CN218241795U - Primary and secondary quartz boat carrying mechanism - Google Patents
Primary and secondary quartz boat carrying mechanism Download PDFInfo
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- CN218241795U CN218241795U CN202222236194.8U CN202222236194U CN218241795U CN 218241795 U CN218241795 U CN 218241795U CN 202222236194 U CN202222236194 U CN 202222236194U CN 218241795 U CN218241795 U CN 218241795U
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Abstract
The utility model relates to a quartz boat transport technical field, concretely relates to primary and secondary quartz boat transport mechanism. The device comprises a base, a first rail, a second rail, a grabbing mechanism and a placing mechanism; the first rail is arranged on the surface of the base, and the second rail is arranged on the base and positioned on one side of the first rail; the grabbing mechanism comprises a manipulator and a clamping jaw, the manipulator is arranged on the first rail in a sliding mode, and the clamping jaw is arranged on the manipulator; the placing mechanism is arranged on the second rail in a sliding mode. The primary and secondary quartz boats are installed on the placing mechanism, the clamping jaws are controlled by the mechanical arm to clamp the secondary boats out of the primary boat, and the secondary boats are integrally moved into the processing equipment to be processed. Simultaneously the manipulator can move on first track and the second track again with placing the mechanism respectively, can be convenient for the manipulator to snatch of son mother quartz boat neutron boat. Therefore, the primary and secondary boats can be carried, and the processing work of the silicon wafers is realized.
Description
Technical Field
The utility model relates to a quartz boat transport technical field, concretely relates to primary and secondary quartz boat transport mechanism.
Background
The silicon wafer is a main material for producing photovoltaic products, is also an important material for manufacturing integrated circuits, can be made into various semiconductor devices by means of photoetching, ion implantation and the like, and is widely applied to the fields of aerospace, industry, agriculture, national defense and the like.
When silicon wafers are processed, the silicon wafers to be processed are usually placed in a mother-and-son boat, then the son boat filled with the silicon wafers is moved to a processing device for processing, and then the processed son boat is moved to the mother boat.
The above problems are problems that the art needs to solve.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a primary and secondary quartz boat transport mechanism to can carry the primary and secondary boat, realize the processing work of silicon chip.
In order to solve the technical problem, the utility model provides a scheme is: a primary and secondary quartz boat carrying mechanism comprises a base, a first rail, a second rail, a grabbing mechanism and a placing mechanism;
the first rail is arranged on the surface of the base, and the second rail is arranged on the base and positioned on one side of the first rail;
the grabbing mechanism comprises a manipulator and a clamping jaw, the manipulator is arranged on the first rail in a sliding mode, and the clamping jaw is arranged on the manipulator;
the placing mechanism is arranged on the second rail in a sliding mode.
As a further improvement of the utility model, the clamping jaw comprises a mounting plate, moving arms are arranged on two sides of the mounting plate, and a driving cylinder for driving the moving arms is arranged on the mounting plate; and a limiting hole is formed in the lower part of the moving arm, and a clamping mechanism is arranged on the inner side surface of the moving arm corresponding to the limiting hole.
As a further improvement, the clamping mechanism is including setting up the last die clamping cylinder of removal arm, die clamping cylinder's output is provided with the tight piece of clamp, press from both sides and correspond on the tight piece spacing hole is provided with the tight groove of clamp.
As the utility model discloses a further improvement, the other both sides of mounting panel are provided with baffle and limiting plate respectively, be provided with the drive on the mounting panel the cylinder of limiting plate.
As a further improvement of the utility model, be provided with position sensor on the removal arm.
As a further improvement of the utility model, the placement machine constructs including removing the setting and is in the orbital mounting bracket of second, the both ends of mounting bracket all are provided with fixed cylinder, the fixed cylinder output all is provided with the fixed plate.
As a further improvement, the installation frame bottom is provided with a plurality of sensors at intervals.
As a further improvement of the utility model, be provided with position sensor on the mounting bracket.
The utility model has the advantages that:
the utility model discloses rational in infrastructure, simple, the simple operation is installed the quartz boat of primary and secondary on placing the mechanism, and the manipulator control clamping jaw presss from both sides the son boat from female boat and gets out to handle son boat moving as a whole to the treatment facility. Simultaneously, the manipulator and the placing mechanism can move on the first rail and the second rail respectively, and the manipulator can grab the daughter quartz boat conveniently. Therefore, the primary and secondary boats can be carried, and the processing work of the silicon wafers is realized.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
FIG. 2 is an enlarged schematic view of section A of FIG. 1;
fig. 3 is a schematic structural view of the clamping jaw of the present invention;
FIG. 4 is an enlarged schematic view of section B of FIG. 3;
FIG. 5 is a schematic view of the primary and secondary boat of the present invention.
Reference numerals: 1. a base; 2. a first track; 3. a second track; 4. a manipulator; 5. a clamping jaw; 501. mounting a plate; 502. a moving arm; 503. a driving cylinder; 504. a limiting hole; 505. a clamping mechanism; 5051. a clamping cylinder; 5052. a clamping block; 5053. a clamping groove; 506. a baffle plate; 507. a limiting plate; 6. a mounting frame; 7. fixing the cylinder; 8. a fixing plate; 9. a sensor.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not limited to the present invention.
Referring to fig. 1, an embodiment of the present invention includes a base 1, a middle portion of a first rail 2 is installed on the base 1, and a second rail 3 is installed on the base 1 and located on one side of the first rail 2. And then the grabbing mechanism is arranged on the first rail 2 in a sliding manner, the grabbing mechanism comprises a manipulator 4 and a clamping jaw 5, the manipulator 4 is arranged on the first rail 2 in a sliding manner, and the clamping jaw 5 is arranged on the manipulator 4. The placement mechanism is slidably mounted on the second rail 3.
In the transportation to the son boat, install son and mother quartz boat on placing the mechanism, manipulator 4 control clamping jaw 5 is got from mother boat clamp and is got out to the son boat is whole to be moved to the treatment facility and is handled. Simultaneously 4 and the mechanism of placing can remove on first track 2 and the second track 3 respectively again, can be convenient for 4 snatch of son mother quartz boat neutron boat in the manipulator.
As shown in fig. 3, the clamping jaw 5 comprises a mounting plate 501, moving arms 502 are arranged on two sides of the mounting plate 501, and a driving cylinder 503 for driving the moving arms 502 is arranged on the mounting plate 501; a limiting hole 504 is formed in the lower portion of the moving arm 502, and a clamping mechanism 505 is arranged on the inner side face of the moving arm 502 corresponding to the limiting hole 504. The outside both sides of son boat in the primary and secondary quartz boat can be provided with the lifting rod, and 4 control mounting panel 501 of manipulator move to the top of primary and secondary quartz boat, and later 4 control mounting panel 501 downstream of manipulator for spacing hole 504 remains the lifting rod and is in same horizontally height, later drives the removal arm 502 of actuating cylinder 503 drive both sides and inwards removes, makes the lifting rod insert to spacing hole 504 in. Then manipulator 4 control mounting panel 501 rebound, through the weight of sub-boat self, can make hold in the palm the lifting rod and contact with spacing hole 504 inner bottom surface, and then ensure to press from both sides on the accurate position of sub-boat, later clamping mechanism 505 is pressing from both sides tightly fixedly to holding in the palm the lifting rod, can fix spacing to the sub-boat to the completion is pressed from both sides the work of getting of sub-boat.
As shown in fig. 4, the clamping mechanism 505 includes a clamping cylinder 5051 provided on the movable arm 502, a clamping block 5052 is provided at an output end of the clamping cylinder 5051, and a clamping groove 5053 is provided in the clamping block 5052 corresponding to the stopper hole 504. The clamping cylinder 5051 drives the pressing block 5052 to move, so that the clamping groove 5053 presses the lifting rod, and the lifting rod is fixed.
The silicon wafers are fully inserted into the sub-boat, and the silicon wafers on the sub-boat are prevented from falling off in the moving process of the sub-boat. As shown in fig. 3, a baffle 506 and a stopper plate 507 are provided on the other two sides of the mounting plate 501, and the mounting plate 501 is provided with a cylinder for driving the stopper plate 507. According to the size of a sub-boat, the cylinder drives the limiting plate 507 to move to a proper position, the other two sides of the sub-boat can be protected through the common cooperation of the limiting plate 507 and the baffle 506, the silicon wafer is prevented from falling off from the sub-boat, and the safety of the work process is improved.
In this embodiment, the moving arm 502 is provided with a position sensor capable of detecting the position of the lifting lever, so that the robot 4, the driving cylinder 503, and the gripping mechanism 505 can automatically perform the next operation.
As shown in fig. 2, the placing mechanism includes a mounting frame 6 movably disposed on the second track 3, two ends of the mounting frame 6 are both provided with a fixing cylinder 7, and an output end of the fixing cylinder 7 is both provided with a fixing plate 8. Place mother's boat on mounting bracket 6, later fixed cylinder 7 drive fixed plate 8 removes for fixed plate 8 supports on mother's boat's lateral surface, and then can carry out effectual fixed to mother's boat.
As shown in fig. 2, a plurality of sensors 9 are arranged at intervals on the bottom of the mounting frame 6. The position of the sensor 9 is arranged according to the position of the son boat on the mother boat, and the number of the son boats on the mother boat can be monitored in real time through the sensor 9.
In this embodiment, be provided with position sensor on the mounting bracket 6, can detect the state of female boat, whether detect female boat on mounting bracket 6.
During actual work, the primary and secondary quartz boats are placed on the mounting frame 6 and are fixed through the fixing plate 8. The manipulator 4 moves to a proper position, drives the mounting plate 501 to move to the upper part of the primary-secondary quartz boat, then the manipulator 4 controls the mounting plate 501 to move downwards, so that the rest lifting rods in the limiting holes 504 are at the same horizontal height, and then the driving cylinder 503 drives the moving arms 502 on the two sides to move inwards, so that the lifting rods are inserted into the limiting holes 504. Then the manipulator 4 controls the mounting plate 501 to move upwards, so that the lifting rod is in contact with the inner bottom surface of the limiting hole 504, and then the clamping cylinder 5051 drives the pressing block 5052 to move, so that the clamping groove 5053 presses and fixes the lifting rod. Finally, the mechanical arm 4 moves the sub-boat to a processing device for processing. Therefore, the primary and secondary boats can be carried, and the processing work of the silicon wafers is realized.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
As the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, their indicated orientation or positional relationship is based on that shown in the drawings, merely for convenience in describing the invention and simplifying the description, and does not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
The appearances of the terms first, second, and third, if any, are used for descriptive purposes only and are not intended to be limiting or imply relative importance.
Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structural changes made by the contents of the specification and the drawings, or the direct or indirect application in other related technical fields, are included in the same way in the protection scope of the present invention.
Claims (8)
1. A primary and secondary quartz boat carrying mechanism is characterized by comprising a base (1), a first rail (2), a second rail (3), a grabbing mechanism and a placing mechanism;
the first rail (2) is arranged on the surface of the base (1), and the second rail (3) is arranged on the base (1) and positioned on one side of the first rail (2);
the grabbing mechanism comprises a mechanical arm (4) and a clamping jaw (5), the mechanical arm (4) is arranged on the first rail (2) in a sliding mode, and the clamping jaw (5) is arranged on the mechanical arm (4);
the placing mechanism is arranged on the second track (3) in a sliding mode.
2. The daughter quartz boat transfer mechanism as claimed in claim 1, wherein said clamping jaws (5) comprise a mounting plate (501), moving arms (502) are disposed on two sides of said mounting plate (501), and a driving cylinder (503) for driving said moving arms (502) is disposed on said mounting plate (501); a limiting hole (504) is formed in the lower portion of the moving arm (502), and a clamping mechanism (505) is arranged on the inner side face of the moving arm (502) corresponding to the limiting hole (504).
3. A parent quartz boat handling mechanism according to claim 2, wherein the clamping mechanism (505) comprises a clamping cylinder (5051) disposed on the moving arm (502), the output end of the clamping cylinder (5051) is provided with a clamping block (5052), and the clamping block (5052) is provided with a clamping groove (5053) corresponding to the limiting hole (504).
4. The boat-carrying mechanism as claimed in claim 2, wherein the mounting plate (501) is provided with a baffle (506) and a limiting plate (507) on the other two sides, and the mounting plate (501) is provided with a cylinder for driving the limiting plate (507).
5. The daughter quartz boat transfer mechanism as claimed in claim 2 wherein said transfer arm (502) is provided with a position sensor.
6. The boat-carrying mechanism for the mother and son quartz boats as claimed in claim 1, wherein the placing mechanism comprises a mounting frame (6) movably disposed on the second rail (3), the mounting frame (6) is provided with a fixed cylinder (7) at both ends, and the fixed cylinder (7) is provided with a fixed plate (8) at the output end.
7. The son-mother quartz boat handling mechanism as claimed in claim 6, wherein the bottom of the mounting rack (6) is provided with a plurality of sensors (9) at intervals.
8. The daughter quartz boat transfer mechanism as claimed in claim 6 wherein the mounting bracket (6) is provided with a position sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222236194.8U CN218241795U (en) | 2022-08-24 | 2022-08-24 | Primary and secondary quartz boat carrying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222236194.8U CN218241795U (en) | 2022-08-24 | 2022-08-24 | Primary and secondary quartz boat carrying mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218241795U true CN218241795U (en) | 2023-01-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222236194.8U Active CN218241795U (en) | 2022-08-24 | 2022-08-24 | Primary and secondary quartz boat carrying mechanism |
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| CN (1) | CN218241795U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116705670A (en) * | 2023-08-07 | 2023-09-05 | 拉普拉斯新能源科技股份有限公司 | Grabbing method and device for height Wen Zhou |
-
2022
- 2022-08-24 CN CN202222236194.8U patent/CN218241795U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116705670A (en) * | 2023-08-07 | 2023-09-05 | 拉普拉斯新能源科技股份有限公司 | Grabbing method and device for height Wen Zhou |
| CN116705670B (en) * | 2023-08-07 | 2024-01-02 | 拉普拉斯新能源科技股份有限公司 | Grabbing method and device for height Wen Zhou |
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