CN218756030U

CN218756030U - PECVD with auxiliary heating device

Info

Publication number: CN218756030U
Application number: CN202222287706.3U
Authority: CN
Inventors: 刘帅; 周佑丞; 张春成; 肖洁; 柳懿峰
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2022-08-29
Filing date: 2022-08-29
Publication date: 2023-03-28
Anticipated expiration: 2032-08-29

Abstract

The utility model discloses a take auxiliary heating device's PECVD, including the furnace body, the furnace body includes the stove outer covering and sets up heat preservation, main heating element, the quartz capsule in the stove outer covering, and main heating element still includes auxiliary heating element around establishing at the quartz capsule outer wall, and auxiliary heating element includes two piece at least auxiliary heating boards, and auxiliary heating board arranges respectively in main heating element's top and below. The utility model has the advantages of better heating uniformity, higher temperature control precision, convenient installation and maintenance, more flexible arrangement of the heating plate, effective improvement of the coating uniformity and the like.

Description

PECVD with auxiliary heating device

Technical Field

The utility model relates to a photovoltaic cell piece production technical field refers in particular to a take auxiliary heating device's PECVD.

Background

The silicon chip is made into a battery piece through the working procedures of texturing, diffusion, etching, annealing, surface coating, passivation, silk-screen sintering and the like, and different process flows are not necessary. The surface coating is one of core procedures in the production process of the photovoltaic cell, the PECVD is equipment for the surface coating, and the PECVD equipment comprises three parts, namely a furnace body cabinet, a purification table and a source cabinet. The reaction chamber is positioned in the furnace body cabinet and is a place for carrying out film coating reaction, and the reaction is usually carried out at 400-600 ℃. The existing tubular PECVD furnace body is of a cylindrical structure, a heating wire surrounds the outer wall of a quartz tube, a coating reaction chamber is formed in the quartz tube, and the furnace body heats the reaction chamber by a cylindrical heating cavity; the graphite boat is positioned in the reaction chamber, and the outer boat blade of the graphite boat has a large heating area and can be easily heated by a furnace body because of the vertical insertion sheet structure of the graphite boat; the boat blade and the silicon wafer of the middle graphite boat are far away from the heating body, and the radiation area of the heating body received by the boat blade is small, so that the boat blade and the silicon wafer are difficult to be heated; the existing solution is to achieve uniform heating of the middle boat leaves by prolonging the constant temperature time, but the prolonged heating time greatly reduces the coating capacity of the equipment.

In order to reduce the process time and improve the coating uniformity, an auxiliary heating device is generally added in a reaction chamber in the prior art, and the upper part and the lower part of a graphite boat are independently heated in an auxiliary manner, so that the temperature uniformity of the graphite boat and a silicon wafer inside the graphite boat is better, the requirement of the process temperature is met, the process time can be shortened by the auxiliary heating device, and the productivity and the performance of equipment are improved. For example, 201920037274.6 discloses that a plurality of auxiliary heating devices and heating sleeves are installed in a reaction cavity inside a main heating furnace body, the main furnace body is assisted to heat in a temperature rising stage, and the heating time and the process time are shortened; 201920978650.1 discloses that a tungsten filament infrared auxiliary heating body is arranged between the inner part of a quartz tube of a reaction chamber and the bottom end of a graphite boat to generate infrared auxiliary heating, so that a silicon wafer is comprehensively heated, the process time is shortened, and the coating color difference is reduced; 202023146457.3 discloses the use of a resistive heating rod in combination with a quartz sleeve to achieve auxiliary heating in a PECVD reaction chamber, which simplifies the auxiliary heating device in the chamber and facilitates its application in PECVD.

However, the auxiliary heating device adopted by the existing equipment generally contains magnesium or tungsten and other metals, so that the coating process is easily polluted, the efficiency of the battery piece is reduced, and the battery piece is generally protected by a quartz sleeve; in the reaction chamber, the auxiliary heating and the quartz sleeve pipe for protecting the auxiliary heating occupy partial space in the quartz pipe, the in-and-out and taking and placing movement of the graphite boat are influenced, the boat loading device easily collides the auxiliary heating device when entering and exiting the graphite boat, and the auxiliary heating device and the quartz sleeve pipe are easily damaged; the heating rod and the adaptive sleeve can be damaged due to various reasons, the service life of the infrared heating rod is only 6-10 months generally, and the heating rod is heavy and easily damages the quartz sleeve when being heated above; the space in the reaction chamber is narrow, the graphite boat needs to be heated in a small space range in an auxiliary mode, the power of the auxiliary heating device with a large amplitude is usually adopted, the heating surface load of the auxiliary heating device is high, the service life of the auxiliary heating device is shortened, and the probability of damage of the auxiliary heating device is high.

Because of the coating deposition of the reaction chamber, the quartz sleeve generally needs to be cleaned and maintained regularly, and when the auxiliary heating device or the use sleeve thereof is damaged and needs to be replaced, the reaction chamber of the equipment needs to be cooled to the temperature which can be operated by people, so that the service time of the equipment is influenced to a great extent, the capacity of the equipment is reduced, and the maintenance cost of the equipment is increased; and frequent cooling also has great influence on the service life of quartz tubes, furnace bodies, sealing rings and other parts.

SUMMERY OF THE UTILITY MODEL

To the technical problem that prior art exists, the utility model provides a heating homogeneity is better, the temperature control precision is higher, the installation is maintained more conveniently, the hot plate is arranged more in a flexible way, can effectively improve the PECVD of taking auxiliary heating device of coating film homogeneity.

In order to solve the technical problem, the utility model discloses a following technical scheme:

the utility model provides a take auxiliary heating device's PECVD, includes the furnace body, the furnace body includes the stove outer covering and sets up heat preservation, main heating element, the quartz capsule in the stove outer covering, main heating element is around establishing the quartz capsule outer wall still includes auxiliary heating element, auxiliary heating element includes two auxiliary heating boards at least, auxiliary heating board arranges respectively in main heating element's top and below.

As a further improvement of the utility model: the auxiliary heating plate is used for controlling the auxiliary heating plates to output different powers.

As a further improvement of the utility model: the auxiliary heat power regulator comprises a first auxiliary heat power regulator and a second auxiliary heat power regulator, and the first auxiliary heat power regulator and the second auxiliary heat power regulator are respectively used for controlling the output power of the auxiliary heating plate above and the auxiliary heating plate below.

As a further improvement of the utility model: the auxiliary heating plate comprises a heating furnace wire and a fixing plate, and the fixing plate is used for fixing the heating furnace wire.

As a further improvement of the utility model: the fixed plate is provided with a first groove for fixing the heating furnace wire.

As a further improvement of the utility model: the first groove is a trapezoidal groove or a circular groove with an opening.

As a further improvement of the utility model: the heating furnace wires are arranged on the fixing plate in a spiral or serpentine manner.

As a further improvement of the utility model: and an insulator fixing groove is formed in the fixing plate and used for fixing the auxiliary heating plate outside an insulator string of the main heating assembly.

As a further improvement of the utility model: the main heating assembly comprises a plurality of groups of main heating furnace wires and a main heating power adjuster, and the main heating power adjuster is used for being connected with the plurality of groups of main heating furnace wires and controlling the plurality of groups of main heating furnace wires to heat.

As a further improvement of the utility model: the total length of the auxiliary heating plates is not less than that of the graphite boat.

Compared with the prior art, the utility model has the advantages of:

the utility model discloses a take PECVD of auxiliary heating device, the auxiliary heating board of this auxiliary heating subassembly is integrated in the furnace body, sets up polylith auxiliary heating board in the periphery of the main heating subassembly of furnace body, and the auxiliary heating board embeds multiunit auxiliary heating silk and carries out the auxiliary heating to the graphite boat in the furnace body; the auxiliary heating plate is made of the same material as the heating wire of the main heating component of the furnace body, has the same service life as the furnace body, is not in a reaction chamber and is free of maintenance during use; because the auxiliary heating assembly is positioned outside the reaction chamber, the reaction chamber is not polluted due to the damage of the quartz sleeve like an auxiliary heating device in the reaction chamber, the shutdown maintenance caused by the damage of the auxiliary heating device is avoided, and the productivity of the equipment can be effectively improved; the auxiliary heating device is positioned outside the reaction chamber, does not occupy the space in the reaction chamber, and is convenient for the graphite boat to enter and exit the reaction chamber; the auxiliary heating plate is positioned outside the furnace wire, a plurality of groups of auxiliary heating wires are adopted for auxiliary heating, the heating plates are positioned above and below the graphite boat, and a plate type heating mode is adopted, so that the heating is more uniform compared with a heating rod structure; this auxiliary heating board can carry out multistage auxiliary heating to the graphite boat respectively for polylith hot plate according to the demand design of graphite boat heating, more is favorable to the temperature control precision of graphite boat, effectively improves PECVD coating film homogeneity.

Drawings

FIG. 1 is a schematic structural diagram of the first embodiment of the present invention

Fig. 2 is a schematic structural diagram of a plurality of auxiliary heating plates according to a first embodiment of the present invention.

Fig. 3 is a schematic structural diagram of an auxiliary heating plate according to a first embodiment of the present invention.

Fig. 4 isbase:Sub>A cross-sectional view atbase:Sub>A-base:Sub>A of fig. 3.

Illustration of the drawings:

1. a furnace shell; 2. a heat-insulating layer; 3. a primary heating assembly; 4. a quartz tube; 5. an auxiliary heating assembly; 51. an auxiliary heating plate; 511. heating furnace wires; 512. a fixing plate; 6. an auxiliary heat power regulator; 61. a first auxiliary heat power regulator; 62. a second auxiliary heat power regulator; 7. a first groove; 8. insulator fixing slots; 9. a main heating power regulator; 10. graphite boat.

Detailed Description

The invention will be further described with reference to the drawings and specific preferred embodiments without limiting the scope of the invention.

In the description of the present invention, it is to be understood that the terms "lateral," "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the indicated orientations and positional relationships, based on the orientation or positional relationship shown in the drawings, and are intended merely to facilitate the description and to simplify the description, rather than to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to imply that the indicated technical features are in number, whereby features defined as "first" and "second" may or may not include one or more of those features either explicitly or implicitly, in the description of the invention "plurality" means two or more than two unless explicitly and explicitly limited otherwise.

The invention will be described in further detail with reference to the drawings and specific examples.

As shown in fig. 1 to fig. 4, the embodiment discloses a PECVD with an auxiliary heating device, which comprises a furnace body, wherein the furnace body comprises a furnace shell 1, a heat insulating layer 2 arranged in the furnace shell 1, a main heating assembly 3, a quartz tube 4, the main heating assembly 3 wound on the outer wall of the quartz tube 4, and an auxiliary heating assembly 5, the auxiliary heating assembly 5 comprises at least two auxiliary heating plates 51, and the auxiliary heating plates 51 are respectively arranged above and below the main heating assembly 3.

In the PECVD with the auxiliary heating device in this embodiment, the auxiliary heating plate 51 of the auxiliary heating assembly 5 is integrated in the furnace body, a plurality of auxiliary heating plates 51 are arranged at the periphery of the heating wire of the main heating assembly 3 of the furnace body, and a plurality of groups of heating furnace wires 511 are embedded in the auxiliary heating plates 51 to perform auxiliary heating on the graphite boat 10 in the furnace body; the auxiliary heating plate 51 is made of the same material as the heating wire of the main heating component 3 of the furnace body, has the same service life as the furnace body, is not in a reaction chamber and is free from maintenance during use; because the auxiliary heating assembly 5 is positioned outside the reaction chamber, the reaction chamber is not polluted due to the damage of the quartz sleeve like an auxiliary heating device in the reaction chamber, the shutdown maintenance caused by the damage of the auxiliary heating device is avoided, and the productivity of the equipment can be effectively improved; the auxiliary heating device is positioned outside the reaction chamber, does not occupy the space in the reaction chamber, and is convenient for the graphite boat 10 to enter and exit the reaction chamber; the auxiliary heating plate 51 is positioned outside the furnace wires, a plurality of groups of auxiliary heating wires are adopted for auxiliary heating, the auxiliary heating plate 51 is positioned above and below the graphite boat 10, and a plate-type heating mode is adopted, so that the heating is more uniform compared with a heating rod structure; this auxiliary heating board 51 can be designed into the polylith hot plate according to the demand that graphite boat 10 heated, can carry out multistage auxiliary heating to the graphite boat respectively, more does benefit to the temperature control precision of graphite boat 10, effectively improves PECVD coating film homogeneity.

In this embodiment, the auxiliary heating device 6 is further included, and the auxiliary heating device 6 is used for controlling the plurality of auxiliary heating plates 51 to output different powers. Further, in the preferred embodiment, the auxiliary heat and power regulator 6 includes a first auxiliary heat and power regulator 61 and a second auxiliary heat and power regulator 62, and the first auxiliary heat and power regulator 61 and the second auxiliary heat and power regulator 62 are respectively used for controlling the power output by the upper auxiliary heating plate 51 and the lower auxiliary heating plate 51.

In this embodiment, still include main heating element 3, including multiunit main heating stove silk, still include main heating power regulator 9, main heating power regulator 9 is used for linking to each other with multiunit main heating stove silk for control multistage main heating stove silk heats.

In this embodiment, the heating device comprises a main heating power regulator 9, a plurality of groups of main heating furnace wires and a plurality of auxiliary heating plates 51; the main heating power regulator 9 is connected with the multi-section main heating furnace wires and is used for controlling the multi-section main heating furnace wires to heat, and the main heating adopts cascade double-loop constant temperature control; the main heating furnace wire is used for carrying out constant temperature heating on the heating system; the first auxiliary heat power regulator 61 controls the plurality of upper auxiliary heating plates 51 to perform constant power heating, and the output power of each upper auxiliary heating plate 51 is respectively regulated according to the process requirements, so that the temperature uniformity of each groove above the graphite boat 10 is improved; the second auxiliary heat power regulator 62 controls the output power of the plurality of auxiliary heating plates 51 below, so as to improve the temperature uniformity of each groove below the graphite boat 10; the length and number of the auxiliary heating plates 51 are generally divided into 3 segments of auxiliary heating plates 51 or more auxiliary heating plates 51 according to the temperature of the graphite boat 10 required to be adjusted by the design and process of the graphite boat 10, and the total length of the auxiliary heating plates 51 should be longer than the total length of the graphite boat 10 to ensure that both ends of the graphite boat 10 can be heated uniformly.

In this embodiment, the auxiliary heating plate 51 includes a heating furnace wire 511 and a fixing plate 512, the fixing plate 512 is used for fixing the heating furnace wire 511, and the fixing plate 512 is provided with a first groove 7 for fixing the heating furnace wire 511.

In this embodiment, the first groove 7 is a trapezoidal groove, and the use of the trapezoidal groove with a narrow opening can ensure that the heating furnace wire 511 is reliably and stably arranged in the first groove 7 and is not easy to fall off from the trapezoidal groove. In other embodiments, the first groove 7 may also be a circular groove with an opening or other shapes, which can satisfy the requirement of stable and reliable fixing of the heating furnace wire 511.

In this embodiment, the fixing plate 512 is provided with an insulator fixing groove 8 for fixing the auxiliary heating plate 51 outside the insulator string of the main heating assembly 3. Further, in the preferred embodiment, a plurality of auxiliary heating plates 51 are respectively disposed on the periphery of the main heating unit 3 to form an upper auxiliary heating plate 51 and a lower auxiliary heating plate 51 for auxiliary heating of the graphite boat 10 in the reaction chamber. The auxiliary heating plate 51 comprises auxiliary heating furnace wires 511, the auxiliary heating furnace wires 511 are arranged in a spiral structure, the auxiliary heating furnace wires 511 are embedded into a trapezoidal groove of a fixed heating wire of an insulating and heat-insulating material plate (such as a ceramic fiber plate), and the auxiliary heating plate 51 is designed into a groove structure of an insulator fixing groove 8, so that the auxiliary heating plate 51 is conveniently fixed outside an insulator string of the main heating furnace wires.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, a plurality of modifications and decorations without departing from the principle of the present invention should be considered as the protection scope of the present invention.

Claims

1. The utility model provides a take auxiliary heating device's PECVD, includes the furnace body, the furnace body includes stove outer covering (1) and sets up heat preservation (2), main heating element (3), quartz capsule (4) in stove outer covering (1), its characterized in that, main heating element (3) are around establishing quartz capsule (4) outer wall still includes auxiliary heating element (5), auxiliary heating element (5) include two piece at least auxiliary heating boards (51), auxiliary heating board (51) are arranged respectively in the top and the below of main heating element (3).

2. PECVD with auxiliary heating device according to claim 1, further comprising an auxiliary heat regulator (6), wherein the auxiliary heat regulator (6) is used to control a plurality of auxiliary heating plates (51) to output different powers.

3. PECVD with auxiliary heating device according to claim 2, characterized in that the auxiliary thermal power regulator (6) comprises a first auxiliary thermal power regulator (61) and a second auxiliary thermal power regulator (62), the first auxiliary thermal power regulator (61) and the second auxiliary thermal power regulator (62) being respectively used to control the power output by the upper auxiliary heating plate (51) and the lower auxiliary heating plate (51).

4. PECVD with auxiliary heating according to claim 2, characterized in that the auxiliary heating plate (51) comprises a heating filament (511) and a fixing plate (512), the fixing plate (512) being used for fixing the heating filament (511).

5. PECVD with auxiliary heating device according to claim 4, wherein the fixing plate (512) is provided with a first groove (7) for fixing the heating furnace wire (511).

6. PECVD with auxiliary heating according to claim 5, characterized in that the first recess (7) is a trapezoidal or circular recess with an opening.

7. PECVD with auxiliary heating according to claim 4, characterised in that the heating wires (511) are arranged spirally or in a serpentine on the fixing plate (512).

8. PECVD with auxiliary heating device according to claim 4, in which insulator fixing slots (8) are opened on the fixing plate (512) for fixing the auxiliary heating plate (51) outside the insulator string of the main heating assembly (3).

9. PECVD with auxiliary heating device according to any of the claims 1 to 8, characterized in that the main heating assembly (3) comprises a plurality of groups of main heating furnace wires and a main heating power regulator (9), wherein the main heating power regulator (9) is connected with the plurality of groups of main heating furnace wires and is used for controlling the plurality of groups of main heating furnace wires to heat.

10. PECVD with auxiliary heating device in accordance with one of the claims 1 to 8, characterized in that the total length of the plurality of auxiliary heating plates (51) is not less than the total length of the graphite boat (10).