CN212713848U - Air inlet assembly and diffusion device - Google Patents
Air inlet assembly and diffusion device Download PDFInfo
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- CN212713848U CN212713848U CN202020177251.8U CN202020177251U CN212713848U CN 212713848 U CN212713848 U CN 212713848U CN 202020177251 U CN202020177251 U CN 202020177251U CN 212713848 U CN212713848 U CN 212713848U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model relates to an air inlet assembly and diffusion equipment. The air intake assembly comprises at least two air intake devices, each air intake device comprising a delivery conduit and a regulating member. The head end of the conveying pipeline is positioned outside the furnace body and communicated with an air source, and the tail end of the conveying pipeline is positioned at a preset air supply position in the furnace body; the adjustment component is configured to be able to adjust a gas parameter of the gas within the delivery conduit directly or indirectly independently of an air intake device external to the air intake assembly. Wherein, there is interval between the terminal position of the pipeline of each air inlet unit. The utility model discloses an air inlet assembly includes two at least air inlet unit, and each air inlet unit is through the admission line independent each other to furnace body conveying gas, and each air inlet unit's admission line is different at the predetermined position of supplying gas in the furnace body for the gas of each position department in the furnace body is even, stable, makes the solar wafer that the production obtained have even square resistance.
Description
Technical Field
The utility model relates to a solar cell and manufacturing field especially relate to an air intake assembly and diffusion equipment.
Background
With the increasing consumption of conventional fossil energy such as global coal, oil, natural gas and the like, the ecological environment is continuously deteriorated, and particularly, the sustainable development of the human society is seriously threatened due to the increasingly severe global climate change caused by the emission of greenhouse gases. Various countries in the world make respective energy development strategies to deal with the limitation of conventional fossil energy resources and the environmental problems caused by development and utilization. Solar energy has become one of the most important renewable energy sources by virtue of the characteristics of reliability, safety, universality, long service life, environmental protection and resource sufficiency, and is expected to become a main pillar of global power supply in the future.
In a new energy revolution process, the photovoltaic industry in China has grown into a strategic emerging industry with international competitive advantages. However, the development of the photovoltaic industry still faces many problems and challenges, and the conversion efficiency and reliability are the biggest technical obstacles restricting the development of the photovoltaic industry, while the cost control and the scale-up are economically restricted.
In the production process of solar cell, diffusion is a very critical step. The PN junction of the core part of the power generation of the solar cell is formed in the diffusion process, and the square resistance of the diffused solar cell is an important index for measuring the diffusion effect, so that the uniformity of the square resistance on the surface of the whole solar cell is very important, and the uniformity directly influences the electrical property of the solar cell. In the diffusion step, the solar cell is usually placed in a diffusion furnace body, and then specific gas is introduced into the furnace body, and the conventional diffusion furnace body has two gas inlet modes: furnace mouth air intake and furnace tail air intake. The two air inlet modes can not ensure the uniform distribution of air in the tube, and the air flow in the tube can be unstable when the vacuum pump exhausts air at the other end, so that the uniformity of the resistance of the diffusion rear block is poor. In order to solve this problem, one method is to fill a large amount of the required gas into the furnace body, but such a solution causes a waste of the specific gas.
In addition, with the development of the industry, the size of the solar cell is larger and larger, and the number of the cells contained in the diffusion single tube is larger and larger, so that the size requirement on the diffusion furnace body is larger and larger, especially for the cells with the size of 210mm or more, the required pipe diameter and total length of the diffusion furnace body are increased greatly, and the uniformity of the gas in the furnace body in the diffusion process is difficult to control.
It is therefore desirable to provide an air inlet assembly and diffuser apparatus that at least partially address the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an air inlet assembly and diffusion equipment to a diffusion step in the manufacturing process for solar wafer. The utility model discloses an air inlet assembly includes two at least air inlet unit, and each air inlet unit carries specific gas to the furnace body through the admission line independent each other for each, and each air inlet unit's admission line is different at the predetermined position of supplying gas in the furnace body for specific gas can flow in the furnace body evenly, steadily, makes the solar wafer that the production obtained have even square resistance.
And each gas inlet device is provided with an independent adjusting component for adjusting specific gas parameters of the gas in the respective conveying pipeline, so that each gas inlet device can be independently adjusted according to needs in the manufacturing process, and the operation enables the process of conveying the gas into the furnace body to be more controllable, thereby optimizing the diffusion process.
According to an aspect of the utility model, a subassembly of admitting air for to holding in the diffusion step in the manufacturing process of solar wafer the furnace body transport of solar wafer waits to carry gas, the subassembly of admitting air includes two at least air inlet unit, each air inlet unit includes:
the head end of the conveying pipeline is positioned outside the furnace body and communicated with an air source, and the tail end of the conveying pipeline is positioned at a preset air supply position in the furnace body; and
an adjustment component mounted on the delivery conduit and configured to enable adjustment of a gas parameter of the gas within the delivery conduit, either directly or indirectly, independently of an air intake external to the air intake assembly,
wherein, there is interval between the terminal position of the pipeline of each said air inlet device.
In one embodiment, the gas inlet assembly is a gas inlet assembly adapted for the gas to be delivered comprising a phosphorus source of nitrogen, oxygen and normal nitrogen.
In one embodiment, each of the air intake devices further includes:
the phosphorus source bottle is internally provided with a phosphorus diffusion source;
a small nitrogen inlet pipe which extends into the phosphorus diffusion source from the outside and is used for conveying nitrogen into the phosphorus source bottle,
and the head end of the delivery pipe is communicated with the phosphorus source bottle for introducing phosphorus source nitrogen gas into the delivery pipe from the phosphorus source bottle.
In one embodiment, the conveying pipeline is communicated with a large nitrogen inlet pipe used for introducing ordinary nitrogen into the conveying pipeline from the outside and an oxygen inlet pipe used for introducing oxygen into the conveying pipeline from the outside.
In one embodiment, each of the intake devices further includes a sensing part configured to enable closed-loop control based on a sensing result of the sensing part, the sensing part including:
a small nitrogen intake flow meter mounted on the small nitrogen intake pipe;
and the phosphorus source nitrogen pressure gauge is arranged on the air supply pipeline and is positioned at the upstream of the large nitrogen air inlet pipe and the oxygen air inlet pipe.
In one embodiment, the adjustment member comprises:
the large nitrogen flow valve is arranged on the large nitrogen inlet pipe;
and the oxygen flow valve is installed on the oxygen inlet pipe.
In one embodiment, said regulating means comprise an integral flow valve mounted on said delivery conduit downstream of said nitrogen inlet conduit and said oxygen inlet conduit.
In one embodiment, the adjustment component comprises a plurality of sub-components, each of which is capable of independently adjusting its corresponding gas parameter relative to the other.
In one embodiment, the gas parameter comprises at least one of flow rate, pressure, temperature, and ratio of components of the gas.
In one embodiment, the furnace body is provided with an accommodating cavity, and the extension direction of the conveying pipeline is consistent with the length direction of the accommodating cavity.
In one embodiment, the predetermined air supply position corresponding to one of the at least two air inlet devices is at an end portion of the accommodating chamber in a longitudinal direction of the accommodating chamber, and the predetermined air supply position corresponding to another of the at least two air inlet devices is at a middle portion of the accommodating chamber in the longitudinal direction of the accommodating chamber.
In one embodiment, the predetermined air supply positions corresponding to the air inlet devices are arranged at equal intervals in the length direction of the accommodating cavity in the accommodating cavity.
In one embodiment, the delivery conduit is configured such that the predetermined delivery location is changeable.
In one embodiment, the delivery conduit is configured to be able to change the position of its distal end by adjusting its length.
In one embodiment, the delivery conduit comprises a plurality of sleeves telescopically connected in series, the delivery conduit being configured such that the length of the delivery conduit can be varied by adjusting the length of the intussusception between adjacent sleeves.
In one embodiment, the gas inlet assembly further comprises a thermal insulation device for keeping the phosphorus source bottles in a constant temperature environment, and the phosphorus source bottles of each gas inlet device are positioned in the same thermal insulation device or separately positioned in different thermal insulation devices.
According to the utility model discloses another aspect provides a diffusion equipment for the diffusion step in the manufacturing process of solar wafer, diffusion equipment includes:
the furnace body is provided with an accommodating cavity for accommodating the solar cell; and
the air intake assembly according to any one of the preceding aspects.
In one embodiment, the receiving cavity is a cylindrical cavity and has a radial dimension greater than 350mm and an axial dimension greater than 3000 mm.
In one embodiment, the diffusion device further comprises a heating tube located in the receiving chamber and disposed against a wall of the receiving chamber.
According to the utility model discloses, can optimize the diffusion step that is arranged in solar wafer's the manufacturing process. The utility model discloses an air inlet assembly includes two at least air inlet unit, and each air inlet unit carries specific gas to the furnace body through the admission line independent each other for each, and each air inlet unit's admission line is different at the predetermined position of supplying gas in the furnace body for the specific gas of each position department in the furnace body is even, stable, makes the solar wafer that production obtained have even square resistance. And each gas inlet device is provided with an independent adjusting component for adjusting specific gas parameters of the gas in the respective conveying pipeline, so that each gas inlet device can be independently adjusted according to the requirement in the manufacturing process, and the process of conveying the gas into the furnace body is more controllable and the diffusion process is optimized.
Drawings
For a better understanding of the above and other objects, features, advantages and functions of the present invention, reference should be made to the preferred embodiments illustrated in the accompanying drawings. Like reference numerals in the drawings refer to like parts. It will be appreciated by persons skilled in the art that the drawings are intended to illustrate preferred embodiments of the invention without any limiting effect on the scope of the invention, and that the various components in the drawings are not to scale.
Fig. 1 is a schematic view of a diffusion apparatus according to a preferred embodiment of the present invention.
Reference numerals:
Furnace body 1
Exhaust port 11
First air intake device 21
First phosphorus source bottle 211
First diffused phosphorus source 211a
First small nitrogen intake pipe 212
First large nitrogen intake pipe 214
First oxygen inlet line 215
First small nitrogen inlet flow meter 216
First phosphorus source nitrogen pressure gauge 217
First big nitrogen flow valve 218
First oxygen flow valve 219
Second air intake device 22
Second phosphorus source bottle 221
Second diffused phosphorus source 221a
Second small nitrogen inlet pipe 222
Second big nitrogen intake pipe 224
Second oxygen inlet pipe 225
Second small nitrogen intake flow meter 226
Second phosphorus Source Nitrogen pressure gauge 227
Second large nitrogen flow valve 228
Second oxygen flow valve 229
Detailed Description
Referring now to the drawings, specific embodiments of the present invention will be described in detail. What has been described herein is merely a preferred embodiment in accordance with the present invention, and those skilled in the art will appreciate that other ways of implementing the present invention on the basis of the preferred embodiment will also fall within the scope of the present invention.
The utility model provides an admit air subassembly and diffusion equipment for making solar wafer, this admit air subassembly and diffusion equipment are used for specifically accomplishing the diffusion on solar wafer's base member piece. The substrate of the solar cell is, for example, a silicon wafer, and after the air inlet assembly and the diffusion device provided by the present invention are used, for example, a PN junction can be formed on the surface of the silicon wafer. It should be noted that, the "solar cell" mentioned herein may be a solar cell in the manufacturing process, for example, it may be understood as a silicon wafer.
Fig. 1 shows a preferred embodiment of the diffusion device. Referring to fig. 1, the diffusion apparatus 100 includes a furnace body 1 and an air intake assembly 2. The furnace body 1 has a receiving chamber for receiving the silicon wafer 200, and the silicon wafer 200 can be placed in the quartz boat 300 and enter the furnace body 1 together with the quartz boat. The gas inlet means is used to supply a specific gas into the furnace body 1 in the diffusion step, and in the present embodiment, the specific gas includes a phosphorus source nitrogen gas, an oxygen gas, and a normal nitrogen gas, but in other embodiments not shown, a gas having other compositions may be supplied into the furnace body 1 using the gas inlet means according to process requirements. The furnace body 1 is also provided with an exhaust port 11 for pumping out the exhaust gas.
The air inlet assembly 2 comprises at least two air inlet means independent with respect to each other, in this embodiment the air inlet assembly 2 comprises a first air inlet means 21 and a second air inlet means 22, but in other embodiments not shown the air inlet assembly 2 may also comprise more air inlet means. Each air inlet device comprises a conveying pipeline and an adjusting part, wherein the head end of the conveying pipeline is positioned outside the furnace body 1 and communicated with an air source, and the conveying pipeline penetrates through the wall of the tail part of the furnace body 1, so that the tail end 213b of the conveying pipeline is positioned at a preset air supply position in the furnace body 1; the adjustment means is configured to be able to adjust a specific gas parameter of the gas within the conveying duct directly or indirectly independently of other gas inlet devices. The first air intake device 21 will be described below as an example.
Referring to fig. 1, the first air intake device 21 includes a first phosphorus source bottle 211, a first delivery pipe 213, a regulating member, and additional air intake pipes such as a first small nitrogen intake pipe 212, a first large nitrogen intake pipe 214, a first oxygen intake pipe 215, and the like. The first phosphorus source bottle 211 contains a liquid first diffusion phosphorus source 211a, and the first diffusion phosphorus source 211a is not filled in the first phosphorus source bottle 211, so that a gas containing part is arranged above the first diffusion phosphorus source 211a in the first phosphorus source bottle 211. The first small nitrogen inlet pipe 212 extends from the outside into the first diffusion phosphorus source 211a in the first phosphorus source bottle 211 and feeds nitrogen gas into the first diffusion phosphorus source 211, and the nitrogen gas carries phosphorus elements to the gas accommodating part in the first phosphorus source bottle 211 after passing through the liquid first diffusion phosphorus source 211a, so that it can be understood that the gas in the gas accommodating part is phosphorus source nitrogen gas. Meanwhile, the first feed pipe 213 has a head end 213a extending into the gas receiving portion of the first phosphorus source bottle 211 and a tail end 213b extending into a predetermined gas supply position in the furnace body 1. As can be seen from fig. 1, the distal end 213b of the first conveyance pipe 213 is located at an intermediate position in the longitudinal direction of the receiving chamber of the furnace body 1, which is a predetermined air supply position of the first air supply device 21.
The first large nitrogen intake pipe 214 and the first oxygen intake pipe 215 communicate with the first delivery pipe 213 for delivering normal nitrogen and oxygen thereto, and the first large nitrogen intake pipe 214 and the first oxygen intake pipe 215 are also located outside the furnace body 1. The nitrogen gas as the phosphorus source, the ordinary nitrogen gas and the oxygen gas are mixed in the first transfer pipe 213 and fed into the furnace body 1. The direction of gas flow within the first delivery conduit 213 is shown by the arrows in the figure, it being noted that the terms "upstream" and "downstream" as referred to herein refer to relative to the direction of gas flow within the conduit, for example, in the arrangement shown in figure 1, the first source bottle 211 is located upstream of the first large nitrogen inlet conduit 214 and the first large nitrogen inlet conduit 214 is located upstream of the first oxygen inlet conduit 215.
The adjusting means of the first gas inlet arrangement 21 are capable of adjusting, directly or indirectly, independently of the second gas inlet arrangement 22, specific gas parameters of the gas within the first conveying conduit 213, which may be, for example, gas composition ratios, gas flow rates, pressures, temperatures, etc.
For example, the regulating means may include a first big nitrogen flow valve 218 mounted on the first big nitrogen intake pipe 214 and a first oxygen flow valve 219 mounted on the first oxygen intake pipe 215, the first big nitrogen flow valve 218 and the first oxygen flow valve 219 being directly manipulable by a user to regulate the flow of ordinary nitrogen and oxygen. And/or, the first air intake device 21 may further include a sensing component for assisting the adjustment component, and some subcomponents of the adjustment component may be configured to perform closed-loop control based on the sensing result of the sensing component, for example, the sensing component may include a first small nitrogen intake flow meter 216 and a first phosphorus source nitrogen pressure gauge 217, the first small nitrogen intake flow meter 216 being mounted on the first small nitrogen intake pipe 212, and the first phosphorus source nitrogen pressure gauge 217 being mounted on the first air intake pipe and located upstream of the first large nitrogen intake pipe 214. Correspondingly, the regulating means may comprise a small nitrogen inlet flow control valve (not shown), the first small nitrogen flow meter being capable of providing closed loop feedback to the small nitrogen inlet flow valve; the regulation component also includes a phosphorus source nitrogen pressure valve (not shown) to which the first phosphorus source nitrogen pressure gauge 217 can provide closed loop feedback.
Preferably, a whole-flow valve may also be provided on the first delivery duct 213, which whole-flow valve should be arranged downstream of the first oxygen inlet pipe 215. The integral flow valve is used for adjusting the flow of the mixed gas of the phosphorus source nitrogen, the common nitrogen and the oxygen.
As can be seen from the above examples, the various sub-components of the regulating component may be independent with respect to each other to be able to be manipulated in a targeted manner to regulate their corresponding specific gas parameters. Such an arrangement may make the regulation of the gas fed into the furnace 1 more targeted, a certain gas parameter may be individually modified, while keeping the gas parameter independent of this certain gas parameter unchanged. For example, the flow of the mixed gas of the phosphorus source nitrogen, the normal nitrogen, and the oxygen may be adjusted by manipulating the integral flow control valve, but this operation does not affect the ratio of the components in the mixed gas.
Preferably, the position of the distal end 213b of the first conveying pipe 213 (i.e. the predetermined plenum position of the first conveying pipe 213) is changeable, for example by adjusting the length of the first conveying pipe 213. To provide the first delivery conduit 213 with an adjustable length, the first delivery conduit 213 may comprise a plurality of sleeves that are telescopically connected in turn, the first delivery conduit 213 being configured to enable the length of the delivery conduit to be varied by adjusting the length of the intussusception between adjacent sleeves. For example, if it is desired that the predetermined gas delivery location be located further towards the furnace mouth (i.e., away from the first phosphorus source bottle 211), the length of the intussusception between adjacent sleeves can be suitably reduced; if it is desired that the predetermined gas delivery location be further toward the furnace tail (i.e., toward the first phosphorus source bottle 211), the length of the intussusception between adjacent sleeves can be increased appropriately. Preferably, only the jacket at the tail of the first transfer duct 213 may be adjusted, and the portion of the first transfer duct 213 outside the furnace body 1 may be kept unchanged.
Turning now to the second air intake apparatus 22 of FIG. 1, the second air intake apparatus 22 includes a second phosphorus source bottle 221 containing a second diffused phosphorus source 221a, a second transfer pipe 223 (having a head end 223a and a tail end 223b), a second small nitrogen intake pipe 222, a second large nitrogen intake pipe 224, a second oxygen intake pipe 225, a second small nitrogen intake flow meter 226, a second phosphorus source nitrogen pressure gauge 227, a second large nitrogen flow valve 228, and a second oxygen flow valve 229. The second air intake device 22 is similar to the first air intake device 21, and the same or similar parts of the second air intake device 22 as the first air intake device 21 in use and configuration will not be described.
Unlike the first air inlet means 21, the tip 223b of the second conveying pipe 223 of the second air inlet means 22 extends to the mouth end of the accommodating chamber of the furnace body 1. That is, the predetermined air supply position of the second conveying pipe 223 is a position near the furnace opening. In this way, when the first gas inlet means 21 and the second gas inlet means 22 work together to supply gas into the furnace body 1, the gas from the first gas inlet means 21 is released at the middle position in the longitudinal direction of the furnace body 1, and the gas from the second gas inlet means 22 is released at the end position in the longitudinal direction of the furnace body 1. Compared with the scheme that only a single exhaust point is arranged in the furnace body, the arrangement can improve the uniformity of the gas in the furnace body 1, so that the silicon wafers 200 at different positions in the furnace body 1 can have uniform surface sheet resistance after the diffusion is completed.
Preferably, if the gas inlet assembly has three or more groups of gas inlet devices, the predetermined gas supply positions (i.e. the end positions of the conveying pipelines) corresponding to the gas inlet devices can be arranged at equal intervals along the length direction of the accommodating cavity in the furnace body. Such an arrangement can further promote the uniformity of the gas within the furnace body.
In order to maintain each source bottle at a constant temperature, the gas inlet assembly 2 is also typically provided with a thermal insulation. Wherein, the phosphorus source bottle of each air inlet device can be positioned in the same heat preservation device or can be separately positioned in different heat preservation devices.
On the other hand, the furnace body 1 of the diffusion apparatus 100 may also have various preferable configurations. For example, the accommodating chamber in the furnace body 1 may be a cylindrical cavity, and preferably, the extending direction of each conveying pipe may coincide with the length direction of the accommodating chamber of the furnace body 1. Meanwhile, a heating pipe 3 attached to the wall surface of the accommodating chamber may be provided in the accommodating chamber of the furnace body 1. Preferably, the furnace body 1 and the part of each conveying pipeline entering into the furnace body 1 can be made of high-temperature-resistant quartz materials.
It should be noted that the air intake assembly 2 provided in the present embodiment is particularly suitable for the furnace body 1 with a large volume for producing large-sized solar cells. In the present embodiment, the furnace body 1 may have a large volume, for example, the radial dimension of its housing cavity is larger than 350mm, and the axial dimension is larger than 3000 mm.
According to the utility model provides a scheme, the subassembly that admits air includes two at least air inlet unit, and each air inlet unit is through carrying specific gas to the furnace body for independent admission line each other, and the predetermined position of admitting air of each air inlet unit's admission line in the furnace body is different for the specific gas of each position department in the furnace body is even, stable, makes the solar wafer that production obtained have even square resistance. And gas waste can be avoided under the condition. And each gas inlet device is provided with an independent adjusting component for adjusting specific gas parameters of the gas in the respective conveying pipeline, so that each gas inlet device can be independently adjusted according to the requirement in the manufacturing process, and the process of conveying the gas into the furnace body is more controllable and the diffusion process is optimized. And, the utility model provides a scheme has better compatibility with the conventional equipment, makes things convenient for the concrete application in the practice.
The foregoing description of various embodiments of the invention is provided to one of ordinary skill in the relevant art for the purpose of illustration. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. As noted above, various alternatives and modifications of the present invention will be apparent to those skilled in the art of the above teachings. Thus, while some alternative embodiments are specifically described, other embodiments will be apparent to, or relatively easily developed by, those of ordinary skill in the art. The present invention is intended to embrace all such alternatives, modifications and variances of the present invention described herein, as well as other embodiments that fall within the spirit and scope of the present invention as described above.
Claims (18)
1. An air inlet assembly for delivering a specific gas to a furnace body containing solar cells in a diffusion step in a manufacturing process of the solar cells, characterized in that the air inlet assembly comprises at least two air inlet devices, each of the air inlet devices comprises:
the head end of the conveying pipeline is positioned outside the furnace body and communicated with an air source, and the tail end of the conveying pipeline is positioned at a preset air supply position in the furnace body; and
a regulating component mounted on the delivery conduit and configured to be capable of regulating a particular gas parameter of the gas within the delivery conduit, either directly or indirectly, independently of an air intake device external to the air intake assembly,
wherein, there is interval between the terminal position of the pipeline of each said air inlet device.
2. The intake assembly of claim 1, wherein each of the intake devices further comprises:
the phosphorus source bottle is internally provided with a phosphorus diffusion source;
a small nitrogen inlet pipe which extends into the phosphorus diffusion source from the outside and is used for conveying nitrogen into the phosphorus source bottle,
and the head end of the delivery pipe is communicated with the phosphorus source bottle for introducing phosphorus source nitrogen gas into the delivery pipe from the phosphorus source bottle.
3. The intake assembly of claim 2, wherein the delivery conduit is connected to a large nitrogen inlet conduit for introducing normal nitrogen gas from the outside into the delivery conduit and an oxygen inlet conduit for introducing oxygen gas from the outside into the delivery conduit.
4. The intake assembly of claim 3, wherein each of the intake devices further includes a sensing part configured to enable closed-loop control based on a sensing result of the sensing part, the sensing part including:
a small nitrogen intake flow meter mounted on the small nitrogen intake pipe;
and the phosphorus source nitrogen pressure gauge is arranged on the air supply pipeline and is positioned at the upstream of the large nitrogen air inlet pipe and the oxygen air inlet pipe.
5. The air intake assembly of claim 3, wherein the adjustment component comprises:
the large nitrogen flow valve is arranged on the large nitrogen inlet pipe;
and the oxygen flow valve is installed on the oxygen inlet pipe.
6. An air intake assembly according to claim 3, wherein the regulating means comprises an integral flow valve mounted on the delivery conduit downstream of the nitrogen inlet conduit and the oxygen inlet conduit.
7. The air intake assembly of claim 1, wherein the adjustment component includes a plurality of sub-components, each of which is capable of independently adjusting its corresponding specific gas parameter relative to one another.
8. The air intake assembly of claim 1, wherein the specific gas parameter includes at least one of a flow rate, a pressure, a temperature, and a ratio of components of the gas.
9. The air intake assembly of claim 1, wherein the furnace body is provided with a containing cavity, and the extension direction of the conveying pipeline is consistent with the length direction of the containing cavity.
10. The intake assembly of claim 9, wherein the predetermined air feed location for one of the at least two air inlet devices is at an end of the receiving cavity in a length direction of the receiving cavity, and the predetermined air feed location for another of the at least two air inlet devices is at a middle of the receiving cavity in the length direction of the receiving cavity.
11. The air intake assembly of claim 9, wherein the predetermined air delivery locations for each of the air intake devices are equally spaced along the length of the receiving cavity within the receiving cavity.
12. The air intake assembly of claim 1, wherein the delivery conduit is configured such that the predetermined delivery location is changeable.
13. The air intake assembly of claim 12, wherein the delivery conduit is configured to enable the position of its distal end to be varied by adjusting its length.
14. The air intake assembly of claim 13, wherein the delivery conduit comprises a plurality of nested connected sleeves, the delivery conduit configured to enable a length of the delivery conduit to be varied by adjusting a length of a nested portion between adjacent sleeves.
15. The intake assembly of claim 2, further comprising a thermal insulator for maintaining the phosphorous source bottles in a constant temperature environment, wherein the phosphorous source bottles of each of the intake assemblies are located in the same thermal insulator or separately located in different thermal insulators.
16. A diffusion apparatus for a diffusion step in a solar cell manufacturing process, the diffusion apparatus comprising:
the furnace body is provided with an accommodating cavity for accommodating the solar cell; and
an air inlet assembly according to any one of claims 1 to 15.
17. The diffusion device of claim 16, wherein the receiving chamber is a cylindrical cavity having a radial dimension greater than 350mm and an axial dimension greater than 3000 mm.
18. The diffusion apparatus of claim 16, further comprising a heating tube positioned within the receiving chamber and positioned against a wall of the receiving chamber.
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| CN202020177251.8U CN212713848U (en) | 2020-02-17 | 2020-02-17 | Air inlet assembly and diffusion device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111188093A (en) * | 2020-02-17 | 2020-05-22 | 通威太阳能(眉山)有限公司 | Air inlet assembly and diffusion device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111188093A (en) * | 2020-02-17 | 2020-05-22 | 通威太阳能(眉山)有限公司 | Air inlet assembly and diffusion device |
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