AU2020101628A4 - An intracavity-enhanced dual-wavelength common-path phase microscopy imaging measurement system based on an F-P interferometer - Google Patents

An intracavity-enhanced dual-wavelength common-path phase microscopy imaging measurement system based on an F-P interferometer Download PDF

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AU2020101628A4
AU2020101628A4 AU2020101628A AU2020101628A AU2020101628A4 AU 2020101628 A4 AU2020101628 A4 AU 2020101628A4 AU 2020101628 A AU2020101628 A AU 2020101628A AU 2020101628 A AU2020101628 A AU 2020101628A AU 2020101628 A4 AU2020101628 A4 AU 2020101628A4
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interferometer
light
measured
wavelength
cavity
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Sheng Li
Lingzhi MENG
Libo Yuan
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Guilin University of Electronic Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/06Means for illuminating specimens
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image

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Abstract

The present invention provides an intracavity-enhanced dual-wavelength common-path phase microscopy imaging measurement system based on an F-P interferometer. It is characterized by: it comprises a laser light source 1, an optical attenuator 2, a fiber coupler (LFC) 3, a single mode fiber 4, a fiber collimator (FCL) 5, an expander 6, an F-P interferometer 7, an object to be measured 8, a microscopic objective 9, a CCD detecting camera 10 and a computer 11. The present invention can be used for digital holography and refractive index measurements of microscopic objects, and can be widely used for three-dimensional microscopic imaging of refractive index of various microscopic objects. 1/2 DRAWINGS 1-11 1-24-2 5 68 8 9 11 10 FIG. 1 1-2 FIG. 2

Description

1/2 DRAWINGS
1-11
5 1-24-2
68 8
9 11
10
FIG. 1
1-2
FIG. 2
DESCRIPTION TITLE OF INVENTION
An intracavity-enhanced dual-wavelength common-path phase microscopy imaging
measurement system based on an F-P interferometer
TECHNICAL FIELD
[0001] The present invention relates to an intracavity-enhanced dual-wavelength common-path
phase microscopy imaging measurement system based on an F-P interferometer, which can be
used for the three-dimensional microscopic imaging of refractive index inside cells and various
microscopic objects, which belongs to the field of optical imaging technology.
BACKGROUND ART
[0002] Micro-optical imaging, also commonly referred to as Optical Microscopy, or Light
Microscopy, is the technology of reflecting visible light through the sample or from the sample,
passing through one or more lens, to obtain a magnified image of the microscopic sample. The
image obtained can be viewed directly with eyes through an eyepiece, or with a photographic
plate or a digital image detector such as a charge coupled device (CCD) and a complementary
metal oxide semiconductor (CMOS) to record, and a computer to display and analyze process.
[0003] Ordinary optical microscopy using bright-field illumination is often limited in three ways: first, it can only be performed on dark-colored samples (transmissive) or strong-reflective samples (reflective) for imaging; second, the optical diffraction limits restrict the maximum resolution of the technique to be approximately 200 nm; third, out-of-focus information reduces image contrast. Based on the excitation of the fluorescent molecules in the sample (exogenous or endogenous) and the Fluorescence Microscopy emitted by fluorescence, it can overcome the limitations of not being able to image transparent samples, but with limited resolution and out of-focus interference, other measures are still needed to address the problem.
[0004] In the 1930s, the Dutch physicist Zemike first proposed the phase contrast technique. The
principle is that by changing the phase of the direct light (i.e. zero frequency light) by 90 and
attenuating appropriately, so the direct light and the diffraction light can interfere to cause the
distribution of complex amplitudes in the image plane to be approximately proportional to the
phase distribution of the object, converting the "invisible" phase change into a "visible" phase
change. Using this technique, direct observation and imaging of unstained live cell samples can
be easily achieved, but it has the disadvantage of being unsuitable for thick samples and very
small samples.
[0005] Digital holography has been used in recent years for its ability to record and display full
information about the object being recorded and apply to microscopy imaging. A three
wavelength reflective digital holographic microscope is disclosed in patent CN109062018A.
The digital holographic microscope consists of three beams of linearly polarized light sources
with different wavelengths, as well as a spectroscopic prism and lens. It achieves the function of
having better image resolution compared to previous microscopy imaging devices, but its system
uses only the reflected light as the forming interference light and a more accurate image cannot
be obtained.
[0006] Disclosed in patent CN109615651A is a three-dimensional microscopic imaging method
and system based on a light field microscope system, the light field intensity image and its first forward projection matrix, the high-resolution intensity image, and the second forward projection matrix, by a preset algorithm, are reconstructed in three dimensions to generate the results of the three-dimensional reconstruction of the three-dimensional sample. By adding one path of acquisition light, to achieve the enhancement of focal plane reconstruction signal-to-noise ratio (SNR) under the circumstance of having same number of iterations, the reconstruction effect of the light field microscopy image is greatly increased. However, the method and system were reconstructed using a more optimized algorithm, relying on an optical path structure that still has no changes, and the iterations are complex and difficult to implement.
[0007] Disclosed in patent CN109520988A is a microscopic imaging system, consists of a shock-isolated platform, a removable slide, and an imaging component. It can conduct high accuracy tests on different types of cell samples, but the system is based on the principle of cellular fluorescence to image and cannot be used to image other non-cell-particles and objects, it has a limited applicability.
[0008] Patent CN201710904860.1 discloses an optical coherence tomography imaging system. The imaging system uses a Mach-Zehnder interferometric optical path, which features an optical fiber to simplify the system and reduce costs, but comparing to an F-P cavity optical path structure, it is still quite complex.
[0009] Patent CN201810145657.5 discloses a high-resolution digital holographic diffraction topographic imaging, characterized by a Mach-Zehnder interferometric optical path structure, using a synthetic aperture method to obtain N numbers of synthetic high resolution holograms, thereby obtaining a high-resolution three-dimensional refractive index reproduction of the measured sample. In contrast, the structure is more complex and fundamentally different from the present invention.
[0010] Patent CN201910136421.X discloses a super-resolution digital holographic imaging
system and imaging method, the characteristic of the imaging system is that a piece of
transmissive spatial light modulator is incorporated in front of a conventional Mach-Zehnder
interference optical pat, which can modulate the light source. There is a fundamental difference
compared to the present invention which uses an optical path structure with an F-P cavity.
[0011] In this regard, the dual-wavelength common-path phase microscopy imaging
measurement system based on an F-P interferometer designed by the present invention, the F-P
interferometer has a fine degree of 20 or more, which allows the use of multiple reflections of
light beams in the F-P interferometer, and the interference strips produced after its reflection and
transmission will be multiplied, directly improving the resolution of imaging from the
interference structure part.
[0012] In addition, the dual-wavelength common-path phase microscopy imaging measurement
system based on an F-P interferometer designed by the present invention is capable of using
dual-wavelength to improve the stability and accuracy of phase measurements. The two light
sources emit different wavelengths of light to form a composite hologram. The synthesized
wavelength is then obtained by calculating, to reduce the scattering noise in the numerical
reconstruction and to improve the accuracy and stability. The structure of the invention is simple
and easy to operate and adjust, which is a more optimized microscopic imaging and
measurement system for microscopic objects.
SUMMARY OF INVENTION
[0013] It is an object of the present invention to provide a simple and compact structured, and
easy to operate and adjust dual-wavelength common-path phase microscopy imaging
measurement system based on an F-P interferometer
[0014] The object of the present invention is achieved by the following method:
[0015] A dual-wavelength common-path phase microscopy imaging measurement system
comprises a laser light source 1, an optical attenuator 2, a LFC fiber coupler 3 , a single mode
fiber 4, an FCL fiber collimator 5, an expander 6, an F-P interferometer 7, an object to be
measured 8, a microscopic objective 9, a CCD detecting camera 10 and a computer 11.
[0016] In the system, the laser light source 1 is divided into two light sources of different
wavelengths 1-1 and 1-2, the light X1 emitted from the light source 1-1 passes through the optical
attenuator 2-1, and couple into the single-mode optical fiber 4-1 through the LFC fiber coupler
3-1. The light X1 is transmitted in the optical fiber to the optical fiber collimator 5 for collimation
and the expander 6 for expansion, and then transmitted to the F-P interferometer. The light beam
X1 is reflected multiple times in the F-P cavity, multiply-magnifying the optical path difference
of the particle to be measured placed in the F-P cavity, thus multiply-magnifying its phase
information, the transmitted light carrying information of the particle to be measured particle is
transmitted to the microscopic objective 9 underneath, then passes the microscopic objective to
the detecting camera 10 underneath, and then transmits the signal of the particle to be measured
to the computer 11. Then, the light X2 emitted from the light source 1-2 passes through the optical
attenuator 2-2, and couple into the single-mode optical fiber 4-2 through the LFC fiber coupler
3-2. The light X2 is transmitted in the optical fiber to the optical fiber collimator 5 for collimation
and the expander 6 for expansion, and then transmitted to the F-P interferometer. The light beam
X2 is reflected multiple times in the F-P cavity, multiply-magnifying the optical path difference
of the particle to be measured placed in the F-P cavity, the transmitted light carrying information
of the particle to be measured particle is transmitted to the microscopic objective 9 underneath,
then passes the microscopic objective to the detecting camera 10 underneath, and then transmits
the signal of the particle to be measured to the computer 11. The computer 11 gets the
synthesized wavelength based on the calculation of the two wavelengths, thus reducing the
speckle noise in the numerical reconstruction and improving the accuracy.
[0017] The invention also has the following technical features.
[0018] The F-P interferometer of the optical path system is used as an interference device, it allows the light beam to produce self-interference in the optical path through multiple reflections of light in the F-P cavity, which can significantly increase the width of the interference strip due to its high number of reflections, and achieves the purpose of increasing the spatial resolution.
[0019] The adjustable F-P interferometer described herein has a fixed cavity length and the heights of the two flat plates of the cavity are parallel, producing a more desirable interference strip.
[0020] The microscopic objective 9 described herein uses an apochromatic microscope objective, which has excellent correction and an extremely high numerical aperture, thus providing maximum resolution, color purity, contrast, and image straightness in observation and microphotography.
[0021] The single-mode fiber can transmit the two light sources of different wavelengths to a fiber collimator, avoiding complexity of optical paths and instability of various reflection and transmission devices, and achieving the goal of simplifying the optical path.
[0022] The present invention records two interferograms separately in a computer based on optical information recorded from two beams of light with different wavelengths, and derives a
synthesized wavelength based on A 21 2 . The synthesized wavelength is significantly
shorter than the wavelengths of the two waves, thereby reducing phase scattering noise and improving accuracy stability in the two-wavelength numerical reconstruction.
[0023] In the F-P cavity, the beam is reflected and transmitted multiple times, the phase is
enhanced, and the final complex amplitude of the beam passing through the F-P cavity is.
Ur u~= = Ao4 1- R_-R
[0024] 1- Re' (1)
[0025] Where UT is the complex amplitude of the transmitted light, A, is the complex
amplitude of the incident light in the F-P cavity, R is the surface reflectance on the inside of the
two parallel planar glass plates in the F-P cavity, and 6 is the phase distribution of the cells to
be measured.
[0026] When multiple light beams are interfering in the F-P cavity, the phase distribution
obtained by digital holography for F-P cavity multi-beam interference is.
2rc 5(X ,y - - l d c#>
[0027] (2)
[0028] Where n is the refractive index of the cavity medium, d is the thickness of the F-P cavity,
and I is the synthesized wavelength of the light source.
[0029] Along the direction of propagation of the beam, the accumulation of the refractive index
at each point through the interior of the object to be measured is the phase distribution obtained
from a digital hologram, and when the difference in refractive indexes within the object to be
measured and with the ambient medium surrounding the object to be measured is small, and the
optical path difference is the accumulation of the refractive index in the direction of the beam path, the phase distribution is related to the refractive index distribution of the object to be measured as follows:
2/c 5(x,y)= -- 2.[n(x,y,z)-no]dz
[0030] (3)
[0031]Where n(x,y,z) is the refractive index distribution within the cell to be tested 2, the z
axis is the direction of light beam propagation, and no is the refractive index of the ambient
medium surrounding the cell to be tested 2.
[0032] The corresponding synthesized wavelength is:
1 2
[0033] " +2 (4)
[0034] A more accurate strip was obtained by reducing the scattering noise through the holographic superposition effect of the synthesized wavelength.
[0035] A comparison between the phase distribution map obtained and the phase distribution map generally obtained by M-Z interference is shown in FIG. 4. Compared to the conventional M-Z method, a more pronounced rate of change image can be obtained, indicating that the sharpness of the interference strips will be significantly enhanced, and the particle hologram image thus reconstructed by the computer will have a higher resolution than the conventional method and will be more suitable for fine measurements.
[0036] The device of the present invention, due to its small number of optical components, it is convenient for at a later stage to add various tunable devices onto the F-P interferometer, to effectively control the parallelism of the F-P interferometer and increase the reflectivity of the F P interferometer, there is a large room for modifications. In addition, if the synthesized wavelength is obtained using a method in which the number of wavelengths is greater than two, only the corresponding number of wavelengths is increased, which is the same method to the present invention's synthesized wavelength microscopy imaging method, and should also be within the scope of protection of the present invention.
[0037] The method of the present invention can significantly improve the resolution of the reproduced image.
BRIEF DESCRIPTION OF DRAWINGS
[0038] FIG. 1 is an embodiment of an intracavity-enhanced dual-wavelength common-path phase microscopy imaging measurement system based on an F-P interferometer, it is characterized by: it comprises a laser light source 1, an optical attenuator 2, a LFC fiber coupler 3 , a single mode fiber 4, an FCL fiber collimator 5, an expander 6, an F-P interferometer 7, an object to be measured 8, a microscopic objective 9, a CCD detecting camera 10 and a computer 11.
[0039] FIG. 2 is an example of an embodiment of the F-P cavity of a dual-wavelength common path phase microscopy imaging measurement system based on an F-P interferometer.
[0040] FIG. 3 shows the interference strips obtained by synthesizing wavelengths in a dual wavelength common-path phase microscopy imaging measurement system based on an F-P interferometer.
[0041] FIG. 4 is a comparison diagram of the intensity variations obtained by a dual-wavelength
common-path phase microscopy imaging measurement system based on an F-P interferometer
and a general M-Z interferometer.
DESCRIPTION OF EMBODIMENTS
[0042] The invention is further described below in relation to specific embodiments. However,
this should not be used to limit the scope of protection of the present invention.
[0043] Referring to FIG. 1, FIG. 1 is a dual-wavelength common-path phase microscopy
imaging measurement system based on an F-P interferometer, it is characterized by: it comprises
a laser light source 1, an optical attenuator 2, a LFC fiber coupler 3 , a single mode fiber 4, an
FCL fiber collimator 5, an expander 6, an F-P interferometer 7, an object to be measured 8, a
microscopic objective 9, a CCD detecting camera 10 and a computer 11. The location
relationships of the above components are as follows:
[0044] Refer to the light source 1-1, along the direction of the optical axis of the output light of
the laser light source 1-1, in order there are the attenuator 2-1 and the LFCfiber coupler 3-1.
Connect the single-mode optical fiber 4-1 to the LFC fiber coupler 3-1 and the FCL optical fiber
collimator 5, and then along the direction of the optical axis after the beam is emitted from the
collimator is the expander 6 and the F-P interferometer 7 where the object to be measured 8 is in.
Then, refer to the light source 1-2, along the direction of the optical axis of the output light of the
laser light source 1-2, in order there are the attenuator 2-2 and the LFC fiber coupler 3-2.
Connect the single-mode optical fiber 4-2 to the LFC fiber coupler 3-2 and the FCL optical fiber collimator 5, and then along the direction of the optical axis after the beam is emitted from the collimator is the expander 6 and the F-P interferometer 7. The MO micro-objective lens and the CCD detecting camera 10 are below the F-P interferometer, and then the detecting camera is connected to the computer 11 on the side.
[0045] A method of achieving dual-wavelength three-dimensional phase imaging enhancement of an object to be measured using the present invention, refer to FIG. 2, the method comprises the following steps:
[0046] The operation of placing the object to be measured 8 in the F-P interferometer 7 is divided into two parts, the first of which is: Adjust the position of each device in the optical path so that the output coherent light from the laser light source 1-1 is attenuated by the attenuator 2 1, and couple into the single-mode fiber 4-1 at the LFC fiber coupler 3-1, the light is transmitted through the single-mode fiber, and then collimated at the fiber collimator 5. Then expanded by the expander 6 into the F-P interferometer, at this time adjust the position of the F-P interferometer, so that the beam in the F-P cavity, where the object to be measured is in, is reflected multiple times. Adjust the microscopic objective 9, so that the transmitted light from the interferometer can completely enter the microscopic objective 9, slowly move the detecting camera 10 so that it is at the back focal plane of the light passing through the microscopic objective 9.
[0047] Then proceed to the second part: Adjust the position of each device in the optical path so that the output coherent light from the laser light source 1-2 of another wavelength is attenuated by the attenuator 2-2, and couple into the single-mode fiber 4-2 at the LFC fiber coupler 3-2, the light is transmitted through the single-mode fiber, and then also collimated at the fiber collimator 5. Then expanded by the expander 6 into the F-P interferometer, at this time adjust the position of the F-P interferometer, so that the beam in the F-P cavity, where the object to be measured is in, is reflected multiple times. Adjust the microscopic objective 9, so that the transmitted light from the interferometer can completely enter the microscopic objective 9, slowly move the detecting camera 10 so that it is at the back focal plane of the light passing through the microscopic objective 9. Then use A = to obtain the synthesized wavelength, calculating with the above formula to obtain the desired composite recording map, reducing the phase parcel required for reconstruction.
[0048] The working embodiment of the F-P cavity of a dual-wavelength common-path phase
microscopy imaging measurement system based on an F-P interferometer is as follows:
[0049] Refer first to FIG. 3, which shows the working steps of the F-P cavity in a dual
wavelength common-path phase microscopy imaging measurement system based on an F-P
interferometer. After light enters the F-P cavity at an angle, it is reflected several times in the
cavity, and each time the reflection passes through the object to be measured. Every time the
reflective light passes the object to be measured, the optical path difference will be multiply
amplified, and finally the light is transmitted out of the F-P cavity, passes the MO microscopic
objective, then converge to the CCD detecting camera and an amplified interference strip is
obtained.
[0050] The present invention is a dual-wavelength common-path phase microscopy imaging
measurement system based on an F-P interferometer, which uses an F-P interferometer with a
fixed cavity length to repeatedly reflect and enhance the coherent light, which carries the phase
information of the object to be measured. Meanwhile the dual-wavelength beams measure the
object to be measured sequentially, producing the interferograms obtained by two light sources
with different wavelengths, and then calculates the arc tangent of the two reconstructed images
as well as the amplitude of the product, in the meantime obtain the reconstructed image
according to the synthesized wavelength.
[0051] Preferably, the single-mode fiber used in this example is Corning's corning SMF-28 single-mode fiber, which has good transmission efficiency.
[0052] Preferably, the object to be measured in this embodiment is a polystyrene sphere. A good uniform strip can be obtained.
[0053] Preferably, the two light sources used in this embodiment have wavelengths of 632.8 nm and 532 nm, respectively. These two beams of light yield better holograms when sheared transversely to form a composite hologram.
[0054] Preferably, the F-P cavity has a free spectral range of FSR > 100 GHz, a fineness of F > ,and aloss of<3 dB.
[0055] The foregoing embodiments are merely better embodiments for the purpose of fully illustrating the invention, and the scope of protection of the invention is not limited to them. Equivalent substitutions or transformations made by those skilled in the art on the basis of the present invention are within the scope of protection of the present invention. The scope of protection of the present invention is governed by the claims.

Claims (5)

1. An intracavity-enhanced dual-wavelength common-path phase microscopy imaging
measurement system based on an F-P interferometer. It comprises a laser light source 1, an
optical attenuator 2, a fiber coupler (LFC) 3 , a single mode fiber 4, a fiber collimator (FCL) 5,
an expander 6, an F-P interferometer 7, an object to be measured 8, a microscopic objective 9, a
CCD detecting camera 10 and a computer 11. In the system, the laser light source 1 is divided
into two light sources of different wavelengths 1-1 and 1-2, the light emitted from the light
source 1-1 (the wavelength is Xi) passes through the optical attenuator 2-1, and couple into the
single-mode optical fiber 4-1 through the LFC fiber coupler 3-1. The light X1 is transmitted in the
optical fiber to the optical fiber collimator 5 for collimation and the expander 6 for expansion,
and then transmitted to the F-P interferometer. The beam with the wavelength ofX1 is reflected
multiple times in the F-P cavity, multiply-magnifying the optical path difference of the particle to
be measured placed in the F-P cavity, thus multiply-magnifying its phase information, the
transmitted light carrying information of the particle to be measured particle is transmitted to the
microscopic objective 9 underneath, then passes the microscopic objective to the detecting
camera 10 underneath, and then transmits the signal of the particle to be measured to the
computer 11. Then, the light X2 emitted from the light source 1-2 passes through the optical
attenuator 2-2, and couple into the single-mode optical fiber 4-2 through the LFC fiber coupler
3-2. The light with a wavelength of X2 is transmitted in the optical fiber to the optical fiber
collimator 5 for collimation and the expander 6 for expansion, and then transmitted to the F-P
interferometer. The beam with the wavelength of X2 is reflected multiple times in the F-P cavity,
multiply-magnifying the optical path difference of the particle to be measured placed in the F-P
cavity, the transmitted light carrying information of the particle to be measured particle is
transmitted to the microscopic objective 9 underneath, then passes the microscopic objective to
the detecting camera 10 underneath, and then transmits the signal of the particle to be measured
to the computer 11. The computer 11 gets the synthesized wavelength based on the calculation of
the two wavelengths, thus reducing the speckle noise in the numerical reconstruction and
improving the accuracy.
2. As claimed by claim 1, a microscopy imaging measurement system, it is characterized by:
The F-P interferometer in the optical path system used acts as the device to produce multiplied
optical path difference, through the multiple reflections of light in the F-P cavity, each time it
passes the particles to be measured the optical path difference can be multiply-increased, thereby
significantly increasing the width of the interference strip, to achieve the purpose of improving
the resolution.
3. As claimed by claim 1, a microscopy imaging measurement system, it is characterized by:
the system uses two light sources of different wavelengths to obtain two interference strip
distributions with different wavelengths. Then obtains a synthesized wavelengths through the
two different wavelengths, the synthesized wavelength is significantly shorter than the two
wavelengths, then a compound hologram is obtained.
4. As claimed by claim 1, a microscopy imaging measurement system, it is characterized by:
the number of wavelengths used is greater than or equal to 2.
5. As claimed by claim 1, a microscopy imaging measurement system, it is characterized by:
the F-P interferometer, the cavity length remains unchanged, the object to be measured is placed
in the cavity, through multiple reflections to obtain multiply-amplified interference strips.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116320377A (en) * 2023-02-15 2023-06-23 中科摇橹船科技(西安)有限公司 Three-color light large dynamic range camera parameter detection system and detection method
CN117686009A (en) * 2024-02-04 2024-03-12 武汉理工大学 Optical fiber double-FP composite sensing monitoring equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116320377A (en) * 2023-02-15 2023-06-23 中科摇橹船科技(西安)有限公司 Three-color light large dynamic range camera parameter detection system and detection method
CN117686009A (en) * 2024-02-04 2024-03-12 武汉理工大学 Optical fiber double-FP composite sensing monitoring equipment
CN117686009B (en) * 2024-02-04 2024-05-14 武汉理工大学 Optical fiber double-FP composite sensing monitoring equipment

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