CN115385403A - Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process - Google Patents

Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process Download PDF

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Publication number
CN115385403A
CN115385403A CN202210820155.4A CN202210820155A CN115385403A CN 115385403 A CN115385403 A CN 115385403A CN 202210820155 A CN202210820155 A CN 202210820155A CN 115385403 A CN115385403 A CN 115385403A
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CN
China
Prior art keywords
process equipment
water
recycling
electromagnetic valve
equipment
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Pending
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CN202210820155.4A
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Chinese (zh)
Inventor
林正辉
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Lijihong Optoelectronic Technology Kunshan Co ltd
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Lijihong Optoelectronic Technology Kunshan Co ltd
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Priority to CN202210820155.4A priority Critical patent/CN115385403A/en
Publication of CN115385403A publication Critical patent/CN115385403A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/005—Processes using a programmable logic controller [PLC]

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  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A clean water saving and recycling device for a semiconductor wet method equipment manufacturing process is provided with a recycling pool and a waste water pool, wherein a PLC controller is used for controlling a three-way electromagnetic valve by detecting the clean resistance value of water, and the water meeting the water cleaning standard flows into the recycling pool. The device discharges the waste water meeting the water quality requirement into a recovery tank for recycling by changing a recovery pipeline of a semiconductor wet method equipment manufacturing process, and discharges the waste water not meeting the requirement into a waste water tank. The device adopts the PLC to set time and set parameters of an electronic water resistance value to control the steering of the three-way electromagnetic valve, thereby determining whether water enters a wastewater discharge tank or a recovery tank.

Description

Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process
Technical Field
The invention relates to a water recovery device, in particular to a clean water saving and recovery device for a semiconductor wet process equipment manufacturing process, which is provided with a recovery pool and a wastewater pool, wherein water meeting the water cleaning standard flows into the recovery pool by detecting the resistance value of the clean water and controlling a three-way electromagnetic valve by a PLC (programmable logic controller).
Background
The waste water in the existing semiconductor wet method equipment manufacturing process is directly discharged into a waste water tank through a manual valve and a waste water pipeline, and if relatively clean water flows out in the semiconductor wet method equipment manufacturing process, the clean water only flows into the waste water tank in a whitish way, so that precious water resources are wasted.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the clean water saving and recycling device for the semiconductor wet method equipment manufacturing process, which is provided with the recycling tank and the waste water tank, and is used for flowing water meeting the water cleaning standard into the recycling tank by detecting the resistance value of the clean water and controlling the three-way electromagnetic valve by using the PLC.
The technical scheme adopted by the invention for solving the technical problems is as follows: a clean water saving and recycling device for a semiconductor wet equipment process technology comprises a process equipment box body 15, a recycling tank 13 and a waste water tank 14, wherein a first process equipment 16, a second process equipment 17, a third process equipment 18 and a fourth process equipment 19 are arranged in the process equipment box body 15, the first process equipment 16, the second process equipment 17, the third process equipment 18 and the fourth process equipment 19 are respectively provided with a manual valve 10 at the bottom, the manual valve 10 is connected with an electronic water resistance value 8, the electronic water resistance value 8 is connected with a three-way electromagnetic valve 2, the outlet end of the three-way electromagnetic valve 2 is connected with a waste water pipeline 11, the waste water pipeline 11 is connected to the waste water tank 14, the other end of the outlet of the three-way electromagnetic valve 2 is connected with a recycled water pipeline 12, the recycled water pipeline 12 is connected to the recycling tank 13, a reset button 7 and a starting button 9 are arranged on the upper portion of the left side of the process equipment box body 15, an alarm lamp 3 and an alarm horn 4 are arranged on the upper portion of the left side of the process equipment box body 15, a PLC controller 1 is arranged on the lower portion of the left side of the process equipment box body 15, and a battery 5 and a power switch 6 are arranged on the lower portion of the process equipment box body 15.
The invention has the beneficial effects that the waste water meeting the water quality requirement is discharged into the recovery tank for recovery and reuse by changing the recovery pipeline of the semiconductor wet equipment process technology. Discharging the wastewater which does not meet the requirements into a wastewater pool. The device adopts the PLC to set time and set parameters of an electronic water resistance value to control the steering of the three-way electromagnetic valve, thereby determining whether the device enters a wastewater discharge tank or a recovery tank, and the design aims at recycling most of relatively clean deionized water in the process flow of semiconductor wet equipment, recycling water resources under lower treatment cost and achieving the aim of reducing wastewater discharge treatment.
Drawings
The invention is further illustrated with reference to the following figures and examples.
Fig. 1 is a block diagram of a first embodiment of the present invention.
Fig. 2 is a circuit diagram of a first embodiment of the present invention.
In the figure: the automatic control system comprises a PLC (programmable logic controller), a three-way electromagnetic valve, a 3 alarm lamp, a 4 alarm horn, a 5 battery, a 6 power switch, a 7 reset button, an 8 electronic water resistance value, a 9 start button, a 10 manual valve, a 11 waste water pipeline, a 12 recovered water pipeline, a 13 recovered pool, a 14 waste water pool, a 15 process equipment box, a 16 process equipment, a 17 process equipment, a 18 process equipment and a 19 process equipment.
Detailed Description
In the embodiment shown in fig. 1, a PLC controller (1), a three-way electromagnetic valve (2), an alarm lamp (3), an alarm horn (4), a battery (5), a power switch (6), a reset button (7), an electronic water resistance value meter (8), a start button (9), a manual valve (10), a wastewater pipeline (11), a recovered water pipeline (12), a recovery tank (13), a wastewater tank (14), a processing equipment box body (15), a first processing equipment (16), a second processing equipment (17), a third processing equipment (18) and a fourth processing equipment (19) are provided.
The clean water saving and recycling device for the semiconductor wet method equipment processing technology comprises a processing equipment box body (15), a recycling tank (13) and a wastewater tank (14), wherein a first processing equipment (16), a second processing equipment (17) and a third processing equipment (18) are arranged in the processing equipment box body (15), process equipment (19) No. four, process equipment (16), process equipment (17) No. two, process equipment (18) No. three, process equipment (19) No. four has been put manual valve (10) respectively to process equipment (19) bottom, electronic water resistance value (8) are connected in manual valve (10), tee bend solenoid valve (2) are connected in electronic water resistance value (8), waste water pipeline (11) is connected to tee bend solenoid valve (2) exit end, waste water pipeline (11) are connected to waste water pond (14), return water pipeline (12) are connected to tee bend solenoid valve (2) export other end, return water pipeline (12) are connected to recovery pond (13), reset button (7) and start button (9) are installed to process equipment box (15) left side upper portion, alarm lamp (3) and warning loudspeaker (4) are installed to upper portion in process equipment box (15) left side, lower part installation PLC controller (1) in process equipment box (15) left side, process equipment box (15) left side lower part installation battery (5) and switch (6).
The clean water saving and recycling device for the semiconductor wet process equipment manufacturing process is implemented, a pin 1 of a PLC (1) is electrically connected with one end of a starting button (9), a pin 2 of the PLC (1) is electrically connected with one end of an electronic water resistance value meter (8), a pin 3 of the PLC (1) is electrically connected with one end of a reset button (7), a pin 4 of the PLC (1) is electrically connected with the other end of the reset button (7), a pin 5 of the PLC (1) is electrically connected with one end of a power switch (6), the other end of the power switch (6) is electrically connected with a cathode end of a battery (5), a pin 6 of the PLC (1) is electrically connected with one end of a three-way electromagnetic valve (2), a pin 7 of the PLC (1) is electrically connected with one end of an alarm lamp (3), a pin 8 of the PLC (1) is electrically connected with one end of the alarm horn (4), a pin 10 of the PLC (1) is electrically connected with an anode end of the battery (5), the other end of the alarm horn (4), the other end of the alarm lamp (3), the other end of the three-way electromagnetic valve (2), the other end of the electronic water resistance value meter button (9) and the starting button (9).
The clean water saving and recycling device for the semiconductor wet method equipment processing technology can be implemented by a first processing equipment (16), a second processing equipment (17), a third processing equipment (18) and a fourth processing equipment (19) which can be expanded to no more than 100 at most.
The clean water saving and recycling device for the semiconductor wet method equipment manufacturing process is implemented, the three-way electromagnetic valve (2) is a steering electromagnetic valve, the three-way electromagnetic valve (2) is connected with the recycled water pipeline (12) in the power-on state, and the three-way electromagnetic valve (2) is connected with the waste water pipeline (11) in the power-off state.
By implementing the clean water saving and recycling device for the semiconductor wet equipment processing technology, the PLC (1) can set the time and the parameters of the electronic water resistance value to determine the electrification of the three-way electromagnetic valve (2) and control the steering of the three-way electromagnetic valve (2).
The clean water saving and recycling device for the semiconductor wet process equipment manufacturing process is implemented by changing a recycling pipeline of the semiconductor wet process equipment manufacturing process, and discharging the waste water meeting the water quality requirement into a recycling tank for recycling. Discharging the waste water which does not meet the requirements into a waste water tank. The device adopts the PLC to set time and set parameters of an electronic water resistance value to control the steering of the three-way electromagnetic valve, thereby determining whether the device enters a wastewater discharge tank or a recovery tank.
According to the clean water saving and recycling device for the semiconductor wet process equipment manufacturing process, after the PLC meets the time condition, if the water quality can pass the requirement, the PLC is discharged into a recycling system; if the water quality can not meet the requirement, the water is discharged into a waste water system, and the water is not discharged into a reclaimed water system until the water quality meets the requirement.
The clean water saving and recycling device for the semiconductor wet method equipment processing process has the advantage that the waste reduction effect is realized, and related setting is made on the programming of the equipment according to the requirements of the processing process, so that the waste water discharge amount can be reduced by at least 1/3.
The clean water saving and recovering device for the semiconductor wet equipment process technology adopts time to control the whole system, when an operator presses a start button, the equipment process starts, when the drainage time is not due, the discharged water is discharged into a waste water pipeline, when the appointed time is due, a PLC (programmable logic controller) compares whether the reading of a water resistance value meets the requirement, if not, the recovered water pipeline of a three-way electromagnetic valve is not communicated, the waste water is directly discharged into a waste water pool, and an alarm lamp and a buzzer are communicated, and when the reading of the water resistance value meets the condition, a reset button is pressed, so that the alarm can be eliminated. When the reading of the water resistance value accords with the condition, the recovered water pipeline of the three-way electromagnetic valve is communicated, and the discharged water is discharged into a recovered water tank until the manufacturing process is finished.
The invention has good effect.

Claims (5)

1. The clean water saving and recycling device for the semiconductor wet process equipment process comprises a process equipment box body (15), a recycling tank (13) and a wastewater disposal basin (14), and is characterized in that a first process equipment (16), a second process equipment (17), a third process equipment (18) and a fourth process equipment (19) are arranged in the process equipment box body (15), the first process equipment (16), the second process equipment (17), the third process equipment (18) and the fourth process equipment (19) are respectively provided with a manual valve (10) at the bottom, the manual valve (10) is connected with an electronic water resistance value (8), the electronic water resistance value (8) is connected with a three-way electromagnetic valve (2), the outlet end of the three-way electromagnetic valve (2) is connected with a wastewater pipeline (11), the wastewater pipeline (11) is connected with the wastewater disposal basin (14), the other end of an outlet of the three-way electromagnetic valve (2) is connected with the recycling water pipeline (12), the recycling water pipeline (12) is connected with the recycling tank (13), a reset button (7) and a start button (9) are arranged on the upper part of the left side of the process equipment box body (15), an alarm lamp (3) and a left side switch (5) are arranged on the left side of the process equipment box body (15), and a left side switch (5) and a left side switch device switch (5) is arranged on the process equipment (15) .
2. The semiconductor wet process equipment processing procedure clean water saving and recycling device according to claim 1, characterized in that the 1 st pin of the PLC controller (1) is electrically connected with one end of a starting button (9), the 2 nd pin of the PLC controller (1) is electrically connected with one end of an electronic water resistance value meter (8), the 3 rd pin of the PLC controller (1) is electrically connected with one end of a reset button (7), the 4 th pin of the PLC controller (1) is electrically connected with the other end of the reset button (7), the 5 th pin of the PLC controller (1) is electrically connected with one end of a power switch (6), the other end of the power switch (6) is electrically connected with the cathode end of a battery (5), the 6 th pin of the PLC controller (1) is electrically connected with one end of a three-way electromagnetic valve (2), the 7 th pin of the PLC controller (1) is electrically connected with one end of an alarm lamp (3), the 8 th pin of the PLC controller (1) is electrically connected with one end of an alarm horn (4), the 10 th pin of the PLC controller (1) is electrically connected with the anode end of the battery (5), the other end of the alarm horn (4), the other end of the alarm lamp (3), the other end of the three-way electromagnetic water resistance value meter (9), and the other end of the electronic water resistance value meter (9).
3. The clean water saving and recycling device for semiconductor wet equipment processing technology according to claim 1, wherein the number of the first processing equipment (16), the second processing equipment (17), the third processing equipment (18) and the fourth processing equipment (19) can be expanded to not more than 100 at most.
4. The clean water saving and recycling device for the semiconductor wet method equipment process technology according to claim 1, characterized in that the three-way electromagnetic valve (2) is a steering electromagnetic valve, the three-way electromagnetic valve (2) is connected with the recycled water pipeline (12) in the power-on state, and the three-way electromagnetic valve (2) is connected with the waste water pipeline (11) in the power-off state.
5. The clean water saving and recycling device for the manufacturing process of semiconductor wet equipment as claimed in claim 1, characterized in that the PLC controller (1) can set parameters of time and electronic water resistance value to determine the energization of the three-way solenoid valve (2) and control the turning of the three-way solenoid valve (2).
CN202210820155.4A 2022-06-18 2022-06-18 Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process Pending CN115385403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210820155.4A CN115385403A (en) 2022-06-18 2022-06-18 Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210820155.4A CN115385403A (en) 2022-06-18 2022-06-18 Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process

Publications (1)

Publication Number Publication Date
CN115385403A true CN115385403A (en) 2022-11-25

Family

ID=84116530

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210820155.4A Pending CN115385403A (en) 2022-06-18 2022-06-18 Device for saving and recycling clean water in semiconductor wet method equipment manufacturing process

Country Status (1)

Country Link
CN (1) CN115385403A (en)

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