CN213714406U - Zone-melting crystal inspection equipment - Google Patents
Zone-melting crystal inspection equipment Download PDFInfo
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- CN213714406U CN213714406U CN202022787561.4U CN202022787561U CN213714406U CN 213714406 U CN213714406 U CN 213714406U CN 202022787561 U CN202022787561 U CN 202022787561U CN 213714406 U CN213714406 U CN 213714406U
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- detection
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- 239000013078 crystal Substances 0.000 title claims abstract description 63
- 238000007689 inspection Methods 0.000 title claims abstract description 36
- 238000004857 zone melting Methods 0.000 title claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 81
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 81
- 239000010703 silicon Substances 0.000 claims abstract description 81
- 238000005498 polishing Methods 0.000 claims abstract description 55
- 238000001514 detection method Methods 0.000 claims abstract description 43
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000005303 weighing Methods 0.000 claims abstract description 30
- 239000000523 sample Substances 0.000 claims description 26
- 239000000428 dust Substances 0.000 claims description 17
- 238000012360 testing method Methods 0.000 claims description 13
- 241000834287 Cookeolus japonicus Species 0.000 claims description 7
- 244000309464 bull Species 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 7
- 230000006378 damage Effects 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010407 vacuum cleaning Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides zone-melting crystal inspection equipment, which comprises a weighing module, a polishing module, a detection module and a man-machine information system in sequence; wherein: the weighing module is used for measuring the weight of the silicon rod horizontally arranged on the crystal supporting and locking and supporting mechanism; the polishing module is used for polishing the silicon rods with qualified temperature to prepare for resistivity detection and PN type detection of the silicon rods; the detection module is used for detecting the temperature, the resistivity and the PN type of the silicon rod and reporting the detection data; the human-computer information system is electrically connected with the weighing module, the detection module and the polishing module and is used for controlling work, displaying data and giving an alarm. The utility model discloses detect the zone-melting single crystal silicon rod by equipment is automatic, and rate of accuracy and uniformity are higher, and are safer controllable, save the resource, improve production efficiency.
Description
Technical Field
The utility model belongs to the technical field of zone-melting crystal detects, especially, relate to a zone-melting crystal check out test set.
Background
In the semiconductor industry, the measurement of geometric dimensions such as diameter, effective length, real-time temperature, resistivity, PN type, and weight of a silicon rod in a zone-melting single crystal silicon is conventionally performed manually, and the pure human industry has the following defects: the data accuracy of manual operation test is not high, data reading errors and recording errors may exist, the consistency is poor, time and labor are wasted, the resource waste is serious, and the production efficiency is low; and need polish the process in the test, the operation of polishing belongs to the harmful operation that can produce the dust, easily causes the injury to the staff's body, has the potential safety hazard.
Therefore, how to design equipment for automatically detecting parameters such as diameter, effective length, real-time temperature, resistivity, PN type, weight and the like of the zone-melting silicon single crystal rod by the equipment is solved, the accuracy of detection data is ensured, the consistency is high, the equipment is safer and more controllable, and the equipment is the key for saving resources and improving the production efficiency.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the defects of the prior art, and aims to solve the problems that the accuracy of data of manual operation tests in the prior art is not high, data reading errors and inputting errors possibly exist, the consistency is poor, time and labor are wasted, the resource waste is serious, and the production efficiency is low; in addition, a polishing process is required in the test, and the polishing operation belongs to harmful operation which can generate dust, easily causes harm to the human body of a worker and has potential safety hazard; the equipment is used for automatically detecting the zone-melting single crystal silicon rod, the accuracy and consistency are higher, the equipment is safer and more controllable, resources are saved, and the production efficiency is improved.
In order to solve the technical problem, the utility model discloses a technical scheme is:
the utility model provides a zone-melting crystal check out test set, includes weighing module, the module of polishing, detection module, man-machine information system in proper order, wherein:
the weighing module is used for measuring the weight of the silicon rod;
the polishing module is used for polishing the silicon rods with qualified temperature, and preparing for resistivity detection and PN type detection of the silicon rods;
the detection module is used for detecting various parameters of the silicon rod and reporting detection data;
the man-machine information system is electrically connected with the weighing module, the detection module and the polishing module and used for controlling work, displaying data and giving an alarm.
Furthermore, the weighing module comprises a plurality of crystal supports arranged along the length direction of the silicon rod, limiting clamps arranged along the length direction of the silicon rod and used for limiting the silicon rod, a locking mechanism supporting cylinder arranged below the crystal supports, a plurality of locking supporting mechanisms arranged on the upper portion of the locking mechanism supporting cylinder, and locking mechanism lifting linear bearings parallel to the locking mechanism supporting cylinder in the vertical direction, wherein weighing sensors are arranged in the locking supporting mechanisms.
Further, the crystal supports are arranged side by side at even intervals along the length direction of the silicon rod.
Further, the crystal support comprises a bull-eye bearing rotatably arranged on the upper surface of the crystal support and used for pushing the silicon rod to the limiting clamp along the horizontal length direction.
Further, the bull's eye bearing is smooth surface, locking holding up mechanism upper surface is the roughness surface.
Further, the number of the crystal supports is 8-10, and the number of the locking and supporting mechanisms is 4-6.
Further, the polishing module comprises a polishing mechanical arm used for polishing along the length direction of the silicon rod, a polishing working head arranged on the polishing mechanical arm and used for polishing, a transverse walking shaft connected with the polishing mechanical arm and used for controlling the movement of the polishing mechanical arm, and a vacuum dust collection port internally provided with a dust collector and used for absorbing dust generated by polishing operation.
Further, the detection module includes:
the silicon rod weighing and detecting device comprises a detecting mechanical arm, an infrared temperature probe, a PN type probe, an ultrasonic ranging sensor and an intelligent camera, wherein the detecting mechanical arm is used for moving along the length direction of the silicon rod, the infrared temperature probe is arranged on the detecting mechanical arm and is used for detecting the real-time temperature of the silicon rod after weighing is finished, the PN type probe is arranged on the detecting mechanical arm and is used for detecting the PN type of the silicon rod after polishing is finished, the ultrasonic ranging sensor and the intelligent camera are arranged on the detecting mechanical arm and are used for detecting the diameter of the silicon rod, and the four probes are arranged;
the detection module can report the detected data to the man-machine information system.
The floating zone crystal inspection device comprises a floating zone crystal inspection device, a floating zone crystal inspection device and a support foot cup, wherein the floating zone crystal inspection device is arranged at the bottom end of the floating zone crystal inspection device, the support foot cup is arranged at the bottom end of the floating zone crystal inspection device and is used for supporting the floating zone crystal inspection device.
Compared with the prior art, the utility model has the advantages and positive effect be: the utility model discloses a zone-melting crystal check out test set can carry out diameter, effective length, real-time temperature, resistivity, PN type, weight isoparametric to the silicon rod automatically, and whole testing process rate of accuracy and uniformity are higher, and safe controllable more, save the resource, improve production efficiency.
Drawings
Fig. 1 is a front view of an embodiment of the present invention;
fig. 2 is a top view of a weighing module according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view A-A of FIG. 1;
fig. 4 is a schematic structural diagram of a PN type probe and a four-probe according to an embodiment of the present invention;
FIG. 5 is an enlarged view of portion B of FIG. 1;
FIG. 6 is an enlarged view of section C of FIG. 1;
fig. 7 is an enlarged view of a portion D of fig. 3.
In the figure:
100. crystal support 110, limiting fixture 130 and locking supporting mechanism supporting cylinder
140. Locking supporting mechanism 150, locking mechanism lifting straight 160 and bull eye bearing spool bearing
200. Grinding mechanical arm 210, grinding working head 220 and transverse walking shaft
230. Vacuum cleaning port 300, detection mechanical arm 310 and infrared temperature probe
320. PN-TYPE PROBE 330, FOUR-PROBE 340, ULTRASONIC RANGE-MEASURING SENSOR
350. Intelligent camera 400, man-machine information system 500, universal caster
510. Supporting foot cup 600, silicon rod 700 and four-color alarm lamp
Detailed Description
The technical solution in the embodiment of the present invention is clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.
The following examples are specifically illustrated by taking preferred embodiments as examples.
This embodiment provides a zone-melting crystal check out test set, but the mobile device of equipment for possessing the workstation that has movable closed glass cover all around, as shown in fig. 1, include weighing module, the module of polishing, detection module, man-machine information system in proper order, wherein: the weighing module is used for measuring the weight of the silicon rod 600 horizontally arranged on the crystal support 100 and the locking and supporting mechanism 140, and then the next process is carried out; the polishing module is used for polishing the silicon rod 600 with qualified temperature, and preparing for resistivity detection and PN type detection of the silicon rod 600; the detection module is used for detecting the temperature, the resistivity and the PN type of the silicon rod 600 and reporting the detection data; the human-computer information system 400 is electrically connected with the weighing module, the detection module and the polishing module and used for controlling work, displaying data and giving an alarm.
As shown in fig. 1 and 2, the weighing module includes a plurality of crystal supports 100 arranged side by side at regular intervals along a length direction of the silicon rod 600, a limiting jig 110 arranged along the length direction of the silicon rod 600 for limiting the position of the silicon rod 600, a locking mechanism supporting cylinder 130 arranged below the crystal supports 100, and a plurality of locking supporting mechanisms 140 positioned above the locking mechanism supporting cylinder 130 and a locking mechanism lifting linear bearing 150 arranged in a vertical direction parallel to the locking mechanism supporting cylinder 130, the locking supporting mechanisms having built-in weighing sensors (not shown), wherein the crystal supports 100 include a bull's eye bearing 160 rotatably arranged on an upper surface of the crystal support 100 for pushing the silicon rod 600 to the limiting jig 110 along a horizontal length direction. Specifically, each crystal support 100 has two opposing bull-eye bearings 160 on its upper surface.
Preferably, the bull's eye bearing 160 has a smooth surface, which facilitates the sliding and advancing of the silicon rod 600 on the bull's eye bearing 160; the upper surface of the locking and supporting mechanism 140 is a rough surface, which is beneficial to locking the silicon rod 600 and prevents the silicon rod 600 from sliding to cause the operation error.
Preferably, the number of crystal supports 100 is 8-10 and the number of latch lift mechanisms 140 is 4-6.
In the weighing step, a carrying tool is used for carrying and placing the silicon rod 600 to be detected above the crystal support 100, the silicon rod 600 is pushed to one end of the limiting clamp 110 on the bull eye bearing 160 along the length direction of the silicon rod 600 until the silicon rod 600 is contacted with the limiting clamp 110, the man-machine information system 400 is started, the single crystal number of the silicon rod 600 is input, the program is started, and the detection process is started. The locking mechanism supporting cylinder 130 acts on the locking mechanism lifting linear bearing 150 and moves upwards in the vertical direction, so that the locking supporting mechanism 140 moves upwards, the rough surface is in contact with the silicon rod 600, and after the built-in weighing sensor detects the weight of the silicon rod 600, the detection data is reported to the man-machine information system 400. After the detection is finished, the locking mechanism supporting cylinder 130 and the locking mechanism lifting linear bearing 150 fall in the vertical direction to drive the locking supporting mechanism 140 to fall, and the weighing step is finished.
As shown in fig. 1, 3, 5, 6, and 7, the detection module includes: the silicon rod weighing and detecting device comprises a detecting mechanical arm 300, an infrared temperature probe 310, a PN-type probe 320, an ultrasonic ranging sensor 340 and an intelligent camera 350, wherein the detecting mechanical arm 300 is used for moving along the length direction of a silicon rod 600, the infrared temperature probe 310 is arranged on the detecting mechanical arm 300 and is used for detecting the real-time temperature of the silicon rod 600 after weighing is finished, the PN-type probe 320 is arranged on the detecting mechanical arm 300 and is used for detecting the PN-type of the silicon rod 600 after polishing is finished, the ultrasonic ranging sensor 340 and the intelligent camera 350 are arranged on the detecting mechanical arm 300 and are used for detecting the diameter;
the detection module may report the data obtained from the detection to the telematics system 400.
Specifically, after the weighing step is finished, the next step is carried out, the infrared temperature probe 310 on the detection mechanical arm 300 selects a plurality of temperature measurement points on the surface of the silicon rod 600, real-time temperature detection is carried out on the silicon rod 600, if the temperature is too high, an alarm prompt message of 'needing to replace crystals or waiting' is sent out on the interface of the human-computer information system 400, and if the temperature meets the requirement, the next step is carried out. The ultrasonic ranging sensor 340 and the intelligent camera 350 on the detection mechanical arm 300 measure and calculate the diameter and the effective length of the silicon rod 600, if the diameter which does not meet the standard is found, the length corresponding to the diameter is marked, and the silicon rod is cut from the effective length. And then entering a grinding step.
As shown in fig. 1, the polishing module includes a polishing robot arm 200 for performing a single-line polishing operation along the length direction of the silicon rod 600, a polishing head 210 disposed on the polishing robot arm 200 for performing polishing, a traverse shaft 220 connected to the polishing robot arm 200 for controlling the polishing robot arm 200 to move along the length direction of the silicon rod 600, and a vacuum suction port 230 having a built-in vacuum cleaner for sucking dust generated by the polishing operation.
Specifically, in the polishing step, the locking mechanism holding cylinder 130 and the locking mechanism elevating linear bearing 150 move upward in the vertical direction, so that the locking holding mechanism 140 moves upward, the rough surface comes into contact with the silicon rod 600, the silicon rod 600 is locked, and the silicon rod 600 is prevented from rolling; then, the transverse walking shaft 220 controls the polishing mechanical arm 200 to move along the length direction of the silicon rod 600, the polishing working head 210 on the polishing mechanical arm 200 performs single-line polishing operation with a set density on the silicon rod 600, dust generated in the polishing process is absorbed by the vacuum dust absorption port 230, and a dust collector (not shown in the figure) is arranged in the vacuum dust absorption port 230 and can be used for treating the absorbed dust.
Specifically, after the polishing step is finished, the next step is performed, and the locking mechanism supporting cylinder 130 and the locking mechanism lifting linear bearing 150 descend to drive the locking mechanism supporting mechanism 140 to descend, so that the built-in sensor is prevented from being damaged. The inspection robot 300 moves along the length direction of the silicon rod 600, the PN type probe 320 on the inspection robot 300 performs PN type inspection on the polished silicon rod 600, the four probes 330 on the inspection robot 300 perform resistivity inspection on the polished silicon rod 600, and the configuration of the PN type probe 320 and the four probes 330 is as shown in fig. 4.
Specifically, the PN-type probe 320 and the four-probe 330 are detected by selecting a predetermined point at a polished position on the silicon rod 600. After the detection is finished, the detection data is reported to the man-machine information system 400.
As shown in fig. 1, the floating zone crystal inspection apparatus further includes casters 500 and support cups 510, the casters 500 being provided at four corners of the bottom end of the floating zone crystal inspection apparatus for moving the floating zone crystal inspection apparatus, and the support cups 510 being provided at four sides of the bottom end of the floating zone crystal inspection apparatus for supporting the floating zone crystal inspection apparatus to stand on the ground stably.
Preferably, the number of the supporting cup 510 provided on each side of the bottom end of the floating zone crystal inspection apparatus is 2-4. In this embodiment, 2 are selected for use to reach and compromise material saving and better equipment stability demand.
In this embodiment, a four-color warning lamp 700 may also be provided at the top end of the zone-melting crystal inspection apparatus. Four-color alarm lamp 700 and weighing module electric connection, if silicon rod 600 does not have steadily to place taking place at the in-process that promotes silicon rod 600, when having the slope or the unstable condition, four-color alarm lamp 700 is the continuous circulation scintillation promptly and is sent four colors, reports to the police and suggests. After adjustment and correction are performed, the four-color alarm lamp 700 stops alarm prompting, and orderly and stable operation of each test step is ensured after the man-machine information system 400 is started later.
1. The utility model discloses a zone-melting crystal check out test set, can be full-automatic to the detection of zone-melting single crystal silicon rod diameter, effective length, real-time temperature, resistivity, PN type, weight isoparametric, whole testing process rate of accuracy and uniformity are higher, easy operation, and safe controllable saves the resource, improves production efficiency.
2. The double-row smooth bull eye bearing is more beneficial to the sliding and advancing of the silicon rod on the bull eye bearing, so that the transportation and the pushing of the silicon rod are smoother; the upper surface of the locking supporting mechanism is a rough surface, so that the silicon rod is locked, the silicon rod is prevented from sliding to cause error in operation, and the detection accuracy is higher.
3. The vacuum dust absorption mouth of the built-in dust collector who sets up in the module of polishing can absorb and handle the harmful dust that produces in the process of polishing, reduces the risk to staff's bodily injury, also environmental protection more simultaneously.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (9)
1. The utility model provides a zone-melting crystal check out test set which characterized in that includes weighing module, the module of polishing, detection module, man-machine information system in proper order, wherein:
the weighing module is used for measuring the weight of the silicon rod;
the polishing module is used for polishing the silicon rods with qualified temperature, and preparing for resistivity detection and PN type detection of the silicon rods;
the detection module is used for detecting various parameters of the silicon rod and reporting detection data;
the man-machine information system is electrically connected with the weighing module, the detection module and the polishing module and used for controlling work, displaying data and giving an alarm.
2. The float-zone crystal inspection equipment according to claim 1, wherein the weighing module comprises a plurality of crystal supports arranged along the length direction of the silicon rod, limiting clamps arranged along the length direction of the silicon rod for limiting the silicon rod, a locking mechanism supporting cylinder arranged below the crystal supports, a plurality of locking supporting mechanisms arranged on the upper portion of the locking mechanism supporting cylinder, and a locking mechanism lifting linear bearing parallel to the locking mechanism supporting cylinder in the vertical direction, and a weighing sensor is arranged in each locking supporting mechanism.
3. The float zone crystal inspection apparatus of claim 2, wherein: the crystal supports are arranged side by side at even intervals along the length direction of the silicon rod.
4. The float zone crystal inspection apparatus of claim 2, wherein: the crystal support comprises a bull-eye bearing which is rotatably arranged on the upper surface of the crystal support and is used for pushing the silicon rod to the limiting clamp along the horizontal length direction.
5. The float zone crystal inspection apparatus of claim 4, wherein: the bull's eye bearing is smooth surface, locking holding up mechanism upper surface is the roughness surface.
6. The float zone crystal inspection apparatus of claim 2, wherein: the number of the crystal supports is 8-10, and the number of the locking and supporting mechanisms is 4-6.
7. A float zone crystal inspection apparatus as claimed in any one of claims 1 to 6, wherein: the polishing module is including being used for following silicon rod length direction polishes the operation's the polishing arm, set up in the polishing work head of polishing of implementing on the polishing arm, with the polishing arm is connected and is used for control the axle is walked to the violently that the arm removed of polishing to and built-in dust catcher is used for absorbing the vacuum dust absorption mouth of the dust that the operation of polishing produced.
8. The float zone crystal inspection apparatus of claim 1, wherein the detection module comprises:
the silicon rod weighing and detecting device comprises a detecting mechanical arm, an infrared temperature probe, a PN type probe, an ultrasonic ranging sensor and an intelligent camera, wherein the detecting mechanical arm is used for moving along the length direction of the silicon rod, the infrared temperature probe is arranged on the detecting mechanical arm and is used for detecting the real-time temperature of the silicon rod after weighing is finished, the PN type probe is arranged on the detecting mechanical arm and is used for detecting the PN type of the silicon rod after polishing is finished, the ultrasonic ranging sensor and the intelligent camera are arranged on the detecting mechanical arm and are used for detecting the diameter of the silicon rod, and the four probes are arranged;
the detection module can report the detected data to the man-machine information system.
9. A float zone crystal inspection apparatus as claimed in any one of claims 1 to 6 and 8, wherein: the floating zone crystal inspection device comprises a floating zone crystal inspection device, and is characterized by further comprising a universal caster wheel and a supporting foot cup, wherein the universal caster wheel is arranged at the bottom end of the floating zone crystal inspection device and used for enabling the floating zone crystal inspection device to move, and the supporting foot cup is arranged at the bottom end of the floating zone crystal inspection device and used for supporting the floating zone crystal inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022787561.4U CN213714406U (en) | 2020-11-27 | 2020-11-27 | Zone-melting crystal inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022787561.4U CN213714406U (en) | 2020-11-27 | 2020-11-27 | Zone-melting crystal inspection equipment |
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| Publication Number | Publication Date |
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| CN213714406U true CN213714406U (en) | 2021-07-16 |
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| CN202022787561.4U Active CN213714406U (en) | 2020-11-27 | 2020-11-27 | Zone-melting crystal inspection equipment |
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| CN (1) | CN213714406U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
| CN114536101A (en) * | 2022-03-21 | 2022-05-27 | 惠州市腾达科技有限公司 | Machining process method of medical product hardware fitting |
-
2020
- 2020-11-27 CN CN202022787561.4U patent/CN213714406U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
| CN114536101A (en) * | 2022-03-21 | 2022-05-27 | 惠州市腾达科技有限公司 | Machining process method of medical product hardware fitting |
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Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: No.12 Haitai East Road, Huayuan Industrial Zone, Binhai New Area, Tianjin Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |