CN216348361U - Laser interferometer - Google Patents
Laser interferometer Download PDFInfo
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- CN216348361U CN216348361U CN202123203675.0U CN202123203675U CN216348361U CN 216348361 U CN216348361 U CN 216348361U CN 202123203675 U CN202123203675 U CN 202123203675U CN 216348361 U CN216348361 U CN 216348361U
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Abstract
The utility model discloses a laser interferometer which comprises a step reflection assembly, wherein the step reflection assembly comprises n independent second reflecting mirrors, n is more than or equal to 2, each second reflecting mirror is provided with a moving device, and the second reflecting mirrors are used for reflecting laser emitted by a laser emission assembly reflected by a first beam splitter. The beneficial effects are as follows: the problem of among the prior art to the manufacturing accuracy of fixed speculum require highly is solved, have processing simply, the advantage that the manufacturing cost is lower.
Description
Technical Field
The utility model relates to a precision test instrument, in particular to a laser interferometer.
Background
The appearance of the laser enables the old interference technology to be developed rapidly, the laser has the characteristics of high brightness, good directivity, good monochromaticity and coherence and the like, and the laser interference measurement technology is relatively mature. Laser interferometry systems are very widely used: the measurement of precise length and angle is like the detection of a linear ruler, a grating, a gauge block and a precise screw rod; control and correction of positioning detection systems in precision instruments, such as precision machines; positioning detection system in large scale integrated circuit special equipment and detection instrument; measurement of minute dimensions, etc. In most laser interferometry systems, a michelson interferometer or similar optical path structure is used.
In the prior art, a single-frequency laser interferometer emits a light beam from a laser, is divided into two paths by a beam splitter after beam expansion and collimation, and is reflected back from a fixed reflector and a movable reflector respectively and converged on the beam splitter to generate interference fringes. When the movable reflector moves, the light intensity change of interference fringe is converted into electric pulse signal by photoelectric conversion element and electronic circuit in receiver, after shaping and amplification the electric pulse signal is inputted into reversible counter to calculate total pulse number, then the electronic computer can calculate displacement L of movable reflector according to the calculation formula L being N x lambda/2, in which lambda is laser wavelength (N is total number of electric pulses).
However, the measurement accuracy of the single-frequency laser interferometer is greatly influenced by the environment, and therefore a multi-beam stepped plane mirror laser interferometer is derived, such as the multi-beam stepped plane mirror laser interferometer disclosed in patent No. CN 104713474 a, which comprises a laser source, a spectroscope, a fixed mirror, a movable mirror and a photoelectric detector set, wherein the laser source comprises n (n is equal to or greater than 2) parallel laser beams, the photoelectric detector set comprises n photoelectric detectors, the reflecting surface of the fixed mirror is n stepped planes, and the distance between two adjacent reflecting planes is λ/2n + k λ/2(k is a natural number); each beam of laser is changed into two beams after passing through the beam splitter, one beam of laser is transmitted from the beam splitter after being reflected by the fixed reflector and reaches the photoelectric detector, and the other beam of laser is also incident to the photoelectric detector after being reflected by the movable reflector and the beam splitter in sequence. In the prior art, n stepped planes are constructed on a fixed reflector, and the distance between adjacent planes is lambda/2 n + k lambda/2, but in actual production, the construction of a plurality of stepped planes on the reflector requires very high processing precision, the processing is difficult, and the processing cost is also increased. Therefore, the above problems are urgently solved.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a laser interferometer, which solves the problem of high requirement on the manufacturing precision of a fixed reflecting mirror in the prior art and has the advantages of simple processing and lower manufacturing cost.
The utility model is realized by the following technical scheme:
a laser interferometer comprises a laser emission component, a first spectroscope, a step reflection component, a first reflector and a photoelectric detection component, wherein the step reflection component comprises n mobile devices, n is larger than or equal to 2, the mobile devices are provided with second reflectors, and the second reflectors are used for reflecting laser emitted by the laser emission component reflected by the first spectroscope.
The laser interferometer comprises a laser emission component, a first spectroscope, a step reflection component, a first reflector and a photoelectric detection component; the laser emission component emits n parallel lasers, each laser is divided into two paths after passing through the first beam splitter, one path of laser is reflected to the second reflecting mirror on one of the moving devices through the first beam splitter, then reflected to the first beam splitter and transmitted to the photoelectric detection component, the other path of laser is directly transmitted through the first beam splitter and then incident to the first reflecting mirror, and then reflected to the photoelectric detection component, so that whether the two paths of optical path differences generate the strongest interference state or the weakest interference state in the displacement process of the first reflecting mirror can be detected. Because n interference light paths are used for measurement, the optical path difference between adjacent light paths is lambda/n + k lambda, the interference optical path difference of one laser wavelength can be divided into n equal parts, and the measurement precision is greatly improved. Only the moving device needs to be adjusted in the process of equally dividing the interference optical path difference of one laser wavelength, so that the plurality of second reflecting mirrors are in a step shape, the operation is simple and convenient, the reflecting mirrors do not need to be constructed into the step shape with a plurality of reflecting surfaces, the requirement on processing precision is reduced, and the processing cost is saved.
Preferably, the moving means comprises a nano-displacement platform or a piezoelectric ceramic.
The nanometer displacement platform can realize nanometer-level precise displacement through voltage control, so that the using effect is better in the process of adjusting the second reflector, and the precision is better.
Piezoelectric ceramic can produce deformation under the effect of electric field to realize the removal of second mirror, have good use accuracy.
Preferably, the laser emitting device further comprises a laser emitting assembly, wherein the laser emitting assembly comprises n lasers, and the lasers correspond to the second reflecting mirror.
Preferably, the laser device further comprises a first beam splitter for reflecting the laser light and transmitting the laser light.
Preferably, the laser device further comprises a first reflecting mirror for reflecting the laser light.
Preferably, the optical detection device further comprises a photoelectric detection assembly, wherein the photoelectric detection assembly comprises n photoelectric detectors, and the photoelectric detectors correspond to the second reflecting mirror.
The photoelectric detectors are used for receiving the interference laser light reflected and transmitted by the first beam splitter and correspond to the number of the second beam splitters one to one.
Preferably, the laser emission assembly comprises a laser, a beam splitting mirror group and a third reflector, the beam splitting mirror group comprises n-1 second beam splitting mirrors which are sequentially arranged in parallel, the third reflector is arranged at one end of the beam splitting mirror group in parallel, the laser is arranged at the other end of the beam splitting mirror group and corresponds to the second beam splitting mirror at the other end, and the laser emitted by the laser sequentially passes through the n-1 second beam splitting mirrors and the third reflector to generate n beams of parallel laser.
Laser emitted by the laser is emitted into a second beam splitter at the head end, then the laser is divided into two paths, one path of laser is reflected to the next second beam splitter through the second beam splitter, and the other path of laser is emitted to the first beam splitter through the second beam splitter; the n-1 second spectroscopes are arranged in parallel to form n-1 parallel light beams, the third reflector is positioned at the tail end of the second spectroscope group, laser emitted from the last second spectroscope is directly reflected to the first spectroscope, and finally the n parallel light beams are formed and correspond to the n second reflectors; through above mode, convert the laser of a laser instrument into the parallel laser of multibeam to reduced the installation quantity of laser instrument, avoided this device because the too big problem of volume that the laser instrument arouses, the design is more reasonable.
Compared with the prior art, the utility model has the following advantages and beneficial effects:
the utility model provides a laser interferometer, which enables a plurality of second reflectors to form a step-shaped reflection assembly by mounting the second reflectors on a moving device, so that a plurality of step-shaped reflection planes do not need to be constructed on one reflector, the processing precision is reduced, the manufacturing difficulty in actual production is reduced, and the processing cost is saved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the utility model and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the utility model and together with the description serve to explain the principles of the utility model. In the drawings:
FIG. 1 is a schematic view of a state of a laser interferometer according to embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of another state of a laser interferometer according to embodiment 1 of the present invention;
fig. 3 is a schematic diagram of another laser interferometer provided in embodiment 2 of the present invention.
Reference numbers and corresponding part names in the drawings:
100-laser emission component, 110-laser, 120-beam splitter group, 121-second beam splitter, 130-third reflector, 200-first beam splitter, 300-step reflector component, 310-moving device, 320-second reflector, 400-first reflector, 500-photoelectric detection component and 510-photoelectric detector.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to one of ordinary skill in the art that: it is not necessary to employ these specific details to practice the present invention. In other instances, well-known structures, circuits, materials, or methods have not been described in detail so as not to obscure the present invention.
Throughout the specification, reference to "one embodiment," "an embodiment," "one example," or "an example" means: the particular features, structures, or characteristics described in connection with the embodiment or example are included in at least one embodiment of the utility model. Thus, the appearances of the phrases "one embodiment," "an embodiment," "one example" or "an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in any suitable combination and/or sub-combination in one or more embodiments or examples. Further, those of ordinary skill in the art will appreciate that the illustrations provided herein are for illustrative purposes and are not necessarily drawn to scale. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present invention, the terms "front", "rear", "left", "right", "upper", "lower", "vertical", "horizontal", "upper", "lower", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore, should not be construed as limiting the scope of the present invention.
Example 1
As shown in fig. 1, the laser interferometer of the present invention includes a laser emitting assembly 100, a first beam splitter 200, a step reflection assembly 300, a first reflection mirror 400 and a photodetection assembly 500, wherein the step reflection assembly 300 includes n independent second reflection mirrors 320, n is greater than or equal to 2, each second reflection mirror 320 is provided with a moving device 310, and the distance of each movement of the moving device 310 is λ/2n + k λ/2, where k is a natural number, and λ is a wavelength of laser emitted by the laser emitting assembly 100, and the second reflection mirror 320 is configured to reflect laser emitted by the laser emitting assembly 100 reflected by the first beam splitter 200.
As shown in fig. 1, in the present embodiment, n =4, k = 0; the laser emitting assembly 100 emits 4 parallel laser beams, each laser beam is divided into two paths after passing through the first beam splitter 200, one path of laser beam is reflected to the second reflecting mirror on one of the moving devices 310 through the first beam splitter 200, then reflected to the first beam splitter 200 and transmitted to the photoelectric detection assembly 500, the other path of laser beam is directly transmitted through the first beam splitter 200 and then incident to the first reflecting mirror 400, then reflected to the first beam splitter 200 and reflected to the photoelectric detection assembly 500, and therefore whether the strongest interference state or the weakest interference state is generated in the displacement process of the first reflecting mirror 400 or not can be detected. Because n interference light paths are used for measurement, the optical path difference between adjacent light paths is lambda/n + k lambda, the interference optical path difference of one laser wavelength can be divided into n equal parts, and the measurement precision is greatly improved.
As shown in fig. 1, only the moving device needs to be adjusted in the process of equally dividing the interference optical path difference of one laser wavelength, so that the plurality of second reflectors are in a step shape, the operation is simple and convenient, and the reflectors do not need to be constructed into the step shape with a plurality of reflecting surfaces, thereby reducing the requirement on processing precision and saving the processing cost.
Preferably, the moving device comprises a nano displacement platform or piezoelectric ceramics, and the second mirror is arranged on the nano displacement platform;
or the second reflector is arranged on the piezoelectric ceramic.
As shown in fig. 1, in the present embodiment, the moving device 310 is selected as a nano-displacement platform, and a total of four nano-displacement platforms are provided with the second mirror 320; when the step distance difference of the adjacent second reflecting mirror is realized, the nano displacement platform can perform nano-level precise displacement through the adjustment and control of voltage, the precision is high, and the realization is easy.
It should be noted that in other embodiments, the mobile device 310 may also be a piezoelectric ceramic; the piezoelectric ceramic can deform under the action of an electric field, so that the second reflector 320 can move, and the displacement precision is good.
Preferably, the photo-detecting assembly 500 includes n photo-detectors 510, and the photo-detectors 510 correspond to the second mirror 320.
As shown in fig. 1, n =4 in this example, so a total of 4 photodetectors 510 are provided, and the photodetectors 510 are used for receiving the light intensity variation of the interference fringes and converting the light intensity variation into electric pulse signals, and then the electronic computer can calculate the measured value.
Example 2
Referring to fig. 2, the technical solution in this embodiment is substantially the same as that in embodiment 1, and the main difference is that,
preferably, the laser emission assembly 100 includes a laser 110, a beam splitter group 120 and a third reflector 130, the beam splitter group 120 includes n-1 second beam splitters 121 sequentially arranged in parallel, the third reflector 130 is arranged in parallel at one end of the beam splitter group 120, the laser 110 is arranged at the other end of the beam splitter group 120 and corresponds to the second beam splitter 121 at the other end, and the laser emitted by the laser 110 sequentially passes through the n-1 second beam splitters 121 and the third reflector 130 to generate n parallel laser beams.
As shown in fig. 2, in this embodiment, n =4 is selected, laser light emitted by one laser 110 on the left side is incident on the second beam splitter 121 on the bottom, and then the laser light is divided into two paths, one path of laser light is reflected to the next second beam splitter 121 by the second beam splitter 121, and the other path of laser light is incident on the first beam splitter 200 through the second beam splitter 121; the 3 second beam splitters 121 are arranged in parallel to form 3 parallel light beams, the third reflector 130 is located at the top end of the beam splitter group 120, the laser light incident from the previous second beam splitter 121 is directly reflected to the first beam splitter 200, and finally 4 parallel light beams are formed and correspond to the 4 second reflectors 320; through the mode, the laser of one laser 110 is converted into a plurality of beams of parallel laser, so that the installation quantity of the lasers 110 is reduced, the problem of overlarge volume of the device caused by the fact that the lasers 110 are too much is avoided, and the design is more reasonable.
In the above embodiments of the present invention, the difference between the embodiments is mainly described, and different optimization features between the embodiments can be combined to form a better embodiment as long as they are not contradictory, and further description is omitted here in view of brevity of the text.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. The laser interferometer comprises a step reflection assembly (300), and is characterized in that the step reflection assembly (300) comprises n independent second reflecting mirrors (320), wherein n is larger than or equal to 2, each second reflecting mirror (320) is provided with a moving device (310), and the second reflecting mirrors (320) are used for reflecting n parallel laser beams emitted by a laser emitting assembly (100) reflected by a first beam splitter (200).
2. A laser interferometer according to claim 1, wherein the moving device (310) comprises a nano-displacement platform or piezo-ceramic, the second mirror (320) being arranged on the nano-displacement platform;
or the second mirror (320) is arranged on the piezoelectric ceramic.
3. A laser interferometer according to claim 1, further comprising a laser emitting assembly (100), said laser emitting assembly (100) comprising n lasers (110), said lasers (110) corresponding to said second mirror (320).
4. A laser interferometer according to claim 1, further comprising a first beam splitter (200), the first beam splitter (200) being arranged to reflect laser light and to transmit laser light.
5. A laser interferometer according to claim 1, further comprising a first mirror (400), the first mirror (400) being arranged to reflect laser light.
6. A laser interferometer according to claim 1, further comprising a photo detector assembly (500), wherein the photo detector assembly (500) comprises n photo detectors (510), and wherein the photo detectors (510) are in one-to-one correspondence with the second mirror (320).
7. A laser interferometer according to claim 1, wherein the laser emitting assembly (100) comprises a laser (110), a beam splitter group (120) and a third reflecting mirror (130), the beam splitter group (120) comprises n-1 second beam splitters (121) arranged in parallel in sequence, the third reflecting mirror (130) is arranged at one end of the beam splitter group (120) in parallel, the laser (110) is arranged at the other end of the beam splitter group (120) and corresponds to the second beam splitters (121) at the other end, and the laser emitted by the laser (110) passes through the n-1 second beam splitters (121) and the third reflecting mirror (130) in sequence to generate n parallel beams of laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123203675.0U CN216348361U (en) | 2021-12-17 | 2021-12-17 | Laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123203675.0U CN216348361U (en) | 2021-12-17 | 2021-12-17 | Laser interferometer |
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| CN216348361U true CN216348361U (en) | 2022-04-19 |
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| CN202123203675.0U Active CN216348361U (en) | 2021-12-17 | 2021-12-17 | Laser interferometer |
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