CN219553583U

CN219553583U - Edge finder

Info

Publication number: CN219553583U
Application number: CN202320427552.5U
Authority: CN
Inventors: 余磊; 李亚洲; 伦汉忠; 梁伟东
Original assignee: Dongguan Smartwin Intelligent Equipment Co ltd
Current assignee: Dongguan Smartwin Intelligent Equipment Co ltd
Priority date: 2023-03-07
Filing date: 2023-03-07
Publication date: 2023-08-18
Anticipated expiration: 2033-03-07

Abstract

The utility model relates to the technical field of semiconductors, in particular to an edge finder, which has the technical scheme that: the wafer positioning device comprises a machine table, a tray, a moving mechanism, a recognition mechanism and a controller, wherein the moving mechanism is arranged on the machine table, the tray is arranged on the moving mechanism, the recognition mechanism is arranged on the machine table and located right above the tray, the tray is used for placing the wafer, the recognition mechanism is used for recognizing whether the wafer on the tray is located at the correct position or not, the moving mechanism is used for adjusting the position of the tray to adjust the position of the wafer, and the moving mechanism and the recognition mechanism are electrically connected with the controller. The beneficial effects of the utility model are as follows: the position of the wafer can be identified while the position of the wafer is adjusted.

Description

Edge finder

Technical Field

The utility model relates to the technical field of semiconductors, in particular to an edge finder.

Background

A wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer has a circular shape. In the wafer processing process, photolithography and the like are required, and in general, the wafer processing process has a high precision requirement. At present, wafers are mainly transferred through a transfer device and wafer fingers, when a mechanical device extracts the wafers, the wafers are easy to deviate due to the fact that a wafer material box is generally larger than the size of the wafers, and then the transfer device directly places the wafers on a device corresponding to a process, so that the processing precision is easy to be poor due to the fact that the extraction deviation is easy to solve.

Disclosure of Invention

The utility model provides an edge finder, which has the advantage of being capable of identifying the position of a wafer and adjusting the position of the wafer.

The utility model provides a seek limit ware, includes board, tray, moving mechanism, recognition mechanism and controller, moving mechanism install in on the board, the tray install in on the moving mechanism, recognition mechanism frame is located on the board and be located directly over the tray, the tray is used for placing the wafer, recognition mechanism is used for discernment whether the wafer on the tray is located the exact position, moving mechanism is used for adjusting the position of tray in order to adjust the position of wafer, moving mechanism and recognition mechanism all with the controller electricity is connected.

Through adopting above-mentioned technical scheme, transfer device places the wafer on the tray, and identification mechanism discerns the wafer on the tray, if the position of wafer takes place to skew, and movement mechanism drives the tray and removes and make the wafer on the tray be in the exact position, and transfer device snatchs the wafer again to guarantee that transfer device snatchs the position of wafer is accurate.

Preferably, the moving mechanism comprises a Y-axis moving assembly, a first connecting plate, an X-axis moving assembly and a second connecting plate, wherein the Y-axis moving assembly is installed on the machine table, the first connecting plate is installed on the Y-axis moving assembly, the Y-axis moving assembly is used for driving the first connecting plate to move in the Y-axis direction, the X-axis moving assembly is installed on the first connecting plate, the second connecting plate is installed on the X-axis moving assembly, the tray is installed on the second connecting plate, and the X-axis moving assembly is used for driving the second connecting plate to drive the tray to move in the X-axis direction.

By adopting the scheme, when the position of the wafer needs to be adjusted, the Y-axis moving assembly drives the first connecting plate to move in the Y direction, so that the X-axis moving assembly, the second connecting plate and the tray are driven to move in the Y direction, and the wafer is moved in the Y direction; the X-axis moving assembly drives the second connecting plate to move in the X direction, so that the tray is driven to move in the X direction, and wafers are moved in the X direction.

Preferably, the Y-axis moving assembly comprises a first guide rail, a first sliding block and a first linear motor, wherein the first guide rail is installed on the machine table, the first sliding block is installed on the first guide rail in a sliding manner, the length direction of the first guide rail is positioned in the Y direction, the first sliding block is fixedly connected with the first connecting plate, the first linear motor is installed on the machine table, the first linear motor is connected with the first connecting plate, the first linear motor is electrically connected with the controller, and the first linear motor is used for driving the first connecting plate to move in the Y direction.

Through adopting above-mentioned technical scheme, first linear motor drives first connecting plate and removes in the Y direction, simultaneously, the first guide rail is favorable to restricting the direction of movement of first connecting plate with the setting up of first slider for the removal of first connecting plate is more stable.

Preferably, the X-axis moving assembly comprises a second guide rail, a second slider and a second linear motor, wherein the second guide rail is installed on the first connecting plate, the second slider is installed on the second guide rail in a sliding manner, the length direction of the second guide rail is positioned in the X direction, the second slider is fixedly connected with the second connecting plate, the second linear motor is installed on the first connecting plate, the second linear motor is connected with the second connecting plate, and the second linear motor is used for driving the second connecting plate to move in the X direction.

Through adopting above-mentioned scheme, second linear motor drives the second connecting plate and removes in the Y direction, simultaneously, the second guide rail is favorable to restricting the direction of movement of second connecting plate with the setting up of second slider for the movement of second connecting plate is more stable.

Preferably, the recognition mechanism comprises a camera, the camera is arranged on the machine table, the camera is positioned right above the tray, the camera faces the tray, the camera is electrically connected with the controller, and the camera is used for shooting the position of the wafer on the tray.

By adopting the scheme, the position of the wafer is shot by using the camera, the image signal is transmitted to the controller, and then the image signal is transmitted to an external computer through the controller, so that whether the wafer is at the correct position or not is judged.

Preferably, a rotating assembly is arranged between the tray and the second connecting plate, and the rotating assembly is used for driving the tray to rotate.

Through adopting above-mentioned scheme, the angle that the setting of rotating assembly made the tray can be adjusted to can adjust the angle of wafer.

Preferably, the rotating assembly comprises a rotating motor, the rotating motor is mounted on the second connecting plate, an output shaft of the rotating motor is fixedly connected with the tray coaxially, the rotating motor is electrically connected with the controller, and an output shaft of the rotating motor is used for driving the tray to rotate.

Through adopting above-mentioned scheme, the output shaft of rotating electrical machines drives the tray and rotates to drive the wafer and rotate, in order to adjust the angle of wafer.

Preferably, a first anti-collision fixing seat is fixedly arranged on the machine table, a first anti-collision block is fixedly arranged at the bottom of the first connecting plate, the first anti-collision fixing seat is positioned beside the end part of the first guide rail, and the first anti-collision block is used for colliding with the first anti-collision fixing seat.

Through adopting above-mentioned scheme, when first connecting plate removes to the tip under first linear motor's drive, first crashproof piece collides with first crashproof fixing base to be favorable to restricting the biggest movable range of first connecting plate.

In summary, the beneficial technical effects of the utility model are as follows:

1. the wafer is placed on the tray by the transfer device, the wafer on the tray is identified by the identification mechanism, if the position of the wafer is deviated, the tray is driven by the movement mechanism to move so that the wafer on the tray is positioned at the correct position, and the wafer is grabbed again by the transfer device so as to ensure that the position of grabbing the wafer by the transfer device is accurate.

2. The angle of the tray can be adjusted by the arrangement of the rotating assembly, so that the angle of the wafer can be adjusted.

Drawings

FIG. 1 is a schematic diagram of the internal structure of an edge finder according to the present utility model.

Fig. 2 is a schematic structural view of a tray and a moving mechanism in the present utility model.

Fig. 3 is an enlarged schematic view of the portion a in fig. 2.

FIG. 4 is a schematic diagram of an edge finder according to the present utility model.

Reference numerals illustrate:

1. a machine table; 2. a tray; 3. an identification mechanism; 4. a controller; 5. a first connection plate; 6. a second connecting plate; 7. a first guide rail; 8. a first slider; 9. a first linear motor; 10. a second guide rail; 11. a second slider; 12. a second linear motor; 13. a first photosensor; 14. a first baffle; 15. the first anti-collision fixing seat; 16. a first impact block; 17. a second photosensor; 18. the second anti-collision fixing seat; 19. a rotating electric machine.

Detailed Description

The utility model is described in further detail below in connection with fig. 1-4.

The utility model discloses an edge finder, which is shown in fig. 1 and comprises a machine table 1, a tray 2, a moving mechanism, a recognition mechanism 3 and a controller 4, wherein the moving mechanism is arranged on the machine table 1, the tray 2 is arranged on the moving mechanism, the recognition mechanism 3 is erected on the machine table 1 and is positioned right above the tray 2, the tray 2 is used for placing wafers, and an adsorption piece for adsorbing the wafers is further arranged on the tray 2. The identifying mechanism 3 is used for identifying whether the wafer on the tray 2 is located at the correct position, the moving mechanism is used for adjusting the position of the tray 2 to adjust the position of the wafer, and the moving mechanism and the identifying mechanism 3 are electrically connected with the controller 4. The wafer is placed on the tray 2 by the transfer device, the wafer on the tray 2 is identified by the identification mechanism 3, and if the position of the wafer is deviated, the tray 2 is driven by the movement mechanism to move so that the wafer on the tray 2 is positioned at the correct position, and then the wafer is grabbed again by the transfer device, so that the position where the wafer is grabbed by the transfer device is accurate.

The recognition mechanism 3 comprises a camera, the camera fixing frame is arranged on the machine table 1, the camera is positioned right above the tray 2 and faces the tray 2, the camera is electrically connected with the controller 4, and the camera is used for shooting the position of the wafer on the tray 2. Shooting a picture of the wafer by using a camera, transmitting an image signal to the controller 4, transmitting the image signal to an external computer through the controller 4, and judging whether the circle center of the wafer is positioned at the center of the picture or not by the computer according to the picture, wherein if the circle center of the wafer is positioned at the center of the picture, the wafer is positioned at the correct position; otherwise, the other way round. Thereby realizing the judgment of whether the wafer is in the correct position.

The moving mechanism comprises a Y-axis moving assembly, a first connecting plate 5, an X-axis moving assembly and a second connecting plate 6, wherein the Y-axis moving assembly is arranged on the machine table 1, the first connecting plate 5 is arranged on the Y-axis moving assembly, the Y-axis moving assembly is used for driving the first connecting plate 5 to move in the Y-axis direction, the X-axis moving assembly is arranged on the first connecting plate 5, the second connecting plate 6 is arranged on the X-axis moving assembly, the tray 2 is arranged on the second connecting plate 6, and the X-axis moving assembly is used for driving the second connecting plate 6 to drive the tray 2 to move in the X-axis direction. When the position of the wafer needs to be adjusted, the Y-axis moving assembly drives the first connecting plate 5 to move in the Y direction, so that the X-axis moving assembly, the second connecting plate 6 and the tray 2 are driven to move in the Y direction, and the wafer is moved in the Y direction; the X-axis moving assembly drives the second connecting plate 6 to move in the X direction, so that the tray 2 is driven to move in the X direction, and wafers are moved in the X direction.

Specifically, referring to fig. 2, the y-axis moving assembly includes a first guide rail 7, a first slider 8, and a first linear motor 9, the first guide rail 7 is mounted on the machine 1, and the first slider 8 is sleeved on the first guide rail 7 and can slide on the first guide rail 7, so that the first slider 8 can only slide along the length direction of the first guide rail 7, and limits the movement of the first slider 8 in the vertical direction. The length direction of the first guide rail 7 is located in the Y direction, the top surface of the first sliding block 8 is fixedly connected with the bottom surface of the first connecting plate 5, the first linear motor 9 is installed on the machine table 1, the first linear motor 9 is connected with the first connecting plate 5, the first linear motor 9 is electrically connected with the controller 4, and the first linear motor 9 is used for driving the first connecting plate 5 to move in the Y direction. The first linear motor 9 drives the first connecting plate 5 to move in the Y direction, and meanwhile, the first guide rail 7 and the first sliding block 8 are arranged to be beneficial to limiting the moving direction of the first connecting plate 5, so that the movement of the first connecting plate 5 is more stable.

The X-axis moving assembly comprises a second guide rail 10, a second sliding block 11 and a second linear motor 12, wherein the second guide rail 10 is installed on the first connecting plate 5, the second sliding block 11 is sleeved on the second guide rail 10 and can slide on the second guide rail 10, so that the second sliding block 11 can only slide along the length direction of the second guide rail 10, and the movement of the second sliding block 11 in the vertical direction is limited. The length direction of the second guide rail 10 is located in the X direction, the top surface of the second sliding block 11 is fixedly connected with the bottom surface of the second connecting plate 6, the second linear motor 12 is mounted on the first connecting plate 5, the second linear motor 12 is connected with the second connecting plate 6, the first linear motor 9 is electrically connected with the controller 4, and the second linear motor 12 is used for driving the second connecting plate 6 to move in the X direction. The second linear motor 12 drives the second connecting plate 6 to move in the Y direction, and meanwhile, the second guide rail 10 and the second sliding block 11 are arranged to be beneficial to limiting the moving direction of the second connecting plate 6, so that the movement of the second connecting plate 6 is more stable.

In this embodiment, the number of the first guide rails 7 is two, the number of the first sliding blocks 8 is four, the two first guide rails 7 are parallel to each other and installed on the machine table 1 and are respectively located at two sides of the first linear motor 9, and each first guide rail 7 is sleeved with two first sliding blocks 8. The arrangement of two first guide rails 7 is advantageous for further improving the stability of the movement direction of the first connection plate 5, whereas the arrangement of two first slide blocks 8 on each first guide rail 7 is advantageous for making the bearing of the first slide blocks 8 on the first connection plate 5 more stable. Similarly, the number of the second guide rails 10 is two, the number of the second sliding blocks 11 is four, the two second guide rails 10 are mutually parallel to each other and are arranged on the machine table 1 and are respectively positioned on two sides of the second linear motor 12, and each second guide rail 10 is sleeved with two second sliding blocks 11. The arrangement of two second guide rails 10 is advantageous for further improving the stability of the movement direction of the second connection plate 6, whereas the arrangement of two second slide blocks 11 on each second guide rail 10 is advantageous for making the receiving of the second slide blocks 11 on the second connection plate 6 more stable.

In addition, referring to fig. 2 and 3, two first photoelectric sensors 13 are disposed on the machine 1, two first blocking pieces 14 are disposed on the first connecting plate 5, the two first photoelectric sensors 13 are located at two ends of the first guide rail 7, the two first blocking pieces 14 are located at two ends of a side surface of the first connecting plate 5, and the first photoelectric sensors 13 are connected with the controller 4. When the first connection plate 5 moves to the maximum position, the first blocking piece 14 is placed in the first photoelectric sensor 13, the first photoelectric sensor 13 sends a signal to the controller 4, and the controller 4 stops the first linear motor 9. The machine 1 is fixedly provided with a first anti-collision fixing seat 15, the bottom of the first connecting plate 5 is fixedly provided with a first anti-collision block 16, the first anti-collision block 16 has certain elasticity, the first anti-collision fixing seat 15 is located beside the end part of the first guide rail 7, and the first anti-collision block 16 is used for colliding with the first anti-collision fixing seat 15. When the first blocking piece 14 is placed in the first photoelectric sensor 13, the first anti-collision block 16 collides with the first anti-collision fixing base 15, so that the movement of the first connecting plate 5 is stopped in time and the maximum movement range of the first connecting plate 5 is limited.

Similarly, two second photoelectric sensors 17 are arranged on the first connecting plate 5, two second baffle plates are arranged on the second connecting plate 6, the two second photoelectric sensors 17 are positioned at two ends of the second guide rail 10, the two second baffle plates are respectively positioned at two ends of the side face of the second connecting plate 6, and the second photoelectric sensors 17 are connected with the controller 4. When the second connecting plate 6 moves to the maximum position, the second blocking piece is placed in the second photoelectric sensor 17, the second photoelectric sensor 17 sends a signal to the controller 4, and the controller 4 stops the second linear motor 12. The first connecting plate 5 is fixedly provided with a second anti-collision fixing seat 18, the bottom of the second connecting plate 6 is fixedly provided with a second anti-collision block, the second anti-collision block has certain elasticity, the second anti-collision fixing seat 18 is positioned beside the end part of the second guide rail 10, and the second anti-collision block is used for colliding with the second anti-collision fixing seat 18. When the second blocking piece is placed in the second photoelectric sensor 17, the second anti-collision block collides with the second anti-collision fixing base 18, so that the movement of the second connecting plate 6 is stopped in time, and the maximum movement range of the second connecting plate 6 is limited.

In a part of the wafer processing process, not only is the accuracy required for the position of the wafer high, but also the accuracy is required for the angle of the wafer. A notch is typically provided in the wafer for determining the angle of the wafer. In order to adjust the angle of the wafer, a rotating assembly is arranged between the tray 2 and the second connecting plate 6, and the rotating assembly is used for driving the tray 2 to rotate. In the picture captured by the camera, if the notch on the wafer is not at the preset position of the picture, the angle of the wafer is incorrect, and the rotating assembly drives the tray 2 to rotate, so that the angle of the wafer is adjusted, and the notch on the wafer is positioned at the preset position of the picture. The provision of the rotating assembly enables the angle of the tray 2 to be adjusted, thereby enabling the angle of the wafer to be adjusted.

Specifically, referring back to fig. 2, the rotating assembly includes a rotating motor 19, the rotating motor 19 is mounted on the second connecting plate 6, an output shaft of the rotating motor 19 is fixedly connected with a center of the tray 2 coaxially, and the rotating motor 19 is electrically connected with the controller 4, and an output shaft of the rotating motor 19 is used for driving the tray 2 to rotate. The output shaft of the rotary motor 19 drives the tray 2 to rotate, thereby driving the wafer to rotate to adjust the angle of the wafer.

The implementation principle of the embodiment is as follows:

the transfer device places the wafer on the tray 2, uses the camera to shoot the picture of wafer to in with image signal transmission to controller 4, in the rethread controller 4 transmits to outside computer, the centre of a circle of computer judgement wafer is located the centre of a circle department of picture according to the picture to judge whether the wafer is in the exact position. If the wafer is not in the correct position, the controller 4 starts the first linear motor 9 and the second linear motor 12, and the first linear motor 9 and the second linear motor 12 respectively adjust the positions of the first connecting plate 5 and the second connecting plate 6, so that the position of the tray 2 is adjusted, and the tray 2 drives the wafer to move until the center of the wafer is located at the center of the picture.

The above embodiments are not intended to limit the scope of the present utility model, so: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims

1. An edge finder which is characterized in that: including board (1), tray (2), moving mechanism, identifying mechanism (3) and controller (4), moving mechanism install in on board (1), tray (2) install in on the moving mechanism, identifying mechanism (3) erect in on board (1) and be located directly over tray (2), tray (2) are used for placing the wafer, identifying mechanism (3) are used for discernment whether the wafer on tray (2) is located the exact position, moving mechanism is used for adjusting the position of tray (2) in order to adjust the position of wafer, moving mechanism and identifying mechanism (3) all with controller (4) electricity is connected.

2. An edge finder as defined in claim 1, wherein: the moving mechanism comprises a Y-axis moving assembly, a first connecting plate (5), an X-axis moving assembly and a second connecting plate (6), wherein the Y-axis moving assembly is installed on the machine table (1), the first connecting plate (5) is installed on the Y-axis moving assembly, the Y-axis moving assembly is used for driving the first connecting plate (5) to move in the Y-axis direction, the X-axis moving assembly is installed on the first connecting plate (5), the second connecting plate (6) is installed on the X-axis moving assembly, the tray (2) is installed on the second connecting plate (6), and the X-axis moving assembly is used for driving the second connecting plate (6) to drive the tray (2) to move in the X-axis direction.

3. An edge finder as claimed in claim 2, wherein: the Y-axis moving assembly comprises a first guide rail (7), a first sliding block (8) and a first linear motor (9), wherein the first guide rail (7) is installed on the machine table (1), the first sliding block (8) is installed on the first guide rail (7) in a sliding mode, the length direction of the first guide rail (7) is located in the Y direction, the first sliding block (8) is fixedly connected with the first connecting plate (5), the first linear motor (9) is installed on the machine table (1), the first linear motor (9) is connected with the first connecting plate (5), the first linear motor (9) is electrically connected with the controller (4), and the first linear motor (9) is used for driving the first connecting plate (5) to move in the Y direction.

4. A side finder as claimed in claim 3, wherein: the X-axis moving assembly comprises a second guide rail (10), a second sliding block (11) and a second linear motor (12), wherein the second guide rail (10) is installed on the first connecting plate (5), the second sliding block (11) is installed on the second guide rail (10) in a sliding mode, the length direction of the second guide rail (10) is located in the X direction, the second sliding block (11) is fixedly connected with the second connecting plate (6), the second linear motor (12) is installed on the first connecting plate (5), the second linear motor (12) is connected with the second connecting plate (6), and the second linear motor (12) is used for driving the second connecting plate (6) to move in the X direction.

5. An edge finder as defined in claim 1, wherein: the identification mechanism (3) comprises a camera, the camera is arranged on the machine table (1), the camera is positioned right above the tray (2), the camera faces the tray (2), the camera is electrically connected with the controller (4), and the camera is used for shooting the position of the wafer on the tray (2).

6. An edge finder as claimed in claim 2, wherein: a rotating assembly is arranged between the tray (2) and the second connecting plate (6), and the rotating assembly is used for driving the tray (2) to rotate.

7. An edge finder as defined in claim 6, wherein: the rotating assembly comprises a rotating motor (19), the rotating motor (19) is mounted on the second connecting plate (6), an output shaft of the rotating motor (19) is fixedly connected with the tray (2) in a coaxial mode, the rotating motor (19) is electrically connected with the controller (4), and an output shaft of the rotating motor (19) is used for driving the tray (2) to rotate.

8. A side finder as claimed in claim 3, wherein: the anti-collision device is characterized in that a first anti-collision fixing seat (15) is fixedly arranged on the machine table (1), a first anti-collision block (16) is fixedly arranged at the bottom of the first connecting plate (5), the first anti-collision fixing seat (15) is located beside the end part of the first guide rail (7), and the first anti-collision block (16) is used for colliding with the first anti-collision fixing seat (15).