CN102501227A - Flexible hinge positioning device based on differential motion lever principle - Google Patents
Flexible hinge positioning device based on differential motion lever principle Download PDFInfo
- Publication number
- CN102501227A CN102501227A CN2011103932080A CN201110393208A CN102501227A CN 102501227 A CN102501227 A CN 102501227A CN 2011103932080 A CN2011103932080 A CN 2011103932080A CN 201110393208 A CN201110393208 A CN 201110393208A CN 102501227 A CN102501227 A CN 102501227A
- Authority
- CN
- China
- Prior art keywords
- lever
- flexible hinge
- input platform
- platform
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Transmission Devices (AREA)
Abstract
The invention discloses a flexible hinge positioning device based on a differential motion lever principle, which relates to a big-stroke high-resolution micro-driving positioning device so as to overcome the defect that the traditional flexible hinge positioning platform is difficult to achieve high resolution under the big stroke. A first lever, a second lever, a first input platform, a second input platform and an output platform are all arranged on a lever actuating cavity; the first lever and the inner wall of a lever shell are connected by a first flexible hinge; the first input platform and the first lever are connected by a second flexible hinge; the second lever and the first input platform are connected by a third flexible hinge; the second input platform and the second lever are connected by a fourth flexible hinge; the output platform and the second lever are connected by a fifth flexible hinge; the output platform and the inner wall of the lever shell are connected by a sixth flexible hinge and two seventh flexible hinges; a first actuator drives the first input platform; and a second actuator drives the second input platform. The flexible hinge positioning device is used for precisely positioning the submillimeter-grade moving stroke.
Description
Technical field
The present invention relates to a kind of big stroke high-resolution micro and drive positioner.
Background technology
Along with the fast development of micro-/ nano technology, in high-tech sectors such as the assembling of milli machine part, MEMS (MEMS) assembling, cell manipulation, precision optics, press for and have big stroke high-resolution micro driving positioner.The most series connection lever principles that adopt of this type positioner are promptly passed through the multi-grade lever mechanisms in series at present, the input displacement are amplified step by step reach the output area requirement.Based on the locating platform of this principle, coordinating to exist bottleneck problem aspect big stroke and the high-resolution.Because the series connection lever principle has only an input, reach required travel range through amplification to this input.When the stroke and resolution ratio one timing of input place actuator, after the amplification through the series connection lever, its stroke and resolution value are exaggerated same multiple, that is to say that the quality of resolution ratio descends along with the increase of stroke.In addition, itself characteristics of series connection lever principle also cause the volume of locating platform big, rigidity is low.
Summary of the invention
The objective of the invention is to overcome present flexible hinge locating platform exist under the big stroke high-resolution difficulty reach, and the shortcoming that volume is big, rigidity is low provides a kind of flexible hinge positioner based on differential lever principle.
The inventive system comprises lever, first lever, second lever, the first input platform, the second input platform, output stage, first actuator, second actuator, first trip bolt and second trip bolt; Said lever is provided with penetrating lever chamber, front and back; First lever is arranged on the lower left in the lever chamber; And the lower surface of first lever is connected through first flexible hinge with the lever inwall corresponding with it; The first input platform is arranged on the top of first lever; And the lower surface of the first input platform is connected through second flexible hinge with the upper surface of first lever corresponding with it; Second lever is arranged on the upper right side in the lever chamber; And the upper surface of the lower surface of second lever and first lever corresponding with it is connected through the 3rd flexible hinge, and the second input platform is arranged on the lower left of second lever, and the lower surface of the upper surface of the second input platform and second lever corresponding with it is connected through the 4th flexible hinge; Output stage is arranged on the lower right of second lever; And the lower surface of the upper surface of output stage and second lever corresponding with it is connected through the 5th flexible hinge, and the left end face of output stage is connected through the 6th flexible hinge with the lever inwall corresponding with it, and its right end face of output stage is connected through two the 7th flexible hinges with the lever inwall corresponding with it; First actuator is arranged in the lever chamber and is installed on the upper surface of the first input platform; The end of thread end face of first trip bolt withstands on first actuator, and second actuator is arranged in the lever chamber and is installed in the place, lower surface of the second input platform, and the end of thread end face of second trip bolt withstands on second actuator; First trip bolt and second trip bolt all are threaded with lever, and the front/rear end of output stage is provided with two external loading connecting holes.
Advantage of the present invention is: because flexible hinge can realize not having the gap, no frictional drive; And first lever of the present invention all is connected through flexible hinge with lever with output stage and output stage 6 with the second input platform, second lever with first lever, second lever with the first input platform, second lever with lever, first lever; Therefore; Apparatus of the present invention adopt flexible hinge as kinematic pair; Utilize first actuator and the second actuator double piezoelectric ceramic to drive, thereby realize differential lever transmission.The present invention is through experiment test, and stroke reaches 250 μ m, and resolution ratio reaches 10nm.Therefore, the present invention possesses advantages such as stroke is big, resolution ratio is high, rigidity is high, compact conformation.
Description of drawings
Fig. 1 is overall structure master's cutaway view of apparatus of the present invention, and Fig. 2 is the structural representation of circular flexible hinge, and Fig. 3 is the structural representation of right angle flexible hinge, and Fig. 4 is the overall structure stereogram (M is the rear end face of lever 1 among the figure) of apparatus of the present invention.
The specific embodiment
The specific embodiment one: combine Fig. 1～Fig. 4 that this embodiment is described; This embodiment comprises lever 1, first lever 2, second lever 3, the first input platform 4, the second input platform 5, output stage 6, first actuator 14, second actuator 15, first trip bolt 16 and second trip bolt 17; Lever 1 is provided with the penetrating lever chamber 1-1 in front and back; First lever 2 is arranged on the lower left in the 1-1 of lever chamber; And the lower surface of first lever 2 is connected through first flexible hinge 7 with lever 1 inwall corresponding with it; The first input platform 4 is arranged on the top of first lever 2; And the lower surface of the first input platform 4 is connected through second flexible hinge 8 with the upper surface of first lever 2 corresponding with it; Second lever 3 is arranged on the upper right side in the 1-1 of lever chamber; And the upper surface of the lower surface of second lever 3 and first lever 2 corresponding with it is connected through the 3rd flexible hinge 9, and the second input platform 5 is arranged on the lower left of second lever 3, and the lower surface of the upper surface of the second input platform 5 and second lever 3 corresponding with it is connected through the 4th flexible hinge 10; Output stage 6 is arranged on the lower right of second lever 3; And the lower surface of the upper surface of output stage 6 and second lever 3 corresponding with it is connected through the 5th flexible hinge 11, and the left end face of output stage 6 is connected through the 6th flexible hinge 12 with lever 1 inwall corresponding with it, and its right end face of output stage 6 is connected through two the 7th flexible hinges 13 with lever 1 inwall corresponding with it; First actuator 14 is arranged in the 1-1 of lever chamber and is installed on the upper surface of the first input platform 4; The end of thread end face of first trip bolt 16 withstands on first actuator 14, and second actuator 15 is arranged in the 1-1 of lever chamber and is installed in the place, lower surface of the second input platform 5, and the end of thread end face of second trip bolt 17 withstands on second actuator 15; First trip bolt 16 and second trip bolt 17 all are threaded with lever 1, and the front/rear end of output stage 6 is provided with two external loading connecting hole 6-1.First actuator 14 and second actuator 15 all adopt the Pst150/10 * 10 type actuators of PI company, are Piezoelectric Ceramic.The appearance and size of lever 1 is 80mm * 60mm * 20mm (length * wide * height).
The specific embodiment two: combine Fig. 2 and Fig. 3 that this embodiment is described; First flexible hinge 7 of this embodiment, second flexible hinge 8, the 3rd flexible hinge 9, the 4th flexible hinge 10 and the 5th flexible hinge 11 are the circular flexible hinge, and the 6th flexible hinge 12 and the 7th flexible hinge 13 are the right angle flexible hinge.The input running part adopts the circular flexible hinge in the present invention, and the output running part adopts the right angle flexible hinge, can guarantee that like this running part has enough rigidity, and output place has enough plastic deformation abilities.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment three: combine Fig. 2 and Fig. 3 that this embodiment is described; The radius R of the circular flexible hinge of this embodiment is 0.3mm～1.0mm; The thickness s of circular flexible hinge thinnest part is 0.2mm～1.5mm; The thickness h of said right angle flexible hinge is 0.2mm～0.5mm, and each right angle length of side f of right angle flexible hinge is 2.0mm～5.0mm.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment four: combine Fig. 2 and Fig. 3 that this embodiment is described; The radius R of the circular flexible hinge of this embodiment is 0.5mm; The thickness s of circular flexible hinge thinnest part is 0.5mm; The thickness h of said right angle flexible hinge is 0.3, and each right angle length of side f of said right angle flexible hinge is 3.0mm.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment five: combine Fig. 4 that this embodiment is described, the thickness of first lever 2 of this embodiment, second lever 3, the first input platform 4 and the second input platform 5 all equates, the thickness of output stage 6 be first lever 2 thickness 1/20～1/4.The thickness of output stage 6 is designed to guarantee the rigidity of the transmission stiffness of output stage 6 less than first lever 2 and second lever, 3 running parts like this less than the thickness of first lever 2 and second lever 3.Other composition and annexation are identical with the specific embodiment one.
Operation principle of the present invention:
At first first actuator 14 is connected with power supply respectively with second actuator 15, two external loading connecting hole 6-1 are connected with external loading respectively;
When having only first actuator 14 to drive; Its operation principle is: first actuator, 14 elongations under the power supply effect; Promote the first input platform 4 and move downward, first lever 2 is clockwise rotated around first flexible hinge 7, drive second lever 3 through the 3rd flexible hinge 9 simultaneously and rotate counterclockwise around the 4th flexible hinge 10 through second flexible hinge 8; When moving upward, the right-hand member of second lever 3 drives upwards moving linearly of output stage 6 through the 5th flexible hinge 11; This moment, strain took place in the 6th flexible hinge 12 and the 7th flexible hinge 13, and output stage 6 drives the external loading motion, thereby realizes the load precision positioning.
When having only second actuator 15 to drive; Its operation principle is: second actuator, 15 elongations under the power supply effect; Promoting the second input platform 5 moves upward; Through the 4th flexible hinge 10 second lever 3 is rotated counterclockwise around the 3rd flexible hinge 9, drive upwards moving linearly of output stage 6 through the 5th flexible hinge 11 when the right-hand member of second lever 3 moves upward, this moment, strain took place in the 6th flexible hinge 12 and the 7th flexible hinge 13; Output stage 6 drives the external loading motion, thereby realizes the load precision positioning.
When first actuator 14 and second actuator 15 all drove, its operation principle was their the work independently stack of principle.
Claims (5)
1. flexible hinge positioner based on differential lever principle; Said device comprises lever (1), first lever (2), second lever (3), the first input platform (4), the second input platform (5), output stage (6), first actuator (14), second actuator (15), first trip bolt (16) and second trip bolt (17); It is characterized in that: said lever (1) is provided with penetrating lever chamber (1-1), front and back; First lever (2) is arranged on the lower left in the lever chamber (1-1); And the lower surface of first lever (2) is connected through first flexible hinge (7) with lever (1) inwall corresponding with it; The first input platform (4) is arranged on the top of first lever (2); And the lower surface of the first input platform (4) is connected through second flexible hinge (8) with the upper surface of first lever (2) corresponding with it; Second lever (3) is arranged on the upper right side in the lever chamber (1-1); And the upper surface of the lower surface of second lever (3) and first lever (2) corresponding with it is connected through the 3rd flexible hinge (9); The second input platform (5) is arranged on the lower left of second lever (3); And the upper surface of the second input platform (5) is connected through the 4th flexible hinge (10) with the lower surface of second lever (3) corresponding with it, and output stage (6) is arranged on the lower right of second lever (3), and the lower surface of exporting the upper surface of putting down (6) and second lever (3) corresponding with it is connected through the 5th flexible hinge (11); The left end face of output stage (6) is connected through the 6th flexible hinge (12) with lever (1) inwall corresponding with it; Its right end face of output stage (6) is connected through two the 7th flexible hinges (13) with lever (1) inwall corresponding with it, and first actuator (14) is arranged in the lever chamber (1-1) and is installed on the upper surface of the first input platform (4), and the end of thread end face of first trip bolt (16) withstands on first actuator (14); Second actuator (15) is arranged in the lever chamber (1-1) and is installed in the place, lower surface of the second input platform (5); The end of thread end face of second trip bolt (17) withstands on second actuator (15), and first trip bolt (16) and second trip bolt (17) all are threaded with lever (1), and the front/rear end of output stage (6) is provided with two external loading connecting holes (6-1).
2. according to the said flexible hinge positioner of claim 1 based on differential lever principle; It is characterized in that: said first flexible hinge (7), second flexible hinge (8), the 3rd flexible hinge (9), the 4th flexible hinge (10) and the 5th flexible hinge (11) are the circular flexible hinge, and said the 6th flexible hinge (12) and the 7th flexible hinge (13) are the right angle flexible hinge.
3. according to the said flexible hinge positioner of claim 2 based on differential lever principle; It is characterized in that: the radius of said circular flexible hinge (R) is 0.3mm～1.0mm; The thickness (s) of circular flexible hinge thinnest part is 0.2mm～1.5mm; The thickness (h) of said right angle flexible hinge is 0.2mm～0.5mm, and each right angle length of side (f) of said right angle flexible hinge is 2.5mm～3.0mm.
4. according to the said flexible hinge positioner of claim 3 based on differential lever principle; It is characterized in that: the radius of said circular flexible hinge (R) is 0.5mm; The thickness (s) of circular flexible hinge thinnest part is 0.5mm; The thickness (h) of said right angle flexible hinge is 0.3, and each right angle length of side (f) of said right angle flexible hinge is 3.0mm.
5. according to claim 1 or 2 or 3 said flexible hinge positioners based on differential lever principle; It is characterized in that: the thickness of said first lever (2), second lever (3), the first input platform (4) and the second input platform (5) is all equal, the thickness of said output stage (6) be first lever (2) thickness 1/20～1/4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110393208.0A CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110393208.0A CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102501227A true CN102501227A (en) | 2012-06-20 |
| CN102501227B CN102501227B (en) | 2014-01-22 |
Family
ID=46213390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110393208.0A Expired - Fee Related CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102501227B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104786206A (en) * | 2015-04-07 | 2015-07-22 | 广州番禺职业技术学院 | Precision positioning platform of smoothing mechanism |
| CN106763142A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Single-freedom and flexible hinge with auto-lock function |
| CN106812786A (en) * | 2017-03-01 | 2017-06-09 | 华侨大学 | Single-freedom and flexible hinge |
| CN107402549A (en) * | 2016-05-18 | 2017-11-28 | 艾罗德克有限公司 | The parallel shaft flexible platform of open frame with deflection compensated |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4139948A (en) * | 1976-10-05 | 1979-02-20 | Nippon Telegraph And Telephone Public Corporation | Micromanipulator |
| SU1732316A1 (en) * | 1989-05-29 | 1992-05-07 | Научно-исследовательский институт автоматики и приборостроения | Adjusting device |
| JPH0575173A (en) * | 1991-09-12 | 1993-03-26 | Fuji Electric Co Ltd | Magnifying mechanism for displacement of piezoelectric actuator |
| CN1275469A (en) * | 2000-05-26 | 2000-12-06 | 清华大学 | Integral tpe microdisplacement, force three-dimension flexible driving amplifying and steering mechanism |
| US20040163450A1 (en) * | 2003-02-21 | 2004-08-26 | Korea Advanced Institute Of Science And Technology | 3-Axis straight-line motion stage and sample test device using the same |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1644330A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Integrated three freedom micro-containing operators |
| CN2904210Y (en) * | 2006-04-12 | 2007-05-23 | 合肥工业大学 | Large travel high-precision 2-D working bench |
-
2011
- 2011-12-01 CN CN201110393208.0A patent/CN102501227B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4139948A (en) * | 1976-10-05 | 1979-02-20 | Nippon Telegraph And Telephone Public Corporation | Micromanipulator |
| SU1732316A1 (en) * | 1989-05-29 | 1992-05-07 | Научно-исследовательский институт автоматики и приборостроения | Adjusting device |
| JPH0575173A (en) * | 1991-09-12 | 1993-03-26 | Fuji Electric Co Ltd | Magnifying mechanism for displacement of piezoelectric actuator |
| CN1275469A (en) * | 2000-05-26 | 2000-12-06 | 清华大学 | Integral tpe microdisplacement, force three-dimension flexible driving amplifying and steering mechanism |
| US20040163450A1 (en) * | 2003-02-21 | 2004-08-26 | Korea Advanced Institute Of Science And Technology | 3-Axis straight-line motion stage and sample test device using the same |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1644330A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Integrated three freedom micro-containing operators |
| CN2904210Y (en) * | 2006-04-12 | 2007-05-23 | 合肥工业大学 | Large travel high-precision 2-D working bench |
Non-Patent Citations (2)
| Title |
|---|
| 吴博达等: "具有柔性铰链的差式微位移放大机构", 《压电与声光》 * |
| ***等: "基于压电陶瓷的光学微扫描器及其有限元分析", 《北京理工大学学报》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104786206A (en) * | 2015-04-07 | 2015-07-22 | 广州番禺职业技术学院 | Precision positioning platform of smoothing mechanism |
| CN107402549A (en) * | 2016-05-18 | 2017-11-28 | 艾罗德克有限公司 | The parallel shaft flexible platform of open frame with deflection compensated |
| CN107402549B (en) * | 2016-05-18 | 2021-05-25 | 艾罗德克有限公司 | Open frame parallel dual-axis flexible platform with deflection compensation |
| CN106763142A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Single-freedom and flexible hinge with auto-lock function |
| CN106812786A (en) * | 2017-03-01 | 2017-06-09 | 华侨大学 | Single-freedom and flexible hinge |
| CN106763142B (en) * | 2017-03-01 | 2023-06-20 | 华侨大学 | Single-degree-of-freedom flexible hinge with self-locking function |
| CN106812786B (en) * | 2017-03-01 | 2023-08-29 | 华侨大学 | single degree of freedom flexible hinge |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102501227B (en) | 2014-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201168876Y (en) | Three-freedom degree precision positioning worktable | |
| CN201153129Y (en) | Micro-displacement amplifying device | |
| CN109909976B (en) | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism | |
| CN103737581B (en) | The many bars six degree of freedom welding robot containing parallel closed loop subchain that space is controlled | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| CN100340378C (en) | Six-freedom-degree precision positioning workbench | |
| CN102501227A (en) | Flexible hinge positioning device based on differential motion lever principle | |
| CN102291039B (en) | Multi-degree-of-freedom bionic piezoelectric driver | |
| CN107414477A (en) | A kind of driving type piezoelectric actuator Two-degree-of-freedohigh-precision high-precision microoperation clamper | |
| CN102682857A (en) | Device for changing route range of jogged positioning platform | |
| CN104308781A (en) | Micro-gripper based on two-stage amplification principle and single parallel four-bar mechanism | |
| CN205211424U (en) | Two -dimentional nanometer displacement table of flexible hinge direction | |
| CN101969276A (en) | Two-dimensional uncoupled nano-scale motion platform mechanism | |
| CN102699907A (en) | Three-degree-of-freedom mobile decoupling parallel robot mechanism | |
| CN106272353A (en) | A kind of planar three freedom meek parallel institution of large stroke and high precision | |
| CN102506785B (en) | Three-degree-of-freedom integrated stick-slip linear positioning device | |
| CN205376486U (en) | Realize high accuracy rotary motion's microbit and move amplification device | |
| CN110492781B (en) | Three-stage micro-displacement amplifying mechanism and amplifying method thereof | |
| CN103904937A (en) | Rotation type driving device and method based on three piezoelectric stacks | |
| CN103395059B (en) | Three-degree of freedom flexible topological decouplity parallel micromotion platform | |
| CN104852627B (en) | Inchworm-type piezoelectric torque actuator capable of realizing single-step large torsion angle and actuating method | |
| CN2782326Y (en) | Six-freedom-degree precision positioning workbench | |
| CN103056867A (en) | Flexible micro-moving manipulator | |
| CN109756150A (en) | A kind of compound displacement equations type piezoelectric actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140122 Termination date: 20211201 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |