CN218320778U - Vibration-assisted machining nanometer micro-positioning platform - Google Patents
Vibration-assisted machining nanometer micro-positioning platform Download PDFInfo
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- CN218320778U CN218320778U CN202222775241.6U CN202222775241U CN218320778U CN 218320778 U CN218320778 U CN 218320778U CN 202222775241 U CN202222775241 U CN 202222775241U CN 218320778 U CN218320778 U CN 218320778U
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Abstract
The utility model relates to a vibration is little location platform with nanometer for supplementary processing, including the platform body, xy platform mounting groove has been seted up on the platform body, install xy platform in the xy platform mounting groove, the left and right sides of xy platform articulates there is x to two combined type parallel translation pairs and both sides articulate around and have y to two compound parallel translation pairs, x is to two combined type parallel translation pairs, y is to two compound parallel translation pairs all articulated through the shaft type flexible hinge of parallel have Scott-Russell mechanism of amplification, scott-Russell mechanism of amplification is connected with second grade lever mechanism of amplification, second grade lever structure of amplification one side is equipped with the piezoceramics driver. The utility model discloses enlarge the working stroke of platform and the coupling error of elimination system under satisfying the working stroke condition, the platform enlarges working stroke through tertiary displacement mechanism of amplification, utilizes the vice decoupling zero mechanism that constitutes of parallel shaft type flexible hinge and two combined type parallel translation, has eliminated the kinematic coupling error.
Description
Technical Field
The utility model relates to a vibrating device feeder's field especially relates to a vibration is little location platform of nanometer for supplementary processing.
Background
For the vibration-assisted processing device, the motion precision, the static and dynamic performance, the decoupling capacity, the processing range and other factors are comprehensively considered, and the scheme based on the nanometer positioning platform is more suitable for the design and the realization of the non-resonant ultrasonic elliptical vibration-assisted processing system. The scheme based on the nanometer micro-positioning platform is more suitable for the design and realization of a probe nanometer processing system, and the micro-positioning platform can realize a position-controllable core mechanism under the condition of micron-scale or even nanometer-scale precision. The motion resolution and the working space of the platform determine the system processing resolution and range, so that a large-stroke, high-precision and miniaturized nanometer micro-positioning platform is designed, the integration and integration of the system are improved, the system processing range is enlarged on the basis, and the problem which needs to be solved by the existing micro-positioning platform is solved urgently.
Disclosure of Invention
The utility model provides a vibration is little location platform for auxiliary processing nanometer enlarges the working stroke of platform and the coupling error of elimination system under satisfying the working stroke condition, and the platform enlarges the working stroke through tertiary displacement mechanism of amplification, utilizes the vice decoupling zero mechanism that constitutes of parallel shaft type flexible hinge and two combined type parallel translation, has eliminated the kinematic coupling error.
The utility model discloses a realize above-mentioned purpose, adopt following technical scheme:
the utility model provides a vibration is little location platform of nanometer for auxiliary processing, which comprises a platform body, the xy platform mounting groove has been seted up on the platform body, install the xy platform in the xy platform mounting groove, the left and right sides of xy platform articulates there is the pair of double-compound type parallel translation of x and both sides are articulated to have the pair of double-compound type parallel translation of y around, the pair of double-compound type parallel translation of x, the pair of double-compound type parallel translation of y all articulates through the flexible hinge of parallel shaft type has Scott-Russell (Scott-Lassel) mechanism of amplification, scott-Russell mechanism of amplification is connected with second grade lever mechanism of amplification, second grade lever amplification structure one side is equipped with the piezoceramics driver.
The upper left corner, the lower right corner of platform body are equipped with piezoceramics driver mounting groove, and the piezoceramics driver is installed in corresponding piezoceramics driver mounting groove, and the output of piezoceramics driver is contradicted on second grade lever amplification mechanism.
Correspond on the platform body and set up the second grade lever structure mounting groove with piezoceramics driver mounting groove intercommunication, second grade lever amplification mechanism includes parallel arrangement's first pole and the second pole of amplifying, and first pole, the second pole of amplifying all articulates on second grade lever structure mounting groove inner wall, and it has the flexible hinge of straight circle to articulate between first pole, the second pole of amplifying, and piezoceramics driver's output is contradicted on first pole of amplifying.
The platform body is correspondingly provided with a Scott-Russell amplifying mechanism mounting groove communicated with the secondary lever structure mounting groove, the Scott-Russell amplifying mechanism comprises a driving rod and an output rod, one end of the driving rod is hinged to the inner wall of the Scott-Russell amplifying mechanism mounting groove, the driving rod is hinged to the middle position of the output rod, one end of the output rod is hinged to the second amplifying rod, and the other end of the output rod is hinged to the parallel shaft type flexible hinge.
The x-direction double-compound type parallel moving pair comprises two first moving plates, two first connecting rods are hinged between the two first moving plates and the side wall of the xy platform, the first moving plates are hinged with corresponding second amplifying rods through parallel shaft type flexible hinges, and mounting grooves are formed in the platform body corresponding to the first moving plates and the first connecting rods.
The y-direction double-compound parallel moving pair comprises two second moving plates, two second connecting rods are hinged between the two second moving plates and the side wall of the xy platform, the second moving plates are hinged with corresponding second amplifying rods through parallel shaft type flexible hinges, and mounting grooves are formed in the platform body corresponding to the second moving plates and the second connecting rods.
The platform body is provided with a plurality of connecting holes.
The utility model has the advantages that: the utility model discloses enlarge the working stroke of platform and the coupling error of elimination system under satisfying the working stroke condition, the platform enlarges the working stroke through tertiary displacement mechanism of amplification, utilizes the vice decoupling zero mechanism that constitutes of parallel shaft type flexible hinge and two combined type parallel translation, has eliminated the kinematic coupling error.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a perspective view of the present invention without the piezoelectric ceramic actuator;
FIG. 3 is a schematic structural view of a parallel axis flexible hinge;
FIG. 4 is a schematic view of a straight circular flexible hinge;
FIG. 5 is a schematic diagram of a two-stage lever amplification mechanism, scott-Russell amplification mechanism;
in the figure: 1-a platform body; 2-xy platform mounting groove; a 3-xy platform; 4-x direction double compound parallel moving pair; 5-y-direction double-compound parallel moving pair; 6-parallel axis flexible hinges; 7-Scott-Russell amplifying mechanism; 8-a two-stage lever amplification mechanism; 9-piezoelectric ceramic actuator; 10-a piezoelectric ceramic driver mounting groove; 11-a secondary lever structure mounting groove; 12-Scott-Russell amplifying mechanism mounting groove; 13-connecting holes;
41-a first moving plate; 42-a first link;
51-a second moving plate; 52-a second link;
71-a drive rod; 72-an output rod;
81-first enlargement bar; 82-a second amplification bar; 83-right circular flexible hinge;
the following detailed description will be made with reference to the accompanying drawings in conjunction with embodiments of the present invention.
Detailed Description
The invention will be further explained with reference to the following figures and examples:
a nanometer micro-positioning platform for vibration-assisted machining is shown in figures 1 to 4 and comprises a platform body 1, wherein an xy platform mounting groove 2 is formed in the platform body 1, an xy platform 3 is mounted in the xy platform mounting groove 2, the left side and the right side of the xy platform 3 are hinged with an x-direction double-compound parallel moving pair 4, the front side and the rear side of the xy platform 3 are hinged with a y-direction double-compound parallel moving pair 5, the x-direction double-compound parallel moving pair 4 and the y-direction double-compound parallel moving pair 5 are both hinged with a Scott-Russell amplification mechanism 7 through parallel shaft type flexible hinges 6, the Scott-Russell amplification mechanism 7 is connected with a secondary lever amplification mechanism 8, and one side of the secondary lever amplification mechanism 8 is provided with a piezoelectric ceramic driver 9.
The upper left corner, the lower right corner of platform body 1 are equipped with piezoceramics driver mounting groove 10, and piezoceramics driver 9 is installed in corresponding piezoceramics driver mounting groove 10, and the output of piezoceramics driver 9 is contradicted on second grade lever amplification mechanism 8.
Correspond on the platform body 1 and offer the second grade lever structure mounting groove 11 with piezoceramics driver mounting groove 10 intercommunication, second grade lever amplification mechanism 8 is including parallel arrangement's first pole 81 and the second pole 82 of amplifying, first pole 81 of amplifying, the second pole 82 of amplifying all articulates on 11 inner walls of second grade lever structure mounting groove, first pole 81 of amplifying, the second is amplified and is articulated between the pole 82 to have the flexible hinge 83 of straight circle, the output of piezoceramics driver 9 is contradicted on first pole 81 of amplifying.
The platform body 1 is correspondingly provided with a Scott-Russell amplifying mechanism mounting groove 12 communicated with the secondary lever structure mounting groove 11, the Scott-Russell amplifying mechanism 7 comprises a driving rod 71 and an output rod 72, one end of the driving rod 71 is hinged to the inner wall of the Scott-Russell amplifying mechanism mounting groove 12, the driving rod 71 is hinged to the middle of the output rod 72, one end of the output rod 72 is hinged to the second amplifying rod 82, and the other end of the output rod 72 is hinged to the parallel shaft type flexible hinge 6.
The x-direction double-compound parallel moving pair 4 comprises two first moving plates 41, two first connecting rods 42 are hinged between the two first moving plates 41 and the side wall of the xy platform 3, the first moving plates 41 are hinged with corresponding second amplification rods 82 through parallel shaft type flexible hinges 6, and mounting grooves are formed in the platform body 1 corresponding to the first moving plates 41 and the first connecting rods 42.
The y-direction double-compound parallel moving pair 5 comprises two second moving plates 51, two second connecting rods 52 are hinged between the two second moving plates 51 and the side wall of the xy platform 3, the second moving plates 51 are hinged with the corresponding second amplification rods 82 through parallel shaft type flexible hinges 6, and mounting grooves are formed in the platform body 1 corresponding to the second moving plates 51 and the second connecting rods 52.
The platform body 1 is provided with a plurality of connecting holes 13.
The utility model requires the xy platform 3 to have two degrees of freedom during design, and in order to improve the processing range of the system, the motion stroke of the xy platform 3 in the x/y direction is more than 150 μm; in order to ensure the processing precision, the resolution of the xy platform 3 in the x/y direction is better than 5nm; on the design of a displacement amplification mechanism, firstly, a mechanism motion diagram is constructed through a rigid member design method, the accuracy of motion transmission of a rigid mechanism is ensured, and then a proper flexible hinge is selected to replace the rigid member, so that the design of the flexible amplification mechanism is completed, and as the amplification factor of the single-stage motion amplification mechanism is limited and mainly depends on the size of the single-stage motion amplification mechanism, the compactness of a platform is lost due to a larger size, and a certain amplification factor is lost due to the deformation of materials, the reasonable layout is usually adopted, the multi-stage amplification mechanisms are used in series, so that the compactness of the platform is ensured and a higher stroke is obtained; in the design of a decoupling mechanism, the key point of the xy platform 3 design lies in the design of a flexible hinge, the mutual decoupling in the x direction and the y direction is considered, and good static and dynamic characteristics are ensured at the same time, so that the flexible hinge is used in parallel, the coupling error in the non-motion direction can be effectively eliminated, and the consistency of the rigidity and the dynamic performance of the platform in different directions can be better ensured.
When the utility model works, the piezoelectric ceramic driver 9 gives an initial displacement and an initial input force, and the piezoelectric ceramic driver 9 applies a load to the secondary lever amplifying structure 8; the secondary lever amplification structure 8 realizes secondary amplification effect on micro displacement through the amplification effect of the lever, and the Scott-Russell amplification mechanism 7 realizes third-stage amplification on micro displacement and change of displacement direction, and the principle is shown in figure 5; the x-direction double-compound parallel moving pair 4 and the y-direction double-compound parallel moving pair 5 form a decoupling mechanism, so that the kinematic coupling error is eliminated, and the xy platform 3 has good decoupling capability in an x/y plane so as to avoid influence on the processing quality due to the coupling problem in the processing process and play a role in outputting displacement and guiding; the xy platform 3 is mainly used for a moving device of the micro positioning platform, because the xy platform 3 belongs to a load in a three-stage amplification mechanism, in order to reduce energy loss, a symmetrical structure is adopted in the x and y directions; the parallel shaft type flexible hinge 6 mainly adopts a parallel structure, has higher rotation precision and small stress concentration, is mainly used for effectively eliminating coupling errors in a non-motion direction and better ensures the consistency of the rigidity and the dynamic performance of the platform in different directions.
The present invention has been described above with reference to the accompanying drawings, and it is obvious that the present invention is not limited to the above embodiments, and all the modifications made by the method and the technical solution of the present invention or directly applied to other occasions without modification are within the protection scope of the present invention.
Claims (7)
1. The utility model provides a vibration is little location platform for supplementary processing of nanometer, a serial communication port, including platform body (1), xy platform mounting groove (2) have been seted up on platform body (1), install xy platform (3) in xy platform mounting groove (2), the left and right sides of xy platform (3) are articulated to have x to two combined type parallel translation pair (4) and around both sides articulated have y to two compound parallel translation pair (5), x is to two combined type parallel translation pair (4), y all articulates to two compound parallel translation pair (5) through the flexible hinge of parallel shaft type (6) has Scott-Russell mechanism of amplification (7), scott-Russell mechanism of amplification (7) are connected with second grade lever mechanism of amplification (8), second grade lever mechanism of amplification (8) one side is equipped with piezoceramics driver (9).
2. The nano-micro positioning platform for vibration-assisted machining according to claim 1, characterized in that piezoelectric ceramic driver mounting grooves (10) are formed in the upper left corner and the lower right corner of the platform body (1), the piezoelectric ceramic drivers (9) are mounted in the corresponding piezoelectric ceramic driver mounting grooves (10), and the output ends of the piezoelectric ceramic drivers (9) abut against the secondary lever amplification mechanism (8).
3. The nano micro positioning platform for vibration-assisted machining according to claim 2, wherein a secondary lever structure mounting groove (11) communicated with the piezoelectric ceramic driver mounting groove (10) is correspondingly formed in the platform body (1), the secondary lever amplification mechanism (8) comprises a first amplification rod (81) and a second amplification rod (82) which are arranged in parallel, the first amplification rod (81) and the second amplification rod (82) are hinged to the inner wall of the secondary lever structure mounting groove (11), a straight round flexible hinge (83) is hinged between the first amplification rod (81) and the second amplification rod (82), and the output end of the piezoelectric ceramic driver (9) abuts against the first amplification rod (81).
4. The nano micro positioning platform for vibration-assisted machining according to claim 3, wherein the platform body (1) is correspondingly provided with a Scott-Russell amplification mechanism installation groove (12) communicated with the secondary lever structure installation groove (11), the Scott-Russell amplification mechanism (7) comprises a driving rod (71) and an output rod (72), one end of the driving rod (71) is hinged to the inner wall of the Scott-Russell amplification mechanism installation groove (12), the driving rod (71) is hinged to the middle position of the output rod (72), one end of the output rod (72) is hinged to the second amplification rod (82), and the other end of the output rod (72) is hinged to the parallel shaft type flexible hinge (6).
5. The nano micro positioning platform for vibration-assisted machining according to claim 4, wherein the x-direction double-compound parallel moving pair (4) comprises two first moving plates (41), two first connecting rods (42) are hinged between the two first moving plates (41) and the side wall of the xy platform (3), the first moving plates (41) are hinged with corresponding second amplifying rods (82) through parallel shaft type flexible hinges (6), and mounting grooves are formed in the platform body (1) corresponding to the first moving plates (41) and the first connecting rods (42).
6. The nano micro positioning platform for vibration-assisted machining according to claim 5, wherein the y-direction double-compound parallel moving pair (5) comprises two second moving plates (51), two second connecting rods (52) are hinged between the two second moving plates (51) and the side wall of the xy platform (3), the second moving plates (51) are hinged with the corresponding second amplification rods (82) through parallel shaft type flexible hinges (6), and mounting grooves are formed in the platform body (1) corresponding to the second moving plates (51) and the second connecting rods (52).
7. The nano-micro positioning platform for vibration-assisted machining according to claim 6, characterized in that the platform body (1) is provided with a plurality of connecting holes (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202222775241.6U CN218320778U (en) | 2022-10-19 | 2022-10-19 | Vibration-assisted machining nanometer micro-positioning platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222775241.6U CN218320778U (en) | 2022-10-19 | 2022-10-19 | Vibration-assisted machining nanometer micro-positioning platform |
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| CN218320778U true CN218320778U (en) | 2023-01-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
| CN117260646B (en) * | 2023-11-20 | 2024-01-30 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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