CN111189479A - Inverted hanging type double-sided optical detection equipment - Google Patents
Inverted hanging type double-sided optical detection equipment Download PDFInfo
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- CN111189479A CN111189479A CN201910955752.6A CN201910955752A CN111189479A CN 111189479 A CN111189479 A CN 111189479A CN 201910955752 A CN201910955752 A CN 201910955752A CN 111189479 A CN111189479 A CN 111189479A
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- 238000001514 detection method Methods 0.000 title claims abstract description 64
- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 238000007689 inspection Methods 0.000 claims abstract description 66
- 230000005540 biological transmission Effects 0.000 claims abstract description 30
- 238000001179 sorption measurement Methods 0.000 claims abstract description 8
- 239000010438 granite Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000007306 turnover Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
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- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention provides an inverted hanging type double-sided optical detection device which comprises a detection platform and an inverted hanging type carrier. The inspection platform has at least one first station and at least one second station. The first station comprises a positive detection platform, and a first image capturing device is arranged on one side of the positive detection platform and used for capturing a first side image of an object to be detected. A detection area is arranged between the first platform and the second platform, and a second image capturing device is arranged on one side of the detection area. The inverted hanging type carrier is arranged between the first platform and the second platform of the detection platform and comprises a linear transmission module and a back detection adsorption carrying platform which is matched with the linear transmission module and driven by the linear transmission module. The back detection adsorption carrying platform moves in cooperation with the linear transmission module to adsorb the first side of the object to be detected, and the other side of the object to be detected passes through the detection area to be shot by the second image capturing device in the detection area.
Description
Technical Field
The present invention relates to an optical inspection apparatus, and more particularly, to an inverted double-sided optical inspection apparatus.
Background
In the prior art, when performing double-sided optical inspection, a general method is to move an object to be inspected to an inspection area through a carrier or a transfer device, to photograph a side surface of the object to be inspected through an image capturing device, to turn over the object through a turn-over device when the photographing is completed, and to move the object to the inspection area through the carrier or the transfer device again to perform secondary photographing, thereby obtaining double-sided images of the object to be inspected. The above method is really consistent with the intuitive design, however, the time required for detection is inevitably increased due to the addition of too many steps in the detection process, and the detection efficiency cannot be effectively improved.
Disclosure of Invention
The present invention provides an inverted double-sided optical inspection apparatus, which includes an inspection platform and an inverted carrier. The inspection platform has at least one first station and at least one second station. The first station comprises a positive detection carrying platform, and a first image capturing device is arranged on one side of the positive detection carrying platform and used for capturing a first side image of the object to be detected. A detection area is arranged between the first platform and the second platform, and a second image capturing device is arranged on one side of the detection area. The overhead traveling vehicle is disposed between the first platform and the second platform of the inspection platform. The inverted hanging type carrier comprises a linear transmission module and a back detection adsorption carrying platform which is matched with the linear transmission module and driven by the linear transmission module. The back detection adsorption carrying platform is matched with the linear transmission module to move between the first platform and the second platform so as to adsorb the first side of the object to be detected, and the second side of the object to be detected passes through the detection area to be shot by the second image capturing device.
The invention does not need to additionally arrange a turnover device to carry out turnover procedure on the object to be detected, can effectively reduce the time required for detecting a single object to be detected, and further increases the detection efficiency.
The invention can solve the problem of different precision requirements of double-sided detection of an object to be detected through the linear transmission module and the air-floating type positioning transmission module, and particularly can effectively carry out precise optical detection on a nanometer-level precision workpiece through the air-floating type positioning transmission module.
Drawings
Fig. 1 is an appearance schematic diagram of an inverted double-sided optical inspection apparatus according to the present invention.
Fig. 2 is an appearance schematic diagram of the positive detection stage in the present invention.
Fig. 3 is an exploded view of the alignment stage according to the present invention.
Fig. 4 is a partially transparent schematic view of the overhead traveling vehicle according to the present invention.
Fig. 5a to 5d are schematic diagrams of a work flow from (a) to (a) of the inverted double-sided optical inspection apparatus according to the present invention.
Detailed Description
The detailed description and technical contents of the present invention will be described below with reference to the accompanying drawings. Meanwhile, for convenience of description, the drawings and the proportion thereof are not necessarily drawn to scale, and the drawings and the proportion thereof are not intended to limit the scope of the present invention.
Although the controller is not explicitly disclosed in the drawings in the present invention, it is understood that the present invention is applied to an optical inspection apparatus, necessarily including an image processor for performing image processing; in order to coordinate the operation of each device, it must include a central controller (such as PLC) to adjust the parameters of each device to ensure the smooth operation of the device and eliminate the error; the devices may each include an independent controller and corresponding firmware for switching the operation mode of each device or for feeding back corresponding parameters from sensors, etc., as will be described in detail herein.
The controller may be, for example, a Central Processing Unit (CPU), or other Programmable general purpose or special purpose Microprocessor (Microprocessor), Digital Signal Processor (DSP), Programmable controller, Application Specific Integrated Circuit (ASIC), Programmable Logic Device (PLD), or other similar devices or combinations thereof.
The following description is directed to a preferred embodiment of the present invention, and please refer to fig. 1, which is an appearance schematic diagram of an inverted double-sided optical inspection apparatus according to the present invention, and the diagram is shown in the figure:
the present embodiment provides an inverted double-sided optical inspection apparatus 100, which mainly includes an inspection platform 10 and an inverted carrier 20 disposed in cooperation with the inspection platform 10.
The testing platform 10 is divided into a first station 11 corresponding to a first testing position and a second station 12 corresponding to a second testing position according to the functionality of performing front and back testing on the object P (as shown in fig. 5 a). The first detecting position and the second detecting position are determined by the image capturing ranges of a first image capturing device 111 and a second image capturing device 121. Specifically, the detecting position refers to a preferred image capturing position configured by the equipment personnel according to the type and precision of the object to be measured and the performance (such as resolution and focal length) of the lens and the camera, and the terms are not intended to limit the scope of the present invention, and are not described herein.
The first station 11 includes a front inspection stage 112, and a first image capturing device 111 is disposed on one side of the front inspection stage 112. In a preferred embodiment, the first image capturing device 111 can be an Area Scan Camera (Area Scan Camera) or a Line Scan Camera (Line Scan Camera). In the embodiment of the surface scanning camera, the loss of shooting precision caused by the movement of the platform deck can be reduced; in the embodiment using the line scan camera, the volume of the apparatus can be reduced and the detection efficiency can be increased, which is not limited in the present invention.
The second platform 12 is disposed at the rear end of the first platform 11, and is configured to adsorb the object P to be detected of the first platform 11 through the overhead traveling vehicle 20, and to convey the object P to be detected to the second detection position for shooting. In this embodiment, the second station 12 and the first station 11 are disposed on the same base (the air bearing platform 114). The second station 12 may be disposed separately from the first station 11 according to practical requirements, and is not limited in the present invention. In order to capture the image of the object P, the second docking station 12 has a detection area SP corresponding to the second detection position, and a second image capturing device 121 is disposed on one side of the detection area SP for capturing the image of the passing object P. Like the first image capturing device 111, in a preferred embodiment, the second image capturing device 121 can be an Area Scan Camera (Area Scan Camera) or a Line Scan Camera (Line Scan Camera). In the embodiment of the surface scanning camera, the loss of shooting precision caused by the movement of the platform deck can be reduced; the embodiment of the line scan camera can reduce the volume of the device and increase the detection efficiency, which is not limited in the present invention. The detection region SP is the region of the second station 12 not covered by the base; in the present embodiment, the detection area SP is located at one side of the end position of the base extending direction, and when the front inspection stage 112 moves to the end, the object P is adsorbed by the overhead traveling vehicle 20 and moves onto the detection area SP, so that the second image capturing device 121 captures an image. In addition to the above embodiments, the detection area may be a slot on the base, a space between two adjacent bases, a platform or a machine, and the like, and the setting is not intended to limit the scope of the present invention.
The positive inspection stage 112 of the present invention will be described in detail below with reference to a specific embodiment. Please refer to fig. 2 and fig. 3, which are an appearance schematic diagram and an exploded schematic diagram of the positive test stage according to the present invention, as shown in the drawings:
the positive inspection stage 112 is arranged in cooperation with an air-floating positioning transmission module, and is driven by the air-floating positioning transmission module to pass through an image capturing area (a first inspection position) of the first image capturing device 111, and a first side image of the object P to be inspected is captured by the first image capturing device 112.
In a preferred embodiment, the air floating positioning transmission module comprises a linear motor 113 and an air floating platform 114 disposed in cooperation with the linear motor 113. The air floating platform 114 has a rail 114A for installing the positive checking platform 112. The linear motor 113 includes a stator 113A and an exciting coil 113B, which are respectively disposed on the rail 114A and the positive inspection stage 112, so as to drive the positive inspection stage 112 to move within the distribution range of the rail 114A. Specifically, in the present embodiment, the stator 113A is disposed inside the track 114A, and is disposed in parallel with the extending direction of the track 114A. An exciting coil 113B is coupled to the inner side (or bottom side) of the front inspection stage 112 so that the front inspection stage 112 is moved in the extending direction of the rail 114A by the stator 113A and the exciting coil 113B. In another possible embodiment, the stator 113A and the exciting coil 113B may also be arranged in a reverse direction, for example, the exciting coil is designed to be a straight strip and arranged in the track 114A, and a corresponding stator (magnet set) is arranged on the positive inspection stage 112, and the stator is driven to move by modulating the direction of the induced current of the exciting coil, which is not limited by the present invention.
In order to make the positive inspection stage 112 float relatively and increase the accuracy of the positive inspection stage 112 in the Z-axis (i.e., the distance between the positive inspection stage 112 and the first imager 111), a plurality of air bearings (e.g., a straight air bearing R1 and a side air bearing R2) are coupled to the bottom side and both sides of the positive inspection stage 112. Positive pressure is input to the air bearing through the air pressure device 115 to float the positive detection stage 112. In a preferred embodiment, the positive inspection stage 112 has an upper bearing base 112A and a lower base 112B. The upper bearing seat 112A is locked on the lower base 112B, and two sides of the lower base 112B are symmetrically provided with straight air bearings R1. The air pressure acting force of the straight air bearing R1 is directed downward to float the positive inspection stage 112. In this embodiment, the number of the left side is 4 and the number of the right side is 5, and the total number is 9. At the left position, since a space is provided for the fixed end of the circuit support to be combined with the positive checking platform 112, 4 are provided; a lateral air bearing R2 is provided at each of four corners of the positive inspection stage 112. The air pressure force of the side air bearing R2 is applied to the inner sidewall surface of the rail 114A toward both sides of the positive inspection stage 112, thereby preventing the positive inspection stage 112 from contacting or colliding with the sidewall surfaces. It should be noted that the number of air bearings is mainly considered according to the weight and volume of the positive inspection stage 112. The number of the straight air bearings R1 and the lateral air bearings R2 is not intended to be limiting. In a preferred embodiment, the positive inspection stage 112 may be a vacuum suction stage (not shown), but is not limited in the present invention.
In a preferred embodiment, in order to achieve the requirement of high precision, the material of the surface of the air floating platform 114 is granite, and the plane precision of the granite after polishing can be controlled within 3 μm; the positive inspection stage 112 is used to set the surface of the object P to be inspected as a ceramic material, and the planar accuracy thereof can be controlled within a range of 5 μm. Since the linear motor 113 and the positive detection stage 112 can control the error to a range of 1 μm in positioning accuracy, the error of the entire apparatus does not exceed 10 μm at most.
In order to feed back the moving stroke of the stage 112 and increase the precision of the movement of the stage 112, an optical ruler 116A is disposed on one side of the track 114A, and a pickup head 116B is coupled to one side of the stage 112 for reading and feeding back the value of the optical ruler 116A to a controller (not shown). The controller controls the moving speed and the moving stroke of the positive detection stage 112 according to the numerical values.
When the object P moves to the second platform 12, the overhead traveling vehicle 20 of the second platform 12 adsorbs a first side of the object P, and moves to a second detection position for the corresponding second image capturing device 121 to capture a second side (back) of the object P for back detection. The following is a detailed description of an embodiment of the overhead hoist carrier 20 of the present invention, and referring to fig. 4, a partially transparent schematic view of the overhead hoist carrier of the present invention is shown in the drawings:
the overhead traveling vehicle 20 mainly includes a linear transmission module 21 and a back-inspection suction carrier 22 driven by the linear transmission module 21. The back detection adsorption carrier 22 moves on the planned path in cooperation with the linear transmission module 21.
In order to drive the back-suction stage 22 to move, the linear transmission module 21 mainly includes a driving motor 211, a screw 212 driven by the driving motor 211 to pivot, and at least one linear slide 213 disposed on one side of the screw 212. One side of the back detection adsorption stage 22 has a screw portion 221 coupled to the screw 212, and at least one slider 222 slidably disposed on the linear slide 213. The back suction stage 22 is driven by the screw 212 to move along a planned path within the range of the track defined by the linear slide 213.
In order to maintain the stability of the back detection suction stage 22 during movement and reduce the moment generated by the lateral force acting on the linear slide rails 213, in the present embodiment, the number of the linear slide rails 213 is two, and the linear slide rails are symmetrically disposed on both sides of the screw 212. The screw part 221 and the slider 222 are coupled to one side of the back detection suction stage 22. The number of the sliders 222 is four, and two sliders are symmetrically disposed on both sides of the screw portion 221 to be fixed to the two linear rails 213, respectively. With the above arrangement, the fulcrum is centrally located parallel to the screw 212, reducing the lateral moment on the slider 222. In a preferred embodiment, the drive motor 211 is a stepper motor. In other embodiments, the driving motor 211 may be a servo motor, a servo stepping motor, etc., and is not limited in the present invention.
In order to suck the object P to be detected, the back detection suction stage 22 includes a base 223, a cylinder 224 disposed on the base 223, and a suction platform 225 driven by the cylinder 224 and moving vertically. The base 223 is used for the screw part 221 and the slider 222 to move on the rail for carrying the whole back detection suction stage 22. The cylinder 224 is fixed to the base 223. In a preferred embodiment, a positioning bracket 224A may be further disposed on the base 223, and is disposed at one side of the cylinder 224 for supporting an extension arm 224B of the cylinder 224. The suction platform 225 is coupled to the extension arm 224B to move in coordination with the extension arm 224B up or down over at least two strokes. The suction platform 225 is connected to a pneumatic device (not shown) to form a vacuum suction force on the surface of the suction platform 225.
The following is a description of the working process of the upside down hanging type double-sided optical inspection apparatus 100, please refer to fig. 5a to 5d, which are schematic diagrams of the working process (i) to the working process (iv) of the upside down hanging type double-sided optical inspection apparatus of the present invention, as shown in the figures:
first, as shown in fig. 5a, the object P to be inspected is moved onto the positive inspection stage 112 of the first platform 11 manually or by the transfer device, and the positive inspection stage 112 is driven by the linear motor 113 to move toward the image capturing range (first detection position) of the first image capturing device 111.
Further, as shown in fig. 5b, when the front inspection stage 112 moves to the first inspection position, the first image capturing device 111 captures a first side image of the object P, i.e. a front image of the object P.
Further, as shown in fig. 5c, the front inspection stage 112 further moves to the transfer position, and after the overhead carrier 20 corresponding to the transfer position is driven by the air cylinder 224, the object P to be measured on the front inspection stage 112 moves downward and is sucked, and the sucked area is the first side (front side) and the second side (back side) of the object P to be measured are exposed downward.
Finally, as shown in fig. 5d, the overhead traveling vehicle 20 is driven by the linear transmission module 21 to move to the position above the detection area SP of the second platform 12, so as to capture a second side image (back image) of the object P through the second image capturing device 121 at the lower side of the detection area SP, thereby obtaining two side images of the object P after two times of capturing.
In summary, the present invention does not need to additionally provide a flipping device to perform a flipping procedure on the object to be detected, so as to effectively reduce the time required for detecting a single object to be detected, and further increase the detection efficiency. In addition, the invention can solve the problem of different precision requirements of double-sided detection of the object to be detected through the linear transmission module and the air-floating type positioning transmission module, and particularly can effectively carry out precise optical detection on the nano-scale precision workpiece through the air-floating type positioning transmission module.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (10)
1. The utility model provides a two-sided optical detection equipment of formula of hanging upside down which characterized in that includes:
a detection platform, which has at least a first platform and at least a second platform, wherein the first platform includes a positive detection platform, and a first image capturing device is arranged at one side of the positive detection platform for capturing a first side image of an object to be detected, a detection area is arranged between the first platform and the second platform, and a second image capturing device is arranged at one side of the detection area; and
the reverse hanging type carrier is arranged between the first platform and the second platform of the detection platform and comprises a linear transmission module and a back detection adsorption carrying platform which is matched with the linear transmission module and is driven by the linear transmission module;
the back detection adsorption carrying platform is matched with the linear transmission module to move between the first platform and the second platform so as to adsorb the first side of the object to be detected, and the other side of the object to be detected passes through the detection area to be shot by the second image capturing device.
2. The inverted double-sided optical inspection apparatus according to claim 1, wherein the linear transmission module includes a driving motor, a screw driven by the driving motor to pivot, and at least one linear slide disposed on one side of the screw, one side of the back inspection suction stage has a screw portion coupled to the screw, and at least one slider slidably disposed on the linear slide, and the screw drives the back inspection suction stage to move along a planned path within a track range defined by the linear slide.
3. The upside-down hanging type double-sided optical inspection apparatus according to claim 2, wherein the number of the linear slide rails is two, and the linear slide rails are symmetrically disposed on both sides of the screw rod, the screw connection portion and the slide block are combined on one side of the back inspection suction carrier, the number of the slide blocks is four, and the slide blocks are symmetrically disposed on both sides of the screw connection portion in pairs so as to be respectively fixed on the two linear slide rails.
4. The overhead double-sided optical inspection apparatus of claim 2, wherein the drive motor is a stepper motor.
5. The inverted double-sided optical inspection apparatus according to claim 1, wherein the positive inspection stage is disposed in cooperation with an air-floating positioning transmission module, and is driven by the air-floating positioning transmission module to pass through an image capturing area of the first image capturing device.
6. The upside-down hanging type double-sided optical inspection apparatus according to claim 5, wherein the air-floating positioning and transmission module includes a linear motor, an air-floating platform disposed in cooperation with the linear motor, and a plurality of air-floating air bearings, the air-floating platform has a track for disposing the positive inspection stage, the linear motor includes a stator and a rotor respectively disposed on the positive inspection stage and the track for driving the positive inspection stage to move within a distribution range of the track, and the plurality of air-floating air bearings are disposed between the positive inspection stage and the track.
7. The apparatus of claim 6, wherein an optical ruler is disposed on one side of the track, and a read/write head is coupled to one side of the stage for reading and feeding back a value of the optical ruler to a controller, the controller controlling the moving speed and the moving stroke of the stage according to the value.
8. The overhead double-sided optical inspection apparatus of claim 6, wherein the material of the surface of the air-bearing platform is granite.
9. The upside-down hanging type double-sided optical inspection apparatus according to claim 6, wherein the surface of the positive inspection stage on which the object to be inspected is placed is made of a ceramic material.
10. The overhead double-sided optical inspection apparatus according to any one of claims 1 to 9, wherein the first image capturing device and the second image capturing device are surface scanning cameras or line scanning cameras.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW107140486 | 2018-11-14 | ||
| TW107140486A TWI680406B (en) | 2018-11-14 | 2018-11-14 | Suspended double-sided optical inspection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111189479A true CN111189479A (en) | 2020-05-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910955752.6A Pending CN111189479A (en) | 2018-11-14 | 2019-10-09 | Inverted hanging type double-sided optical detection equipment |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2020085878A (en) |
| CN (1) | CN111189479A (en) |
| TW (1) | TWI680406B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117007513A (en) * | 2023-04-24 | 2023-11-07 | 上海感图网络科技有限公司 | Automatic optical detection table |
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| CN101426664B (en) * | 2006-03-13 | 2013-02-13 | 磁转换技术全球控股有限公司 | Magnetic wheel |
| TWI408352B (en) * | 2009-10-21 | 2013-09-11 | Ind Tech Res Inst | Optical characteristic measurement apparatus |
| TWI576888B (en) * | 2014-11-28 | 2017-04-01 | 財團法人工業技術研究院 | Detecting instrument and detecting method thereof |
| US9926052B2 (en) * | 2015-12-30 | 2018-03-27 | Abb Schweiz Ag | Control mechanism for transformer in-situ inspection device |
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- 2018-11-14 TW TW107140486A patent/TWI680406B/en active
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- 2019-10-09 CN CN201910955752.6A patent/CN111189479A/en active Pending
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| JPH11242007A (en) * | 1998-02-26 | 1999-09-07 | Fujikura Rubber Ltd | Inspection device of o-ring |
| CN201611350U (en) * | 2009-12-18 | 2010-10-20 | 重庆建设工业(集团)有限责任公司 | Magnetic-suspension high-speed measuring instrument calibrating device |
| WO2011115098A1 (en) * | 2010-03-17 | 2011-09-22 | Thk株式会社 | Control device and control method |
| TW201215474A (en) * | 2010-10-15 | 2012-04-16 | Tien-Tung Chung | Positioning stage apparatus with planar motion |
| JP2013015377A (en) * | 2011-07-01 | 2013-01-24 | Tokyo Seimitsu Co Ltd | Positioning device with parallel deviation absorbing mechanisms |
| CN105703520A (en) * | 2014-11-24 | 2016-06-22 | 雷虹桥 | Air bearing-assisted magnetic suspension bearing high speed motor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117007513A (en) * | 2023-04-24 | 2023-11-07 | 上海感图网络科技有限公司 | Automatic optical detection table |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020085878A (en) | 2020-06-04 |
| TWI680406B (en) | 2019-12-21 |
| TW202018580A (en) | 2020-05-16 |
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