CN217709769U

CN217709769U - DCE air inlet structure for external ignition type diffusion furnace

Info

Publication number: CN217709769U
Application number: CN202222027635.3U
Authority: CN
Inventors: 周炳
Original assignee: ZHANGJIAGANG EVER POWER SEMICONDUCTOR CO Ltd
Current assignee: ZHANGJIAGANG EVER POWER SEMICONDUCTOR CO Ltd
Priority date: 2022-08-03
Filing date: 2022-08-03
Publication date: 2022-11-01
Anticipated expiration: 2032-08-03

Abstract

The utility model discloses a DCE inlet structure for external ignition form diffusion furnace, it includes: o is₂Source, N₂The ignition device comprises a source, a DCE source, a three-way pipe joint, an ignition gun and a furnace tube, wherein the three-way pipe joint comprises a first port, a second port and a third port which are mutually communicated, and the O is₂A first gas circuit is arranged between the source and the first port, a second gas circuit is arranged between the second port and one gas inlet of the ignition gun, a third gas circuit is arranged between the gas outlet of the DCE source and the third port, and N is₂A fourth gas path is arranged between the source and the other gas inlet of the ignition gun, and the output of the ignition gunEnd is connected with furnace tube, N₂Be provided with the fifth gas circuit between the air inlet in source and DCE source, be provided with first pneumatic valve on the first gas circuit, be provided with the second pneumatic valve on the fourth gas circuit, be provided with the third pneumatic valve on the fifth gas circuit, let the N of low discharge₂Firstly, entering a DCE source, replacing the DCE, and carrying out DCE and O₂The carbonization phenomenon is reduced by mixing in advance.

Description

DCE air inlet structure for external ignition type diffusion furnace

Technical Field

The utility model relates to a diffusion furnace equipment field especially relates to a DCE inlet structure that is used for outer ignition form diffusion furnace.

Background

In a semiconductor manufacturing line, a diffusion furnace is one of important process equipments. The diffusion furnace can diffuse the dopant material into the silicon wafer at high temperature, thereby changing and controlling the type, concentration and distribution of impurities in the semiconductor and establishing different electrical property regions.

Diffusion furnaces require O₂Mixed with DCE (dichloroethylene) for combustion, but since DCE often enters the furnace tubes at high temperature directly, it is not in time with O in the furnace tubes₂The fully mixed, carbonization easily takes place, causes the contamination of furnace tube, reduces the quality of semiconductor, and the furnace tube is difficult to clear up the maintenance after contaminating moreover, has increased the cost of production, needs to improve.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a DCE inlet structure for igniting form diffusion furnace outward realizes DCE and O₂Mixing in advance to reduce carbonization.

To achieve the purpose, the utility model adopts the following technical proposal:

a DCE gas inlet structure for an external firing version diffusion furnace comprising: o is₂Source, N₂The ignition device comprises a source, a DCE source, a three-way pipe joint, an ignition gun and a furnace tube, wherein the three-way pipe joint comprises a first port, a second port and a third port which are mutually communicated, and the O is₂A first gas circuit is arranged between the source and the first port, a second gas circuit is arranged between the second port and one gas inlet of the ignition gun, a third gas circuit is arranged between the gas outlet of the DCE source and the third port, and N is₂A fourth gas circuit is arranged between the source and the other gas inlet of the ignition gun, the output end of the ignition gun is connected with the furnace tube, and N is₂And a fifth air channel is arranged between the source and the air inlet of the DCE source, a first pneumatic valve is arranged on the first air channel, a second pneumatic valve is arranged on the fourth air channel, and a third pneumatic valve is arranged on the fifth air channel.

The device also comprises a DCE source temperature control box, wherein the DCE source is arranged in the DCE source temperature control box.

And a DCE bubbling device connected with a fifth gas circuit is arranged in the DCE source temperature control box.

The first gas path is provided with a first flowmeter, the fourth gas path is provided with a second flowmeter, and the fifth gas path is provided with a third flowmeter.

Wherein, be provided with first check valve on the first gas circuit.

And a second one-way valve is arranged on the fifth gas path.

The utility model has the advantages that: a DCE air inlet structure for an external ignition type diffusion furnace is characterized in that a fifth air path and a tee pipe joint are specially designed to enable small-flow N₂Firstly, the DCE enters a DCE source, the DCE is replaced, and the DCE are performed through a tee pipe joint₂The mixing is advanced, the mixing uniformity is improved, and the carbonization phenomenon is reduced after the mixture enters a high-temperature furnace tube.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Detailed Description

The technical solution of the present invention is further explained by the specific embodiment with reference to fig. 1.

A DCE gas inlet structure for an external firing version diffusion furnace comprising: o is₂Source 2, N₂The device comprises a source 1, a DCE source 16, a tee joint pipe joint 8, an ignition gun 9, a furnace tube 10 and a DCE source temperature control box 17, wherein the DCE source is arranged in the DCE source temperature control box 17 and used for temperature control.

The three-way pipe joint 8 comprises a first port, a second port and a third port which are communicated with each other, and the O is₂A first gas path 3 is arranged between the source 2 and the first port for introducing oxygen₂Sent to a tee joint 8. In this embodiment, the first flow meter 4 is provided in the first gas passage 3, and O is performed₂And (4) detecting the flow. The first air path 3 is provided with a first pneumatic valve 6 for adjusting O₂For example 5SLM, and a first one-way valve 7 is arranged on said first air passage 3 to avoid backflow problems.

Said N is₂A fifth gas path 12 is provided between the source 1 and the inlet of the DCE source 16 to let the flow of N be small₂Firstly, the DCE enters a DCE source and is replaced. A DCE bubbling device connected with the fifth gas circuit 12 is arranged in the DCE source temperature control box 17, and DCE source replacement is performed in a bubbling mode.

In this embodiment, the fifth gas path 12 is provided with a third flow meter 20 for performing a small flow N₂Flow rate detection of (1). A third pneumatic valve 14 is arranged on the fifth air path 12 for performing N₂For example, at 3SLM. A second one-way valve 15 is arranged on the fifth gas path 12 to avoid a small flow N₂And backflow is caused.

A third air channel 19 is arranged between the air outlet of the DCE source 16 and the third port, and the replaced DCE is sent to the three-way pipe joint 8 and is connected with the O port in advance₂Mixing, upgrading DCE and O₂The mixture is uniform, and the carbonization phenomenon is reduced after the mixture enters the high-temperature furnace tube 10. A second air path 18 is arranged between the second port and one air inlet of the ignition gun 9, and DCE and O after mixing are carried out₂Is fed into the ignition gun 9.

Said N is₂A fourth air path 11 is arranged between the source 1 and the other air inlet of the ignition gun 9, and the large-flow N is generated₂And is fed into the ignition gun 9. In this embodiment, the fourth gas path 11 is provided with a second flow meter 5 for performing a large flow rate N₂Flow rate detection of (1). A second air-operated valve 13 is arranged on the fourth air path 11 for N₂The flow rate is adjusted, for example, at 20 SLM.

The output end of the ignition gun 9 is connected with a furnace tube 10, DCE and O₂The mixture enters the high-temperature furnace tube after being mixed in advance, so that the combustion is more sufficient, the carbonization phenomenon is reduced, the contamination of the furnace tube 10 is delayed, and the use of the furnace tube 10 is prolonged.

The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.

Claims

1. A DCE inlet structure for external firing form diffusion furnace, its special characteristicsCharacterized by comprising the following steps: o is₂Source, N₂The ignition device comprises a source, a DCE source, a three-way pipe joint, an ignition gun and a furnace tube, wherein the three-way pipe joint comprises a first port, a second port and a third port which are mutually communicated, and the O is₂A first gas circuit is arranged between the source and the first port, a second gas circuit is arranged between the second port and one gas inlet of the ignition gun, a third gas circuit is arranged between the gas outlet of the DCE source and the third port, and N₂A fourth gas circuit is arranged between the source and the other gas inlet of the ignition gun, the output end of the ignition gun is connected with the furnace tube, and N is₂And a fifth air channel is arranged between the source and the air inlet of the DCE source, a first pneumatic valve is arranged on the first air channel, a second pneumatic valve is arranged on the fourth air channel, and a third pneumatic valve is arranged on the fifth air channel.

2. The DCE intake structure for an external-fire type diffusion furnace according to claim 1, further comprising a DCE source temperature control box in which the DCE source is disposed.

3. The DCE intake structure for an external ignition type diffusion furnace according to claim 1, wherein a DCE bubbling device connected to a fifth gas path is provided in the DCE source temperature control box.

4. The DCE air intake structure for an external firing type diffusion furnace as claimed in claim 1, wherein a first flow meter is provided on said first air path, a second flow meter is provided on said fourth air path, and a third flow meter is provided on said fifth air path.

5. The DCE intake structure for an external-ignition type diffusion furnace according to claim 1, wherein a first check valve is provided on the first air path.

6. The DCE air intake structure for an external-ignition type diffusion furnace according to claim 1, wherein a second check valve is provided on the fifth air passage.