CN219037588U

CN219037588U - Three-tube diffusion furnace with uniform sintering

Info

Publication number: CN219037588U
Application number: CN202223141559.5U
Authority: CN
Inventors: 朱育平; 芮茂辉; 孟祥飞; 付月明; 王花国; 许云峰; 邓会敏
Original assignee: Qingdao Yuhao Electronics Equipment Co ltd
Current assignee: Qingdao Yuhao Electronics Equipment Co ltd
Priority date: 2022-11-25
Filing date: 2022-11-25
Publication date: 2023-05-16
Anticipated expiration: 2032-11-25

Abstract

The utility model discloses a three-tube diffusion furnace with uniform sintering, which comprises a main furnace body, wherein three diffusion furnace tube fittings are arranged in the main furnace body, a sintering mechanism is arranged in the diffusion furnace tube fittings, an L-shaped conveying bent tube is arranged in the sintering mechanism, one end of the L-shaped conveying bent tube is provided with a first conical tube, the first conical tube is arranged in a conical table manner, one end of the first conical tube is arranged in a penetrating manner, a second conical tube fitting and a plurality of bent tube fittings are arranged at the other end of the first conical tube in a penetrating manner, the second conical tube fitting is positioned in the plurality of bent tube fittings, a plurality of through holes are formed in the second conical tube fitting at equal intervals, and a third conical tube fitting is arranged on the bent tube fitting. The utility model can well cause the gases to blow and collide with each other, is convenient for evenly mixing the gases, and can quickly raise the temperature of the mixed gas in the L-shaped conveying bent pipe in a preheating mode, thereby being convenient for ensuring the uniform distribution of the gases after entering the bearing pipe and ensuring the uniformity of sintering.

Description

Three-tube diffusion furnace with uniform sintering

Technical Field

The utility model relates to the technical field of diffusion furnaces, in particular to a three-tube diffusion furnace with uniform sintering.

Background

The diffusion furnace is one of the important process equipment in the front process of the integrated circuit production line, and has the main purpose of doping the semiconductor, i.e. diffusing the doping material into the silicon wafer under the high temperature condition, and changing and controlling the type, concentration and distribution of impurities in the semiconductor so as to establish different electric characteristic areas.

In order to ensure the uniformity of sintering, the uniformity of mixing various gases is required to be ensured, the gases are effectively heated, the rapid temperature rise after entering the sintering equipment is avoided, the gases cannot be uniformly distributed, the existing gas mixing equipment is complex in structure, the rapid mixing of the gases is not facilitated, and the mixing efficiency and quality are influenced, so that improvement is required.

Disclosure of Invention

The utility model aims to solve the defects that the existing gas mixing equipment is complex in structure, is unfavorable for quickly mixing gas and affects the mixing efficiency and quality, and provides a three-tube diffusion furnace with uniform sintering.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

the utility model provides a three-tube diffusion furnace of sintering uniformity, includes the main furnace body, install three diffusion furnace pipe fitting in the main furnace body, install sintering mechanism in the diffusion furnace pipe fitting, install L type in the sintering mechanism and carry the return bend, first conical tube is installed to the one end of L type and carry the return bend, first conical tube is the toper platform setting, the one end of first conical tube link up the setting, it is equipped with second toper pipe fitting and a plurality of return bend spare to run through on the other end of first conical tube, the second toper pipe fitting is located a plurality of return bend spare, a plurality of through-holes have been seted up to equidistant on the second toper pipe fitting, install the third toper pipe fitting on the return bend spare, a plurality of third toper pipe fittings respectively correspond with a plurality of through-holes.

Preferably, in order to further mix the gases, a sealing plate is installed in the L-shaped conveying elbow, and a plurality of elbow square pipes are installed on the sealing plate at equal intervals and are circularly arranged.

Preferably, in order to raise the temperature of the gas, the L-shaped conveying bent pipe is sleeved with an auxiliary heating component.

Preferably, in order to facilitate sintering operation, the sintering mechanism comprises a cavity formed in the pipe fitting of the diffusion furnace, a bearing pipe is penetrated and arranged in the cavity, the L-shaped conveying bent pipe is penetrated and arranged at one end of the bearing pipe, a return pipe is penetrated and arranged in the bearing pipe, and a heating assembly is arranged on the side wall of the periphery in the cavity.

Preferably, in order to facilitate the conveying of the parts to be sintered into the carrier tube, an auxiliary furnace body is mounted on one side of the main furnace body.

Compared with the prior art, the utility model has the beneficial effects that:

1. through the conical arrangement of the second conical pipe fitting, the gas can be moved out of the through hole faster, through the elbow arrangement of the elbow pipe fitting, the third conical pipe fitting and the through hole are convenient to be in one-to-one correspondence, the two gases can be conveniently and mutually impacted, the mixing can be effectively carried out, and through the circumferential arrangement of the elbow square pipe fitting, the situation of rotary intersection of the gases can be well caused, and the mixing uniformity of the gases is further improved;

2. the auxiliary heating assembly can well preheat the gas, and after entering the cavity installation cavity, the gas can be quickly heated, so that the temperature of the gas entering the bearing pipe is uniform, and the situation that the gas cannot be uniformly diffused is avoided;

in summary, the utility model can well ensure that the gases are blown and collide with each other, so that the gases are mixed uniformly, and the mixed gases in the L-shaped conveying bent pipe are heated rapidly in a preheating mode, so that the gases can be uniformly distributed after entering the bearing pipe, and the uniformity of sintering is ensured.

Drawings

FIG. 1 is a block diagram of a three-tube diffusion furnace with uniform sintering according to the present utility model;

FIG. 2 is a view showing the internal structure of a diffusion furnace pipe fitting of a three-pipe diffusion furnace with uniform sintering;

FIG. 3 is a diagram showing the internal structure of an L-shaped conveying bent pipe of a three-pipe diffusion furnace with uniform sintering;

FIG. 4 is a diagram of a first conical tube structure of a uniformly sintered three-tube diffusion furnace according to the present utility model;

in the figure: the furnace comprises a main furnace body 1, an auxiliary furnace body 2, a diffusion furnace pipe fitting 3, a 4L-shaped conveying bent pipe, a 5 return pipe, a 6 heating component, a 7 bearing pipe, a 8 first conical pipe, a 9 bent pipe fitting, a 10 second conical pipe fitting, a 11 sealing plate, a 12 elbow square pipe fitting, a 13 auxiliary heating component, a 14 through hole and a 15 third conical pipe fitting.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

Referring to fig. 1-4, a three-tube diffusion furnace with uniform sintering comprises a main furnace body 1, wherein three diffusion furnace pipe fittings 3 are installed in the main furnace body 1, an auxiliary furnace body 2 is installed on one side of the main furnace body 1, a sintering mechanism is installed in the diffusion furnace pipe fittings 3, and an L-shaped conveying bent pipe 4 is installed in the sintering mechanism, so that gas can be conveniently conveyed through the L-shaped conveying bent pipe 4.

Referring to fig. 2, the sintering mechanism includes the cavity of seting up in diffusion furnace pipe fitting 3, run through in the cavity and be equipped with carrier pipe 7, L type conveying return pipe 4 runs through the one end that sets up in carrier pipe 7, run through in the carrier pipe 7 and be equipped with back flow 5, install heating element 6 on the a week lateral wall in the cavity, can be fine heat the part and the gas in the carrier pipe 7 through heating element 6, conveniently realize sintering operation, the one end of L type conveying return pipe 4 is located the cavity simultaneously, the one end heating that conveniently is located the cavity through heating element 6 to L type conveying return pipe 4, can promote gaseous temperature fast.

Referring to fig. 1-4, a first conical tube 8 is installed at one end of the L-shaped conveying elbow 4, the first conical tube 8 is arranged in a conical table, one end of the first conical tube 8 is arranged in a penetrating manner, a second conical tube 10 and a plurality of elbow tubes 9 are arranged at the other end of the first conical tube 8 in a penetrating manner, the second conical tube 10 is located on the plurality of elbow tubes 9, a plurality of through holes 14 are formed in the second conical tube 10 at equal intervals, a third conical tube 15 is installed on the elbow tube 9, the plurality of third conical tube 15 respectively correspond to the plurality of through holes 14, a bearing part is conveyed into the corresponding bearing tube 7 through an auxiliary furnace body 2, at this time, gas is conveyed through one end of the L-shaped conveying elbow 4 and is rapidly discharged through the through holes 14, and is rapidly mixed through the elbow tubes 9 and the third conical tube 15, when moving, the corresponding gas discharged through the third conical tube 15 and the through holes 14 collides with each other, a swirl flow mode is formed through the plurality of elbow tube members 12, the mixed efficiency is further improved, the mixed flow is uniformly, the bearing tube is heated uniformly, and the temperature is uniformly distributed in the bearing tube 7 and the bearing tube is heated uniformly, and the bearing tube is heated uniformly after the bearing tube is heated by the bearing tube 7, and the bearing tube is heated uniformly and the bearing tube is heated by the bearing tube 7.

Referring to fig. 3, a sealing plate 11 is installed in the L-shaped conveying elbow 4, a plurality of elbow square pipe fittings 12 are installed on the sealing plate 11 at equal intervals, and the elbow square pipe fittings 12 are circularly arranged, so that the collision and dispersion of gas and the L-shaped conveying elbow 4 can be well realized, and the quality of gas mixing can be further improved.

Referring to fig. 2, the auxiliary heating unit 13 is fitted over the L-shaped delivery elbow 4, so that the auxiliary heating unit 13 on the L-shaped delivery elbow 4 can rapidly heat the gas flowing in the L-shaped delivery elbow 4.

In the utility model, when the device is used, the bearing parts are conveyed into the corresponding bearing pipes 7 through the auxiliary furnace body 2, at the moment, gas is conveyed through one end of the L-shaped conveying bent pipe 4, is rapidly discharged through the second conical pipe piece 10 and the through holes 14, and is discharged through the bent pipe piece 9 and the third conical pipe piece 15, and the gas discharged through the corresponding third conical pipe piece 15 and the through holes 14 collide with each other to be rapidly mixed, and when the device moves, the gas forms vortex flow through the plurality of elbow square pipe pieces 12, so that the mixing efficiency is further improved, and when the gas flows, the gas is heated through the auxiliary heating component 13, the bearing pipes 7 and the part of the L-shaped conveying bent pipe 4 in the cavity, so that the temperature is uniform after the gas enters the bearing pipes 7, the gas is uniformly dispersed, and the sintering uniformity is conveniently improved.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims

1. The utility model provides a three-tube diffusion furnace of sintering uniformity, includes main furnace body (1), its characterized in that: install three diffusion furnace pipe fitting (3) in main furnace body (1), install sintering mechanism in diffusion furnace pipe fitting (3), install L type in the sintering mechanism and carry return bend (4), first conical tube (8) are installed to the one end of L type and carry return bend (4), first conical tube (8) are the toper platform setting, the one end of first conical tube (8) link up the setting, it is equipped with second conical pipe fitting (10) and a plurality of return bend (9) to run through on the other end of first conical tube (8), second conical pipe fitting (10) are located a plurality of return bend (9), a plurality of through-holes (14) have been offered to equidistant on second conical pipe fitting (10), install third conical pipe fitting (15) on return bend (9), a plurality of third conical pipe fittings (15) are corresponding with a plurality of through-holes (14) respectively.

2. A uniformly sintered three tube diffusion furnace according to claim 1, wherein: the sealing plate (11) is arranged in the L-shaped conveying bent pipe (4), a plurality of elbow square pipe fittings (12) are arranged on the sealing plate (11) at equal intervals, and the elbow square pipe fittings (12) are circularly arranged.

3. A uniformly sintered three tube diffusion furnace according to claim 1, wherein: an auxiliary heating component (13) is sleeved on the L-shaped conveying bent pipe (4).

4. A uniformly sintered three tube diffusion furnace according to claim 1, wherein: the sintering mechanism comprises a cavity formed in the diffusion furnace pipe fitting (3), a bearing pipe (7) is arranged in the cavity in a penetrating mode, the L-shaped conveying bent pipe (4) is arranged at one end of the bearing pipe (7) in a penetrating mode, a return pipe (5) is arranged in the bearing pipe (7) in a penetrating mode, and a heating assembly (6) is arranged on the side wall of the periphery in the cavity.

5. A uniformly sintered three tube diffusion furnace according to claim 1, wherein: an auxiliary furnace body (2) is arranged on one side of the main furnace body (1).