CN213934470U - Material modification system - Google Patents

Material modification system Download PDF

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Publication number
CN213934470U
CN213934470U CN202023005227.5U CN202023005227U CN213934470U CN 213934470 U CN213934470 U CN 213934470U CN 202023005227 U CN202023005227 U CN 202023005227U CN 213934470 U CN213934470 U CN 213934470U
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laser
pulse
unit
output
module
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CN202023005227.5U
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陈赞仁
郭中一
许巍耀
郑晨泰
刘浩铨
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Contrel Technology Co Ltd
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Contrel Technology Co Ltd
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Abstract

The utility model discloses a material modification system includes pulse generation device and vision alignment device. The pulse generating device is used for modulating laser according to the work period of the grating modulation signal, the laser comprises a plurality of short pulses, and the work period comprises on-time and off-time. The laser is allowed to output a plurality of short pulses corresponding to the time domain during the on time, and the laser is not allowed to output a plurality of short pulses corresponding to the time domain during the off time. The vision alignment device is connected with the pulse generation device and is used for aligning the pulse generation device to the modified layer of the object and carrying out modification operation by the modulated laser.

Description

Material modification system
Technical Field
The present invention relates to a defect repairing apparatus for liquid crystal display panels, and more particularly to a material modifying system.
Background
In order to ensure the quality and yield of the lcd panel, the lcd panel is usually inspected after the manufacturing process is completed to determine that the lcd panel has no defects, such as bright spots or light leakage, which may cause the lcd panel to be unable to show a full black color, i.e., light can penetrate through the color filter of the lcd panel and then be outwardly displayed.
In the currently known repair technique, a color filter is modified by focusing laser light, for example, to blacken the modified portion (pixel) and shield the light. However, by continuously modifying the focus laser, a large amount of heat energy is accumulated in the color filter, and the heat energy accumulation affects adjacent pixels. Further, when modifying with a long pulse laser (for example, nanosecond laser), nanosecond laser light is irradiated on a defective pixel of a color filter, and a peeling phenomenon easily occurs in adjacent pixels.
SUMMERY OF THE UTILITY MODEL
In view of the above disadvantages, the material modification system of the present invention is used to modulate laser light so that the laser light can uniformly and efficiently modify the defect region and further blacken the defect region.
To achieve the above object, the material modification system of the present invention comprises a pulse generator and a vision alignment device. The pulse generating device is used for modulating laser according to the work period of the grating modulation signal, the laser comprises a plurality of short pulses, and the work period comprises on-time and off-time. The laser is allowed to output a plurality of short pulses corresponding to the time domain during the on time, and the laser is not allowed to output a plurality of short pulses corresponding to the time domain during the off time. The vision alignment device is connected with the pulse generation device and is used for aligning the pulse generation device to the modified layer of the object and carrying out modification operation by the modulated laser.
In the above material modifying system, the corresponding time domain is a time overlap between a duty cycle of the grating modulation signal and the laser.
The material modification system described above, wherein the temporal pulse width of the plurality of short pulses is in the order of femtoseconds.
The above material modifying system, wherein the pulse generating device includes a laser source, a pulse intensity adjusting unit, a pulse modulating unit, a scanning unit, a relay lens and a pulse output unit, the laser source is configured to radiate the laser, the laser passes through the pulse intensity adjusting unit, the pulse modulating unit, the scanning unit, the relay unit and the pulse output unit in sequence, the pulse intensity adjusting unit is configured to adjust the intensity of the laser, the pulse modulating unit is configured to generate the grating modulation signal to modulate the laser, the scanning unit is configured to scan a defect area of the modifying layer of the object, the relay lens is configured to receive the modulated laser output by the scanning unit, and the pulse output unit is configured to output the modulated laser to blacken the defect area. The pulse modulation unit comprises a pulse grid controller, the pulse grid controller comprises a signal generation module, a radio frequency driving module and a modulation output module, the signal generation module is coupled with the laser driving module and is used for generating the grating modulation signal, the laser driving module is used for emitting the grating modulation signal, and the modulation output module receives the grating modulation signal and the laser and outputs the modulated laser according to the grating modulation signal.
In the above material modifying system, the object includes a liquid crystal panel. The modified layer of the object comprises a color filter.
Thus, the material modification system of the present invention can efficiently and uniformly modify the defect range of the modified layer by the modulated laser light, and can reduce the heat accumulation.
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments, but the present invention is not limited thereto.
Drawings
Fig. 1 is a schematic diagram of the composition of the material modification system of the present invention.
Fig. 2 is a schematic diagram of the focusing unit in fig. 1.
Fig. 3 is a schematic diagram of the composition of the pulse gate controller of the pulse modulation unit in fig. 1.
Fig. 4 is a time domain signal diagram of the laser, the grating modulation signal, and the modulated laser of fig. 1.
Fig. 5 is a flowchart of the steps of the focusing process in fig. 1.
FIG. 6 is a diagram illustrating the step 701-703 of finding the visual range of the bright point position of the liquid crystal panel in FIG. 5.
FIG. 7 is a schematic diagram of the pulse output unit, the visual alignment device and the liquid crystal panel of FIG. 1.
Fig. 8 is a schematic diagram of the modified visual range of step 709 in fig. 5.
Reference numerals
100 material modification system
10 pulse generating device
Laser source 11
Pulse intensity adjusting unit
Pulse modulation unit (15)
151 first reflecting mirror
153 pulse grid controller
155 second reflecting mirror
157 Signal generating module
158 radio frequency drive module
159 modulation output module
17 scanning unit
18 relay lens
19 pulse output unit
191 coupling mirror
193 objective lens
195Z-axis adjusting module
30 visual alignment device
31 delivery unit
33 lighting unit
35 image sensing unit
37 focusing unit
371 transmitting module
373 sense module
375 processing module
50 liquid crystal panel
51 surface
53 modified layer
700 focusing process
701 step 709-
91 visual information
93 bright spot
95 defect range
TD work period
Tn conduction time
To closing time
S157 raster modulation signal
Si laser
Detailed Description
The following describes the structural and operational principles of the present invention in detail with reference to the accompanying drawings:
as shown in fig. 1, the material modification system 100 of the present invention includes a pulse generating device 10 and a vision alignment device 30. The above-mentioned modification is a behavior of changing the characteristics of the raw material by the characteristics of the pulses output from the pulse generator 10, and in the present embodiment, the object is the liquid crystal panel 50, and the object to be modified is a color filter or other optical film of the liquid crystal panel 50, so that part of the material is blackened to block light.
Wherein, the above-mentioned device can include more or less optical elements such as lens, reflector, etc. than the embodiment to change the light transmission, therefore, the following embodiment is convenient for describing the utility model, but not explicitly or implicitly the using quantity limit of the optical elements of the utility model, so it can not be understood as the limit of the utility model.
The pulse generating apparatus 10 includes a laser light source 11, a pulse intensity adjusting unit 13, a pulse modulating unit 15, a scanning unit 17, a relay lens (relay lens)18, and a pulse output unit 19. The laser source 11 is used to radiate laser light of near infrared wavelength, which includes a plurality of short pulses (as shown in fig. 4). The pulse intensity adjusting unit 13 is used for adjusting a plurality of short pulse intensities. The pulse modulation unit 15 modulates the laser by the grating modulation signal to regulate and control the multiple short pulse output frequencies and peak power of the laser. The scanning unit 17 is used to change the reflection angle of the laser light. The pulse output unit 19 is configured to project the modulated laser light to the defect range of the modified layer of the liquid crystal panel 50. The laser light output from the laser light source 11 passes through the pulse intensity adjusting unit 13, the pulse modulating unit 15, the scanning unit 17, the relay lens 18, and the pulse output unit 19 in this order.
The time domain pulse width of the short pulse is femtosecond, the femtosecond outputs approximately same power in femtosecond to generate multiphoton absorption to instantly modify the defective pixels of the color filter of the liquid crystal panel into blackening so as to block the light of the backlight source from penetrating out and achieve the effect of darkening the bright point.
The pulse intensity adjusting unit 13 includes a polarizer, and adjusts the laser intensity by changing the polarization direction of the laser by adjusting the angle of the polarizer. The output power is strongest when the polarization direction of the polarizer is parallel to the polarization direction of the laser, and the output power is weakest when the polarization direction of the polarizer is perpendicular to the polarization transmission direction of the laser.
The pulse modulation unit 15 includes a first mirror 151, a pulse gate controller 153, and a second mirror 155. The first reflecting mirror 151 is used for reflecting the laser output by the pulse intensity adjusting unit 13. The pulse grid controller 153 is disposed between the first mirror 151 and the second mirror 155 to receive the laser light reflected by the first mirror 151. The second mirror 155 is used for reflecting the laser modulated by the pulse grid controller 153 to the scanning unit 17.
The scanning unit 17 has an X-Y laser galvanometer to change the laser deflection angle. The scanning unit 17 is used for scanning a defect (pixel) range of the color filter of the liquid crystal panel 50 and planning a scanning path to conform to the defect (pixel) range.
The relay lens 18 receives the laser light output by the scanning unit 17 and transmits the laser light to the pulse output unit 19. The relay lens 18 is used to converge the laser output from the scanning unit 17 so that the modulated laser can be reliably transmitted to the pulse output unit 19.
The pulse output unit 19 receives the modulated laser light output by the relay lens 18, and includes a coupling mirror 191, an objective lens 193, and a Z-axis adjustment module 195. The modulated laser light passes through the coupling lens 191 and the objective lens 193 in this order. The coupling lens 191 and the objective lens 193 are coupled to the Z-axis adjustment module 195. The Z-axis adjustment module 195 is used to move the coupling lens 191 and the objective lens 193 up or down.
In this embodiment, the distance between the coupling lens 191 and the objective lens 193 is fixed, and the visual alignment device 30 is disposed on the Z-axis adjusting module 195, so that the coupling lens 191, the objective lens 193, and the visual alignment device 30 all move synchronously during the moving process, and in other embodiments, the Z-axis adjusting module 195 may only move the objective lens 193 or the coupling lens 191.
The vision alignment device 30 is used to generate a vision image and focus to make the laser processing operation accurate and to observe the modification process by naked eyes. The visual alignment device 30 includes a transfer unit 31, an illumination unit 33, an image sensing unit 35, and a focusing unit 37. The transmitting unit 31 is used for transmitting a light beam, such as visible light or laser, to a destination, such as the coupling mirror 191, the image sensing unit 35 and the focusing unit 37. The illumination unit 31 is used for generating a visible light beam, and the visible light beam is projected to the liquid crystal panel 50 through the transmission unit 31 and the coupling mirror 191 of the pulse output unit 19.
The image sensing unit 35 includes a visual range for sensing the visible light beam reflected by the liquid crystal panel 50 to generate visual information. The visual information includes an observation distance for adjusting the height of the objective lens 193 with respect to the liquid crystal panel 50, and the reflected light of the visible light beam is transmitted to the image sensing unit 35 through the coupling mirror 191 and the transmitting unit 31 of the pulse output unit 19.
The focusing unit 37 includes a laser detection range in which the laser detection range is in the visual range, and the focusing unit 37 detects focusing information of a defect range of the modified layer of the liquid crystal panel 50 in the laser detection range, the focusing information including a focusing distance, which is a distance by which the objective lens 193 is pushed.
As shown in fig. 2, the focusing unit 37 includes an emitting module 371, a sensing module 373, and a processing module 375. The emitting module 371 is used for generating focusing laser. The sensing module 373 senses the focused laser reflected by the defect area of the modified layer. In this embodiment, the sensing module 373 senses half of the reflected focused laser beam, and the other half of the reflected focused laser beam is blocked and not sensed, and whether focusing is completed or not is identified by half of the beam profile. The processing module 375 is coupled to the transmitting module 371, the sensing module 373, and the Z-axis adjusting module 195. The processing module 375 calculates the focusing distance according to the round trip time of the focused laser to control the Z-axis adjustment module 195 to push the objective lens 193 up or down to make the laser more accurate.
As shown in fig. 3 and 4, the pulse grid controller 153 is, for example, an Acousto-Optic modulator (AOM), and is used for modulating the duty cycle T of the laserD. Duty cycle TDIncluding the on-time TNAnd off-time To, at on-time TNThe internal pulse gating controller 153 allows the short pulse of the laser corresponding To the time domain To be outputted To the second mirror 155, and the internal pulse gating controller 153 does not allow the short pulse of the laser corresponding To the time domain To be outputted To the second mirror 155 during the off time To. In this embodiment, the laser corresponding time domain refers to the laser and the working period T of the time domain signalDAre overlapping.
The pulse gate controller 153 includes a signal generating module 157, an rf driving module 158 and a modulation output module 159. The signal generating module 157 is coupled to the rf driving module 158 and is configured to output a grating modulation signal, as indicated by symbol S157 in fig. 4, where the modulation period or amplitude can be changed. The rf driving module 158 receives and transmits the grating modulation signal S157. The modulation output module 159 receives the grating modulation signal S157 and the laser light Si input from the first mirror 151, and outputs a modulated laser light SO according to a duty cycle of the grating modulation signal S157. Thus, the laser modification process can pass through the working period TDTo for heat dissipation and To reduce heat accumulation, and, in addition, the duty cycle TDOn-time T ofNA plurality of short pulses are intermittently output to uniformly repair the pixel area of the color filter so as to blacken the color filter to block light.
As shown in fig. 5, the focusing process 700 of the material modification system of the present invention includes steps 701: the bright point of the liquid crystal panel 50 is detected, and then, step 703: adjusting the relative height between the objective lens 193 and the liquid crystal panel 50, adjusting the observation distance between the objective lens 193 of the pulse output unit 19 and the liquid crystal panel 50 through the Z-axis adjusting module 195 to clearly identify the image of the bright point position, and then, step 705: focusing the modified layer of the liquid crystal panel 50, the focusing unit 37 detects and focuses the modified layer of the liquid crystal panel 50 to obtain the focusing distance between the modified layer and the objective lens 193, and then step 707: adjusting the relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 to focus the laser on the modified layer, adjusting the relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 through the Z-axis adjusting module 195 according to the focusing distance, and finally, in step 709: and outputting laser to modify the modified layer. In step 705-.
After the backlight of the liquid crystal panel 50 is turned on, whether or not the bright spot 93 exists on the surface of the liquid crystal panel 50 can be clearly recognized in step 701 in the completely black screen. In step 701, the detection is to detect the visible light beam reflected by the liquid crystal panel 50 through the image sensing unit 35, and the reflected visible light beam generates the visual information 91 through the image sensing unit 35, as shown in fig. 6. The rectangular dashed box represents a defect (pixel) area 95, and the bright spot 93 is within the defect area 95. The image sensing unit 35 has a visual range 90, and the visual range 90 is a picture that can be presented through a display, such as a local surface appearance of the liquid crystal panel 50. The visual information 91 relates to the visual range 90.
In step 703, the adjustment is performed by the Z-axis adjustment module 195. As shown in fig. 7, in order to clearly identify the bright point 93, the Z-axis adjustment module 195 may be manually or automatically adjusted to change the observation distance between the objective lens 193 and the surface 51 of the liquid crystal panel 50, so as to find a clear image, as shown in fig. 6, and thus the display can clearly display the bright point 93 and the range. The bright spots 93 are confirmed by a clear image to correspond to the corresponding pixels of the color filter (modified layer) of the liquid crystal panel 50.
In step 705, focusing is performed by the focusing unit 37, and the focusing unit 37 focuses on the defect range of the modified layer (i.e. the color filter) 53 of the liquid crystal panel 50, which is also to find the relative height of the laser focused on the defect range of the modified layer 53, i.e. the relative focusing distance between the objective lens 193 and the defect range.
In this embodiment, the focusing unit 37 is used for detecting the focusing information of the modified layer of the liquid crystal panel 50 by the focusing laser, and the focusing information includes a focusing shape and an out-of-focus shape. The focusing information is in the visual range, and the processing positions where the visible light, the laser and the focusing laser are projected to the object 50 are overlapped. The focusing shape and the defocusing shape are related to the beam profile of the reflected focused laser, and when the beam profile forms a shape such as a circle, since the sensing module senses a half of the beam, the defocusing shape is an incomplete pattern such as a semicircle and the beam profile is unclear. When focused, the focused shape is a complete pattern, e.g., a spot, and the beam profile is substantially sharp. In other embodiments, the shape of the beam profile may be a line, or a combination of a point and a line, if the shape is other, such as a square or other shape. The processing module 375 of the focusing unit 37 determines the focusing distance according to the focusing shape.
The adjustment in step 707 is by the Z-axis adjustment module 195. The relative height between the objective lens 193 and the modified layer of the liquid crystal panel 50 is fine-tuned according to the focusing distance to make the modulated laser light substantially focus on the modified layer, and finally, the laser light output in step 709 can be correctly modified on the defect range 95 (i.e. the corresponding pixel range) of the modified layer to make the corresponding pixel blacken to achieve the effect of shielding light, as shown in fig. 8, the defect range 95 is modified to blacken to shield the light of the light backlight source.
As shown in fig. 7, the color filter 53 of the liquid crystal panel 50 is below the surface 51, so that the laser light can be focused on the modified layer more accurately through steps 705 and 707 to modify the material more uniformly and prevent the adjacent material from peeling off.
Naturally, the present invention can be embodied in many other forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be made by one skilled in the art without departing from the spirit or essential attributes thereof, and it is intended that all such changes and modifications be considered as within the scope of the appended claims.

Claims (7)

1. A material modification system, comprising:
a pulse generating device, for modulating a laser according to a duty cycle of a grating modulation signal, the laser including a plurality of short pulses, the duty cycle including an on-time and an off-time, the laser being allowed to output the plurality of short pulses in a corresponding time domain within the on-time, the laser being not allowed to output the plurality of short pulses in the corresponding time domain within the off-time; and
and the visual alignment device is connected with the pulse generating device and is used for aligning the pulse generating device to a modified layer of an object and performing modified operation on the laser after modulation.
2. The material modification system of claim 1, wherein the corresponding time domain is a temporal overlap of a duty cycle of the grating modulation signal and the laser light.
3. The material modification system of claim 1, wherein the temporal pulse width of the plurality of short pulses is on the order of femtoseconds.
4. The material modification system of claim 1, wherein the pulse generation device comprises a laser source, a pulse intensity adjustment unit, a pulse modulation unit, a scanning unit, a relay lens, and a pulse output unit, the laser source is used for radiating the laser, the laser sequentially passes through the pulse intensity adjusting unit, the pulse modulating unit, the scanning unit, the relay unit and the pulse output unit, the pulse intensity adjusting unit is used for adjusting the laser intensity, the pulse modulation unit is used for generating the grating modulation signal to modulate the laser, the scanning unit is used for scanning a defect range of the modified layer of the object, the relay lens is used for collecting the modulated laser output by the scanning unit, and the pulse output unit is used for outputting the modulated laser to blacken the defect range.
5. The material modifying system of claim 4, wherein the pulse modulation unit comprises a pulse gating controller, the pulse gating controller comprises a signal generating module, a radio frequency driving module and a modulation output module, the signal generating module is coupled to the laser driving module and configured to generate the grating modulation signal, the laser driving module is configured to emit the grating modulation signal, and the modulation output module receives the grating modulation signal and the laser light and outputs the modulated laser light according to the grating modulation signal.
6. The material modification system of claim 1, wherein the object comprises a liquid crystal panel.
7. The material modification system of claim 6, wherein the modification layer of the object comprises a color filter.
CN202023005227.5U 2020-12-14 2020-12-14 Material modification system Active CN213934470U (en)

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