CN212623449U - Irradiation unit and liquid crystal panel manufacturing apparatus - Google Patents

Irradiation unit and liquid crystal panel manufacturing apparatus Download PDF

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Publication number
CN212623449U
CN212623449U CN202021692780.8U CN202021692780U CN212623449U CN 212623449 U CN212623449 U CN 212623449U CN 202021692780 U CN202021692780 U CN 202021692780U CN 212623449 U CN212623449 U CN 212623449U
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CN
China
Prior art keywords
flow path
substrate
cooling block
channel
irradiation unit
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Active
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CN202021692780.8U
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Chinese (zh)
Inventor
藤冈纯
田内亮彦
中川幸信
田中贵章
加藤刚雄
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Toshiba Lighting and Technology Corp
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Toshiba Lighting and Technology Corp
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133382Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Mathematical Physics (AREA)

Abstract

The utility model provides an shine unit and liquid crystal display panel manufacturing installation. The utility model discloses a topic lies in making the maintenance operation easy. The irradiation unit of an embodiment includes: a plurality of light emitting elements, a cooling block, a cooling pipe, and a third flow path. The plurality of light emitting elements are mounted on the front surface of the substrate. The cooling block has a first flow path extending in the longitudinal direction of the substrate and is disposed on the back surface of the substrate. The cooling pipe has a second flow path parallel to the first flow path and is disposed on the back side of the cooling block. The third channel connects one end of the first channel to one end of the second channel.

Description

Irradiation unit and liquid crystal panel manufacturing apparatus
Technical Field
The utility model discloses an embodiment relates to an shine unit and liquid crystal display panel manufacturing installation.
Background
Conventionally, an irradiation unit that lights a plurality of light emitting elements to irradiate light is known. The irradiation unit is used in various industrial fields such as production of a liquid crystal panel and curing of ink (ink) or an adhesive material.
[ Prior art documents ]
[ patent document ]
[ patent document 1] Japanese patent application laid-open No. 2009-61702
SUMMERY OF THE UTILITY MODEL
[ problem to be solved by the utility model ]
In order to manufacture a large-sized liquid crystal panel, a plurality of long irradiation units having a total length of more than 2 m, for example, may be arranged side by side, and it is necessary to improve the workability of maintenance work such as inspection or replacement of structural members.
The present invention is to provide an irradiation unit and a liquid crystal panel manufacturing apparatus that can facilitate maintenance work.
[ means for solving problems ]
The irradiation unit of an embodiment includes: a plurality of light emitting elements, a cooling block, a cooling pipe, and a third flow path. The plurality of light emitting elements are mounted on the front surface of the substrate. The cooling block has a first flow path extending in the longitudinal direction of the substrate and is disposed on the back surface of the substrate. The cooling pipe has a second flow path parallel to the first flow path and is disposed on the back side of the cooling block. The third channel connects one end of the first channel to one end of the second channel.
In an embodiment of the present invention, the irradiation unit includes: and a holding mechanism for holding the cooling block along the longitudinal direction of the substrate.
In an embodiment of the present invention, the irradiation unit includes: a first joint member connected to the other end side of the first channel; and a second joint member connected to the other end side of the second channel.
In an embodiment of the present invention, the cooling block is detachably disposed along a longitudinal direction of the substrate.
The liquid crystal panel manufacturing apparatus of another embodiment includes: a plurality of ultraviolet irradiation devices that irradiate the panel to be processed containing the photoreactive material with light, and the ultraviolet irradiation devices are the irradiation units according to the above embodiments.
[ effects of the utility model ]
According to the utility model, the maintenance operation can be easy.
Drawings
Fig. 1 is a side view of a liquid crystal panel manufacturing apparatus according to an embodiment.
Fig. 2 is a front view of the irradiation unit of the embodiment.
Fig. 3 is a side view of the irradiation unit of the embodiment.
Fig. 4 is a cross-sectional view schematically showing a liquid crystal panel.
Fig. 5 is a schematic view of an ultraviolet irradiation module of an embodiment.
[ description of symbols ]
1: irradiation unit
6: processed panel
7. 8: substrate
9: liquid crystal layer
10: cooling block
10a, 20 a: end (the other end)
10b, 20 b: end (one end)
11: flow path (first flow path)
12: concave part
20: cooling pipe
21: flow path (second flow path)
30: connecting member
31: flow path (third flow path)
40: holding part
50: light source unit
51: substrate
52: light emitting element
60: mounting part
71: joint component (first joint component)
72: joint component (second joint component)
80: supporting member
100: liquid crystal panel manufacturing device
140: irradiation part
141: ultraviolet irradiation module
142: lighting device
143: reflecting plate
144: top board
145. 146: end part
150: carrier part
151: carrying platform
152: jacking pin
R1, R2: and irradiating the area.
Detailed Description
The irradiation unit 1 of the embodiment described below includes: a plurality of light emitting elements 52, a cooling block 10, a cooling pipe 20, and a third flow path (flow path 31). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51. The cooling block 10 has a first flow path (flow path 11) extending in the longitudinal direction of the substrate 51, and is disposed on the back surface of the substrate 51. The cooling pipe 20 has a second flow path (flow path 21) parallel to the first flow path (flow path 11), and is disposed on the opposite side of the substrate 51 with the cooling block 10 interposed therebetween. The third channel (channel 31) has one end of the first channel (channel 11) and one end of the second channel (channel 21) in communication.
The irradiation unit 1 of the embodiment described below includes a holding mechanism that holds the cooling block 10 along the longitudinal direction of the substrate 51.
In addition, the irradiation unit 1 of the embodiment described below includes: a first joint member (joint member 71) connected to the other end side of the first channel (channel 11); and a second joint member (joint member 72) connected to the other end side of the second flow path (flow path 21).
The cooling block 10 of the embodiment described below is disposed so as to be detachable along the longitudinal direction of the substrate 51.
The liquid crystal panel manufacturing apparatus 100 of the embodiment described below includes a plurality of ultraviolet irradiation devices. The plurality of ultraviolet irradiation apparatuses irradiate the target panel 6 containing the photoreactive material with light. The ultraviolet irradiation device is an irradiation unit 1.
Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below do not limit the technology disclosed in the present invention. In addition, the embodiments and modifications described below can be combined as appropriate within a range not inconsistent with the above description. In the description of the embodiments, the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.
[ embodiment ]
First, an outline of a liquid crystal panel manufacturing apparatus according to an embodiment will be described with reference to fig. 1. Fig. 1 is a side view of a liquid crystal panel manufacturing apparatus according to an embodiment.
For ease of understanding of the description, fig. 1 illustrates a three-dimensional orthogonal coordinate system including a Z axis with the irradiation direction as a positive direction. The orthogonal coordinate system is also shown in other drawings used in the following description.
As shown in fig. 1, the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes an irradiation section 140 and a stage section 150. The liquid crystal panel manufacturing apparatus 100 is an apparatus for manufacturing a liquid crystal panel by irradiating ultraviolet rays to the panel 6 to be processed placed on the stage unit 150.
The irradiation unit 140 includes: an ultraviolet irradiation module 141, a lighting device 142, and a reflector 143. The ultraviolet irradiation module 141 has a plurality of irradiation units 1. The irradiation unit 1 emits ultraviolet rays having a wavelength suitable for the treatment of the treatment panel 6 by electric power supplied from a power supply device, not shown, via the lighting device 142.
The reflecting plate 143 improves the irradiation efficiency by reflecting the ultraviolet rays emitted from the irradiation unit 1 toward the stage unit 150. In the example shown in fig. 1, the reflecting plate 143 is disposed only on the back side (Z-axis negative side) of the ultraviolet irradiation module 141, but is not limited thereto, and may be disposed inside the irradiation unit 140 or the stage unit 150, for example.
Here, a configuration example of the irradiation unit 1 will be described with reference to fig. 2 and 3. Fig. 2 is a front view of the irradiation unit of the embodiment. Fig. 3 is a side view of the irradiation unit of the embodiment.
As shown in fig. 2 and 3, the irradiation unit 1 of the embodiment includes: the light source unit 50, the cooling block 10, the cooling tube 20, the connecting member 30, the joint member 71, the joint member 72, the mounting unit 60, the holding unit 40, and the support member 80.
The light source unit 50 includes a substrate 51 and a plurality of light emitting elements 52. The substrate 51 is formed by providing a long base material made of, for example, ceramic with a printed wiring, not shown, formed of, for example, silver or the like in a desired pattern. A plurality of light emitting elements 52 are provided on the front surface of the substrate 51 so as to be electrically connected to the printed wiring. The plurality of light emitting elements 52 are arranged in a line along the longitudinal direction (X-axis direction) of the substrate 51.
Although not shown, the substrate 51 is covered with a coating film in order to ensure insulation and prevent corrosion in regions other than the connection terminals for connecting the light-emitting elements 52 and the power supply terminals to which power is supplied from the power supply device. The coating film is formed of an inorganic material containing a glass material or the like as a main component, for example. Further, the substrate 51 may be formed of white alumina having a relatively high reflectance, if necessary, to improve the reflectance for reflecting light emitted from the light emitting element 52. In addition, the substrate 51 may also be formed of aluminum nitride having relatively high thermal conductivity to ensure high thermal conductivity.
As the Light Emitting element 52, a Light Emitting Diode (LED) or a semiconductor Laser (Laser Diode) that emits ultraviolet rays is used. The light emitting element 52 emits ultraviolet light having a dominant wavelength of about 300 to 400 nm and a peak wavelength of 365 nm, for example.
The term "ultraviolet light" as used in the embodiments refers to light having a wavelength of 450 nm or less, specifically 365 nm as emitted from the light emitting element 52, but other wavelengths are also acceptable. The light emitting element 52 is not limited to an LED or LD that emits light having a wavelength of 450 nm or less, and may be an LED or LD that emits light having a wavelength longer than 450 nm, in addition to light having a wavelength of 450 nm or less. That is, the light emission form is not limited as long as it is an LED or LD that emits light having a wavelength of 450[ nm ] or less.
The cooling block 10 is formed in a substantially rectangular parallelepiped shape and is disposed on the back surface of the substrate 51. For the cooling block 10, for example, aluminum alloy, stainless steel, or the like is used.
The cooling block 10 has a flow path 11 as a first flow path extending in the longitudinal direction (X-axis direction) of the substrate 51. By circulating the fluid through the flow path 11, the cooling block 10 functions as a so-called liquid cooling block, and heat transferred from the light emitting element 52 via the substrate 51 can be quickly dissipated. Further, the fluid is, for example, water. Further, as the fluid, for example, liquid such as liquid nitrogen or antifreeze, or dry air or gas such as nitrogen may be used.
The cooling pipe 20 is a straight pipe-shaped member having a flow path 21 as a second flow path extending in the X-axis direction so as to be parallel to the flow path 11 and disposed on the back side of the cooling block 10. For the cooling pipe 20, for example, aluminum alloy, stainless steel, or the like is used. The flow path 21 penetrates both ends (end 20a, end 20b) of the cooling pipe 20.
The connection member 30 is a tubular member having a flow path 31 as a third flow path. The connecting member 30 is, for example, a 90 degree elbow joint (elbow joint), and has one end connected to the cooling block 10 at one end (end 10b) side and the other end connected to the cooling pipe 20 at one end (end 20b) side. The flow path 31 penetrates both ends of the connecting member 30 to communicate the flow path 11 with the flow path 21. For the connecting member 30, for example, aluminum alloy, stainless steel, or the like is used. Further, the connecting member 30 may be a straight tubular member. Further, as long as the cooling block 10 and/or the cooling pipe 20 has a flow path extending in the Z-axis direction corresponding to the flow path 31, the cooling block 10 and the cooling pipe 20 may be connected without the connection member 30.
The joint member 71 is connected to the flow path 11 that opens on the other end (end 10a) side of the cooling block 10. The joint member 72 is connected to the flow channel 21 that opens at the other end (end 20a) of the cooling pipe 20. The joint members 71 and 72 are, for example, a one-touch (quick) joint, also called a coupler (coupler), and are easily attachable to and detachable from corresponding hoses and other tubular members. If the joint members 71 and 72 include check valves and other check mechanisms, leakage of fluid from the inside of the cooling block 10 or the cooling pipe 20 is less likely to occur when the irradiation unit 1 is attached and detached, and contamination and other problems of the light source unit 50 due to leakage of fluid can be suppressed.
The mounting portions 60 are mounted on the top plate 144 and are disposed on both sides in the Y-axis direction with the irradiation unit 1 interposed therebetween. In addition, the holding portion 40 is disposed in the mounting portion 60. The holding portion 40 extends in the longitudinal direction (X-axis direction) of the substrate 51, and a plurality of the mounting portions 60 are arranged in the X-axis direction to position the holding portion 40.
The holding portions 40 are disposed on both sides in the Y axis direction with the cooling block 10 interposed therebetween, and are formed so as to protrude toward the cooling block 10 of the irradiation unit 1. The holding portion 40 engages with a concave portion 12 provided on a side surface of the cooling block 10 to hold the irradiation unit 1. The concave portion 12 is an example of a holding mechanism for holding the cooling block 10 along the longitudinal direction of the substrate 51, that is, the X-axis direction, in cooperation with the holding portion 40.
The holding portion 40 also functions as a guide for attaching and detaching the cooling block 10. That is, the cooling block 10 can be attached to and detached from the cooling block 10 along the X-axis direction so that the concave portion 12 engages with the holding portion 40. Therefore, the work time required for inspection or replacement of the cooling block 10 or the irradiation unit 1 including the light source unit 50 can be shortened.
The support member 80 is disposed between the cooling tube 20 and the cooling block 10, and prevents a problem that may occur in the light source unit 50 due to bending, vibration, or the like of the cooling block 10. The support member 80 may be configured by one or more according to the length or mass of the irradiation unit 1 in the X-axis direction, or the like.
In the irradiation unit 1 of the embodiment, the cooling medium flows in the order of the flow path 11 → the flow path 31 → the flow path 21 so as to be folded in a substantially U-shape. Further, the direction of the flow of the cooling medium may be reversed.
Here, the irradiation unit 1 may be configured as follows: the first flow path (flow path 11), the third flow path (flow path 31), and the second flow path (flow path 21) are provided inside the cooling block 10, and the cooling medium flows in a substantially U-shape along the XY plane in one cooling block 10, or the cooling tubes 20 are provided in parallel on the Y axis and the cooling medium flows in a substantially U-shape along the same XY plane as the cooling block 10. However, in the above structure, the cooling block 10 or the cooling pipe 20 occupies a width in the Y-axis direction, and is therefore not preferable. Further, when a plurality of irradiation units 1 are arranged on the Y axis, it is difficult to obtain a desired interval (pitch), which is not preferable.
Further, the following configuration may be adopted: the irradiation unit 1 is not provided with the cooling pipe 20, and the first channels of the cooling blocks 10 of the plurality of irradiation units 1 are connected by the third channel, and the cooling medium flows integrally with the plurality of irradiation units 1. However, in the irradiation unit 1 provided with the joint member 71 and the irradiation unit 1 provided with the joint member 72, the temperature of the cooling medium is different. Therefore, it is difficult to control the temperature of the cooling medium in the plurality of irradiation units 1, and the illuminance of the ultraviolet light may be different in the plurality of irradiation units 1, which is not preferable. Further, if the first passages of the cooling blocks 10 of the plurality of irradiation units 1 are connected by the third passage, it is not preferable to replace the irradiation unit 1 to be replaced if the third passage is not completely removed during the maintenance operation.
In order to solve the above-described problem, it is preferable that the irradiation unit 1 is configured such that the cooling medium flows so as to be folded back in a substantially U-shape along the X-axis direction, as in the present embodiment.
As described above, the irradiation unit 1 according to the embodiment can efficiently manufacture a liquid crystal panel by emitting ultraviolet rays having a wavelength suitable for the treatment of the panel 6 to be treated. Here, the panel 6 to be processed will be described with reference to fig. 4.
Fig. 4 is a cross-sectional view schematically showing a liquid crystal panel. The target panel 6 shown in fig. 4 includes a pair of substrates 7 and 8, and a liquid crystal layer 9 provided between the substrates 7 and 8.
The substrate 7 is a color filter substrate in which, for example, color filters (not shown) for transmitting red, green, and blue light are disposed on a base material, and the color filters are covered with a protective film. The substrate 8 is an opposing substrate provided to face the substrate 7 with a liquid crystal layer 9 interposed therebetween, and a plurality of electrodes are arranged in an array.
The liquid crystal layer 9 includes a liquid crystal composition and a polymerizable monomer as a photoreactive material. The liquid crystal layer 9 absorbs ultraviolet rays having a specific wavelength emitted from the irradiation unit 1 to polymerize the polymerizable monomer, thereby stabilizing the liquid crystal composition whose orientation is controlled by the application of a voltage on the stage 151.
Next, an example of the arrangement of the plurality of irradiation units 1 in the ultraviolet irradiation module 141 will be described with reference to fig. 5. Fig. 5 is a schematic view of an ultraviolet irradiation module of an embodiment.
As shown in fig. 5, the plurality of irradiation units 1 are fixed to the top plate 144, respectively, and are arranged in parallel such that the longitudinal direction of the irradiation units 1 is along the X-axis direction which is the opening and closing direction of the shutter 160, respectively. The top plate 144 may also serve as the reflecting plate 143 (see fig. 1).
The plurality of irradiation units 1 are arranged in different directions in the irradiation region R1 and the irradiation region R2. Specifically, in the irradiation region R1, the joint member 71 and the joint member 72 are located at the end 145 on the X-axis negative direction side, and in the irradiation region R2, the joint member 71 and the joint member 72 are located at the end 146 on the X-axis positive direction side. Thus, the irradiation unit 1 can be attached to and detached from the end 145 in the irradiation region R1, and the irradiation unit 1 can be attached to and detached from the end 146 in the irradiation region R2. Therefore, maintenance work can be facilitated. When the irradiation region is narrow or when the entire length of the irradiation unit 1 is large, all of the irradiation units 1 may be arranged in the same direction.
Further explanation will be given with reference to fig. 1. The stage unit 150 includes a stage 151 and a lift pin 152. The stage 151 applies a voltage to the panel 6 to be processed placed at a predetermined position. For example, aluminum having high heat dissipation can be used for the stage 151. Further, if the surface of stage 151 is coated with a fluororesin, rapid neutralization after panel replacement can be performed, and the liquid crystal panel can be efficiently manufactured.
The lift pins 152 are lifters for lifting the mounted panel 6 to be processed, and are mainly used for carrying in and out the panel 6 to be processed. Specifically, the lift pins 152 receive the target panel 6 carried into the stage unit 150 from a carrying-in/carrying-out port, not shown. The lift-up pins 152 lift up the panel 6 to be processed, which is placed on the stage 151 after the irradiation of ultraviolet rays, and deliver the panel to a transport robot, not shown.
As described above, the irradiation unit 1 of the embodiment includes: a plurality of light emitting elements 52, a cooling block 10, a cooling pipe 20, and a third flow path (flow path 31). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51. The cooling block 10 has a first flow path (flow path 11) extending in the longitudinal direction of the substrate 51, and is disposed on the back surface of the substrate 51. The cooling pipe 20 has a second flow path (flow path 21) parallel to the first flow path (flow path 11), and is disposed on the opposite side of the substrate 51 with the cooling block 10 interposed therebetween. The third channel (channel 31) has one end of the first channel (channel 11) and one end of the second channel (channel 21) in communication. Therefore, maintenance work can be facilitated.
The cooling block 10 of the embodiment is disposed so as to be detachable along the longitudinal direction of the substrate 51. Therefore, maintenance work can be facilitated.
In addition, the irradiation unit 1 of the embodiment includes: a first joint member (joint member 71) connected to the other end side of the first channel (channel 11); and a second joint member (joint member 72) connected to the other end side of the second flow path (flow path 21). Therefore, the cooling medium is less likely to fall during maintenance work.
The cooling block 10 of the embodiment is disposed so as to be detachable along the longitudinal direction of the substrate 51. Therefore, maintenance work can be facilitated.
The liquid crystal panel manufacturing apparatus 100 according to the embodiment includes a plurality of ultraviolet irradiation devices. The plurality of ultraviolet irradiation apparatuses irradiate the target panel 6 containing the photoreactive material with light. The ultraviolet irradiation device is an irradiation unit 1. Therefore, maintenance work can be facilitated.
In the above embodiment, an example of the holding mechanism in which the recess 12 of the cooling block 10 and the holding portion 40 cooperate has been described, but the present invention is not limited to this, and for example, the following configuration may be adopted: the cooling block 10 has a convex portion protruding in the longitudinal direction of the substrate 51, and the holding portion 40 has a concave portion engaging with the convex portion.
In the above embodiments, the case where the light emitting elements 52 are arranged in a line along the longitudinal direction of the substrate 51 has been described, but the present invention is not limited to this, and for example, a so-called zigzag arrangement in which positions are alternately shifted in a direction intersecting the arrangement direction along the arrangement direction may be adopted.
The embodiments of the present invention have been described, but the embodiments are merely examples and are not intended to limit the scope of the present invention. The embodiments may be implemented in other various embodiments, and various omissions, substitutions, and changes may be made without departing from the spirit of the invention. The embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the invention described in the claims and equivalent ranges thereof.

Claims (5)

1. An illumination unit, comprising:
a plurality of light emitting elements mounted on the front surface of the substrate;
a cooling block having a first flow path extending in a longitudinal direction of the substrate and disposed on a back surface of the substrate;
a cooling pipe having a second flow path parallel to the first flow path and disposed on the rear surface side of the cooling block; and
and a third channel having one end of the first channel and one end of the second channel in communication.
2. The illumination unit of claim 1, comprising:
and a holding mechanism for holding the cooling block along the longitudinal direction of the substrate.
3. The illumination unit of claim 1 or 2, comprising:
a first joint member connected to the other end side of the first channel; and
and a second joint member connected to the other end side of the second channel.
4. The illumination unit of claim 1,
the cooling block is detachably disposed along a longitudinal direction of the substrate.
5. An apparatus for manufacturing a liquid crystal panel, comprising:
a plurality of ultraviolet irradiation devices for irradiating the processed panel containing photoreactive material with light
The ultraviolet irradiation apparatus is the irradiation unit according to any one of claims 1 to 4.
CN202021692780.8U 2019-09-24 2020-08-14 Irradiation unit and liquid crystal panel manufacturing apparatus Active CN212623449U (en)

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JP2019173213A JP7302409B2 (en) 2019-09-24 2019-09-24 Irradiation unit and liquid crystal panel manufacturing equipment
JP2019-173213 2019-09-24

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Publication Number Publication Date
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KR102521350B1 (en) * 2021-06-25 2023-04-14 주식회사 코렌스 Heat exchanger for inverter power module

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JP2009061702A (en) 2007-09-06 2009-03-26 Panasonic Electric Works Co Ltd Ultraviolet irradiation apparatus
CN102830548A (en) 2012-08-15 2012-12-19 深圳市华星光电技术有限公司 Device and the method for carrying out exposure processing for LCD (Liquid Crystal Display) panel
KR102297802B1 (en) * 2014-09-22 2021-09-03 도시바 라이텍쿠 가부시키가이샤 Light source device
JP6471586B2 (en) 2015-03-31 2019-02-20 東芝ライテック株式会社 Irradiation body and irradiation device
JP7009930B2 (en) 2017-11-02 2022-01-26 岩崎電気株式会社 Light source unit

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JP2021051156A (en) 2021-04-01
TWI829960B (en) 2024-01-21

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GR01 Patent grant