CN215179573U - Focal locking detection system of microscope - Google Patents
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- CN215179573U CN215179573U CN202120408894.3U CN202120408894U CN215179573U CN 215179573 U CN215179573 U CN 215179573U CN 202120408894 U CN202120408894 U CN 202120408894U CN 215179573 U CN215179573 U CN 215179573U
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Abstract
The utility model discloses a microscopical lock burnt detecting system, this method includes, lock the burnt variable quantity of detecting the distance between module detection objective and the sample to send the variable quantity of distance to lock burnt controller, lock burnt controller output displacement to Z axle displacement ware, Z axle displacement ware displacement drives objective 1 and removes, keeps the interval of objective and sample in the focus value of predetermineeing. The utility model discloses throw away horizontal magnification as the enlargements of optical dimension, adopt axial magnification as optical magnification, measure out axial magnification, axial magnification can be directly proportional to the square of horizontal magnification, accomplish more with accurate detection.
Description
Technical Field
The utility model relates to a microscope range finding technical field, concretely relates to microscopical lock burnt detecting system.
Background
The lock-in is the distance between the objective lens of the lock-in microscope and the sample, i.e. the focal plane of the objective lens. The focus locking system comprises two parts: one is a detector for detecting the distance between the sample and the objective lens in real time; one is a precision displacer. Since the displacement of the objective lens and the sample is generally 20 to 50nm, a precise detector capable of detecting a value of 20nm or less is required. Therefore, the most important technical point of the focus-locked detector is to amplify 20nm to a detectable degree. The existing detector system has the following disadvantages:
1. the existing scheme utilizes the transverse magnification of a microscope, the self magnification of the existing microscope is 100x, the magnification of about 2 times is increased through an optical path, the total magnification is about 200x, and more precise detection cannot be achieved.
2. In the focus lock detector module, because of the limitation of size, a larger magnification ratio cannot be achieved, and a more complex system is required for increasing the magnification ratio.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of above prior art existence, provide a focus detection system is locked to microscope of the change of distance between accurate measurement objective and the sample.
The purpose of the utility model is realized through the following technical scheme:
a focus lock detection system for a microscope, comprising: the device comprises an objective lens, a tube lens, a focus locking detection module, a focus locking controller, a Z-axis shifter and an imaging CCD (charge coupled device); the Z-axis shifter is arranged on the side edge of the objective lens; the objective lens is arranged under the sample, the tube lens is arranged under the objective lens, the imaging CCD is arranged under the tube lens, the focus-locking detection module is arranged between the tube lens and the imaging CCD, and the focus-locking detection module, the focus-locking controller and the Z-axis shifter are sequentially connected.
Preferably, the focus lock detection module comprises: the device comprises a first light splitting lens, a quarter-wave plate, a second light splitting lens, a light source, a third light splitting lens and a linear detector; the first beam splitting lens is obliquely arranged right below the tube lens, the first beam splitting lens, the quarter wave plate, the second beam splitting lens and the third beam splitting lens are sequentially horizontally arranged, the left surface of the first beam splitting lens is symmetrical to the left surface of the second beam splitting lens, the right surface of the second beam splitting lens is symmetrical to the left surface of the third beam splitting lens, the light source is arranged right above the left surface of the second beam splitting lens, and the linear detector is arranged right above the left surface of the third beam splitting lens.
Preferably, the focus lock detection module further comprises: a collimating lens; the collimating lens is arranged between the first beam splitting lens and the quarter-wave plate, and the collimating lens, the first beam splitting lens and the quarter-wave plate are on the same horizontal optical axis.
Preferably, the second spectroscope is a polarization spectroscope; the left surface of the third light splitting lens is plated with a polarization film which transmits P-state polarized light and reflects S-state polarization, and the right surface of the third light splitting lens is plated with a total reflection film; the left surface of the first light splitting lens is plated with a film which reflects infrared light and transmits visible light.
A method of focus lock detection for a microscope, comprising: the focal length of the object lens is detected by the focal length locking detection module, the variable quantity of the distance between the object lens and the sample is sent to the focal length locking controller, the focal length locking controller outputs the moving distance to the Z-axis shifter, the moving distance of the Z-axis shifter drives the object lens 1 to move, and the distance between the object lens and the sample is kept within a preset focal length value.
Preferably, the focus lock detection module detects the variation of the distance between the objective lens and the sample, and comprises: after infrared detection light passes through the left side of the third spectroscope, part of light is reflected to the detector, and the part of light path reflected to the detector at the moment is recorded as a first light path; the other part of light passes through the left surface of the third spectroscope, is reflected by the right surface of the third spectroscope and then enters the left surface of the third spectroscope, one part of light can be transmitted out of the left surface of the third spectroscope again and then enters the detector, and the part of light path reflected to the detector at the moment is recorded as a second light path; the other part of light is reflected to the right side of the third spectroscope through the left side of the third spectroscope, and after being reflected through the right side of the third spectroscope, the other part of light is transmitted out of the left side of the third spectroscope, and the part of light path reflected to the detector at the moment is recorded as a third light path; by analogy, N light paths are emitted to the third beam splitter in sequence, the detector detects the transverse position of light emitted to the detector in different times and the corresponding light intensity, the moving position on the detector is obtained through calculation of a look-up table LUT, and N is larger than or equal to 3.
Preferably, before the infrared probe light passes through the left side of the third spectroscope, the infrared probe light further comprises: the light source outputs linearly polarized light, the linearly polarized light is reflected to the quarter-wave plate through the second light splitting lens and is changed into circularly polarized light after passing through the quarter-wave plate, the circularly polarized light is reflected through the first light splitting lens, and the reflected light is incident on a sample after sequentially passing through the tube lens and the objective lens; light reflected by the sample sequentially passes through the objective lens and the tube lens and then enters the first light splitting lens; the infrared detection light is reflected by the first beam splitting lens and projected by the quarter wave plate to become P-state polarized light, and the P-state polarized light is infrared detection light.
Compared with the prior art, the utility model have following advantage:
the utility model discloses a lock burnt detection module and survey the change volume of distance between objective and the sample to send the change volume of distance to the burnt controller of lock, lock burnt controller output displacement to Z axle displacement ware, Z axle displacement ware displacement drives objective and removes, keeps the interval of objective and sample in predetermined focal length value. In the process of detecting the distance variation between the objective lens and the sample by the focus-locking detection module, the transverse position of light entering the detector for different times and the corresponding light intensity are detected by the detector, the moving position on the detector is obtained by calculating the look-up table LUT, the transverse amplification rate is abandoned by the detection method and is used as the amplification of the optical size, the axial amplification rate is used as the optical amplification rate, the axial amplification rate is measured and is in direct proportion to the square of the transverse amplification rate, and more precise detection is achieved.
Drawings
The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a configuration diagram of a focus lock detection system of a microscope of embodiment 1.
Fig. 2 is a structural diagram of a focus lock detection module according to embodiment 1.
Fig. 3 is an optical path diagram of the third spectroscopic lens and the linear detector of example 1.
Fig. 4 is a structural diagram of a focus lock detection module according to embodiment 2.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
Example 1
Referring to fig. 1-3, a focus lock detection system for a microscope comprises: the device comprises an objective lens 2, a tube mirror 3, a focus locking detection module 5, a focus locking controller 6, a Z-axis displacement device 7 and an imaging CCD 4; the Z-axis shifter 7 is arranged on the side of the objective lens 2; the objective lens 2 is arranged right below the sample 1, the tube lens 3 is arranged right below the objective lens 2, the imaging CCD4 is arranged right below the tube lens 3, the focus locking detection module 5 is arranged between the tube lens 3 and the imaging CCD4, and the focus locking detection module 5, the focus locking controller 6 and the Z-axis shifter 7 are sequentially connected.
In this embodiment, the focus lock detection module 5 includes: a first beam splitter 51, a quarter wave plate 52, a second beam splitter 53, a light source 54, a third beam splitter 55 and a linear detector 56; the first spectroscope 51 is obliquely arranged right below the tube lens 3, the first spectroscope 51, the quarter-wave plate 52, the second spectroscope 53 and the third spectroscope 55 are sequentially horizontally arranged, the left surface of the first spectroscope 51 is symmetrical to the left surface of the second spectroscope 53, the right surface of the second spectroscope 53 is symmetrical to the left surface of the third spectroscope 55, the light source 54 is arranged right above the left surface of the second spectroscope 53, and the linear detector 56 is arranged right above the left surface of the third spectroscope 55.
In the present embodiment, the second beam splitter 53 is a polarization beam splitter. The left surface of the third beam splitter lens 55 is plated with a polarization film which transmits P-state polarized light and reflects S-state polarization, and the right surface of the third beam splitter lens 55 is plated with a total reflection film. The left surface of the first spectroscope 51 is coated with a film that reflects infrared light and transmits visible light. The first spectroscopic lens 51 can disperse the light of the microscope and then perform the operation. The light emitted from the light source 54 is linearly polarized light.
The light path of the microscope is as follows: the light of the sample 1 becomes parallel light after passing through the objective lens 2, and then is focused on the imaging CCD4 after passing through the tube mirror 3.
The focus locking detection method of the microscope applicable to the focus locking detection system of the microscope comprises the following steps: the focal length locking detection module 5 detects the variation of the distance between the objective lens 2 and the sample 1, sends the variation of the distance to the focal length locking controller 6, the focal length locking controller 6 outputs the movement distance to the Z-axis displacement device 7, the movement distance of the Z-axis displacement device 7 drives the objective lens 21 to move, and the distance between the objective lens 2 and the sample 1 is kept within a preset focal length value.
In this embodiment, the focus lock detection module 5 detects the variation of the distance between the objective lens 2 and the sample 1, including: the light source 54 outputs linearly polarized light, the linearly polarized light is reflected to the quarter-wave plate through the second light splitting lens 53 and is changed into circularly polarized light after passing through the quarter-wave plate, the circularly polarized light is reflected through the first light splitting lens 51, and the reflected light is incident on the sample 1 after sequentially passing through the tube lens 3 and the objective lens 2; the light reflected by the sample 1 sequentially passes through the objective lens 2 and the tube lens 3 and then enters the first beam splitter 51; the infrared detection light is reflected by the first beam splitter 51 and projected by the quarter wave plate to become P-state polarized light, and the P-state polarized light is infrared detection light. After the infrared detection light passes through the left side of the third spectroscope, a part of light is reflected to the detector 56, and the part of light path reflected to the detector 56 at the moment is recorded as a first light path; the other part of light passes through the left surface of the third spectroscope, is reflected by the right surface of the third spectroscope and then enters the left surface of the third spectroscope, one part of light can be transmitted out of the left surface of the third spectroscope again and then enters the detector 56, and the part of light path reflected to the detector 56 at the moment is marked as a second light path; the other part of the light is reflected to the right of the third spectroscope through the left of the third spectroscope, and after the other part of the light is reflected through the right of the third spectroscope, another part of the light is transmitted out of the left of the third spectroscope, and the part of the light path reflected to the detector 56 at this time is recorded as a third light path; by analogy, N lights are incident to the third beam splitter in sequence; the detector 56 detects the transverse position of light incident on the detector 56 in different times and the corresponding light intensity, the moving position on the detector 56 is obtained through calculation of a look-up table LUT, and N is more than or equal to 3.
The difference in axial position is the difference in focal point, i.e., intensity density, i.e., intensity per unit area, which can be characterized by the intensity on the detector 56. Although the other characteristic of the axial direction is that the measured spot size can be different and the spot size of the focus point is smaller, the spot size cannot be easily measured in actual measurement, so that the spot size measurement is not adopted to position the focus point.
The linear detector 56 attenuates energy differently at different locations during detection, and the intensity of light at different locations attenuates to the extent of R1R 2 (the value of R1R 2 is about 0.5), and how to measure the intensity of light at different locations is described below.
Because the scheme of axial magnification is adopted for detection, the detection precision is the square of transverse magnification, the magnification of 100 times is taken as an example, the magnification of the axial direction is 10000 times, and meanwhile, because the third spectroscope is added, the magnification is reduced to be 1/n approximately equal to 1/1.5 equal to 2/3 due to the existence of the third spectroscope, so that the overall magnification is about 6666 times. Because of the presence of the third beam splitter, all positions cannot be detected, i.e. the detected positions are not continuous, the detection step is d/n, the value of d/n can be set to correspond to an axial movement of 20 nm. Specifically, when the light intensity of the light initially incident is I0, the light first incident on the detector 56 is 501, the position is L1 (initial position on the detector 56), and the light intensity is I1.
Let the front surface of the third beam splitter have a reflectance of R1, a transmittance of T1, and a reflectance of the rear surface of R2. The thickness of the third spectroscope is d, the refractive index is n, and the incident angle is 45 degrees, regardless of the material absorption of the third spectroscope.
The relationship between the light intensity and the position in the case of distinguishing the light intensity of the light spots is as follows, when the light intensity at the real position is I1, I2, I3, I4 and I5. According to the trend of the light path, the corresponding position relationship under different light path is as follows:
Second optical path 502 incident to linear detector 56: the position is L2, L2 is L1+ d/n, and the length is d/n more than the position of L1
The axial position relationship of different light spots is progressive d/n, the light intensities of the axial positions (L1-L5) in the real condition are I1, I2, I3, I4 and I5, the light intensity of each corresponding position on the CCD is changed considering that the trans-reflection degrees of different positions are different when passing, and the actual light intensities are I1 ', I2 ', I3 ', I4 ' and I5 '
second optical path 502 incident to linear detector 56: the intensity I2' ═ I2 × T1 × R2 × T1 ═ I2 × T12*R2
Third light path 503 incident to linear detector 56: the intensity I3' ═ I3 × T1 × R2 × R1 × R2 × T1 ═ I3 × T12*R*R1
Fourth light path 504 incident on linear detector 56: the intensity I4' ═ I4 × T1 × R2 × R1 × R2 × R1 × R2 × T1 ═ I4 × T12*R23*R12
Fifth light path 505 incident on linear detector 56: the intensity I5 ═ I5 ═ T1 ═ R2 ═ R1 ═ R2 ═ R1 ═ R2 ═ R1 ═ R2 ═ T1 ═ I5 ═ T12*R24*R13
The simplified version is as follows
First light path 501 incident to linear detector 56: the intensity I1' ═ I1R 1,
second optical path 502 incident to linear detector 56: the intensity I2' ═ I2T 12*R2
Third light path 503 incident to linear detector 56: the intensity I3' ═ I3T 12*R*R1
Fourth light path 504 incident on linear detector 56: the intensity I4' ═ I4T 12*R23*R12
Fifth light path 505 incident on linear detector 56: the intensity I5' ═ I5T 12*R24*R13
In order to reflect the light intensity of the light spot on the CCD to the light intensity of the actual position, I1 to I5 are reversely solved through I1 'to I5'. The inverse ratio is as follows
The above calculation formula introduces the characteristics of different imaging positions and imaging light intensities, and the measurement method is as follows:
the light source 54 is turned off, the detector 56 measures the background BM, and the noise of the detector 56 is calibrated;
imaging the standard sample 1 and determining a left boundary of light intensity; assume the left boundary is the mth column on detection, where the different optical paths incident to linear detector 56 are distributed in different columns; reconstructing an attenuation ratio and position relation look-up table LUT, wherein the pixel number of the look-up table LUT and the pixel number of the CCD are consistent with the set of the look-up table LUT as follows:
(1) initially setting each value of the LUT to 0;
(2) starting from the left boundary position and then going to the m + N th column, the value is 1, where N ═ d/N/pixize ], pixize is the pixel size of the detector 56, [ ] is the rounding function;
(3) the value in the column from m + N to m +2N is R1/(T1R 2T 1)
(4) The values from the m +2N to the m +3N are R1/(T1R 2T 1R 1R 2)
(5) The value from one time to m + KN to m + (K +1) N is R1/(T1R 2T 1R 1K-2*R2K-2)；
After the imaging surface of the reference sample 1 is positioned, the position is calibrated as a reference position, and the light intensity map IM0 on the detector 56 is measured, so as to obtain a new reconstructed image IM 0' by the following formula:
Im0’＝(Im0-BM).*LUT
wherein, the two images are multiplied according to the values of the corresponding positions;
calculating the position of the centroid column of Im 0' as n0 columns;
when the distance between the sample 1 and the objective lens 2 is shifted, the distance is imaged as Im1 on the probe, and a reconstructed image Im1 'is calculated'
Im1’＝(Im1-BM).*LUT
Calculating the position of the centroid column of the Im 1' column as n1 column;
the moving position on the detector 56 is calculated by the following formula:
D＝(n1-n0)*pixel，
when D is a positive value, the light spot moves to the right, and the distance D/beta between the sample 1 and the objective lens 2 is pulled far2When D is negative, the light spot moves to the left, and the distance-D/beta between the sample 1 and the objective lens 2 is reduced2Wherein the beta value is the magnification of the system.
Through the operation, the movement distance required by the Z-axis displacement table can be obtained, 5 calculates the movement distance required by the Z-axis displacement device 7, and then the Z-axis displacement device 7 moves by the corresponding distance, so that the distance between the objective lens 2 and the sample 1 can be kept unchanged under the closed loop.
Example 2
Referring to fig. 4, embodiment 2 differs from embodiment 1 in that the focus lock detection module 5 further includes: a collimator lens 57; the collimating lens 57 is disposed between the first beam splitter 51 and the quarter wave plate 52, and the collimating lens 57, the first beam splitter 51 and the quarter wave plate 52 are on the same horizontal optical axis. The focus lock detection method further includes: the circularly polarized light passing through the quarter-wave plate enters the collimating lens 57, and becomes parallel light after passing through the collimating lens 57, and the parallel light enters the first dichroic mirror 51; the light reflected by the sample 1 is reflected by the beam splitter and then enters the collimator lens 57, and is changed into focused light after passing through the collimator lens 57, and the focused light enters the first beam splitter 51. Embodiment 2 avoids loss of light for imaging by adding the collimator lens 57.
The utility model discloses, throw away horizontal magnification as the amplification of optical size, adopt the axial magnification as optical magnification, the axial magnification can be directly proportional to the square of horizontal magnification. This allows an increase in magnification of at least two orders of magnitude, i.e. at least 100 times the magnification. But realize that the measurement of axial magnification is more difficult, the utility model discloses a neotype scheme measures out the axial magnification.
The above-mentioned specific implementation is the preferred embodiment of the present invention, can not be right the utility model discloses the limit, any other does not deviate from the technical scheme of the utility model and the change or other equivalent replacement modes of doing all contain within the scope of protection of the utility model.
Claims (4)
1. A focus lock detection system for a microscope, comprising: the device comprises an objective lens, a tube lens, a focus locking detection module, a focus locking controller, a Z-axis shifter and an imaging CCD (charge coupled device); the Z-axis shifter is arranged on the side edge of the objective lens;
the objective lens is arranged under the sample, the tube lens is arranged under the objective lens, the imaging CCD is arranged under the tube lens, the focus-locking detection module is arranged between the tube lens and the imaging CCD, and the focus-locking detection module, the focus-locking controller and the Z-axis shifter are sequentially connected.
2. The focus lock detection system for a microscope of claim 1, wherein the focus lock detection module comprises: the device comprises a first light splitting lens, a quarter-wave plate, a second light splitting lens, a light source, a third light splitting lens and a linear detector;
the first beam splitting lens is obliquely arranged right below the tube lens, the first beam splitting lens, the quarter wave plate, the second beam splitting lens and the third beam splitting lens are sequentially horizontally arranged, the left surface of the first beam splitting lens is symmetrical to the left surface of the second beam splitting lens, the right surface of the second beam splitting lens is symmetrical to the left surface of the third beam splitting lens, the light source is arranged right above the left surface of the second beam splitting lens, and the linear detector is arranged right above the left surface of the third beam splitting lens.
3. The focus lock detection system for a microscope of claim 2, wherein the focus lock detection module further comprises: a collimating lens;
the collimating lens is arranged between the first beam splitting lens and the quarter-wave plate, and the collimating lens, the first beam splitting lens and the quarter-wave plate are on the same horizontal optical axis.
4. The lock focus detection system of claim 2, wherein the second beam splitter is a polarizing beam splitter; the left surface of the third light splitting lens is plated with a polarization film which transmits P-state polarized light and reflects S-state polarization, and the right surface of the third light splitting lens is plated with a total reflection film; the left surface of the first light splitting lens is plated with a film which reflects infrared light and transmits visible light.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114114663A (en) * | 2021-02-25 | 2022-03-01 | 广东粤港澳大湾区黄埔材料研究院 | Focal-locking detection system and method of microscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114114663A (en) * | 2021-02-25 | 2022-03-01 | 广东粤港澳大湾区黄埔材料研究院 | Focal-locking detection system and method of microscope |
| CN114114663B (en) * | 2021-02-25 | 2023-11-21 | 广东粤港澳大湾区黄埔材料研究院 | Lock focus detection system and method for microscope |
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