㎜; It comprises following preparation process:
(1) base:
1. the making of crucible attachment portion (4) in axis body and stove: manufacture crucible attachment portion (4) in the axis body of graphite material and stove by tratitional technology;
2. axis body and the outer power connection of stove divide the making of (5): it is 0.3g/ ㎝ that the net tire be made up of carbon fiber and carbon cloth are made bulk density by acupuncture compound
3~ 0.6g/ ㎝
3axis body and the outer power connection of stove divide (5) precast body;
(2) density: (1) the axis body of gained and the outer power connection of stove divide (5) precast body by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density by step, its density progressively to be increased and through graphitization processing, making bulk density is 1.0g/ ㎝
3~ 1.8g/ ㎝
3axis body and the outer power connection of stove divide (5) base substrate;
(3) machining: by step (2) the axis body of gained and the outer power connection of stove divide (5) base substrate to be machined to required shape and size, the axis body obtaining carbon/carbon compound material and stove outward power connection divide (5);
(4) combine installation: divided by the outer power connection of axis body and stove of step (3) gained carbon/carbon compound material axis body and crucible attachment portion (4) in stove of (5) and step (1) gained graphite material to adopt to be threaded or mortise-tenon joint becomes transmission shaft finished product;
(5) purifying: the transmission shaft finished product of step (4) gained is put into High Temperature Furnaces, and heat removal of impurities under vacuum, cleansing temp is 1600 DEG C ~ 2600 DEG C, and holding time is 2h ~ 5h.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210099126.XA CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210099126.XA CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102619863A CN102619863A (en) | 2012-08-01 |
| CN102619863B true CN102619863B (en) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210099126.XA Active CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115141029B (en) * | 2022-08-31 | 2022-11-11 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible support rod |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101319353A (en) * | 2008-05-20 | 2008-12-10 | 湖南金博复合材料科技有限公司 | Carbon/carbon composite material crucible pot and preparing technique thereof |
| CN102191537A (en) * | 2011-06-01 | 2011-09-21 | 奥特斯维能源（太仓）有限公司 | Crucible used for monocrystalline growth with czochralski method |
| CN202500885U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
| CN202500886U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
-
2012
- 2012-04-06 CN CN201210099126.XA patent/CN102619863B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101319353A (en) * | 2008-05-20 | 2008-12-10 | 湖南金博复合材料科技有限公司 | Carbon/carbon composite material crucible pot and preparing technique thereof |
| CN102191537A (en) * | 2011-06-01 | 2011-09-21 | 奥特斯维能源（太仓）有限公司 | Crucible used for monocrystalline growth with czochralski method |
| CN202500885U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
| CN202500886U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
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| CN102619863A (en) | 2012-08-01 |
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Address after: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee after: Hunan gold carbon Limited by Share Ltd Address before: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee before: Hunan KBCarbon Composite Science and Technology Co., Ltd. |