CN217756926U - Semiconductor wet process equipment processing procedure clean water saving and recycling device - Google Patents
Semiconductor wet process equipment processing procedure clean water saving and recycling device Download PDFInfo
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- CN217756926U CN217756926U CN202221635665.6U CN202221635665U CN217756926U CN 217756926 U CN217756926 U CN 217756926U CN 202221635665 U CN202221635665 U CN 202221635665U CN 217756926 U CN217756926 U CN 217756926U
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 title claims abstract description 57
- 238000004064 recycling Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 239000002351 wastewater Substances 0.000 claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 238000005516 engineering process Methods 0.000 claims description 6
- 238000011084 recovery Methods 0.000 abstract description 14
- 238000004140 cleaning Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Priority Applications (1)
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CN202221635665.6U CN217756926U (en) | 2022-06-18 | 2022-06-18 | Semiconductor wet process equipment processing procedure clean water saving and recycling device |
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CN202221635665.6U CN217756926U (en) | 2022-06-18 | 2022-06-18 | Semiconductor wet process equipment processing procedure clean water saving and recycling device |
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CN217756926U true CN217756926U (en) | 2022-11-08 |
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CN202221635665.6U Active CN217756926U (en) | 2022-06-18 | 2022-06-18 | Semiconductor wet process equipment processing procedure clean water saving and recycling device |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 226500 No. 28, Taoli Road, Xiayuan Town, Rugao City, Nantong City, Jiangsu Province Patentee after: Lijihong Optoelectronic Technology (Nantong) Co.,Ltd. Country or region after: China Address before: 215300 room 311, room 1, 268 Dengyun Road, Yushan Town, Kunshan City, Jiangsu Province Patentee before: Lijihong Optoelectronic Technology (Kunshan) Co.,Ltd. Country or region before: China |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Room 128, Building B, No. 3 Rugang Road, Changjiang Town, Rugao City, Nantong City, Jiangsu Province, 226500 Patentee after: Lijihong Optoelectronic Technology (Nantong) Co.,Ltd. Country or region after: China Address before: 226500 No. 28, Taoli Road, Xiayuan Town, Rugao City, Nantong City, Jiangsu Province Patentee before: Lijihong Optoelectronic Technology (Nantong) Co.,Ltd. Country or region before: China |
|
CP03 | Change of name, title or address |