CN214669935U

CN214669935U - Material modification system

Info

Publication number: CN214669935U
Application number: CN202023009281.7U
Authority: CN
Inventors: 陈赞仁; 郭中一; 许巍耀; 郑晨泰; 刘浩铨
Original assignee: Contrel Technology Co Ltd
Current assignee: Contrel Technology Co Ltd
Priority date: 2020-12-14
Filing date: 2020-12-14
Publication date: 2021-11-09
Anticipated expiration: 2030-12-14

Abstract

The utility model discloses a material modification system includes pulse generation device and vision alignment device. The pulse generating device comprises an objective lens and is used for projecting laser through the objective lens so as to modify the modified layer of the object. The visual alignment device is connected with the pulse generation device and comprises an illumination unit, an image sensing unit and a focusing unit. The illumination unit is used for projecting a visible light beam to the object. The image sensing unit comprises a visual range for sensing the visible light beam reflected by the object to generate visual information, wherein the visual information comprises a viewing distance for adjusting the height of the objective lens relative to the object. The focusing unit includes a laser detection range. The laser detection range is in the visual range, the focusing unit detects focusing information of the defect range of the modified layer of the object in the laser detection range, and the focusing information comprises a focusing distance. The focusing distance is the distance that the objective lens is pushed to focus the laser on the modified layer.

Description

Material modification system

Technical Field

The present invention relates to a defect repairing apparatus for liquid crystal display panels, and more particularly to a material modifying system.

Background

In order to ensure the quality and yield of the lcd panel, the lcd panel is usually inspected after the manufacturing process is completed to determine that the lcd panel has no defects, such as bright spots or light leakage, which may cause the lcd panel to be unable to show a full black color, i.e., light can penetrate through the color filter of the lcd panel and then be outwardly displayed.

The conventional laser focusing method is usually focusing by a visual image method, i.e. sensing the bright point position by an image sensing element, and performing a modification operation by laser after determining the bright point position, so as to blacken one pixel of the color filter. However, in the structure of the liquid crystal panel, it is known that the color filter is one layer structure inside the liquid crystal panel, and the visual image is only the surface image of the liquid crystal panel, so that the bright point position can be known by the image sensing element, and the focus of the image sensor is not directed to the color filter, so that the laser light is not directly modified to the color filter, and the accurate operation cannot be realized.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned disappearance, the utility model discloses a material modification system is used for focusing through laser after finding out the bright spot position through the visual observation mode and lets modulated back laser energy accurately focus at the defect scope on modification layer, and then lets the defect scope blacken.

To achieve the above object, the material modification system of the present invention comprises a pulse generator and a vision alignment device. The pulse generating device comprises an objective lens and is used for projecting laser through the objective lens so as to modify the modified layer of the object. The visual alignment device is connected with the pulse generation device and comprises an illumination unit, an image sensing unit and a focusing unit. The illumination unit is used for projecting a visible light beam to the object. The image sensing unit comprises a visual range for sensing the visible light beam reflected by the object to generate visual information, wherein the visual information comprises a viewing distance for adjusting the height of the objective lens relative to the object. The focusing unit includes a laser detection range. The laser detection range is in the visual range, the focusing unit detects focusing information of the defect range of the modified layer of the object in the laser detection range, and the focusing information comprises a focusing distance. The focusing distance is the distance that the objective lens is pushed to focus the laser on the modified layer.

The above material modifying system, wherein the focusing unit includes an emitting module, a sensing module and a processing module, the emitting module is configured to generate a focusing laser, the sensing module is configured to sense the focusing laser reflected by the defect area of the modifying layer, the processing module is coupled to the emitting module and the sensing module, and the processing module calculates the focusing distance according to the focusing information of the reflected focusing laser.

In the above material modifying system, the focus information includes a focus shape, and the focus shape includes a point or a line.

In the above material modifying system, the visible light beam and the focused laser light pass through the objective lens.

In the above material modifying system, the visual alignment device includes a transmission unit for transmitting the visible light beam and the focusing laser to the objective lens, and transmitting the visible light beam and the focusing laser reflected from the objective lens to the image sensing unit and the focusing unit.

In the above material modification system, the pulse generating device includes a Z-axis adjusting module connected to the objective lens and configured to adjust and push a height of the objective lens relative to the object according to the focusing distance.

In the above material modification system, the Z-axis adjustment module is connected to the vision alignment device and synchronously adjusts and pushes the vision alignment device.

Therefore, the material modification system of the present invention can accurately focus the defect range through the focusing unit, so that the laser can be accurately focused in the defect range to achieve uniform and efficient modification of the defect range.

The present invention will be described in detail with reference to the accompanying drawings and specific embodiments, but the present invention is not limited thereto.

Drawings

Fig. 1 is a schematic diagram of the composition of the material modification system of the present invention.

Fig. 2 is a schematic diagram of the focusing unit in fig. 1.

Fig. 3 is a schematic diagram of the composition of the pulse gate controller of the pulse modulation unit in fig. 1.

Fig. 4 is a time domain signal diagram of the laser, the grating modulation signal, and the modulated laser of fig. 1.

Fig. 5 is a flowchart of the steps of the focusing process in fig. 1.

FIG. 6 is a diagram illustrating the step 701-703 of finding the visual range of the bright point position of the liquid crystal panel in FIG. 5.

FIG. 7 is a schematic diagram of the pulse output unit, the visual alignment device and the liquid crystal panel of FIG. 1.

Fig. 8 is a schematic diagram of the modified visual range of step 709 in fig. 5.

Reference numerals

100 material modification system

10 pulse generating device

Laser source 11

Pulse intensity adjusting unit

Pulse modulation unit (15)

151 first reflecting mirror

153 pulse grid controller

155 second reflecting mirror

157 Signal generating module

158 radio frequency drive module

159 modulation output module

17 scanning unit

18 relay lens

19 pulse output unit

191 coupling mirror

193 objective lens

195Z-axis adjusting module

30 visual alignment device

31 delivery unit

33 lighting unit

35 image sensing unit

37 focusing unit

371 transmitting module

373 sense module

375 processing module

50 liquid crystal panel

51 surface

53 modified layer

700 focusing process

701 step 709-

91 visual information

93 bright spot

95 defect range

TD work period

Tn conduction time

To closing time

S157 raster modulation signal

Si laser

Detailed Description

The following describes the structural and operational principles of the present invention in detail with reference to the accompanying drawings:

as shown in fig. 1, the material modification system 100 of the present invention includes a pulse generating device 10 and a vision alignment device 30. The above-mentioned modification is a behavior of changing the characteristics of the raw material by the characteristics of the pulses output from the pulse generator 10, and in the present embodiment, the object is the liquid crystal panel 50, and the object to be modified is a color filter or other optical film of the liquid crystal panel 50, so that part of the material is blackened to block light.

Wherein, the above-mentioned device can include more or less optical elements such as lens, reflector, etc. than the embodiment to change the light transmission, therefore, the following embodiment is convenient for describing the utility model, but not explicitly or implicitly the using quantity limit of the optical elements of the utility model, so it can not be understood as the limit of the utility model.

The pulse generating apparatus 10 includes a laser light source 11, a pulse intensity adjusting unit 13, a pulse modulating unit 15, a scanning unit 17, a relay lens (relay lens)18, and a pulse output unit 19. The laser source 11 is used to radiate laser light of near infrared wavelength, which includes a plurality of short pulses (as shown in fig. 4). The pulse intensity adjusting unit 13 is used for adjusting a plurality of short pulse intensities. The pulse modulation unit 15 modulates the laser by the grating modulation signal to regulate and control the multiple short pulse output frequencies and peak power of the laser. The scanning unit 17 is used to change the reflection angle of the laser light. The pulse output unit 19 is configured to project the modulated laser light to the defect range of the modified layer of the liquid crystal panel 50. The laser light output from the laser light source 11 passes through the pulse intensity adjusting unit 13, the pulse modulating unit 15, the scanning unit 17, the relay lens 18, and the pulse output unit 19 in this order.

The time domain pulse width of the short pulse is femtosecond, the femtosecond outputs approximately same power in femtosecond to generate multiphoton absorption to instantly modify the defective pixels of the color filter of the liquid crystal panel into blackening so as to block the light of the backlight source from penetrating out and achieve the effect of darkening the bright point.

The pulse intensity adjusting unit 13 includes a polarizer, and adjusts the laser intensity by changing the polarization direction of the laser by adjusting the angle of the polarizer. The output power is strongest when the polarization direction of the polarizer is parallel to the polarization direction of the laser, and the output power is weakest when the polarization direction of the polarizer is perpendicular to the polarization transmission direction of the laser.

The pulse modulation unit 15 includes a first mirror 151, a pulse gate controller 153, and a second mirror 155. The first reflecting mirror 151 is used for reflecting the laser output by the pulse intensity adjusting unit 13. The pulse grid controller 153 is disposed between the first mirror 151 and the second mirror 155 to receive the laser light reflected by the first mirror 151. The second mirror 155 is used for reflecting the laser modulated by the pulse grid controller 153 to the scanning unit 17.

The scanning unit 17 has an X-Y laser galvanometer to change the laser deflection angle. The scanning unit 17 is used for scanning a defect (pixel) range of the color filter of the liquid crystal panel 50 and planning a scanning path to conform to the defect (pixel) range.

The relay lens 18 receives the laser light output by the scanning unit 17 and transmits the laser light to the pulse output unit 19. The relay lens 18 is used to converge the laser output from the scanning unit 17 so that the modulated laser can be reliably transmitted to the pulse output unit 19.

The pulse output unit 19 receives the modulated laser light output by the relay lens 18, and includes a coupling mirror 191, an objective lens 193, and a Z-axis adjustment module 195. The modulated laser light passes through the coupling lens 191 and the objective lens 193 in sequence. The coupling lens 191 and the objective lens 193 are coupled to the Z-axis adjustment module 195. The Z-axis adjustment module 195 is used to move the coupling lens 191 and the objective lens 193 up or down.

In this embodiment, the distance between the coupling lens 191 and the objective lens 193 is fixed, and the visual alignment device 30 is disposed on the Z-axis adjusting module 195, so that the coupling lens 191, the objective lens 193, and the visual alignment device 30 all move synchronously during the moving process, and in other embodiments, the Z-axis adjusting module 195 may only move the objective lens 193 or the coupling lens 191.

The vision alignment device 30 is used to generate a vision image and focus to make the laser processing operation accurate and to observe the modification process by naked eyes. The visual alignment device 30 includes a transfer unit 31, an illumination unit 33, an image sensing unit 35, and a focusing unit 37. The transmitting unit 31 is used for transmitting a light beam, such as visible light or laser, to a destination, such as the coupling mirror 191, the image sensing unit 35 and the focusing unit 37. The illumination unit 31 is used for generating a visible light beam, and the visible light beam is projected to the liquid crystal panel 50 through the transmission unit 31 and the coupling mirror 191 of the pulse output unit 19.

The image sensing unit 35 includes a visual range for sensing the visible light beam reflected by the liquid crystal panel 50 to generate visual information. The visual information includes an observation distance for adjusting the height of the objective lens 193 with respect to the liquid crystal panel 50, and the reflected light of the visible light beam is transmitted to the image sensing unit 35 through the coupling mirror 191 and the transmitting unit 31 of the pulse output unit 19.

The focusing unit 37 includes a laser detection range in which the laser detection range is in the visual range, and the focusing unit 37 detects focusing information of a defect range of the modified layer of the liquid crystal panel 50 in the laser detection range, the focusing information including a focusing distance, which is a distance by which the objective lens 193 is pushed.

As shown in fig. 2, the focusing unit 37 includes an emitting module 371, a sensing module 373, and a processing module 375. The emitting module 371 is used for generating focusing laser. The sensing module 373 senses the focused laser reflected by the defect area of the modified layer. In this embodiment, the sensing module 373 senses half of the reflected focused laser beam, and the other half of the reflected focused laser beam is blocked and not sensed, and whether focusing is completed or not is identified by the half of the reflected focused laser beam. The processing module 375 is coupled to the transmitting module 371, the sensing module 373, and the Z-axis adjusting module 195. The processing module 375 calculates the focusing distance according to the round trip time of the focused laser to control the Z-axis adjustment module 195 to push the objective lens 193 up or down to make the laser more accurate.

As shown in fig. 3 and 4, the pulse grid controller 153 is, for example, an Acousto-Optic modulator (AOM), and is used for modulating the duty cycle T of the laser_D. Duty cycle T_DIncluding the on-time T_NAnd off-time To, at on-time T_NThe internal pulse gating controller 153 allows the short pulse of the laser corresponding To the time domain To be outputted To the second mirror 155, and the internal pulse gating controller 153 does not allow the short pulse of the laser corresponding To the time domain To be outputted To the second mirror 155 during the off time To. In this embodiment, the laser corresponding time domain refers to the laser and the working period T of the time domain signal_DAre overlapping.

The pulse gate controller 153 includes a signal generating module 157, an rf driving module 158 and a modulation output module 159. The signal generating module 157 is coupled to the rf driving module 158 and is configured to output a grating modulation signal, as indicated by symbol S157 in fig. 4, where the modulation period or amplitude can be changed. The rf driving module 158 receives and transmits the grating modulation signal S157. The modulation output module 159 receives the grating modulation signal S157 and the laser light Si input from the first mirror 151, and outputs a modulated laser light So according to a duty cycle of the grating modulation signal S157. Thus, the laser modification process can pass through the working period T_DTo for heat dissipation and To reduce heat accumulation, and, in addition, the duty cycle T_DOn-time T of_NA plurality of short pulses are intermittently output to uniformly repair the pixel area of the color filter so as to blacken the color filter to block light.

As shown in fig. 5, the focusing process 700 of the material modification system of the present invention includes steps 701: the bright point of the liquid crystal panel 50 is detected, and then, step 703: adjusting the relative height between the objective lens 193 and the liquid crystal panel 50, adjusting the observation distance between the objective lens 193 of the pulse output unit 19 and the liquid crystal panel 50 through the Z-axis adjusting module 195 to clearly identify the image of the bright point position, and then, step 705: focusing the modified layer of the liquid crystal panel 50, the focusing unit 37 detects and focuses the modified layer of the liquid crystal panel 50 to obtain the focusing distance between the modified layer and the objective lens 193, and then step 707: adjusting the relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 to focus the laser on the modified layer, adjusting the relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 through the Z-axis adjusting module 195 according to the focusing distance, and finally, in step 709: and outputting laser to modify the modified layer. In step 705-.

After the backlight of the liquid crystal panel 50 is turned on, in the completely black screen, whether or not there is a bright point on the surface of the liquid crystal panel 50 can be clearly identified in step 701. In step 701, the detection is to detect the visible light beam reflected by the liquid crystal panel 50 through the image sensing unit 35, and the reflected visible light beam generates the visual information 91 through the image sensing unit 35, as shown in fig. 6. The rectangular dashed box represents a defect (pixel) area 95, and the bright spot 93 is within the defect area 95. The image sensing unit 35 has a visual range 90, and the visual range 90 is a picture that can be presented through a display, such as a local surface appearance of the liquid crystal panel 50. The visual information 91 relates to the visual range 90.

In step 703, the adjustment is performed by the Z-axis adjustment module 195. As shown in fig. 7, in order to clearly identify the bright point 93, the Z-axis adjustment module 195 may be manually or automatically adjusted to change the observation distance between the objective lens 193 and the surface 51 of the liquid crystal panel 50, so as to find a clear image, as shown in fig. 6, and thus the display can clearly display the bright point 93 and the range. The bright spots 93 are confirmed by a clear image to correspond to the corresponding pixels of the color filter (modified layer) of the liquid crystal panel 50.

In step 705, focusing is performed by the focusing unit 37, and the focusing unit 37 focuses on the defect range of the modified layer (i.e. the color filter) 53 of the liquid crystal panel 50, which is also to find the relative height of the laser focused on the defect range of the modified layer 53, i.e. the relative focusing distance between the objective lens 193 and the defect range.

In this embodiment, the focusing unit 37 is used for detecting the focusing information of the modified layer of the liquid crystal panel 50 by the focusing laser, and the focusing information includes a focusing shape and an out-of-focus shape. The focusing information is in the visual range, and the processing positions where the visible light, the laser and the focusing laser are projected to the object 50 are overlapped. The focusing shape and the defocusing shape are related to the beam profile of the reflected focused laser, and when the beam profile forms a shape such as a circle, since the sensing module senses a half of the beam, the defocusing shape is an incomplete pattern such as a semicircle and the beam profile is unclear. When focused, the focused shape is a complete pattern, e.g., a spot, and the beam profile is substantially sharp. In other embodiments, the shape of the beam profile may be a line, or a combination of a point and a line, if the shape is other, such as a square or other shape. The processing module 375 of the focusing unit 37 determines the focusing distance according to the focusing shape.

The adjustment in step 707 is by the Z-axis adjustment module 195. The relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 is fine-tuned according to the focusing distance to make the modulated laser light substantially focus on the modified layer, and finally, the laser light output in step 709 can be correctly modified on the defect range 95 (i.e. the corresponding pixel range) of the modified layer to make the corresponding pixel blacken to achieve the effect of shielding light, as shown in fig. 8, the defect range 95 is modified to blacken to shield the light of the light backlight source.

As shown in fig. 7, the color filter 53 of the liquid crystal panel 50 is below the surface 51, so that the laser light can be focused on the modified layer more accurately through

steps

705 and 707 to modify the material more uniformly and prevent the adjacent material from peeling off.

Naturally, the present invention can be embodied in many other forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be made by one skilled in the art without departing from the spirit or essential attributes thereof, and it is intended that all such changes and modifications be considered as within the scope of the appended claims.

Claims

1. A material modification system, comprising:

a pulse generating device including an objective lens for projecting a laser beam through the objective lens to perform a modifying operation on a modified layer of an object;

a visual alignment device connected to the pulse generator and including an illumination unit for projecting a visible light beam to the object, an image sensing unit including a visual range for sensing the visible light beam reflected by the object to generate visual information including an observation distance for adjusting the height of the object relative to the object, and a focusing unit including a laser detection range within which the laser detection range is within, the focusing unit detecting a focus information of a defective range of the modified layer of the object within the laser detection range, the focus information including a focusing distance, the focusing distance being a distance by which the object is pushed to focus the laser on the modified layer.

2. The material modifying system of claim 1, wherein the focusing unit comprises an emitting module for generating a focusing laser, a sensing module for sensing the focusing laser reflected from the defect area of the modifying layer, and a processing module coupled to the emitting module and the sensing module, the processing module calculating the focusing distance according to the focusing information of the reflected focusing laser.

3. The material modification system of claim 2, wherein the in-focus information comprises a focus shape, the focus shape comprising a point or a line.

4. The material modification system of claim 2, wherein the visible light beam and the focused laser light pass through the objective lens.

5. The material modifying system of claim 2, wherein the vision alignment device comprises a transmission unit for transmitting the visible light beam and the focusing laser light to the objective lens, and the visible light beam and the focusing laser light reflected from the objective lens are transmitted to the image sensing unit and the focusing unit.

6. The material modification system of claim 1, wherein the pulse generator comprises a Z-axis adjustment module coupled to the objective lens and configured to adjust and advance the height of the objective lens relative to the object according to the focusing distance.

7. The material modification system of claim 6, wherein the Z-axis adjustment module is coupled to the vision alignment device and synchronously adjusts and moves the vision alignment device.