CN214520003U - Three-freedom-degree precision micro-displacement positioning platform - Google Patents
Three-freedom-degree precision micro-displacement positioning platform Download PDFInfo
- Publication number
- CN214520003U CN214520003U CN202120001171.1U CN202120001171U CN214520003U CN 214520003 U CN214520003 U CN 214520003U CN 202120001171 U CN202120001171 U CN 202120001171U CN 214520003 U CN214520003 U CN 214520003U
- Authority
- CN
- China
- Prior art keywords
- amplification mechanism
- flexible hinge
- stage amplification
- output rod
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 84
- 230000007246 mechanism Effects 0.000 claims abstract description 414
- 230000033001 locomotion Effects 0.000 claims abstract description 38
- 230000003321 amplification Effects 0.000 claims description 321
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 321
- 239000000919 ceramic Substances 0.000 claims description 50
- 229910000831 Steel Inorganic materials 0.000 claims description 17
- 239000010959 steel Substances 0.000 claims description 17
- 239000012634 fragment Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 230000007704 transition Effects 0.000 description 20
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Transmission Devices (AREA)
Abstract
The invention discloses a three-degree-of-freedom precise micro-displacement positioning platform, which comprises: the device comprises a driving unit, a motion platform and a workbench; be equipped with the bolt hole on the workstation and pass through bolt fixed connection with drive unit, drive unit passes through the flexible hinge of second grade mechanism output pole output and the flexible hinge fixed connection of second grade mechanism output of amplifying in one side of motion platform, drive unit has two-stage displacement mechanism of amplifying, drive unit is equipped with four groups, respectively with workstation fixed connection and evenly distributed around motion platform, adopt if the design of scheme, there is two-stage mechanism of amplifying between motion platform and the mechanism of amplifying, can increase motion platform's displacement and avoided the influence of displacement coupling, adopt piezoceramics drive transverse arrangement, can reduce positioning platform's volume.
Description
Technical Field
The invention relates to a precision positioning platform of a two-stage micro-displacement amplification mechanism, in particular to a three-degree-of-freedom precision micro-displacement positioning platform.
Background information
The precision micro-positioning technology is an important component of advanced manufacturing technology and one of the key technologies of nanotechnology, and in recent years, the technology is rapidly developed along with the fields of microelectronic manufacturing, ultra-precision mechanical manufacturing, precision measurement optical instruments and the like. Higher requirements are put forward on the precise micro-positioning technology. The conventional micro-displacement positioning system usually adopts transmission schemes such as a servo motor, a precise lead screw and the like, so that the problems of thread clearance and transmission friction exist, and the general positioning precision can only reach the micron level.
In order to solve the above problems, a micro-displacement positioning platform with high precision, large stroke and small volume is needed to meet the complex processing and operating requirements in scientific and technical research.
Disclosure of Invention
In view of the above disadvantages, the present invention provides a three-degree-of-freedom precision micro-displacement positioning platform, which can precisely control in three degrees of freedom: the device moves horizontally in the x and y directions and rotates around the z axis, and has the characteristics of high precision and large stroke.
The technical scheme is as follows:
a three-degree-of-freedom precise micro-displacement positioning platform comprises: a driving unit moving platform and a workbench; the driving unit is of a symmetrical structure and is provided with two stages of displacement amplification mechanisms, and the driving units are provided with four groups and are respectively fixedly connected with the workbench and uniformly distributed around the motion platform.
Further, the drive unit mechanism includes: the base, piezoceramics, the steel ball, wedge mechanism part one, wedge mechanism part two, folding shell fragment fixed establishment, the outside bolt hole, transition flexible hinge, the outside push rod, first order amplification mechanism outside input flexible hinge, first order amplification mechanism outside stiff end flexible hinge, first order amplification mechanism outside input rod, second level amplification mechanism output rod output end flexible hinge, second level amplification mechanism output rod stiff end flexible hinge, second level amplification mechanism output rod input flexible hinge, inboard push rod, the flexible hinge on the inboard output rod of first order amplification mechanism, the inboard output rod stiff end of first order amplification mechanism flexible hinge, the inboard output rod input flexible hinge of first order amplification mechanism, inboard bolt hole.
Further, the outer input rod of the first-stage amplification mechanism is fixedly connected to the upper part of the left side of the mountain-shaped base through a flexible hinge at the outer fixed end of the first-stage amplification mechanism, the outer fixed end of the first-stage amplification mechanism is fixedly connected with the position, close to the lower part of the left end part, of the outer input rod of the first-stage amplification mechanism through a flexible hinge, and the flexible hinge at the outer input end of the first-stage amplification mechanism is fixedly connected to the lower part of the outer input rod of the first-stage amplification mechanism and is positioned on the inner side of the flexible hinge at the outer fixed end of the first-stage amplification mechanism; the inner output rod of the first-stage amplification mechanism is fixedly connected to the left side of a T-shaped mechanism in the middle of a mountain-shaped base through a flexible hinge at the inner output rod fixed end of the first-stage amplification mechanism, the inner output rod input end of the first-stage amplification mechanism is fixedly connected to the lower position of the inner output rod of the first-stage amplification mechanism close to the left end, the flexible hinge at the inner output rod fixed end of the first-stage amplification mechanism is arranged on the inner side of the flexible hinge at the inner output rod input end of the second-stage amplification mechanism on the inner side of the first-stage amplification mechanism, the outer input rod of the first-stage amplification mechanism and the inner output rod of the first-stage amplification mechanism are transversely arranged, the outer input rod of the first-stage amplification mechanism is arranged on the upper side of the inner output rod of the first-stage amplification mechanism, the outer push rod is fixedly connected to the lower part of the flexible hinge at the outer push rod and the inner output rod input end of the first-stage amplification mechanism through a transition flexible hinge, and the upper part of the wedge-shaped mechanism is fixedly connected to the outer push rod and the lower part of the flexible hinge at the inner output rod input end of the first-stage amplification mechanism The output rod of the second-stage amplification mechanism is arranged on the upper side of the input rod outside the first-stage amplification mechanism, the flexible hinge at the input end of the output rod of the second-stage amplification mechanism is fixedly connected to the position, close to the lower part of the right side end, of the output rod of the second-stage amplification mechanism, and the flexible hinge at the fixed end of the output rod of the second-stage amplification mechanism is fixedly connected to the inner side of the flexible hinge at the input end of the output rod of the second-stage amplification mechanism; the output end of the output rod of the second-stage amplification mechanism is fixedly connected with a position close to the upper part of the output rod of the second-stage amplification mechanism at the output end of the left-side end part by a flexible hinge, an inner side push rod is fixedly connected below the flexible hinge at the input end of the output rod of the second-stage amplification mechanism, and the inner side push rod is fixedly connected with the upper side of the inner side output rod of the first-stage amplification mechanism by a flexible hinge; the upper flexible hinge of the output rod on the inner side of the first-stage amplification mechanism is fixedly connected at a position above the output rod on the inner side of the first-stage amplification mechanism close to the right side end, and the fixed end of the output rod of the second-stage amplification mechanism is fixedly connected at a position above the input rod on the outer side of the first-stage amplification mechanism close to the right side end.
Further, the first base is of a mountain shape, the folding elastic sheet is located on the lower side of the fixing mechanism of the folding elastic sheet, the left side of the folding elastic sheet is tightly connected with the first base, the right side of the folding elastic sheet is tightly connected with the left side of the first wedge-shaped mechanism part, the piezoelectric ceramic is located on the left side of the first base in the mountain shape, the center of the left side of the piezoelectric ceramic is tightly connected with the right side of the first wedge-shaped mechanism part through steel balls, and the first wedge-shaped mechanism part is tightly connected with the second wedge-shaped mechanism part.
Furthermore, the driving units are fixedly connected with the motion platform through flexible hinges at the output ends of output rods of the second-stage amplification mechanisms and flexible hinges at the output ends of the output rods of the second-stage amplification mechanisms, and the four groups of driving units are uniformly distributed around the motion platform.
The invention has the technical effects that:
the invention adopts a symmetrical structure, and the driving units are symmetrically and uniformly distributed around the motion platform.
The invention adopts the structure that each driving unit is provided with two output ends, and the motion platform realizes the motion with three degrees of freedom.
According to the invention, each driving unit is divided into a left part and a right part, and each part is divided into two stages of amplification mechanisms, so that the motion platform realizes larger displacement.
The invention adopts 8 piezoelectric ceramics to drive, and the piezoelectric ceramics at different positions are matched to work, thereby realizing the movement in different directions.
The invention adopts a wedge-shaped mechanism and the piezoelectric ceramic is driven to be horizontally arranged, thereby reducing the volume of the mechanism.
The invention adopts a flexible hinge mode for connection, the clearance and the friction force between the rod pieces are smaller, the error can be reduced, and the precision can be improved.
The invention adopts the wedge-shaped mechanism part I to be connected with the piezoelectric ceramic by steel balls, thereby reducing the movement error of the mechanism.
Drawings
Fig. 1 is a schematic front view of the overall structure.
Fig. 2 is a schematic side view of the overall structure.
Fig. 3 is a schematic view of a left side portion of the drive unit.
Fig. 4 is a schematic view of a right-hand portion of the drive unit.
In the figure: 1. the first driving unit 111, the base 112, the piezoelectric ceramic 113, the steel ball 114, the first wedge mechanism 115, the second wedge mechanism 116, the folding elastic sheet 117, the folding elastic sheet fixing mechanism 118, the bolt hole 119, the transition flexible hinge 1110, the outer push rod 1111, the flexible hinge at the outer input end of the first amplification mechanism 1112, the flexible hinge at the outer fixed end of the first amplification mechanism 1113, the outer input rod of the first amplification mechanism 1114, the output rod of the second amplification mechanism 1115, the flexible hinge at the output end of the output rod of the second amplification mechanism 1116, the flexible hinge at the fixed end of the output rod of the second amplification mechanism 1117, the flexible hinge at the input end of the output rod of the second amplification mechanism 1118, the inner push rod 1119, the flexible hinge at the upper side of the inner output rod of the first amplification mechanism 1120, the inner output rod 1121 of the first amplification mechanism, the flexible hinge at the fixed end of the output rod of the first amplification mechanism, 1122. the flexible hinge at the input end of the output rod inside the first-stage amplification mechanism comprises a first-stage amplification mechanism input end flexible hinge 121, a base 122, piezoelectric ceramics 123, steel balls 124, a first wedge mechanism part 125, a second wedge mechanism part 126, a folding elastic sheet 127, a folding elastic sheet fixing mechanism 128, a bolt hole 129, a transition flexible hinge 1210, an outer push rod 1211, a first-stage amplification mechanism outer input end flexible hinge 1212, a first-stage amplification mechanism outer fixed end flexible hinge 1213, a first-stage amplification mechanism outer input rod 1214, a second-stage amplification mechanism output rod 1215, a second-stage amplification mechanism output rod output end flexible hinge 1216, a second-stage amplification mechanism output rod fixed end flexible hinge 1217, a second-stage amplification mechanism output rod input end flexible hinge 1218, an inner push rod 1219, a first-stage amplification mechanism inner output rod upside flexible hinge 1220, 1220, The device comprises a first-stage amplification mechanism inner output rod, 1221, a first-stage amplification mechanism inner output rod fixed end flexible hinge, 1222, a first-stage amplification mechanism inner output rod input end flexible hinge, 2, a driving unit II, 212, piezoelectric ceramics, 222, piezoelectric ceramics, 3, a driving unit III, 312, piezoelectric ceramics, 322, piezoelectric ceramics, 4, a driving unit IV, 412, piezoelectric ceramics, 422, piezoelectric ceramics, 5, a motion platform, 6 and a workbench.
Detailed Description
Specific embodiments of the present invention are described below in conjunction with the appended drawings to enable those skilled in the art to practice and reproduce the present invention.
As shown in fig. 1 and fig. 2, the present invention is a three-degree-of-freedom precise micro-displacement positioning platform, comprising: the device comprises a first driving unit 1, a second driving unit 2, a third driving unit 3, a fourth driving unit 4, a motion platform 5 and a workbench 6; the workbench 6 is provided with a bolt hole which is fixedly connected with the driving unit through a bolt. The first driving unit 1 is fixedly connected to one side of the moving platform 5 through a second-stage amplification mechanism output rod output end flexible hinge 1115 and a second-stage amplification mechanism output rod output end flexible hinge 1215. The drive unit is provided with 4 groups which are respectively fixedly connected with the workbench 6 and evenly distributed around the motion platform 6.
As shown in fig. 3 and 4, the driving unit one 1 mechanism includes: 111. a base, 112, piezoceramics, 113, steel balls, 114, a wedge mechanism part I, 115, a wedge mechanism part II, 116, a folding spring sheet, 117, a folding spring sheet fixing mechanism, 118, an outer bolt hole, 119, a transition flexible hinge, 1110, an outer push rod, 1111, a first-stage amplification mechanism outer input end flexible hinge, 1112, a first-stage amplification mechanism outer fixed end flexible hinge, 1113, a first-stage amplification mechanism outer input rod, 1114, a second-stage amplification mechanism output rod, 1115, a second-stage amplification mechanism output rod output end flexible hinge, 1116, a second-stage amplification mechanism output rod fixed end flexible hinge, 1117, a second-stage amplification mechanism output rod input end flexible hinge, 1118, an inner push rod, 1119, a first-stage amplification mechanism inner output rod upper side flexible hinge, 1120, a first-stage amplification mechanism inner output rod 1121, a first-stage amplification mechanism inner output rod fixed end flexible hinge, 1122. the input end of the inner output rod of the first-stage amplification mechanism is provided with a flexible hinge 1123 and an inner bolt hole; 121. a base 122, a piezoelectric ceramic 123, a steel ball 124, a wedge mechanism part I, a wedge mechanism part 125, a wedge mechanism part II, a folding spring plate 126, a folding spring plate 127, a folding spring plate fixing mechanism 128, a bolt hole 129, a transition flexible hinge 1210, an outer push rod 1211, a first amplification mechanism outer input end flexible hinge 1212, a first amplification mechanism outer fixed end flexible hinge 1213, a first amplification mechanism outer input rod 1214, a second amplification mechanism output rod 1215, a second amplification mechanism output rod output end flexible hinge 1216, a second amplification mechanism output rod fixed end flexible hinge 1217, a second amplification mechanism output rod input end flexible hinge 1218, an inner push rod 1219, a first amplification mechanism inner output rod upper side flexible hinge 1220, a first amplification mechanism inner output rod 1221, a first amplification mechanism inner output rod fixed end flexible hinge, 1222. the flexible hinge of inboard output lever input end of first order amplification mechanism 1223, inboard bolt hole.
The first driving unit 1 is of a symmetrical structure, the left side and the right side of the first driving unit are both two-stage amplification mechanisms, and the first driving unit is fixedly connected with the workbench 6 through the outer bolt holes 118, the inner bolt holes 1123 and the outer bolt holes 128.
The first base 111 is of a mountain shape, the folding elastic sheet 116 is located on the lower side of the folding elastic sheet fixing mechanism 117, the left side of the folding elastic sheet 116 is tightly connected with the first base 111, the right side of the folding elastic sheet 116 is tightly connected with the left side of the first wedge-shaped mechanism part 114, the piezoelectric ceramic 112 is located on the left side of the first base 111 in the mountain shape, the center of the left side of the piezoelectric ceramic 112 is tightly connected with the right side of the first wedge-shaped mechanism part 114 through steel balls 113, and the first wedge-shaped mechanism part 114 is tightly connected with the wedge-shaped mechanism 115.
The first-stage amplification mechanism outer input rod 1113 is fixedly connected to the upper left side of the base 111 in a mountain shape through a first-stage amplification mechanism outer fixed end flexible hinge 1112, the first-stage amplification mechanism outer fixed end flexible hinge 1112 is fixedly connected to the position, close to the lower part of the left end, of the first-stage amplification mechanism outer input rod 1113, and the first-stage amplification mechanism outer input end flexible hinge 1111 is fixedly connected to the lower part of the first-stage amplification mechanism outer input rod 1113 and is positioned on the inner side of the first-stage amplification mechanism outer fixed end flexible hinge 1112; the first-stage amplification mechanism inner output rod 1120 is fixedly connected to the left side of a T-shaped mechanism in the middle of a mountain shape of the base 111 through a first-stage amplification mechanism inner output rod fixed end flexible hinge 1121, a first-stage amplification mechanism inner output rod input end flexible hinge 1122 is fixedly connected to the lower position of the first-stage amplification mechanism inner output rod 1120 close to the left end, and the first-stage amplification mechanism inner output rod fixed end flexible hinge 1121 is arranged on the inner side of the first-stage amplification mechanism inner second-stage amplification mechanism output rod input end flexible hinge 1122;
the first-stage amplification mechanism outside input rod 1113 and the first-stage amplification mechanism inside output rod 1120 are arranged laterally. The first-stage amplification mechanism outer side input rod 1113 is arranged on the upper side of the first-stage amplification mechanism inner side output rod 1120, the outer side push rod 1110 is fixedly connected below the first-stage amplification mechanism outer side input end flexible hinge 1111, and the upper part of the wedge-shaped mechanism part two 115 is fixedly connected below the outer side push rod 1110 and the first-stage amplification mechanism inner side output rod input end flexible hinge 1122 through the transition flexible hinge 1110.
The output rod 1114 of the second-stage amplification mechanism is arranged on the upper side of the input rod 1113 outside the first-stage amplification mechanism, the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism is fixedly connected to the position, close to the lower part of the right side end, of the output rod 1114 of the second-stage amplification mechanism, and the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism is fixedly connected to the inner side of the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism; the output end flexible hinge 1115 of the output rod of the second-stage amplification mechanism is fixedly connected to a position close to the upper part of the output rod 1114 of the second-stage amplification mechanism at the left end part, the lower part of the input end flexible hinge 1117 of the output rod of the second-stage amplification mechanism is fixedly connected with the inner side push rod 1118, and the inner side push rod 1118 is fixedly connected with the upper side flexible hinge 1119 of the inner side output rod of the first-stage amplification mechanism; the first stage amplification mechanism inside output rod upper side flexible hinge 1119 is fixedly connected at a position near the right side end above the first stage amplification mechanism inside output rod 1120, and the second stage amplification mechanism output rod fixed end flexible hinge 1116 is fixedly connected at a position near the first stage amplification mechanism outside input rod 1113.
The first base 111 is of a mountain shape, the folding elastic sheet 126 is located on the lower side of the folding elastic sheet fixing mechanism 117, the right side of the folding elastic sheet 126 is tightly connected with the first base 111, the left side of the folding elastic sheet 126 is tightly connected with the right side of the first wedge-shaped mechanism part 124, the piezoelectric ceramic 112 is located on the right side of the inner portion of the first base 111, the center of the left side of the piezoelectric ceramic 112 is tightly connected with the left side of the first wedge-shaped mechanism part 114 through steel balls 113, and the first wedge-shaped mechanism part 114 is tightly connected with the wedge-shaped mechanism 115.
The first-stage amplification mechanism outer input rod 1213 is fixedly connected to the upper part of the right side of the mountain shape of the base 111 through a first-stage amplification mechanism outer fixed end flexible hinge 1212, the first-stage amplification mechanism outer fixed end flexible hinge 1212 is fixedly connected to the position of the first-stage amplification mechanism outer input rod 1213 close to the lower part of the right side end, and a first-stage amplification mechanism outer input end flexible hinge 1211 is fixedly connected to the lower part of the first-stage amplification mechanism outer input rod 1113 and is positioned inside the first-stage amplification mechanism outer fixed end flexible hinge 1212; the first stage amplification mechanism inner side output rod 1220 is fixedly connected to the left side of the T-shaped mechanism in the middle of the mountain-shaped base 111 through a first stage amplification mechanism inner side output rod fixed end flexible hinge 1221, the first stage amplification mechanism inner side output rod input end flexible hinge 1222 is fixedly connected to the lower position of the first stage amplification mechanism inner side output rod 1220 close to the right side end, and the first stage amplification mechanism inner side output rod fixed end flexible hinge 1221 is arranged inside the first stage amplification mechanism inner side second stage amplification mechanism output rod input end flexible hinge 1222.
The first-stage amplification mechanism outside input bar 1213 and the first-stage amplification mechanism inside output bar 1220 are arranged laterally. The first stage amplifying mechanism outer input rod 1213 is on the first stage amplifying mechanism inner output rod 1220, the outer push rod 1210 is fixed under the first stage amplifying mechanism outer input end flexible hinge 1211, the upper part of the wedge mechanism part two 125 is fixed under the outer push rod 1110 and the first stage amplifying mechanism inner output rod input end flexible hinge 1222 by the transition flexible hinge 1210.
A second stage amplification mechanism output rod 1214 is arranged on the upper side of the first stage amplification mechanism outer input rod 1213, a second stage amplification mechanism output rod input end flexible hinge 1217 is fixedly connected to the position, close to the lower part of the left side end, of the second stage amplification mechanism output rod 1214, and a second stage amplification mechanism output rod fixed end flexible hinge 1216 is fixedly connected to the inner side of the second stage amplification mechanism output rod input end flexible hinge 1217; a second-stage amplification mechanism output rod output end flexible hinge 1215 is fixedly connected to a position close to the right-side end output rod and above a second-stage amplification mechanism output rod 1214, an inner side push rod 1218 is fixedly connected below a second-stage amplification mechanism output rod input end flexible hinge 1217, and the inner side push rod 1218 is fixedly connected with a first-stage amplification mechanism inner side output rod upper side flexible hinge 1219; the first stage amplification mechanism inside output rod upper side flexible hinge 1219 is fixedly attached at a position above the first stage amplification mechanism inside output rod 1220 near the left and right side end portions, and the second stage amplification mechanism output rod fixed end flexible hinge 1216 is fixedly attached at a position above the first stage amplification mechanism outside input rod 1213.
The first driving unit 1 is fixedly connected with the moving platform 5 through a flexible hinge 1115 at the output end of an output rod of the second-stage amplification mechanism and a flexible hinge 1215 at the output end of the output rod of the second-stage amplification mechanism; the driving units are provided with four groups, are respectively fixedly connected with the workbench and are uniformly distributed around the motion platform.
The precise positioning platform positioning method comprises the following specific steps:
the method comprises the following steps: when piezoelectric ceramic 112 and piezoelectric ceramic 122 operate simultaneously, and the other piezoelectric ceramics do not operate: the piezoelectric ceramic 112 transmits displacement to the steel ball 113, the steel ball 113 transmits the displacement to the wedge-shaped mechanism part I114, the wedge-shaped mechanism part I114 transmits the displacement to the wedge-shaped mechanism part II 115, the wedge-shaped mechanism part II 115 transmits the displacement to the transition flexible hinge 119, the transition flexible hinge 119 transmits the displacement to the outer push rod 1110, the outer push rod 1110 transmits the displacement to the first-stage amplification mechanism outer input end flexible hinge 1111, the first-stage amplification mechanism outer input end flexible hinge 1111 transmits the displacement to the first-stage amplification mechanism outer fixed end flexible hinge 1112, and the first-stage amplification mechanism outer fixed end flexible hinge 1112 transmits the displacement to the first-stage amplification mechanism outer input rod 1113; the second wedge mechanism part 115 transmits the displacement to a first-stage amplification mechanism inner output rod fixed end flexible hinge 1122, and the first-stage amplification mechanism inner output rod fixed end flexible hinge 1122 transmits the displacement to a first-stage amplification mechanism inner output rod 1120; meanwhile, the piezoelectric ceramic 122 transmits displacement to the steel ball 123, the steel ball 123 transmits displacement to the first wedge mechanism part 124, the first wedge mechanism part 124 transmits displacement to the second wedge mechanism part 125, the second wedge mechanism part 125 transmits displacement to the transition flexible hinge 129, the transition flexible hinge 129 transmits displacement to the outer push rod 1210, the outer push rod 1210 transmits displacement to the outer input end flexible hinge 1211 of the first-stage amplification mechanism, the outer input end flexible hinge 1211 of the first-stage amplification mechanism transmits displacement to the outer fixed end flexible hinge 1212 of the first-stage amplification mechanism, and the outer fixed end flexible hinge 1212 of the first-stage amplification mechanism transmits displacement to the outer input rod 1213 of the first-stage amplification mechanism; meanwhile, the second wedge mechanism 125 transmits the displacement to the first stage amplification mechanism inner output rod fixed end flexible hinge 1222, and the first stage amplification mechanism inner output rod fixed end flexible hinge 1222 transmits the displacement to the first stage amplification mechanism inner output rod 1220.
The second wedge mechanism part 115, the transition flexible hinge 119, the outer push rod 1110 and the flexible hinge 1111 at the outer input end of the first-stage amplification mechanism move upwards; the folding tabs 116 are compressed; wedge mechanism portion one 114 moves to the left; the flexible hinge 1122 at the input end of the output rod inside the first stage amplification mechanism moves upwards; meanwhile, the second wedge mechanism part 125, the transition flexible hinge 129, the outer push rod 1210 and the flexible hinge 1211 at the outer input end of the first-stage amplification mechanism move upwards; the folding spring 126 is compressed; wedge mechanism portion one 124 moves to the left; at the same time, the first stage amplification mechanism inner output rod input end flexible hinge 1222 moves upward.
The base 111 is stationary: by utilizing the lever principle, the flexible hinge 1112 at the outer fixed end of the first-stage amplification mechanism plays a role in pulling the outer input rod 1113 of the first-stage amplification mechanism, the second wedge-shaped mechanism part 115 plays a role in jacking the outer input rod 1113 of the first-stage amplification mechanism through the transition flexible hinge 119, the outer push rod 1110 and the flexible hinge 1111 at the outer input end of the first-stage amplification mechanism, the outer input rod 1113 of the first-stage amplification mechanism deflects, and the right end moves upwards; the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in pulling the output rod 1120 at the inner side of the first-stage amplification mechanism, the second wedge-shaped mechanism part 115 plays a role in jacking through the flexible hinge 1122 at the input end of the output rod at the inner side of the first-stage amplification mechanism, the output rod 1120 at the inner side of the first-stage amplification mechanism deflects, and the right end moves downwards; meanwhile, the base 111 is stationary: by utilizing the lever principle, the flexible hinge 1212 at the outer fixed end of the first-stage amplification mechanism plays a role in pulling the outer input rod 1213 of the first-stage amplification mechanism, the second wedge-shaped mechanism part 125 plays a role in jacking the outer input rod 1213 of the first-stage amplification mechanism through the transition flexible hinge 129, the outer push rod 1210 and the flexible hinge 1211 at the outer input end of the first-stage amplification mechanism, the outer input rod 1213 of the first-stage amplification mechanism deflects, and the right end moves upwards; the base 111 is stationary: by utilizing the lever principle, the flexible hinge 1216 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in pulling the inner output rod 1220 of the first-stage amplification mechanism, the second wedge-shaped mechanism part 125 plays a role in jacking through the flexible hinge 1222 at the input end of the inner output rod of the first-stage amplification mechanism, the inner output rod 1220 of the first-stage amplification mechanism deflects, and the right end moves downwards.
The outer input rod 1113 of the first-stage amplification mechanism transmits the displacement to the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism; the first stage amplification mechanism inner output rod 1120 transmits displacement to the first stage amplification mechanism inner output rod upper flexible hinge 1119, the first stage amplification mechanism inner output rod upper flexible hinge 1119 transmits displacement to the inner push rod 1118, the inner push rod 1118 transmits displacement to the second stage amplification mechanism output rod input end flexible hinge 1117, the second stage amplification mechanism output rod fixed end flexible hinge 1116 transmits upward displacement to the second stage amplification mechanism output rod 1114, and the second stage amplification mechanism output rod input end flexible hinge 1117 transmits downward displacement to the second stage amplification mechanism output rod 1114; at the same time, the first stage amplification mechanism outboard input bar 1213 transfers the displacement to the second stage amplification mechanism output bar fixed end flexible hinge 1216; the first stage amplification mechanism inner output rod 1220 transmits displacement to the first stage amplification mechanism inner output rod upper flexible hinge 1219, the first stage amplification mechanism inner output rod upper flexible hinge 1219 transmits displacement to the inner push rod 1218, the inner push rod 1218 transmits displacement to the second stage amplification mechanism output rod input end flexible hinge 1217, the second stage amplification mechanism output rod fixed end flexible hinge 1216 transmits displacement moving upwards to the second stage amplification mechanism output rod 1214, and the second stage amplification mechanism output rod input end flexible hinge 1217 transmits displacement moving downwards to the second stage amplification mechanism output rod 1214.
The second stage amplification mechanism output rod fixed end flexible hinge 1116 moves upward; the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism moves downwards; at the same time, the second stage amplification mechanism output rod fixed end flexible hinge 1216 moves upward; the second stage amplification mechanism output rod input end flexible hinge 1217 moves downward.
The base 111 is stationary: by utilizing the lever principle, the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism, the inner push rod 1118 and the flexible hinge 1119 at the upper side of the inner output rod of the first-stage amplification mechanism play a role in pulling the output rod 1114 of the second-stage amplification mechanism, the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in jacking the output rod 1114 of the second-stage amplification mechanism, the output rod 1114 of the second-stage amplification mechanism deflects, and the left end moves upwards; meanwhile, the base 111 is stationary: by utilizing the lever principle, the flexible hinge 1217 at the input end of the output rod of the second-stage amplification mechanism, the inner push rod 1218 and the flexible hinge 1219 at the upper side of the inner output rod of the first-stage amplification mechanism play a role in pulling the output rod 1214 of the second-stage amplification mechanism, the flexible hinge 1216 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in jacking the output rod 1214 of the second-stage amplification mechanism, the output rod 1214 of the second-stage amplification mechanism deflects, and the left end moves upwards;
the left end of the output rod 1114 of the second-stage amplification mechanism moves upwards, the output rod 1114 of the second-stage amplification mechanism transmits the displacement to the flexible hinge 1115 at the output end of the output rod of the second-stage amplification mechanism, and the flexible hinge 1115 at the output end of the output rod of the second-stage amplification mechanism transmits the displacement to the motion platform 5; meanwhile, the left end of the output rod 1214 of the second-stage amplification mechanism moves upwards, the output rod 1214 of the second-stage amplification mechanism transmits the displacement to the flexible hinge 1215 at the output end of the output rod of the second-stage amplification mechanism, and the flexible hinge 1215 at the output end of the output rod of the second-stage amplification mechanism transmits the displacement to the motion platform 5.
When piezoelectric ceramic 112 and piezoelectric ceramic 122 operate simultaneously and other piezoelectric ceramics do not operate, the motion platform generates displacement in the positive y-axis direction. When the piezoelectric ceramics 312 and 322 work simultaneously, and when other piezoelectric ceramics do not work, the motion platform can generate y-axis negative displacement; when the piezoelectric ceramics 412 and 422 work simultaneously and other piezoelectric ceramics do not work, the motion platform can generate displacement in the positive direction of the x axis. When piezoelectric ceramic 212 and piezoelectric ceramic 222 work simultaneously, and when other piezoelectric ceramics do not work, the motion platform generates x-axis negative displacement.
Step two: displacement of rotation about z-axis
When the left part of the driving unit works simultaneously, namely piezoelectric ceramics 112, piezoelectric ceramics 212, piezoelectric ceramics 312 and piezoelectric ceramics 412 work simultaneously, and other piezoelectric ceramics do not work; the piezoelectric ceramic 112 transmits displacement to the steel ball 113, the steel ball 113 transmits the displacement to the wedge-shaped mechanism part I114, the wedge-shaped mechanism part I114 transmits the displacement to the wedge-shaped mechanism part II 115, the wedge-shaped mechanism part II 115 transmits the displacement to the transition flexible hinge 119, the transition flexible hinge 119 transmits the displacement to the outer push rod 1110, the outer push rod 1110 transmits the displacement to the first-stage amplification mechanism outer input end flexible hinge 1111, the first-stage amplification mechanism outer input end flexible hinge 1111 transmits the displacement to the first-stage amplification mechanism outer fixed end flexible hinge 1112, and the first-stage amplification mechanism outer fixed end flexible hinge 1112 transmits the displacement to the first-stage amplification mechanism outer input rod 1113; the above-described mechanism movement is provided with four sets, and the left side portion of each set of drive units moves as described above.
The second wedge mechanism part 115, the transition flexible hinge 119, the outer push rod 1110 and the flexible hinge 1111 at the outer input end of the first-stage amplification mechanism move upwards; the folding tabs 116 are compressed; wedge mechanism portion one 114 moves to the left; the second wedge mechanism part 115 transmits the displacement to a first-stage amplification mechanism inner output rod fixed end flexible hinge 1122, and the first-stage amplification mechanism inner output rod fixed end flexible hinge 1122 transmits the displacement to a first-stage amplification mechanism inner output rod 1120; the flexible hinge 1122 at the input end of the output rod inside the first stage amplification mechanism moves upwards; the above-described mechanism movement is provided with four sets, and the left side portion of each set of drive units moves as described above.
The base 111 is stationary: by utilizing the lever principle, the flexible hinge 1112 at the outer fixed end of the first-stage amplification mechanism plays a role in pulling the outer input rod 1113 of the first-stage amplification mechanism, the second wedge-shaped mechanism part 115 plays a role in jacking the outer input rod 1113 of the first-stage amplification mechanism through the transition flexible hinge 119, the outer push rod 1110 and the flexible hinge 1111 at the outer input end of the first-stage amplification mechanism, the outer input rod 1113 of the first-stage amplification mechanism deflects, and the right end moves upwards; the base 111 is stationary: by utilizing the lever principle, the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in pulling the inner output rod 1120 of the first-stage amplification mechanism, the second wedge-shaped mechanism part 115 plays a role in jacking through the flexible hinge 1122 at the input end of the inner output rod of the first-stage amplification mechanism, the inner output rod 1120 of the first-stage amplification mechanism deflects, and the right end moves downwards; the above-described mechanism movement is provided with four sets, and the left side portion of each set of drive units moves as described above.
The outer input rod 1113 of the first-stage amplification mechanism transmits the displacement to the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism; the first stage amplification mechanism inner output rod 1120 transmits displacement to the first stage amplification mechanism inner output rod upper flexible hinge 1119, the first stage amplification mechanism inner output rod upper flexible hinge 1119 transmits displacement to the inner push rod 1118, the inner push rod 1118 transmits displacement to the second stage amplification mechanism output rod input end flexible hinge 1117, the second stage amplification mechanism output rod fixed end flexible hinge 1116 transmits upward displacement to the second stage amplification mechanism output rod 1114, and the second stage amplification mechanism output rod input end flexible hinge 1117 transmits downward displacement to the second stage amplification mechanism output rod 1114; the second stage amplification mechanism output rod fixed end flexible hinge 1116 moves upward; the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism moves downwards; the above-described mechanism movement is provided with four sets, and the left side portion of each set of drive units moves as described above.
The base 111 is stationary: by utilizing the lever principle, the flexible hinge 1117 at the input end of the output rod of the second-stage amplification mechanism, the inner push rod 1118 and the flexible hinge 1119 at the upper side of the inner output rod of the first-stage amplification mechanism play a role in pulling the output rod 1114 of the second-stage amplification mechanism, the flexible hinge 1116 at the fixed end of the output rod of the second-stage amplification mechanism plays a role in jacking the output rod 1114 of the second-stage amplification mechanism, the output rod 1114 of the second-stage amplification mechanism deflects, and the left end moves upwards; the output rod 1114 of the second-stage amplification mechanism transmits the displacement to the flexible hinge 1115 at the output end of the output rod of the second-stage amplification mechanism, and the flexible hinge 1115 at the output end of the output rod of the second-stage amplification mechanism transmits the displacement to the motion platform 5; the above-described mechanism movement is provided with four sets, and the left side portion of each set of drive units moves as described above.
When the left part of the driving unit works simultaneously, namely piezoelectric ceramics 112, piezoelectric ceramics 212, piezoelectric ceramics 312 and piezoelectric ceramics 412 work simultaneously, and other piezoelectric ceramics do not work; the moving platform 5 will be displaced in the positive direction around the z-axis. When the left part of the driving unit works simultaneously, namely the piezoelectric ceramics 122, 222, 322 and 422 work simultaneously, and other piezoelectric ceramics do not work; when other piezoelectric ceramics do not work, the moving platform 5 generates displacement around the negative direction of the z axis.
It will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in the embodiments described above without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims.
Claims (7)
1. A three-degree-of-freedom precise micro-displacement positioning platform is characterized by comprising: the device comprises a driving unit, a motion platform and a workbench; the driving unit is of a symmetrical structure and is provided with two stages of displacement amplification mechanisms, and the driving units are provided with four groups and are respectively fixedly connected with the workbench and uniformly distributed around the motion platform.
2. The three-degree-of-freedom precision micro-displacement positioning platform of claim 1, wherein the driving unit comprises: the flexible hinge at the output end of the output rod of the second-stage amplification mechanism, the flexible hinge at the input end of the output rod of the second-stage amplification mechanism, the flexible hinge at the inner side of the output rod of the second-stage amplification mechanism, the inner push rod, the flexible hinge at the upper side of the output rod at the inner side of the first-stage amplification mechanism, the flexible hinge at the fixed end of the output rod of the first-stage amplification mechanism, the flexible hinge at the input end of the output rod at the inner side of the first-stage amplification mechanism, and the bolt hole at the inner side; the outer input rod of the first amplification mechanism is fixedly connected to the upper side of the left side of the mountain-shaped base through the outer fixed end flexible hinge of the first amplification mechanism, the outer fixed end flexible hinge of the first amplification mechanism is fixedly connected to the position, close to the lower side of the left end, of the outer input rod of the first amplification mechanism, the outer input end flexible hinge of the first amplification mechanism is fixedly connected to the lower portion of the outer input rod of the first amplification mechanism and is located on the inner side of the outer fixed end flexible hinge of the first amplification mechanism, the inner output rod of the first amplification mechanism is fixedly connected to the left side of the T-shaped mechanism in the middle of the mountain-shaped base through the inner output rod fixed end flexible hinge of the first amplification mechanism, the inner output rod flexible hinge of the first amplification mechanism is fixedly connected to the lower position, close to the left end, of the inner output rod of the first amplification mechanism, and the inner output rod flexible hinge of the first amplification mechanism is arranged on the inner side of the first amplification mechanism at the lower side of the second amplification mechanism The output rod of the second-stage amplification mechanism is arranged on the upper side of the output rod of the second-stage amplification mechanism, the flexible hinge at the input end of the output rod of the second-stage amplification mechanism is fixedly connected to the lower side of the flexible hinge at the output rod close to the right side end of the output rod of the second-stage amplification mechanism, and the flexible hinge at the fixed end of the output rod of the second-stage amplification mechanism is fixedly connected to the inner side of the flexible hinge at the input end of the output rod of the second-stage amplification mechanism; the output end of the output rod of the second-stage amplification mechanism is fixedly connected with a position close to the upper part of the output rod of the second-stage amplification mechanism at the output end of the left-side end part by a flexible hinge, an inner side push rod is fixedly connected below the flexible hinge at the input end of the output rod of the second-stage amplification mechanism, and the inner side push rod is fixedly connected with the upper side of the inner side output rod of the first-stage amplification mechanism by a flexible hinge; the flexible hinge fixed connection of inboard output lever upside of first order mechanism of amplification is in the position that is close to right side tip inboard output lever top of the first order mechanism of amplification, the flexible hinge fixed connection of second order mechanism of amplification output lever stiff end is close to the position that the mechanism outside input lever was amplified to the first order top, folding shell fragment is located folding shell fragment fixed establishment downside, folding shell fragment left side and base one zonulae occludens, folding shell fragment right side and the partial left side zonulae occludens of wedge mechanism, piezoceramics is located the inside left position of base one "mountain" type, piezoceramics left side central point puts through steel ball and partial right side zonulae occludens of wedge mechanism, partial one of wedge mechanism and partial two zonulae occludens of wedge mechanism.
3. The three-degree-of-freedom precision micro-displacement positioning platform of claim 1, wherein the driving units are fixedly connected with the motion platform through flexible hinges at output ends of output rods of the second-stage amplification mechanism and flexible hinges at output ends of output rods of the second-stage amplification mechanism, and the driving units are four groups in total and are uniformly distributed around the motion platform.
4. The three-degree-of-freedom precision micro-displacement positioning platform of claim 1, wherein each driving unit has two output ends and is independent of each other, and the motion platform realizes motion with three degrees of freedom.
5. The three-degree-of-freedom precision micro-displacement positioning platform according to claim 1, wherein a wedge-shaped mechanism is adopted and the piezoelectric ceramic drive is horizontally placed, so that the volume of the mechanism is reduced.
6. The three-degree-of-freedom precision micro-displacement positioning platform according to claim 1, wherein a wedge-shaped mechanism part I is connected with piezoelectric ceramics by steel balls, so that the motion error of the mechanism is reduced.
7. The three-degree-of-freedom precision micro-displacement positioning platform of claim 1, wherein a two-stage amplification mechanism is adopted, and the motion platform can realize larger displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120001171.1U CN214520003U (en) | 2021-01-04 | 2021-01-04 | Three-freedom-degree precision micro-displacement positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120001171.1U CN214520003U (en) | 2021-01-04 | 2021-01-04 | Three-freedom-degree precision micro-displacement positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214520003U true CN214520003U (en) | 2021-10-29 |
Family
ID=78299941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120001171.1U Expired - Fee Related CN214520003U (en) | 2021-01-04 | 2021-01-04 | Three-freedom-degree precision micro-displacement positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214520003U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112720374A (en) * | 2021-01-04 | 2021-04-30 | 山东建筑大学 | Three-freedom-degree precision micro-displacement positioning platform |
-
2021
- 2021-01-04 CN CN202120001171.1U patent/CN214520003U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112720374A (en) * | 2021-01-04 | 2021-04-30 | 山东建筑大学 | Three-freedom-degree precision micro-displacement positioning platform |
| CN112720374B (en) * | 2021-01-04 | 2024-06-04 | 山东建筑大学 | Three-degree-of-freedom precise micro-displacement positioning platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107464586B (en) | Three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force | |
| CN103225728B (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN100376361C (en) | Small two-dimensional de-coupling platforms | |
| CN112092008B (en) | Compact modular variable-stiffness joint | |
| CN107622786B (en) | Two-stage piezoelectric driving micro-nano positioning platform | |
| CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
| CN106737597B (en) | A kind of XYZ three-freedom degree precisions positioner | |
| CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
| CN101844307A (en) | Redundancy-driven three-degree-of-freedom parallel mechanism | |
| CN214520003U (en) | Three-freedom-degree precision micro-displacement positioning platform | |
| CN109584947B (en) | Three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge type amplification mechanism | |
| CN112859535A (en) | Bridge type differential flexible displacement reducing mechanism | |
| CN110010190B (en) | Three-dimensional constant force parallel flexible micro-positioning platform | |
| CN112720374A (en) | Three-freedom-degree precision micro-displacement positioning platform | |
| CN100587850C (en) | Incorporated ultra-precision workbench moving mechanism | |
| CN116343901B (en) | Three-degree-of-freedom micro-motion platform and working method | |
| CN101000807A (en) | Precision positioning desk based on planar motor and super-magnetostrictive drive | |
| CN116455264A (en) | Series-parallel combined piezoelectric translational micro-clamp and method | |
| CN112447262B (en) | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier | |
| Yu et al. | On the design of compliant-based micro-motion manipulators with a nanometer range resolution | |
| US10926366B2 (en) | Two degree-of-freedom nano motion control and positioning stage with parallel flexure hinge mechanism | |
| CN101207344A (en) | Creeping motion type piezoelectricity straight line driver | |
| CN215186505U (en) | Multiple piezoelectric ceramic antisymmetric micro-displacement amplifying mechanism | |
| CN113391524A (en) | Input and output same-direction or reverse-direction modular differential flexible displacement reducing mechanism | |
| CN100436081C (en) | Plane paralled piezoelectric intelligent bar mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211029 |