CN108333145A - A kind of the detection new equipment and localization method of ICF pellets - Google Patents
A kind of the detection new equipment and localization method of ICF pellets Download PDFInfo
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- CN108333145A CN108333145A CN201810001451.5A CN201810001451A CN108333145A CN 108333145 A CN108333145 A CN 108333145A CN 201810001451 A CN201810001451 A CN 201810001451A CN 108333145 A CN108333145 A CN 108333145A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
The present invention relates to a kind of detection new equipment of ICF pellets and localization methods.The present invention includes laser, beam expander, the first beam splitter, the second beam splitter, third beam splitter, plane mirror, pellet to be measured, lens, ccd image sensor, computer, high-capacity LED, diaphragm.Pellet is moved with 10 μm of interval, acquires the back-lit projection image at each position, is filtered, after the image preprocessings work such as aperture extraction, calculates the acutance of bright ring near zone, the maximum position of acutance meets Nonimage Conjugate Relations.After pellet is moved on to the position, continue, with 1 μm of interval, to move in front and back 10 μm of section.Repeating above said collection, image preprocessing, acutance calculate step, and pellet is moved on to new acutance maximum position, complete positioning.Pellet detection new equipment and localization method proposed by the present invention, are suitable for conventional tubular vacuum space, and can realize and fast, accurately be automatically positioned.
Description
Technical field
The invention belongs to technical field of optical precision measurement, are related to a kind of the detection new equipment and localization method of ICF pellets.
Background technology
Inertial confinement fusion (ICF) is one of the mainstream scheme for realizing controllable nuclear fusion, is had in fusion research
Important meaning.Pellet is assembled as all N beams laser beams, and implosion is to induce the core of nuclear fusion, inner surface finish,
Concentricity, uniformity have extremely harsh requirement.For this purpose, it is extremely important to implement quality control to it.
According to the principle of measurement, there are many pellet ice sheet refractive index and thickness detection apparatus.U.S. Lao Lunsilifumo
You utilize interferometry (Interferometric measurement of laser fusion targets. in laboratory
(Applied optics, 1978, Vol.17, No.22:P3641~3646)), interference device is specially a Tai Man-Green
Instrument.Interferometry pellet also has Mach-Zehnder interferometer method, shearing interferometer etc. in addition to Twyman Green Interferometer method.The back of the body
Light sciagraphy is widely used as a kind of method simple in structure in pellet detection.China Engineering Physics Research Institute's laser
Fusion research center characterizes pellet ice sheet inside surface roughness using back-lit projection method, i.e., ice layer thickness is distributed (backlight in pellet
Shadowgraph imaging characterized by techniques ICF pellet inside surface roughness (light laser and the particle beams, 2010, VOL.22, No.12:P2880~
2884)).Sciagraphy relative interference method and back-lit projection method can make up must pre-suppose that pellet ice sheet refractive index or
The deficiency of thickness, and the thickness value not influenced by refractive index can be obtained.But compare interferometry and back-lit projection method, roentgenogram
The exposure time of physiognomy is long, and precision is relatively low, and more demanding to equipment.It has been used simultaneously in the LMJ projects of France dry
Relate to method and back-lit projection method (Observer for a thick layer of solid deuterium-tritium using
backlit optical shadowgraphy and interferometry.(Applied optics,2007,VOL.46,
No.33:P8193~8201)), the ice layer thickness at pellet the two poles of the earth is estimated using interferometry, then ice is solved by back-lit projection
The distribution of layer thickness.The solving precision of this method is higher, but cannot equally solve the refractive index and thickness of ice sheet simultaneously.
Generally, ice sheet refractive index is both needed to solve with thickness in pellet, although the nominal value of these possible known amounts,
But it may be variant with actual value.General single method only solves single unknown number, and interferometry is such as used alone or backlight is thrown
Shadow method etc., only assuming that one of value in the case of solve another unknown number.Roentgenography can exclude refractive index
Influence, solve absolute thickness value.But roentgenography is more demanding to laboratory apparatus, time of measuring is long, and can not
Measure refractive index.In order to solve this problem, the system and device of interferometry and back-lit projection method is combined, it can be according to certain
Algorithm solves two unknown numbers simultaneously.Such as in a kind of patent (measurement method and dress of ice sheet refractive index and thickness in ICF pellets
Set) in, provide a kind of system and device and correspondence measurement method of cross type.The measurement method can be used for measuring target simultaneously
Ice sheet refractive index and thickness in ball.But for most pellet detecting systems, pellet need to be placed in the channel of a tubular, at this moment
Cross type system and device is no longer applicable in.Need a kind of new system and device, the device that can both meet ice sheet in pellet and roll over
Measured while rate is penetrated with thickness, but can meet it is actually detected in environmental demand.
Invention content
The object of the present invention is to provide a kind of detection new equipment of ICF pellets and localization methods.
The technical solution adopted by the present invention to solve the technical problems is as follows：
A kind of detection new equipment of ICF pellets, it is characterised in that anti-including laser, beam expander, the first beam splitter, plane
Penetrate mirror, the second beam splitter, third beam splitter, pellet to be measured, lens, ccd image sensor, high-capacity LED, diaphragm, computer；Institute
Laser, beam expander, the first beam splitter, the plane mirror stated are put successively along same horizontal line, the light-emitting window of laser with
The light inlet of beam expander is aligned, and the light-emitting window of beam expander is aligned with the light inlet of the first beam splitter, the first beam splitter transmitted light
Light-emitting window is with plane mirror in 45 ° of settings；High-capacity LED, light are put successively with one horizontal line of laser parallel direction upper edge
Door screen, third beam splitter, pellet to be measured, the second beam splitter, lens and ccd image sensor；Wherein, diaphragm light-emitting window is located at Gao Gong
The center of rate LED, third beam splitter is placed in diaphragm light-emitting window, and keeps longitudinally-aligned with the first beam splitter；Second point
Shu Jingyu plane mirrors keep longitudinally-aligned；Pellet to be measured, lens, ccd image sensor three put that meet image total
Yoke relationship；Ccd image sensor is connect with computer, obtains interference pattern and back-lit projection figure.
A kind of localization method of the detection new equipment of ICF pellets, includes the following steps：
Step 1：Device light path
1-1. interferes light path：
The laser sent out from laser becomes collimated laser beam by beam expander, is divided into two bundles by the first beam splitter：One
Beam is directed through the first beam splitter, and the second beam splitter is injected after plane mirror reflects；Another beam passes through third beam splitter
Afterwards, pellet to be measured is passed through to inject the second beam splitter；This two-beam is schemed after the second beam splitter closes beam, by lens imaging in CCD
As on sensor；
1-2. back-lit projection light paths
Laser light source is closed, high-power LED light source is opened；The collimated light beam sent out from high-capacity LED passes through diaphragm
Bore reduces afterwards, is divided into two bundles after third beam splitter：It is a branch of to be emitted to except device；It is a branch of to be directed through third beam splitting
Mirror is then passed through the second beam splitter, by lens imaging on ccd image sensor after pellet to be measured；
Step 2：To being handled by the collected each width back-lit projection image of back-lit projection light path, extract
Behind pellet aperture to be measured, by the Information Filtration except the aperture, the information only boxed out in diameter carries out the detection of next step；
Step 3：For it is filtered, extract each width back-lit projection figure III behind aperture, calculate bright ring annular nearby
The acutance in region；
Step 4：For each position sharpness value solved, maximum value therein is found out, and pellet to be measured is moved
To the position of maximum sharpness value, you can form the image relationship with ccd detector conjugation.
In the interference light path of step 1, pellet, lens and ccd image sensor to be measured meet imaging conjugate position pass
System.
For back-lit projection light path, all devices including imaging len and ccd image sensor are motionless, preceding
The position of pellet to be measured is moved afterwards；The back-lit projection figure that ccd image sensor receives changes, Mechanical course pellet to be measured
10 μm are automatically moved every time, acquire the back-lit projection image after movement every time.
Step 2 is implemented as follows：
2-1. is to image preprocessing：It uses gaussian filtering to be filtered collected back-lit projection image to make an uproar to reduce
Sound obtains filtered back-lit projection image I；
2-2. extracts outer profile to filtered back-lit projection image I；
First, edge extracting is carried out to back-lit projection image I using binaryzation function and Sobel operators, it includes side to obtain
The binary image II of edge information；Wherein, the amplitude of binary image II is w × h, and loop truss radius is unknown, if maximum
Radius of circle is image maximum amplitude, that is, has r=1/2 × max (w, h), therefore parameter space size is w × h × r；
2-3. carries out 4 times of down-sampling processing to binary image II, obtains the down-sampled images I that a width reduces；Wherein, under
The amplitude of sampled images I is respectively 1/4w × 1/4h, and first time Hough transform is carried out to it；Due to the width of down-sampled images I,
High and radius of circle size is the 1/4 of binary image II；Therefore, the maximum value of each component of parameter space is also reduced to original
First 1/4, parameter space entirety size are original 1/64 times, and image size is only 1/16 in former algorithm, participate in calculating
Pixel is also 1/16 times originally；
2-4. is set after first time Hough transform, and the central coordinate of circle and radius detected is (a1,b1,r1)；It will detection
Obtained central coordinate of circle and radius amplifies 4 times, obtains the central coordinate of circle of binary image II and the coarse value of radius, i.e. (4a1,
4b1,4r1)；
2-5. re-establishes a new parameter space and carries out second of Hough transform；If the mistake of central coordinate of circle and radius
Poor range is respectively δ1And δ2, then 3 quantization parameter ranges in parameter space be respectively：
Wherein, (x2,y2) be circle image space central coordinate of circle range, r2For radius of circle range；Although image space ruler
It is very little to be restored to II size of binary image, it is 16 times bigger than the image space of first time Hough transform；
2-6. carries out Hough transform loop truss again in new parameter space, to binary image II, you can detects
To the exact value of the circle characteristic value comprising picture aperture information.
Step 3 is specifically realized using Tenengrad gradient algorithms：
Tenengrad gradient algorithms extract Grad both horizontally and vertically respectively using Sobel operators, establish bright ring
The evaluation function of acutance：
The evaluation function of Tenengrad gradient algorithms is defined as：
D (f)=∑y∑x| G (x, y) | (G (x, y) ＞ T) (2)
Wherein, T is preset detection threshold value；The form of G (x, y) is expressed as：
In formula, GxAnd GyIndicate that Sobel operators at pixel (x, y) both horizontally and vertically locate the volume of detective operators respectively
Product, Sobel operator templates are：
Therefore, it is that D (f) takes maximum at clear conjugate position when being judged using above-mentioned acutance evaluation function
At point.
When pellet to be measured is moved to the position of maximum sharpness value by step 4, positioning accuracy has reached 10 μm, if in the maximum
At front and back 10 μm of the position of sharpness value, pellet is further moved with 1 μm of interval；Then to each position according to
Tenengrad gradient algorithms calculate acutance again, finally equally move on to pellet to be measured at the position of maximum sharpness value；It is fixed at this time
Position precision can reach 1 μm of positioning accuracy.
The present invention has following remarkable advantage：
1. proposing a kind of new equipment of ICF pellets detection, solves cross type light path in actually detected device
The problem of can not using.
2. providing mating localization method for new detection device, realization is accurate to 1 micron of positioning accuracy.
3. back-lit projection and interference are detected the two methods to organically blend, there is largely road device altogether in two light paths, have
Conducive to simplifying for device volume, experiment regulating step is enormously simplified.
4. the Hough transform extraction circle used have passed through optimization, the algorithm compared to script improves extraction rate and precision.
Description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is positioning schematic；
In Fig. 3 back-lit projection figures, the region for calculating acutance；
Fig. 4 positioning principle flow charts；
Fig. 5 is five groups of experiment location datas.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and examples.
As shown in Figure 1, a kind of detection new equipment of ICF pellets, including it is laser 1, beam expander 2, the first beam splitter 3, flat
Face speculum 4, the second beam splitter 5, third beam splitter 6, pellet to be measured 7, lens 8, ccd image sensor 9, high-capacity LED (hair
Optical diode) 10, diaphragm 11, computer 12.The laser 1, beam expander 2, the first beam splitter 3, plane mirror 4 are along same
Horizontal line is put successively, and the light-emitting window of laser 1 is aligned with the light inlet of beam expander 2, the light-emitting window of beam expander 2 and the first beam splitting
The light inlet of mirror 3 is aligned, and the light-emitting window of 3 transmitted light of the first beam splitter is arranged with plane mirror 4 in 45 °.It is parallel with laser 1
One horizontal line of direction upper edge put successively high-capacity LED (light emitting diode) 10, diaphragm 11, third beam splitter 6, pellet to be measured 7,
Second beam splitter 5, imaging lens 8 and ccd image sensor 9.Wherein, 11 light-emitting window of diaphragm is located at high-capacity LED (light-emitting diodes
Pipe) 10 center, third beam splitter 6 is placed in 11 light-emitting window of diaphragm, and keeps longitudinally-aligned with the first beam splitter 3.The
Two beam splitters 5 keep longitudinally-aligned with plane mirror 4.Pellet 7 to be measured, lens 8,9 three of ccd image sensor put it is full
Sufficient Nonimage Conjugate Relations.Ccd image sensor 9 is connect with computer 12, obtains interference pattern 13 and back-lit projection Figure 14.
Based on above-mentioned apparatus, the application method of the detection new equipment of ice sheet refractive index and thickness in a kind of ICF pellets, including
Following steps：
Step 1：The laser sent out from laser 1 becomes collimated laser beam by beam expander 2, divides by the first beam splitter 3
For two beams：It is a branch of to be directed through the first beam splitter 3, inject the second beam splitter 5 after the reflection of plane mirror 4；Another Shu Jing
After crossing third beam splitter 6, pellet 7 to be measured is passed through to inject the second beam splitter 5；This two-beam passes through after the second beam splitter 5 closes beam
Lens 8 are imaged on ccd image sensor 9.Wherein, pellet 7 to be measured, lens 8 need to meet imaging with ccd image sensor 9
Conjugate position relationship.The light path is interference light path.
1 light source of laser is closed, 10 light source of high-capacity LED is opened.The collimated light beam sent out from high-capacity LED 10 passes through
Bore reduces after diaphragm 11, is divided into two bundles after third beam splitter 6：It is a branch of to be emitted to except device；It is a branch of to be directed through
Three beam splitters 6 are then passed through the second beam splitter 5 after pellet 7 to be measured, are imaged on ccd image sensor 9 by lens 8.It should
Light path is back-lit projection light path.
For back-lit projection light path, all devices including imaging len and ccd image sensor are motionless, preceding
The position of pellet 7 to be measured is moved afterwards.The back-lit projection figure that ccd image sensor 9 receives changes, and wherein clarity changes
It is especially pronounced.As shown in Fig. 2, Mechanical course pellet 7 to be measured automatically moves 10 μm every time, the back-lit projection after movement every time is acquired
Image.
Step 2：Collected each width back-lit projection image is handled, after extracting pellet aperture to be measured, by this
Information Filtration except aperture, the information only boxed out in diameter carry out the detection of next step.
2-1. is to image preprocessing：It uses gaussian filtering to be filtered collected back-lit projection image to make an uproar to reduce
Sound obtains filtered back-lit projection image I, and gaussian filtering is suitable for eliminating Gaussian noise as a kind of linear smoothing filtering,
It is usually used in reducing picture noise and reduces level of detail.
2-2. extracts outer profile to filtered back-lit projection image I.
First, edge extracting is carried out to back-lit projection image I using binaryzation function and Sobel operators, it includes side to obtain
The binary image II of edge information.Wherein, the amplitude of binary image II is w × h, and loop truss radius is unknown, if maximum
Radius of circle is image maximum amplitude, that is, has r=1/2 × max (w, h), therefore parameter space size is w × h × r.To this parameter
Space carries out Hough transform, it will leads to great memory headroom, influences algorithm rate.
2-3. carries out 4 times of down-sampling processing in order to improve efficiency of algorithm, to binary image II, obtains under width diminution
Sampled images I.Wherein, the amplitude of down-sampled images I is respectively 1/4w × 1/4h, and first time Hough transform is carried out to it.Due to
Wide, high and radius of circle the size of down-sampled images I is the 1/4 of binary image II, therefore each component of parameter space
Maximum value is also reduced to original 1/4.Therefore, parameter space entirety size is original 1/64 times, greatly reduces memory sky
Between, improve algorithm rate.Meanwhile 1/16 in the only former algorithm of image size, it is original to participate in the pixel calculated also
1/16 times.This makes the calculation amount of Hough transform also greatly reduce.
2-4. is set after first time Hough transform, and the central coordinate of circle and radius detected is (a1,b1,r1)；
The obtained central coordinate of circle of detection and radius amplified 4 times, obtains the central coordinate of circle and radius of binary image II
Coarse value, i.e. (4a1,4b1,4r1)。
2-5. considers certain error range and suitably relaxes detection scale, re-establishes a new parameter space and carries out
Second of Hough transform.If the error range of central coordinate of circle and radius is respectively δ1And δ2, then 3 in parameter space quantization ginsengs
Counting range is respectively：
Wherein, (x2,y2) be circle image space central coordinate of circle range, r2For radius of circle range.Although image space ruler
It is very little to be restored to II size of binary image, it is 16 times bigger than the image space of first time Hough transform.But due to for the first time
Hough transform gives the rough center of circle and radius, and parameter space range is limited in 2 δ1With 2 δ2Within, it needs to be traversed for
Image range be substantially reduced.It is worth noting that, 2 δ in new parameter space1=x1,y1, 2 δ2=r1, whole size is than for the first time
Hough transform parameter space is far smaller than 1/16 times.Therefore, second of Hough transform avoids what bulk information redundancy was brought
Calculation amount calculates the time faster than first time Hough transform.
2-6. carries out Hough transform loop truss again in new narrow parameter space, to binary image II, you can inspection
Measure the exact value of the circle characteristic value comprising picture aperture information.The algorithm is compared to justify with traditional classical Hough transforms and be examined
It surveys, has the following advantages：
1) radius that need not preset detection, reduces manual intervention factor；
2) down-sampled images treatment technology is used, parameter space size is reduced, accelerates algorithm rate；
3) identical Hough transform principle, accuracy of detection is used to be consistent with classical Hough transforms.
Step 3：For it is filtered, extract each width back-lit projection figure III behind aperture, calculate bright ring annular nearby
The acutance in region.Choose such as Fig. 3 in its region.16 be bright ring, and 15 be acutance zoning outer boundary, and 17 is in acutance zonings
Boundary.
In terms of frequency domain angle, sharp edge has more high fdrequency components than fuzzy edge image, because defocusing process shadow
Loud is the local edge of imaging point；In terms of the angle of spatial domain, clear image has the edge more sharpened than blurred picture, so,
The sharp keen degree at edge can be used as the judgment criteria of image conjugate.When tested pellet moves in the detection system, image border
Acutance at position will change therewith.Judge whether tested pellet is moved to conjugation according to the sharpness value size of each position
At position.When acutance is when maximum occurs in a certain position, then pellet is tested at this is in conjugate position with ccd detector, directly
It is the most clear to connect the bright ring for showing as being tested at this time in pellet picture.
Tenengrad gradient algorithms extract Grad both horizontally and vertically respectively using Sobel operators, establish bright ring
The evaluation function of acutance mainly has following characteristic：
1) unbiasedness, i.e., only evaluation function just takes extreme value at conjugate position；
2) only there are one extreme points for unimodality, i.e. evaluation function；
3) high s/n ratio, i.e., under the conditions of higher interference, guarantee system can be correctly detecting defocus signal；
4) calculation amount is small.
The evaluation function of Tenengrad gradient algorithms is defined as：
D (f)=∑y∑x| G (x, y) | (G (x, y) ＞ T) (2)
Wherein, T is preset detection threshold value；The form of G (x, y) is expressed as：
In formula, GxAnd GyIndicate that Sobel operators at pixel (x, y) both horizontally and vertically locate the volume of detective operators respectively
Product, Sobel operator templates are：
Therefore, it is that D (f) takes maximum at clear conjugate position when being judged using above-mentioned acutance evaluation function
At point.
Tenengrad gradient algorithms can count the acutance of the bright ring of pellet picture, and pellet shifting is tested to obtain
The acutance variation at each position is moved, the uncertainty of manual intervention is reduced, with detection speed is fast, Detection accuracy is high, anti-
The advantages that making an uproar property is good.
Step 4：For each position sharpness value solved, maximum value therein is found out, and pellet to be measured is moved
To the position of maximum sharpness value, you can form the image relationship with ccd detector conjugation.Positioning accuracy at this time has reached 10 μ
m.In order to further increase positioning accuracy, at front and back 10 μm in the position, pellet is further moved with 1 μm of interval.To every
One position calculates acutance according to Tenengrad gradient algorithms.Pellet is equally moved on into acutance maximum.It can reach 1 μm at this time
Positioning accuracy.General orientation algorithm flow chart such as Fig. 4.
After the completion of back-lit projection framing, back-lit projection experiment is carried out.It is then turned off LED light source, opens laser
Light source is switched to optical interference circuit.In theory, the pellet longitudinal direction to be measured section of back-lit projection light path needs to be total to CCD formation images
Yoke；And in optical interference circuit, the rear surface of pellet needs to form object-image conjugate with CCD.Due to the position of imaging lens and CCD in experiment
It sets and remains constant, in order to ensure the image space required by theory in back-lit projection and interference detection, carrying on the back
After the completion of light projective iteration, when being switched to interference experiment, it is also necessary to which pellet is moved to the distance of a radius towards CCD so that
Interfere in road, rear surface and the CCD of pellet form object-image conjugate.The error of displacement distance comes from machine error.
Repeatability and feasibility to the localization method have carried out experimental verification.According to abovementioned steps, by pellet towards one
Determine direction movement, the bright ring on observation ccd sensor receives at this time back-lit projection figure is from smear out effect to clear, then from clear
It is clear change to it is fuzzy.Back-lit projection image after each movement of acquisition, and the above-mentioned image preprocessing of application, acutance calculating etc..Weight
The relationship of five groups of image sharpness and position is arranged, obtains Fig. 5 by five groups of repetition measurement amount.It can be seen that the bright ring sharpness distribution of each group experiment
It can preferably overlap, demonstrate the repeatability and reliability of this algorithm.
Claims (7)
1. a kind of localization method of the detection new equipment of ICF pellets, it is characterised in that include the following steps：
Step 1：Device light path
1-1. interferes light path：
The laser sent out from laser (1) becomes collimated laser beam by beam expander (2), is divided into two by the first beam splitter (3)
Beam：It is a branch of to be directed through the first beam splitter (3), inject the second beam splitter (5) after plane mirror (4) reflection；Another beam
After third beam splitter (6), pellet to be measured (7) is passed through to inject the second beam splitter (5)；This two-beam is in the second beam splitter (5)
After closing beam, it is imaged on ccd image sensor (9) by lens (8)；
1-2. back-lit projection light paths
Laser (1) light source is closed, high-capacity LED (10) light source is opened；The collimated light beam warp sent out from high-capacity LED (10)
Crossing diaphragm (11), bore reduces afterwards, is divided into two bundles after third beam splitter (6)：It is a branch of to be emitted to except device；It is a branch of direct
Through third beam splitter (6), it is then passed through the second beam splitter (5) after passing through pellet to be measured (7), CCD figures are imaged on by lens (8)
As on sensor (9)；
Step 2：To being handled by the collected each width back-lit projection image of back-lit projection light path, extract to be measured
Behind pellet aperture, by the Information Filtration except the aperture, the information only boxed out in diameter carries out the detection of next step；
Step 3：For it is filtered, extract each width back-lit projection figure III behind aperture, calculate bright ring annular region nearby
Acutance；
Step 4：For each position sharpness value solved, maximum value therein is found out, and pellet to be measured is moved to most
The position of big sharpness value, you can form the image relationship with ccd detector conjugation.
2. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that detection new clothes
It sets including laser (1), beam expander (2), the first beam splitter (3), plane mirror (4), the second beam splitter (5), third beam splitting
Mirror (6), pellet to be measured (7), lens (8), ccd image sensor (9), high-capacity LED (10), diaphragm (11), computer (12)；Institute
Laser (1), beam expander (2), the first beam splitter (3), the plane mirror (4) stated are put successively along same horizontal line, laser
The light-emitting window of device (1) is aligned with the light inlet of beam expander (2), the light inlet of the light-emitting window and the first beam splitter (3) of beam expander (2)
The light-emitting window of alignment, the first beam splitter (3) transmitted light is arranged with plane mirror (4) in 45 °；With laser (1) parallel direction
One horizontal line of upper edge puts high-capacity LED, diaphragm (11), third beam splitter (6), pellet to be measured (7), the second beam splitter successively
(5), imaging lens 8 and ccd image sensor (9)；Wherein, diaphragm (11) light-emitting window is located at the center of high-capacity LED, third point
Shu Jing (6) is placed in diaphragm (11) light-emitting window, and keeps longitudinally-aligned with the first beam splitter (3)；Second beam splitter (5) with it is flat
Face speculum (4) keeps longitudinally-aligned；Pellet (7) to be measured, lens (8), putting for ccd image sensor (9) three meet object
Image conjugate relationship；Ccd image sensor (9) is connect with computer (12), obtains interference pattern (13) and back-lit projection figure (14).
3. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that step 1
Interfere in light path, pellet (7), lens (8) and ccd image sensor (9) to be measured meet imaging conjugate position relationship.
4. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that for backlight
Light path is projected, all devices including imaging len and ccd image sensor are motionless, are moved forward and backward pellet to be measured
(7) position；The back-lit projection figure that ccd image sensor (9) receives changes, and Mechanical course pellet to be measured (7) is each
10 μm are automatically moved, the back-lit projection image after movement every time is acquired.
5. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that step 2 has
Body is realized as follows：
2-1. is to image preprocessing：It uses gaussian filtering that collected back-lit projection image is filtered to reduce noise, obtains
Take filtered back-lit projection image I；
2-2. extracts outer profile to filtered back-lit projection image I；
First, edge extracting is carried out to back-lit projection image I using binaryzation function and Sobel operators, obtains and believes comprising edge
The binary image II of breath；Wherein, the amplitude of binary image II is w × h, and loop truss radius is unknown, if greatest circle half
Diameter is image maximum amplitude, that is, has r=1/2 × max (w, h), therefore parameter space size is w × h × r；
2-3. carries out 4 times of down-sampling processing to binary image II, obtains the down-sampled images I that a width reduces；Wherein, down-sampling
The amplitude of image I is respectively 1/4w × 1/4h, and first time Hough transform is carried out to it；Due to the width of down-sampled images I, it is high with
And the size of radius of circle is the 1/4 of binary image II；Therefore, the maximum value of each component of parameter space is also reduced to original
1/4, parameter space entirety size is original 1/64 times, and image size is only 1/16 in former algorithm, participates in the pixel calculated
Point is also 1/16 times originally；
2-4. is set after first time Hough transform, and the central coordinate of circle and radius detected is (a1,b1,r1)；Detection is obtained
Central coordinate of circle and radius amplify 4 times, obtain the central coordinate of circle of binary image II and the coarse value of radius, i.e. (4a1,4b1,
4r1)；
2-5. re-establishes a new parameter space and carries out second of Hough transform；If the error model of central coordinate of circle and radius
Enclose respectively δ1And δ2, then 3 quantization parameter ranges in parameter space be respectively：
Wherein, (x2,y2) be circle image space central coordinate of circle range, r2For radius of circle range；Although image space size is extensive
II size of binary image is arrived again, it is 16 times bigger than the image space of first time Hough transform；
2-6. carries out Hough transform loop truss again in new parameter space, to binary image II, you can detection is wrapped
The exact value of the circle characteristic value of the information containing picture aperture.
6. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that step 3 has
Body is realized using Tenengrad gradient algorithms：
Tenengrad gradient algorithms extract Grad both horizontally and vertically respectively using Sobel operators, establish bright ring acutance
Evaluation function：
The evaluation function of Tenengrad gradient algorithms is defined as：
D (f)=∑y∑x| G (x, y) | (G (x, y) ＞ T) (2)
Wherein, T is preset detection threshold value；The form of G (x, y) is expressed as：
In formula, GxAnd GyIndicate that Sobel operators at pixel (x, y) both horizontally and vertically locate the convolution of detective operators respectively,
Sobel operator templates are：
Therefore, it is that D (f) takes at maximum point at clear conjugate position when being judged using above-mentioned acutance evaluation function.
7. a kind of localization method of the detection new equipment of ICF pellets according to claim 2, it is characterised in that step 4 will
When pellet to be measured is moved to the position of maximum sharpness value, positioning accuracy has reached 10 μm, if in the position of the maximum sharpness value
At front and back 10 μm, pellet is further moved with 1 μm of interval；Then to each position according to Tenengrad gradient algorithms again
Secondary calculating acutance, finally equally moves on to pellet to be measured at the position of maximum sharpness value；Positioning accuracy can reach 1 μm at this time
Positioning accuracy.
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