CN216792374U

CN216792374U - Multi-cavity mistake-proofing automatic control baking oven for integrated circuit testing

Info

Publication number: CN216792374U
Application number: CN202122458324.8U
Authority: CN
Inventors: 范建华; 戴俊玺
Original assignee: Beijing Weijie Chuangxin Precision Measurement Technology Co ltd
Current assignee: Beijing Weijie Chuangxin Precision Measurement Technology Co ltd
Priority date: 2021-10-12
Filing date: 2021-10-12
Publication date: 2022-06-21
Anticipated expiration: 2031-10-12

Abstract

The utility model discloses a multi-cavity mistake-proofing automatic control baking oven for integrated circuit testing. The baking oven comprises a baking oven body, wherein a plurality of mutually communicated baking cavities are arranged in the baking oven body, and a baking inlet is formed in one side of each baking cavity, which faces the front side of the baking oven body; the inner sides of the baking cavities, which are opposite to the front side of the baking box body, are provided with detection sensors for detecting whether materials to be baked exist in the baking cavities or not; the chamber doors are all arranged on the front surface of the baking box body and respectively correspond to the baking inlets of the baking cavities so as to seal or open the baking inlets; the carrier drawers are respectively installed in the baking cavities in a drawing mode and are used for bearing materials to be baked. This toast case can effectively avoid the human error to get and put the stoving product to guarantee the stability of the interior temperature of toasting case.

Description

Multi-cavity mistake-proofing automatic control baking oven for integrated circuit testing

Technical Field

The utility model relates to a multi-cavity mistake-proofing automatic control baking oven for integrated circuit testing, and belongs to the technical field of integrated circuit sealing and testing.

Background

With the development of the times, automobiles, computers and mobile phones become important components of daily work and life entertainment. These are mainly attributed to the rapid advancement of integrated circuit technology. The integrated circuit has higher and higher integration level, more and more powerful functions and smaller volume. The integrated circuit testing industry is becoming an indispensable independent industry in the integrated circuit industry. The baking oven is in the test process, and the equipment of guarantee chip stability plays crucial effect as getting rid of moisture among the integrated circuit.

Integrated circuit chips need to be screened for chip performance before being assembled into terminal electronic products. The performance screening process is a chip testing link. In the testing step, the wafer slices are packaged, and in order to ensure that the product performance is not affected by moisture, the wafer slices are subjected to a baking step before or after being tested by a performance testing machine, so that the moisture in the product is discharged. Typically, baking is carried out for more than 10 hours in an environment of over one hundred degrees depending on the process requirements.

At present, the chip baking box commonly used adopts the traditional mode and structure, namely, a multilayer clapboard is arranged in a whole large cavity and used for placing more baked products. According to production requirements, personnel place single-batch or multi-batch products in a baking oven, and set temperature, heat and turn on and the like. When new products to be baked exist, the door of the baking box is opened to place the products to be baked in batches in the idle baking area. When the baking time of the product meets the requirement, an operator opens the door of the baking box with the heat insulation gloves to take out the baked product.

When the chip baking box in the prior art is actually used, the following problems still exist:

firstly, the same batch or multiple batches of products can be put in at different times in the actual baking process, so that when an operator takes and puts out the baked materials, the risk of mistakenly taking out the products which do not reach the baking time or forgetting to take out the products which reach the baking time exists, and the products can be baked incompletely or excessively.

Second, toast the in-process and add the product of waiting to toast, need open cavity room door, will cause the inside temperature of toasting case and set for the temperature mismatch condition like this.

Thirdly, products to be baked are added in the baking process, and the products need to be placed into the high-temperature box by an operator, so that operation risks such as scalding exist.

Fourthly, during the process of taking and placing the products, the operation needs to be careful and slow due to high temperature, products placed inside and the like.

Fifth, there is a mix of risks during human handling, as the products to be baked and the baked products are not easily distinguishable.

Disclosure of Invention

The utility model aims to solve the technical problem of providing a multi-cavity mistake-proofing automatic control baking oven for integrated circuit testing.

In order to achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides a case is toasted in mistake proofing automatic control of multi-chamber towards integrated circuit test, includes:

the baking oven comprises a baking oven body, a plurality of baking chambers which are communicated with each other are arranged in the baking oven body, and a baking inlet is arranged on one side of each baking chamber, which faces the front surface of the baking oven body;

the chamber doors are all arranged on the front surface of the baking box body and respectively correspond to baking inlets of the baking cavities so as to seal or open the baking inlets;

and the carrier drawers are respectively arranged in the baking cavities in a drawing manner and are used for bearing the materials to be baked.

Wherein preferably, install the cavity label on the cavity door, one side of cavity label is equipped with the label telescopic machanism, the label telescopic machanism can follow the flexible removal of setting for the direction to shelter from or expose to the cavity label.

Wherein preferably, label telescopic machanism includes telescopic cylinder, fixed block and shielding plate, telescopic cylinder fixes one side of cavity label, the fixed block is fixed telescopic cylinder's power take off end is last, the shielding plate is fixed be close to on the fixed block one side of cavity door, telescopic cylinder's power take off end can drive the fixed block is along being close to or keeping away from the flexible removal of direction of cavity label, in order to drive the shielding plate shelters from or exposes to the cavity label.

Preferably, the carrier drawer is provided with a containing cavity, four corners of the bottom of the containing cavity are provided with supporting seats, and the side walls of two sides of the containing cavity are provided with symmetrically-arranged taking and placing grooves.

Preferably, a detection through hole is formed in one end, close to the detection sensor, of the carrier drawer, and a handle is arranged at one end, far away from the detection sensor, of the carrier drawer.

Wherein preferably, all be equipped with the slide on the inner wall of toasting the chamber both sides, all be equipped with the leading wheel on the outer wall of carrier drawer both sides, the leading wheel with slide sliding fit.

Wherein preferably, the front of toasting the case body still is equipped with a plurality of electronic magnetic locks, each electronic magnetic lock sets up respectively in one side of each cavity door to lock cavity door or remove the locking to cavity door.

Wherein preferably, each bake out the chamber with bake out the relative inboard in front of case body and all be equipped with detection sensor for detect whether there is the material of waiting to toast in the chamber.

According to the multi-cavity mistake-proofing automatic control baking oven provided by the utility model, as the baking oven body is provided with a plurality of mutually communicated baking cavities, the baked products can be effectively prevented from being taken and placed by mistake, and meanwhile, each baking cavity is provided with an independent cavity door to be matched with the electric magnetic lock at one side of each cavity door for automatic control, so that the baking time of each product is ensured to meet the process requirements; in addition, the temperature in the baking box is less influenced by the opening of the single baking cavity, so that the stability of the temperature in the baking box is ensured.

Drawings

Fig. 1 is a schematic structural diagram of a multi-cavity error-proofing automatic control baking oven for integrated circuit testing according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a carrier drawer according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a chamber door according to an embodiment of the present invention;

FIG. 4 is a flow chart of the multi-chamber mistake proofing automatic control baking oven for baking chips.

Detailed Description

The technical contents of the utility model are described in detail below with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1, a multi-cavity error-proofing automatic control baking oven for integrated circuit testing according to an embodiment of the present invention includes: a toaster body 1, a plurality of chamber doors 2 and a plurality of carrier drawers 3. Wherein, toast case body 1 and have the interior chamber of toasting, should toast the interior intracavity and have heating element and temperature control assembly to the messenger toasts the inner chamber and can reach the settlement temperature, a plurality of chamber door 2 are used for opening or close and toast the entry, and a plurality of carrier drawers 3 are used for bearing the weight of the material of waiting to toast (for example, Tray or wafer section encapsulation back product) and can pass in and out toast case body 1, in order to treat toasting of material or take out.

The baking oven comprises a baking oven body 1, a heating device and a cooling device, wherein the baking oven body 1 is internally provided with a plurality of baking cavities 11 which are communicated with each other, namely, a large cavity in the baking oven body 1 is divided into a plurality of small cavities which are communicated with each other; the side of each baking cavity 11 facing the front face (i.e. the face a in fig. 1) of the baking box body 1 is provided with a baking inlet 111 for the material to be baked to enter and exit; the inboard that each toast chamber 11 and toast the relative in front of case body 1 all is equipped with detection sensor 12 to whether there is the material of waiting to toast in being used for detecting toasting chamber 11.

In the embodiment of the present invention, the baking box body 1 is in a rectangular parallelepiped shape, and the baking cavity 11 is also in a rectangular parallelepiped shape, but the present invention is not limited to the specific shapes of the baking box body 1 and the baking cavity 11, and in other embodiments, the present invention may also be in other shapes such as a cylindrical shape, a triangular prism shape, and the like.

A plurality of chamber doors 2 are all installed at the front of the oven body 1, and the plurality of chamber doors 2 correspond to the baking entrances 111 of the plurality of baking chambers 11, respectively, to close or open the baking entrances 111. Wherein, a plurality of cavity door 2 independent control, the normal use that does not influence other cavity door 2 is opened and is closed to one of them cavity door 2, and every independent cavity door 2 carries out switch and alarm according to actual setting condition. The structural design of multi-cavity can effectively keep apart that the people is wrong to get and put the material of waiting to toast, combines the independent control of a plurality of cavity door 2, can ensure that every time of toasting of waiting to toast the material reaches the technological requirement. Meanwhile, the area of the opened oven door is small when the materials to be baked are taken and placed in each baking cavity 11, so that the influence on the internal temperature of the baking oven body 1 is small.

A plurality of carrier drawers 3 are respectively installed in a plurality of baking cavities 11 in a drawable manner, and the carrier drawers 3 are used for bearing materials to be baked. Specifically, referring to fig. 2, the carrier drawer 3 has a containing cavity 31, and the material to be roasted is arranged in the containing cavity 31; the four corners of the bottom of the accommodating cavity 31 are provided with supporting seats 32 for supporting the placement of the material to be baked, and when the material to be baked is placed in the accommodating cavity 31, the four corners of the material to be baked can be respectively supported on the four supporting seats 32, so that the material to be baked is suspended in the accommodating cavity 31, and the top surface and the bottom surface of the material to be baked can be baked conveniently; meanwhile, the side walls at the two sides of the accommodating cavity 31 are provided with symmetrical taking and placing grooves 311, so that the materials to be baked can be taken and placed conveniently.

In addition, in the embodiment of the present invention, the side walls on both sides of the accommodating cavity 31 are inclined guide surfaces, that is, the distance between the tops of the side walls on both sides of the accommodating cavity 31 is slightly greater than the distance between the bottoms of the side walls on both sides of the accommodating cavity 31, so that a certain guide effect can be provided for placing the material to be baked, and the material to be baked can be taken and placed conveniently.

In the above embodiment, one end of the carrier drawer 3 close to the detection sensor 12 is provided with the detection through hole 33, so that the detection sensor 12 can detect whether the material to be baked exists in the accommodating cavity 31 through the detection through hole 33; the detection through hole 33 is preferably elongated, but may be circular or polygonal. Meanwhile, a handle 34 is disposed at one end of the carrier drawer 3 away from the detection sensor 12, and the carrier drawer 3 can be drawn by using the handle 34, so that the convenience of drawing the carrier drawer 3 is improved.

In the above embodiment, the inner walls of the two sides of the baking chamber 11 are provided with the slide rails 112, the outer walls of the two sides of the carrier drawer 3 are provided with the guide wheels 35, and the guide wheels 35 are in sliding fit with the slide rails 112. Accordingly, the movement of the carrier drawer 3 can be guided by the sliding engagement of the guide wheels 35 and the slide rails 112, and the convenience of drawing the carrier drawer 3 can be improved. It is preferable that the diameter of the guide wheel 35 matches the width of the slide track 112, so as to improve the stability of the carrier drawer 3 in drawing, and of course, in other embodiments, the diameter of the guide wheel 35 may be smaller than the width of the slide track 112, and the specific size is not limited herein.

Referring to fig. 3, a chamber label 21 is installed on the chamber door 2, a label extension mechanism 22 is disposed on one side of the chamber label 21, and the label extension mechanism 22 can move in a set direction in an extension and contraction manner to shield or expose the chamber label 21. The barcode of the cavity label 21 contains cavity information, and the cavity information specifically may include: the position and number of the toasting cavity 11, the current operating state etc. After operating personnel pressed the feed door and opened the button, label telescopic machanism 22 drove the automatic display that rises of cavity label 21 to show that present toasting chamber 11 that is in idle state, confirm the back at present batch through sweeping the sign indicating number, idle state's toasting chamber 11 is opened, and operating personnel takes carrier drawer 3 out, will wait to toast the material and place in carrier drawer 3, and with inside carrier drawer 3 pushed back toasting chamber 11, then close cavity door 2. The batch anti-mixing of the materials to be baked is realized by comparing the data of the label telescopic mechanism 22 (namely hardware) and the data of the label identification system (namely software), namely, the batch of the products to be baked is bound with the chamber label 21 so as to record which material to be baked is placed in each baking cavity 11, and after the baking is started, the label telescopic mechanism 22 drives the chamber label 21 to automatically hide.

In the above embodiment, the label retracting mechanism 22 includes the retracting cylinder 221, the fixing block 222, and the shielding plate 223. Wherein, the telescopic cylinder 221 is fixed at one side of the chamber label 21 for providing a driving force, in other embodiments, the telescopic cylinder 221 may also be adaptively replaced with a linear motor, an electric push rod, and other power components; the fixed block 222 is fixed on the power output end of the telescopic cylinder 221 to serve as a connecting piece between the telescopic cylinder 221 and the shielding plate 223; the shielding plate 223 is fixed on the fixing block 222 at a side close to the chamber door 2, and the power output end of the telescopic cylinder 221 can drive the fixing block 222 to move telescopically along a direction close to or far away from the chamber label 21 (i.e., the up-down direction in fig. 3), so as to drive the shielding plate 223 to shield or expose the chamber label 21. It can be understood that the telescopic cylinder 221 is electrically connected to a tag recognition system to control the telescopic motion of the telescopic cylinder 221 by the tag recognition system.

Referring to fig. 1, in the above embodiment, the front surface of the oven body 1 is further provided with a plurality of electromagnetic locks 13, and each electromagnetic lock 13 is respectively disposed at one side of each chamber door 2 to lock the chamber door 2 or unlock the chamber door 2. Specifically, the electric magnetic lock 13 locks or unlocks the chamber door 2 by switching on and off the magnetic force, for example: the electric magnetic lock 13 generates magnetic force in the power-on state, no magnetic force is generated in the power-off state, and after the chamber door 2 is closed, the electric magnetic lock 13 generates magnetic force by powering on the electric magnetic lock 13 so as to lock the chamber door 2; when the chamber door 2 needs to be opened, the electric magnetic lock 13 is powered off to enable the electric magnetic lock 13 to have no magnetic force, and at the moment, the electric magnetic lock 13 releases the locking of the chamber door 2, so that the chamber door 2 can be opened. Therefore, the electric magnetic lock 13 can improve the stability and the sealing performance of the use of the chamber door 2, and the failure caused by the untight closing of the chamber door 2 can be avoided.

In addition, it can be understood that the electromagnetic lock 13 can be automatically controlled by the control system, after the chamber tag 21 shows the baking chamber 11 currently in the idle state, the current batch is confirmed by scanning the code, and the electromagnetic lock 13 is controlled to be powered off, so that the baking chamber 11 in the idle state can be opened. In the embodiment of the present invention, the locking of the chamber door 2 by the electromagnetic lock 13 is only one embodiment, and in other embodiments, the electromagnetic lock 13 may be adaptively replaced by other mechanical locks or electric lock structures.

Referring to fig. 4, the process of baking chips in the multi-cavity mistake-proofing automatic control baking oven specifically includes the following steps:

s1: the oven body 1 is started, and the internal baking cavity of the oven body 1 is heated to a set temperature.

Specifically, press start button 101 and heating button 102 on the case body 1 of toasting for this internal heating system of case begins to heat, detects the inside temperature of the case body of toasting through temperature sensor, and after temperature sensor detected the inside temperature of the case body of toasting and reached the settlement temperature, the stop heating and opened the heat preservation mode, in order to keep the temperature at this settlement temperature.

S2: the chamber door is opened, the material to be baked is placed in the carrier drawer and pushed into the baking chamber.

Specifically, the method further comprises steps S21-S24:

s21: clicking a cavity door opening button 103 on the baking oven body 1;

s22: the working state of each baking chamber 11 is displayed through a chamber label 21 arranged on the chamber door 2; namely: the position, number and whether the baking chambers 11 are in an idle state;

s23: scanning a bar code of the chamber label 21 to perform system recording and information comparison so as to bind the material to be baked with the chamber label 21; from this, it is known which roasting chamber 11 the material to be roasted is about to enter for roasting.

S24: opening a chamber door of the baking chamber with an empty working state;

s25: the material to be baked is placed in the carrier drawer 3 of the baking chamber and pushed into the baking chamber 11, closing the chamber door 2.

S3: detecting whether a material to be baked exists in the baking cavity or not by using a detection sensor, if so, setting baking time and starting timing, and if not, starting a material-free alarm program;

specifically, after the material to be baked is pushed into the baking cavity 11, the cavity door 2 is closed, the detection sensor 12 on the inner wall of the baking cavity 11 is used for detecting whether the material to be baked exists in the carrier drawer 3 through the detection through hole 33 of the carrier drawer 3, and the step S31 and the step S32 are respectively executed according to whether the material to be baked exists in the carrier drawer 3.

S31: if the materials to be baked exist, the system starts to set baking time (for example, 10H) and starts to time, so as to ensure that each material to be baked can be independently timed, and further ensure that each material to be baked can be baked for a sufficient time.

S32: if the materials to be baked do not exist, starting a material-free alarm program, wherein the material-free alarm program comprises the following steps of S321-S323:

s321: after detecting sensor and detecting no material in toasting chamber 11, the chamber label 21 of installation on the chamber door 2 shows unusually to no material warning suggestion, for example: voice prompts, indicator light prompts, and the like;

s322: confirming on the spot manually, eliminating alarm factors;

s323: the chamber label 21 returns to normal.

S4: starting a prompting alarm program when the set time is reached; the prompting and alarming program can prompt the operator in modes of voice prompt, indicator light prompt and the like.

S5: whether the materials to be roasted exist in the roasting cavity 11 or not is detected by using the detection sensor 12, if so, the prompt alarm program is continuously started, and if not, the prompt alarm program is cancelled to wait for feeding of the next batch.

Specifically, after the set time is reached, the material to be roasted needs to be taken out manually, and at the moment, when the material still exists in the roasting cavity 11 through the detection sensor 12, it is indicated that the operator does not take out the roasted material in time, so that the prompt alarm program is continuously started to prompt the operator to take out the material as soon as possible; when the operator takes out the material, the detection sensor 12 detects that the material to be roasted does not exist in the roasting cavity 11. At the moment, the prompting alarm program is cancelled, and the next batch of materials is waited to be baked.

In conclusion, the multi-cavity mistake-proofing automatic control baking oven provided by the utility model has the advantages that the baking oven body 1 is provided with the plurality of mutually communicated baking cavities 11, so that the baked products can be effectively prevented from being taken and placed by mistake, meanwhile, each baking cavity 11 is provided with the independent cavity door 2, and the automatic control is carried out by matching with the electric magnetic lock 13 on one side of each cavity door 2, so that the baking time of each product is ensured to meet the process requirements; in addition, the temperature in the baking box is less affected by the opening of the single baking cavity 11, so that the stability of the temperature in the baking box is ensured. The tag telescoping mechanism 22 can bind the material to be toasted with the toasting cavity 11 in cooperation with the tag identification system to prevent confusion. The carrier drawer 3 adopts a slide way roller form to realize back and forth sliding, and the whole design is more in line with human engineering.

The multi-cavity error-proofing automatic control baking oven for integrated circuit testing provided by the utility model is explained in detail above. It will be apparent to those skilled in the art that any obvious modifications thereof can be made without departing from the spirit of the utility model, which infringes the patent right of the utility model and bears the corresponding legal responsibility.

Claims

1. The utility model provides a case is toasted in mistake proofing automatic control of multi-chamber towards integrated circuit test which characterized in that includes:

the carrier drawers are respectively installed in the baking cavities in a drawing mode and are used for bearing materials to be baked.

2. The multi-chamber fail-safe automatically controlled roaster oven of claim 1, wherein:

install the cavity label on the cavity door, one side of cavity label is equipped with label telescopic machanism, label telescopic machanism can follow the flexible removal of settlement direction to shelter from or expose the cavity label.

3. The multi-chamber fail-safe automatically controlled roaster oven of claim 2, wherein:

the label telescopic machanism includes telescopic cylinder, fixed block and shielding plate, telescopic cylinder fixes one side of cavity label, the fixed block is fixed telescopic cylinder's power take off end is last, the shielding plate is fixed be close to on the fixed block one side of cavity door, telescopic cylinder's power take off end can drive the fixed block is along being close to or keeping away from the flexible removal of direction of cavity label, in order to drive the shielding plate shelters from or exposes to the cavity label.

4. The multi-chamber fail-safe oven as claimed in claim 1, wherein:

the carrier drawer is provided with a containing cavity, four corners of the bottom of the containing cavity are provided with supporting seats, and the side walls of two sides of the containing cavity are provided with symmetrically-arranged taking and placing grooves.

5. The multi-chamber fail-safe automatically controlled roaster oven of claim 1, wherein:

the inner walls of the two sides of the baking cavity are provided with slideways, the outer walls of the two sides of the carrier drawer are provided with guide wheels, and the guide wheels are in sliding fit with the slideways.

6. The multi-chamber fail-safe automatically controlled roaster oven of claim 1, wherein:

the front of toasting the case body still is equipped with a plurality of electronic magnetic locks, each electronic magnetic lock sets up respectively in each one side of cavity room door to lock cavity room door or remove the locking to cavity room door.

7. The multi-chamber mistake proofing automatic control oven according to any one of claims 1 to 6, wherein:

each bake out the chamber with bake out the relative inboard in front of case body and all be equipped with detection sensor for detect whether there is the material of waiting to toast in the chamber.

8. The multi-chamber fail-safe automatically controlled roaster oven of claim 7, wherein:

the carrier drawer is provided with a detection through hole at one end close to the detection sensor, and a handle is arranged at one end far away from the detection sensor on the carrier drawer.