CN104697439A - Multi-light-beam cascading staircase plane angle reflector laser interferometer - Google Patents
Multi-light-beam cascading staircase plane angle reflector laser interferometer Download PDFInfo
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Abstract
The invention discloses a multi-light-beam cascading staircase plane angle reflector laser interferometer. The multi-light-beam cascading staircase plane angle reflector laser interferometer comprises a laser source, a beam splitter mirror, a fixed staircase plane angle reflector mirror, a movable angle reflector, a photoelectric detector set and a micro-moving platform, wherein the laser source includes n parallel laser beams, wherein n is not less than 2; the photoelectric detector set comprises n photoelectric detectors; the reflecting surface of the fixed staircase plane angle reflector mirror is composed of n staircase surfaces; the space between two adjacent reflecting surfaces is shown in the specification (k is a natural number); a laser beam processed by the beam splitter mirror enters one reflecting plane to be reflected to one photoelectric detector, and another laser beam transmitting through the beam splitter mirror passes through the movable angle reflector mirror and the beam splitter mirror to be reflected and then enters the photoelectric detector. According to the multi-light-beam cascading staircase plane angle reflector laser interferometer, the generated laser interference phenomenon is associated with the laser wavelength and the height difference of the staircase reflecting panels; the photoelectric detector set can detect the displacement with the precision reaching lambda/ 2n level, and therefore, the measuring precision is obviously improved.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of multiple beam ladder plane angle reflector laser interference instrument.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system application is widely: the measurement of accurate length, angle as linear scale,
grating,
gauge block,
accurate silk thick stickdetection; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.In most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation, and respectively from stationary mirror and movable
catoptronreflect can be combined on spectroscope and produce interference fringe.When moving reflector moves, the light intensity of interference fringe change is by receptacle
photoelectricityconversion element and electronic circuit etc. are converted to electric impulse signal, input up-down counter and calculate always after shaping, amplification
pulsenumber, then by robot calculator by calculating formula L=N × λ/2, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates the displacement L of moving reflector.When using single frequency laser interferometer, require that ambient atmosphere is in steady state (SS), various air turbulence all can cause DC level change and affect measurement result.
One of weakness of single frequency laser interferometer is exactly seriously affected by environment, and severe at test environment, when measuring distance is longer, this shortcoming is very outstanding.Its reason is that it is a kind of direct current measurement system, must have the drawback of the gentle level drift of direct current light.When laser interferometer moveable mirror moves, photelectric receiver can output signal, if signal has exceeded the triggering level of counter, will go on record, if and laser beam intensity changes, counter is made to stop counting with regard to likely making photosignal lower than the triggering level of counter, the main cause of laser intensity or interference signal Strength Changes is made to be air turbulence, lathe mist of oil
cutting swarfon the impact of light beam, there is skew or corrugated distortion in result light beam.
Single frequency laser interferometer is owing to measuring the problem of structure, and its measuring accuracy is limited to the wavelength of laser, and its precision can only be generally the integral multiple of its wavelength, is difficult to promote again, and the change of measurement environment simultaneously has considerable influence to measurement result.Along with the requirement of commercial production to precision measurement is more and more higher, the measuring accuracy of surveying instrument is had higher requirement.
Summary of the invention
The object of the invention is to overcome existing laser interferometer measurement precision and be limited to optical maser wavelength, measuring accuracy is difficult to the deficiency promoted, a kind of multiple beam ladder plane angle reflector laser interference instrument is provided, this laser interferometer is on the basis of existing Michelson laser interferometer, adopt n light source n ladder plane angle catoptron, measuring accuracy can reach
improve the measuring accuracy of this laser interferometer.Simultaneously due to multi-pass interference state checker, there is higher antijamming capability to the environmental change of optical path.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of multiple beam ladder plane angle reflector laser interference instrument, comprise lasing light emitter, spectroscope, fixed step plane angle catoptron, angle of critical deformation catoptron, photodetector group, described lasing light emitter comprises n collimated laser beam, wherein n>=2, described photodetector group comprises n photoelectric detector; Described fixed step plane angle catoptron (3) comprises two reflective steps faces at a right angle, and each described reflective steps face comprises n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection equals
wherein k is natural number, λ is the optical maser wavelength that lasing light emitter sends, and described angle of critical deformation catoptron comprises two planes of reflection at a right angle; Every Shu Jiguang that described lasing light emitter sends, after described dichroic mirror, injects a corresponding plane of reflection respectively, and each described plane of reflection will often restraint laser reflection each photoelectric detector to corresponding described photodetector group; Every Shu Jiguang that described lasing light emitter sends, after described spectroscope transmission, incides described angle of critical deformation catoptron back reflection each photoelectric detector to corresponding photodetector group respectively.
The laser beam quantity of this laser interferometer, the quantity of stepped appearance plane of reflection quantity and photoelectric detector is n (n >=2), and be one_to_one corresponding, namely each laser that lasing light emitter is launched is divided into two-way, beam of laser is by after dichroic mirror to one of them plane of the cascaded surface of fixed step plane angle catoptron, reflex to one of them photoelectric detector in photodetector group, another bundle laser straight reflexes to same photoelectric detector after being connected on and inciding angle of critical deformation catoptron after transmission in spectroscope again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at angle of critical deformation catoptron.Due to fixed step plane angle catoptron being stepped reflective surface, so each Shu Jiguang that lasing light emitter is launched is not identical by the light path of the light path after the cascaded surface reflection of fixed step plane angle catoptron, the retardation values arrived after each laser that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of the ladder plane of reflection, because adjacent two level differences of this cascaded surface (i.e. the stepped appearance plane of reflection) equal
because incident angle is 45 degree, equivalent optical path is
namely the height difference in adjacent steps face can be the same or different, and because every Shu Jiguang is after each plane of reflection reflection, light path is difference to some extent, and the height difference regardless of adjacent two planes of reflection is how many, and its optical path difference is λ/n+k λ.
Because in above-mentioned optical path difference formula, k λ can't affect the interference state of this beam laser, only have difference λ/n just can have an impact to the interference state of this beam laser, therefore, as long as angle of critical deformation catoptron carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, one of them of photoelectric detector in this photodetector group can detect the change that its laser interference state occurs, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of every two ladder planes of the cascaded surface of fixed step plane angle catoptron and the optical maser wavelength of lasing light emitter.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely introduce AC signal in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal.
It should be noted that, adjacent two level differences equal
whether real decision laser is in the just difference of the strongest interference state or the most weak interference state
difference k λ/2 increased are the height difference in order to increase adjacent two reflectings surface of cascaded surface, and parameter is more greatly for the ease of process and assemble.
Preferably, described fixed step plane angle catoptron comprises corner reflector body and n-1 reflection sheet combines, and the thickness of each described reflection sheet is
wherein k is natural number.
This cascaded surface is superimposed upon on corner reflector body by 2 × (n-1) individual reflection sheets and forms, and corner reflector body surface is laser interferometer normal mirror, and wherein the thickness of each reflection sheet is
k is natural number, and namely the thickness of each reflection sheet can be the same or different, but two cascaded surfaces should be symmetrical.
Preferably, each described reflection sheet thickness is
Preferably, described corner reflector body and reflection sheet are formed in one body, the height error of two ladder planes that adjacent two reflection sheets avoiding the reflection sheet of piecemeal to link together producing are formed.
Preferably, n described lasing light emitter is equally spaced, and the spacing of adjacent two described laser beam equals the integral multiple of optical maser wavelength.
Preferably, the spacing between the laser beam that sends of adjacent two described lasing light emitters is 100-10000 optical maser wavelength doubly.
Compared with prior art, beneficial effect of the present invention: the laser beam quantity of the lasing light emitter transmitting of this multiple beam ladder plane angle reflector laser interference instrument, the quantity of stepped appearance plane of reflection quantity and photoelectric detector is n (n>=2), and one_to_one corresponding, the each Shu Jiguang launched due to lasing light emitter is different by the light path of the light path after Different Plane reflection on the cascaded surface of fixed step plane angle catoptron, the retardation values arrived after each laser that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, whether each photoelectric detector can detect two corresponding bundle laser can interfere phenomenon, the generation of this interference is not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level differences of this cascaded surface equal
because incident angle is 45 degree, equivalent optical path is
therefore, as long as angle of critical deformation catoptron carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photoelectric detector in this photodetector group one of them can only can detect that it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer is λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, its measuring accuracy obtains significant raising.Simultaneously owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
Accompanying drawing illustrates:
Laser optical path schematic diagram when Fig. 1 is multiple beam ladder plane angle reflector laser interference instrument of the present invention use;
Fig. 2 is the structural representation of lasing light emitter in Fig. 1;
Fig. 3 is the structural representation of the stepped appearance plane of reflection of fixed step plane angle catoptron in Fig. 1.
Mark in figure:
1, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3, fixed step plane angle catoptron, 31, catoptron body, 32, reflection sheet, 4, angle of critical deformation catoptron, 5, photodetector group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photoelectric detector three, 54, photoelectric detector four.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
As shown in Figure 1, a kind of multiple beam ladder plane angle reflector laser interference instrument, comprise lasing light emitter 1, spectroscope 2, fixed step plane angle catoptron 3, angle of critical deformation catoptron 4, photodetector group 5, wherein lasing light emitter 1 comprises n collimated laser beam, n>=2, photodetector group 5 also comprises n photoelectric detector, and the reflecting surface of fixed step plane angle catoptron 3 is symmetrical n the stepped appearance plane of reflection, and the spacing h of adjacent two planes of reflection equals
wherein k is random natural number, λ is the optical maser wavelength that lasing light emitter 1 sends; Each laser beam that lasing light emitter 1 sends, after spectroscope 2 reflects, injects a corresponding ladder reflecting surface respectively, and each ladder reflecting surface will often restraint laser reflection to corresponding photoelectric detector; Each laser beam that lasing light emitter 1 sends, after spectroscope 2 transmission, reflexes to corresponding photoelectric detector again after inciding angle of critical deformation catoptron 4 respectively.It should be noted that, the λ in literary composition is the optical maser wavelength that lasing light emitter 1 sends, and the often bundle optical maser wavelength that lasing light emitter 1 sends is all the same.
The laser beam quantity that the lasing light emitter 1 of this laser interferometer sends, the photoelectric detector quantity of cascaded surface plane quantity and photodetector group 5 is n (n >=2), and be one_to_one corresponding, namely every Shu Jiguang that lasing light emitter 1 is launched is divided into two-way, beam of laser reflexes to one of them plane of the cascaded surface of fixed step plane angle catoptron 3 by spectroscope 2 after, be reflected back spectroscope 2 and reenter one of them photoelectric detector be mapped in photodetector group 5, another bundle laser straight reflexes to spectroscope 2 after being connected on and inciding angle of critical deformation catoptron 4 after transmission in spectroscope 2 again, spectroscope 2 reflects it to same photoelectric detector again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at angle of critical deformation catoptron 4.Due to the cascaded surface on fixed step plane angle catoptron 3, so each Shu Jiguang that lasing light emitter 1 is launched is not identical by the light path of the light path after the cascaded surface reflection of fixed step plane angle catoptron 3, the retardation values arrived after each laser that lasing light emitter 1 is launched simultaneously is divided into two-way after corresponding photodetector group 5 is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level difference h of this cascaded surface equal
because incident angle is 45 degree, equivalent optical path is
therefore, as long as angle of critical deformation catoptron 4 carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photodetector group 5 on this photodetector all has one of them to detect, and it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of adjacent two ladder planes of the cascaded surface of fixed step plane angle catoptron 3 and the optical maser wavelength of lasing light emitter 1.
The reflection sheet 32 that this fixed step plane angle catoptron 3 comprises the individual thickness h of corner reflector body 31 and 2 × (n-1) identical combines, and the thickness h of each described reflection sheet 32 is
each cascaded surface of fixed step plane angle catoptron 3 is superimposed upon on corner reflector body 31 by the reflection sheet 32 that n-1 thickness h is identical and forms, corner reflector body 31 is the laser interferometer normal mirror of surface for plane, and wherein the thickness h of each reflection sheet 32 is
simultaneously, the reflection sheet 32 that the individual thickness h of this corner reflector body 31 and 2 × (n-1) is identical can be formed in one body, the height error of two ladder planes that adjacent two reflection sheets 32 avoiding the reflection sheet 32 of piecemeal to link together producing are formed.
As shown in Figure 2, n the laser beam that all lasing light emitters 1 send is equally spaced, now, select n=4, k=0, the laser beam that lasing light emitter 1 sends is respectively laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14, and the spacing e of adjacent two laser beam equals the integral multiple of optical maser wavelength.Spacing e between adjacent two laser beam is preferably 100-10000 optical maser wavelength doubly.If select adjacent two laser beam spacing e to be 1000 times of optical maser wavelength, select the optical maser wavelength of 663 nanometers, the spacing e of adjacent laser beams that so adjacent laser source 1 sends is 6.63 millimeters.The photoelectric detector that corresponding photodetector group 5 receives laser is also respectively four, i.e. photoelectric detector 1, photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54.
Now, the stepped appearance plane of reflection on fixed step plane angle catoptron 3 is also corresponding elects four as, as shown in Figure 3, selects four planes of reflection to become stepped appearance plane so that process and reduce costs.This light path route is that the laser that laser beam 1 sends is divided into two-way at spectroscope 2, one tunnel is split after mirror 2 reflects and incides fixed step plane angle catoptron 3, transmission incide photoelectric detector 1 again after being reflected to spectroscope 2, another road of this laser is then direct incides angle of critical deformation catoptron 4 after spectroscope 2 transmission, after being reflected to spectroscope 2, spectroscope 2 again by this laser reflection to photoelectric detector 1.By that analogy, other laser beam 2 12, laser beam 3 13, laser beam 4 14 are reflected by the plane of reflection respectively and are received by photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54 respectively.According to calculating, owing to have employed four stepped appearance planes of reflection, the difference in height of adjacent two planes of reflection is
because incident angle is 45 degree, equivalent optical path is
therefore the retardation values of laser after the reflection of fixed step plane angle catoptron 3 sent by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14 is respectively a
1λ, a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, wherein a
1, a
2, a
3, a
4for natural number.
When laser beam 1 be in the strongest interference state time, the retardation values after the laser that namely laser beam 1 sends is divided into two-way is a
1λ, can measure laser by photoelectric detector 1 and be in the strongest interference state, now laser beam 2 12 to optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 the two-way retardation values of optical interference circuit is respectively: a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, three's light path is now all in the strongest non-interference state.
When angle of critical deformation catoptron 4 moves λ/8, when the two bundle laser retardation values that lasing light emitter 1 is divided into increase λ/4, laser light path difference also corresponding increase λ/4 of other lasing light emitters, now, the retardation values that the laser that laser beam 1 sends is divided into two-way is a
1λ+λ/4, are in the strongest non-interference state, and the retardation values that the laser that laser beam 2 12 sends is divided into two-way then becomes a
2λ, therefore photoelectric detector 2 52 can detect that optical interference circuit is in the strongest interference state, and the laser of laser beam 3 13 and laser beam 4 14 is also in the strongest non-interference state.When angle of critical deformation catoptron 4 moves λ/4, laser beam 3 13 will be in the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 3 53.
Similar, when angle of critical deformation catoptron 4 moves 3 λ/8, when the two bundle laser retardation values that laser beam 1 is divided into increase by 3 λ/4, laser light path difference also corresponding increase by 3 λ/4 of other laser beam, the retardation values that the laser that now laser beam 4 14 sends is divided into two-way then becomes a
4λ, the two-way light path that its laser is divided into will be in the strongest interference state, can measure the strongest interference state of laser by photoelectric detector 4 54.
Again, when angle of critical deformation catoptron 4 moves λ/2, when the two bundle laser retardation values that laser beam 1 is divided into increase λ, the laser light path difference also corresponding increase λ of other laser beam, laser beam 1 will be in again the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 1.Therefore, be just λ/8 for the measuring accuracy corresponding to the laser interferometer corresponding to four-step planar laser reflection configuration, namely angle of critical deformation catoptron 4 displacement is equal to or greater than λ/8, and namely corresponding photodetector group 5 can observe the interference state significant change of the light path of the four bundle laser that lasing light emitter 1 is launched.
Therefore, the ladder plane of reflection quantity increasing fixed step plane angle catoptron 3 can improve measuring accuracy, when the laser mirror structure of the employing 8 ladder plane of reflection, the corresponding measuring accuracy corresponding to laser interferometer is then λ/16, when adopting fixed step plane angle catoptron 3 structure of the n ladder plane of reflection, the measuring accuracy of this laser interferometer is just corresponding becomes λ/2n.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (6)
1. a multiple beam ladder plane angle reflector laser interference instrument, comprise lasing light emitter (1), spectroscope (2), fixed step plane angle catoptron (3), angle of critical deformation catoptron (4), photodetector group (5), it is characterized in that:
Described lasing light emitter (1) comprises n collimated laser beam, wherein n >=2, and described photodetector group (5) comprises n photoelectric detector;
Described fixed step plane angle catoptron (3) comprises two reflective steps faces at a right angle, and each described reflective steps face comprises n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection equals
wherein k is natural number, λ is the optical maser wavelength that lasing light emitter (1) sends, and described angle of critical deformation catoptron (4) comprises two planes of reflection at a right angle;
Every Shu Jiguang that described lasing light emitter (1) sends is after described spectroscope (2) reflection, inject a corresponding plane of reflection respectively, each described plane of reflection will often restraint laser reflection each photoelectric detector to corresponding described photodetector group (5); Every Shu Jiguang that described lasing light emitter (1) sends, after described spectroscope (2) transmission, incides described angle of critical deformation catoptron (4) back reflection each photoelectric detector to corresponding photodetector group (5) respectively.
2. a kind of multiple beam ladder plane angle reflector laser interference instrument according to claim 1, it is characterized in that, described fixed step plane angle catoptron (3) comprises square catoptron body (31) and n-1 reflection sheet (32) combines, and the thickness of each described reflection sheet (32) is
wherein k is natural number.
3., according to a kind of multiple beam ladder plane angle reflector laser interference instrument shown in claim 2, it is characterized in that, each described reflection sheet (32) thickness is
4. a kind of multiple beam ladder plane angle reflector laser interference instrument according to claim 3, is characterized in that, described catoptron body (31) and reflection sheet (32) are formed in one body.
5. according to the arbitrary described a kind of multiple beam ladder plane angle reflector laser interference instrument of claim 1-4, it is characterized in that, n laser beam of described lasing light emitter (1) is equally spaced, and the spacing of adjacent two described laser beam equals the integral multiple of optical maser wavelength.
6. a kind of multiple beam ladder plane angle reflector laser interference instrument according to claim 5, is characterized in that, the spacing between the laser beam that adjacent two described lasing light emitters (1) send is 100-10000 optical maser wavelength doubly.
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| CN104964642A (en) * | 2015-06-29 | 2015-10-07 | 成都信息工程大学 | Magnetic micro-displacement platform type ladder angle mirror laser interferometer, calibration method and measurement method |
| CN105371756A (en) * | 2015-12-01 | 2016-03-02 | 成都信息工程大学 | Wavelength modification multiple beam cascade step angle reflector laser interferometer and laser wavelength modification method thereof |
| CN113552726A (en) * | 2021-07-12 | 2021-10-26 | 广东粤港澳大湾区硬科技创新研究院 | Laser beam combining device, combined step reflector thereof and filling rate calculation method |
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