CN212617744U - Ultraviolet irradiation device - Google Patents

Abstract

The utility model provides an ultraviolet irradiation device for improving irradiation efficiency. The ultraviolet irradiation apparatus of an embodiment includes a plurality of substrates and a cooling block. In the substrate, a plurality of light emitting elements are arranged on a front surface. The cooling block is disposed on the back surface of the substrate and has a flow path for flowing a fluid therein. The plurality of substrates are respectively configured in the following manner: an angle theta 1 between an irradiated surface of the irradiated body and a width direction of the substrate intersecting with an arrangement direction of the plurality of light emitting elements is 60 DEG or less, and distances between the irradiated body and the plurality of light emitting elements are substantially equal.

Description

Ultraviolet irradiation device

Technical Field

The utility model relates to an ultraviolet irradiation device.

Background

Conventionally, there is known an ultraviolet irradiation device that irradiates ultraviolet light by lighting a plurality of light emitting elements. Ultraviolet irradiation apparatuses are used in various industrial fields such as production of liquid crystal panels and curing of inks (ink) and adhesives.

[ Prior art documents ]

[ patent document ]

[ patent document 1] Japanese patent application laid-open No. 2009-61702

SUMMERY OF THE UTILITY MODEL

[ problem to be solved by the utility model ]

In the ultraviolet irradiation apparatus as described above, further improvement in irradiation efficiency is desired.

The utility model aims to solve the problem that an ultraviolet irradiation device that can improve irradiation efficiency is provided.

[ means for solving problems ]

The ultraviolet irradiation apparatus of an embodiment includes a plurality of substrates and a cooling block. In the substrate, a plurality of light emitting elements are arranged on a front surface. The cooling block is disposed on the back surface of the substrate and has a flow path for flowing a fluid therein. The plurality of substrates are respectively configured in the following manner: an angle theta 1[ ° ] formed between an irradiated surface of an irradiated object and a width direction of a substrate intersecting an arrangement direction of the plurality of light emitting elements is 60[ ° ] or less, and distances between the irradiated object and the plurality of light emitting elements are substantially equal.

The ultraviolet irradiation apparatus according to another embodiment includes a plurality of substrates and a cooling block, and irradiates an irradiation object with ultraviolet rays. In the substrate, a plurality of light emitting elements are arranged on a front surface. The cooling block is disposed on the back surface of the substrate and has a flow path for flowing a fluid therein. The ultraviolet irradiation devices are respectively configured as follows: an angle theta 2[ ° ] formed by a perpendicular line extending from the irradiated surface of the irradiated object to the ultraviolet irradiation device side and a line extending from the irradiated surface of the irradiated object to the light emitting elements arranged on the outermost substrate is 60[ ° ] or less, and distances between the irradiated object and the plurality of light emitting elements are substantially equal.

[ effects of the utility model ]

According to the utility model discloses, can improve and shine efficiency.

Drawings

Fig. 1 is a front view showing an ultraviolet irradiation device according to a first embodiment.

Fig. 2 is a front view showing the ultraviolet irradiation unit.

Fig. 3 is a side view of the ultraviolet irradiation unit shown in fig. 2.

Fig. 4 is a diagram for explaining the arrangement of the light emitting elements.

FIG. 5 is a view showing the relationship between the set radius r [ mm ], the irradiation distance d [ mm ], the width W [ mm ], the angle θ 1, the angle θ 2 and the set angle θ p [ ° ].

Fig. 6 is a front view showing an ultraviolet irradiation device according to a second embodiment.

[ description of symbols ]

1: ultraviolet irradiation unit

1-1 to 1-6: irradiation unit

10. 10A: cooling block

10a, 11 a: front surface

10 b: end part

10d, 11 b: back side of the panel

11. 11A: substrate

12: light emitting element

13: light source unit

14-16, 14A: flow path

17a, 17Aa, 17Ab, 17 b: connecting member

18. 19: sealing member

30. 30A: optical member

31: holding member

60: irradiated body

60 a: illuminated surface

100. 100A: ultraviolet irradiation device

110: window material

A: spacer

B: size of

d: distance of irradiation

H: vertical line

r: radius of setting

W: width of

θ 1, θ 2: angle of rotation

θ p: and setting an angle.

Detailed Description

The ultraviolet irradiation apparatus 100 and the ultraviolet irradiation apparatus 100A according to the embodiments described below include a plurality of substrates 11 and 11A, a cooling block 10, and a cooling block 10A. The substrate 11 and the substrate 11A have a plurality of light-emitting elements 12 arranged on a front surface 11A. The cooling block 10 is disposed on the back surfaces 11b of the substrates 11 and 11A, and has a flow path 14 and a flow path 14A for flowing a fluid therein. The plurality of substrates 11, 11A are arranged as follows: an angle θ 1 formed by the irradiation surface 60a of the irradiation target 60 and the width direction of the substrate 11 and the substrate 11A intersecting the arrangement direction of the plurality of light emitting elements 12 is 60[ ° ] or less, and distances between the irradiation target 60 and the plurality of light emitting elements 12 are substantially equal.

The ultraviolet irradiation apparatus 100 and the ultraviolet irradiation apparatus 100A according to the embodiments described below include a plurality of substrates 11 and 11A, a cooling block 10, and a cooling block 10A, and irradiate the irradiation object 60 with ultraviolet rays. The substrate 11 and the substrate 11A have a plurality of light-emitting elements 12 arranged on a front surface 11A. The cooling block 10 is disposed on the back surfaces 11b of the substrates 11 and 11A, and has a flow path 14 and a flow path 14A for flowing a fluid therein. The ultraviolet irradiation device 100 and the ultraviolet irradiation device 100A are arranged as follows: an angle θ 2 formed by a perpendicular line H extending perpendicularly from the irradiated surface 60a of the irradiated object 60 toward the ultraviolet irradiation device 100 and a line extending from the irradiated surface 60a of the irradiated object 60 toward the light emitting elements 12 arranged on the outermost substrate 11 or substrate 11A is 60[ ° ] or less, and distances between the irradiated object 60 and the plurality of light emitting elements 12 are substantially equal.

The cooling block 10 and the cooling block 10A of the embodiments described below have an inflow channel and an exhaust channel that communicate with the cooling block 10 and the back surface 10d of the cooling block 10A on the opposite side from the front surface 10A.

In the embodiment described below, a dimension B [ mm ] from an end of the light emitting element 12 located at an end of the substrate 11 to the end 10B of the cooling block 10 is a/2 ≦ B ≦ 6 when a distance between adjacent light emitting elements 12 is a [ mm ].

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below do not limit the technology disclosed in the present invention.

[ first embodiment ]

Fig. 1 is a front view showing an ultraviolet irradiation device according to a first embodiment. The ultraviolet irradiation apparatus 100 shown in FIG. 1 includes a plurality of irradiation units 1-1 to 1-6. The irradiation units 1-1 to 1-6 are ultraviolet irradiation units each having a plurality of light emitting elements 12 that emit ultraviolet rays when turned on. By using the plurality of irradiation units 1-1 to 1-6 as described above, the amount of ultraviolet light irradiated to the irradiation object 60 can be increased.

For ease of understanding, fig. 1 shows a three-dimensional orthogonal coordinate system including a Z axis in which the irradiation direction (the direction of the arrow shown in fig. 1) is a positive direction. The orthogonal coordinate system is also shown in fig. 5 and 6 used in the following description.

The light emitting elements 12 of the irradiation units 1-1 to 1-6 correspond to an imaginary arc (shown by a two-dot chain line) centered on the surface 60a of the irradiation target 60. That is, the irradiation units 1-1 to 1-6 are arranged such that the distances between the light emitting element 12 and the surface 60a of the irradiation target 60 to be irradiated are substantially equal. This makes it possible to equalize the amount of ultraviolet light irradiated to the entire irradiation target 60. The "distance between the surface to be irradiated of the irradiation target and the plurality of light-emitting elements" described here is a distance between the surface to be irradiated of the irradiation target 60 and a surface (front surface) on the side on which the plurality of light-emitting elements 12, specifically, the plurality of light-emitting elements 12 of the substrate 11 on which the plurality of light-emitting elements 12 are mounted, with reference to a point on the surface to be irradiated 60a of the irradiation target 60, which is centered at a position where optical axes of the plurality of irradiation units 1-1 to 1-6, more specifically, a plurality of virtual lines provided from the centers of the light-emitting elements 12 mounted on the irradiation units 1-1 to 1-6 toward the irradiation target 60 intersect on the surface to be irradiated, when viewed in a cross section perpendicular to the direction in which the X axis extends. Further, "the irradiation target and the plurality of light emitting elements are arranged so that the distances therebetween are substantially equal" means that the distances between the irradiation target 60 and the plurality of light emitting elements 12 are substantially equal to each other, and is allowed to be within a range of ± 5[ mm ] based on the average value of the distances between the irradiation target 60 and the plurality of light emitting elements 12. The "perpendicular line extending perpendicularly from the irradiated surface of the irradiated object to the ultraviolet irradiation apparatus side" is a perpendicular line extending perpendicularly from the irradiated surface 60a of the irradiated object 60 to the ultraviolet irradiation apparatus 100 side at a position where a plurality of virtual lines provided from the optical axes of the plurality of irradiation units 1-1 to 1-6, more specifically, from the center of the light emitting element 12 mounted on the irradiation units 1-1 to 1-6 toward the irradiated object 60 intersect on the irradiated surface 60a, and the irradiated surface 60a is perpendicular to the irradiated surface 60 a. The "line extending to the light emitting element of the outermost irradiation unit" is a line extending to the optical axis of the irradiation unit 1-1 or the irradiation unit 1-6 located outermost among the plurality of irradiation units 1-1 to 1-6, more specifically, to the center of the light emitting element 12 mounted on the irradiation unit 1-1 or the irradiation unit 1-6.

Here, the irradiation units 1-1 to 1-6 constituting the ultraviolet irradiation device 100 will be further described with reference to fig. 2 and 3. Fig. 2 is a front view showing the ultraviolet irradiation unit. Fig. 3 is a side view of the ultraviolet irradiation unit shown in fig. 2.

The ultraviolet irradiation unit 1 shown in fig. 2 and 3 includes a light source 13 and a cooling block 10. The ultraviolet irradiation unit 1 can be used as the irradiation units 1-1 to 1-6 shown in fig. 1. In fig. 2 and 3, a part of the members shown in fig. 1 is omitted.

The light source unit 13 includes a substrate 11 and a plurality of light emitting elements 12. The substrate 11 is formed by providing a long base material made of, for example, ceramic with a printed wiring, not shown, formed of, for example, silver or the like in a desired pattern. A plurality of light emitting elements 12 are provided on the front surface 11a of the substrate 11 so as to be electrically connected to the printed wiring. The plurality of light emitting elements 12 are arranged in a line along the longitudinal direction (X-axis direction) of the substrate 11.

Although not shown, the substrate 11 is covered with a coating film in order to ensure insulation and prevent corrosion in regions other than the connection terminals for connecting the light-emitting elements 12 and the power supply terminals to which power is supplied from the power supply device. The coating film is formed of an inorganic material containing a glass material or the like as a main component, for example. Further, if necessary, the substrate 11 may be formed of white alumina having a relatively high reflectance so as to improve the reflectance for reflecting light emitted from the light emitting element 12. In addition, the substrate 11 may also be formed of aluminum nitride having relatively high thermal conductivity to ensure high thermal conductivity.

As the Light Emitting element 12, a Light Emitting Diode (LED) or a semiconductor Laser (Laser Diode) that emits ultraviolet rays is used. The light-emitting element 12 emits ultraviolet light having a dominant wavelength of about 300 to 400nm and a peak wavelength (peak) of 365nm, for example.

The term "ultraviolet light" as used in the present embodiment means light having a wavelength of 450nm or less, specifically, light having a wavelength of 365nm emitted from the light-emitting element 12, but other wavelengths are also permissible. The light emitting element 12 is not limited to an LED or LD that emits light having a wavelength of 450nm or less, and may be an LED or LD that emits light having a wavelength longer than the wavelength of 450nm, for example. That is, the light emission form is not limited as long as it is an LED or LD that emits light having a wavelength of 450nm or less.

The cooling block 10 is formed in a substantially rectangular parallelepiped shape and is disposed on the back surface 11b of the substrate 11. For the cooling block 10, for example, aluminum alloy, stainless steel, or the like is used.

The cooling block 10 has flow paths 14 to 16. The cooling block 10 functions as a so-called liquid cooling block by circulating a fluid through the flow paths 14 to 16, and can quickly dissipate heat transferred from the light emitting element 12 via the substrate 11. Further, the fluid is, for example, water. Further, as the fluid, for example, liquid such as liquid nitrogen or antifreeze, or dry air or gas such as nitrogen may be used.

The flow path 14 is a through hole penetrating the cooling block 10 in the X-axis direction of fig. 1. The flow path 14 is disposed on the rear surface 11b side of the substrate 11 so as to overlap the array of the light emitting elements 12 in a plan view. The flow paths 15 and 16 are formed such that one end opens at the back surface 10d of the cooling block 10 opposite to the front surface 10a and the other end communicates with the flow path 14. The flow path 15 is arranged closer to the cooling block 10 in the negative X-axis direction in fig. 1, and the flow path 16 is arranged closer to the cooling block 10 in the positive X-axis direction in fig. 1.

Further, sealing members 18 and 19 are inserted into both ends of the flow path 14, and seal leakage of fluid to both ends of the flow path 14. Thus, one of the flow paths 15 and 16 serves as an inflow flow path for allowing the fluid to flow into the flow path 14, and the other serves as a discharge flow path for discharging the fluid flowing through the flow path 14 to the outside of the cooling block 10, and the flow path 15, the flow path 14, and the flow path 16 form a series of flow paths that communicate in this order. By providing the flow paths 14 to 16 as described above, the plurality of ultraviolet irradiation units 1 can be easily arranged close to each other. Further, the flow paths 15 and 16 opened in the back surface 10d of the cooling block 10 may be provided with connecting members 17a and 17b for facilitating connection of the flow paths 15 and 16 to pipes not shown here. The form of providing the flow paths 14, 15, and 16 is, for example, such that the flow paths 14 are formed by cutting both ends of the flow path 14 of the cooling block 10 so as to penetrate the cooling block 10, and then sealed by the sealing members 18 and 19, but is not limited thereto. For example, the flow path 14, the flow path 15, and the flow path 16 may be formed by cutting a half body of a flow path block formed by a continuous and integral pipe, or the substrate 11 may be arranged in the pipe forming the flow path 14 even if the flow path 14, the flow path 15, and the flow path 16 are formed by a continuous and integral pipe.

Although not shown, the ultraviolet irradiation apparatus 100 may have a window member on the irradiation target 60 side. When the ultraviolet irradiation apparatus 100 irradiates the irradiation object 60 with ultraviolet light, the window material suppresses by-products such as impurity gases and contaminants emitted from the irradiation object 60 from adhering to the optical member 30 or the light emitting element 12 of the irradiation units 1-1 to 1-6. The window material is, for example, a material that transmits ultraviolet rays emitted from the light emitting elements 12 of the irradiation units 1-1 to 1-6. The window material is, for example, quartz glass. The window material is not limited to quartz glass, and may be any material as long as it transmits ultraviolet rays emitted from the light emitting element 12, such as hard glass or ultraviolet-transmitting resin.

Next, the arrangement of the light emitting elements 12 with respect to the cooling block 10 will be described with reference to fig. 4, which is a partially enlarged view of the ultraviolet irradiation unit 1 shown in fig. 3. Fig. 4 is a diagram for explaining the arrangement of the light emitting elements. A dimension B [ mm ] from an end of the light emitting element 12 located at an end of the substrate 11 to an end 10B of the cooling block 10 is A/2 ≦ B ≦ 6 when the interval between the adjacent light emitting elements 12 is A [ mm ]. By arranging the light emitting elements 12 as described above, for example, it is possible to minimize a decrease in illuminance between the ultraviolet irradiation units 1 when other ultraviolet irradiation units 1 are arranged beside the ultraviolet irradiation unit 1, and to suppress the uniformity of light amount in the longitudinal direction to a predetermined value or less, for example, 15 [% ] or less.

The explanation is further made by returning to the explanation of fig. 1. The irradiation units 1-1 to 1-6 are arranged so that an angle θ 1 formed by the irradiation object 60 and the width direction of the substrate 11 is 60[ ° ] or less, respectively. Here, the "angle formed by the irradiation object 60 and the width direction of the substrate 11" indicates how much the direction along the front surface 11a of the substrate 11 is inclined with respect to the irradiation surface 60a of the irradiation object 60. When the irradiation target object 60 and the plurality of light emitting elements 12 face each other so that the irradiation target surface 60a is parallel to the front surface 11a, the angle θ 1 is 0[ ° ]. The reason why it is not preferable that the irradiation target 60 is disposed so that the angle θ 1 formed between the irradiation target 60 and the width direction of the substrate 11 exceeds 60[ ° ] is as follows. That is, the light amount depends on the angle θ, and when the light amount of the ultraviolet rays irradiated to the irradiated surface 60a of the irradiated body 60 when the angle θ is 0[ ° ] is 1, the light amount at a certain angle θ is represented by cos θ according to lambert (Lambertian) cosine law. Thus, when the angle θ is 60 °, the amount of ultraviolet light irradiated to the irradiation surface 60a of the irradiation target 60 becomes cos60 ° -0.5, which is half the amount of light when the angle θ is 0 °,. Therefore, when the angle θ exceeds 60 °, the amount of light to be irradiated to the object 60 is less than half of the amount of light when the angle θ is 0 °, and therefore, even if a large number of irradiation units are provided, the amount of light to be irradiated to the object 60 is not increased, which is not preferable. As described above, the irradiation units 1-1 to 1-6 are preferably set such that the angle θ 1 formed by the irradiation object 60 and the width direction of the substrate 11 is 60 ° or less.

Further, an angle θ 2[ ° ] representing an angle formed by a perpendicular line H extending perpendicularly from the irradiated surface 60a of the irradiated object 60 toward the ultraviolet irradiation device 100 and a line extending from the irradiated surface 60a of the irradiated object 60 toward the light emitting element 12 of the irradiation unit 1-6 is preferably 60[ ° ] or less for the same reason as the angle θ 1[ ° ].

The amount of ultraviolet light irradiated to the irradiation object 60 can be increased by using the ultraviolet irradiation apparatus 100 in which a plurality of irradiation units 1-1 to 1-6 are arranged. Further, by using the ultraviolet irradiation apparatus 100 in which the angle θ 1 of the plurality of irradiation units 1-1 to 1-6 with respect to the irradiation object 60 is set to 60[ ° ] or less, the irradiation surface 60a of the irradiation object 60 can be efficiently irradiated with ultraviolet rays irradiated from the outermost irradiation unit 1-1 and irradiation unit 1-6. The number of the ultraviolet irradiation units 1 included in the ultraviolet irradiation device 100 is not limited to the number shown in the drawing, and may be 2 to 5 or 7 or more.

The irradiation units 1-1 to 1-6 may further include an optical member 30 held by the holding member 31. The optical member 30 is disposed on the front surface 11a (see fig. 2 and 3) side of the substrate 11 so as to be spaced apart from the plurality of light-emitting elements 12 included in the irradiation units 1-1 to 1-6. As the optical member 30, for example, an ultraviolet-transmitting material such as acrylic resin, silicone resin, or quartz glass is used. The optical member 30 is, for example, a biconvex cylindrical lens (cylindrical lens) having both a convex incident side and an emitting side, and condenses the ultraviolet rays emitted from the light emitting element 12 and emits the condensed ultraviolet rays toward the irradiation object 60. Further, the number of the optical members 30 may be plural. The shape of the optical member 30 may be a shape corresponding to the application of the emitted ultraviolet light, and may be, for example, a plano-convex lens. The optical member 30 is not limited to a cylindrical lens, and may be, for example, a fly eye lens (fly eye lens) formed corresponding to the optical axis of each of the plurality of light emitting elements 12 included in each of the irradiation units 1-1 to 1-6.

FIG. 5 is a graph showing the relationship between the set radius r [ mm ], the irradiation distance d [ mm ], the width W [ mm ], the angle θ 1[ ° ], the angle θ 2[ ° ], and the set angle θ p [ ° ]. In fig. 5, only the cooling block 10 and the light source section 13 having the substrate 11 and the light emitting element 12 are shown as the irradiation units 1-1 to 1-6, and other structures are omitted. Here, the setting radius r [ mm ] is a distance from a point at which the optical axes of the plurality of irradiation units 1-1 to 1-6, more specifically, a plurality of virtual lines provided from the center of the light emitting element 12 mounted on the irradiation units 1-1 to 1-6 toward the irradiation object 60 intersect on the irradiation surface 60a, to a surface (front surface) on the side where the irradiation surface 60a of the irradiation object 60 and the light emitting element 12 are mounted, as a center, and r in the present embodiment is 100[ mm ]. The irradiation distance d [ mm ] is a distance between the window member 110 and the surface 60a to be irradiated of the object 60, and the window member 110 is provided at a position facing the surface 60a to be irradiated of the object 60 on the side where the light emitting element 12 of the ultraviolet irradiation device 100 is provided, and in the present embodiment, d is 30[ mm ]. The width W [ mm ] is a width of the cooling block 10 included in each of the irradiation units 1-1 to 1-6 in a cross section perpendicular to the X-axis direction in fig. 1, and in the present embodiment, W is 40[ mm ]. The width W [ mm ] is substantially equal to the width of the substrate 11 of the light source unit 13 in a cross section perpendicular to the X-axis direction in FIG. 1. The set angle θ p [ ° ] is an angle formed by adjacent irradiation units among the irradiation units 1-1 to 1-6, and in the present embodiment, θ p is 24[ ° ]. An angle formed by a perpendicular line H extending perpendicularly from the irradiated surface 60a of the irradiated object 60 toward the ultraviolet irradiation device 100 and a line extending from the irradiated surface 60a of the irradiated object 60 toward the light emitting element 12 of the irradiation unit 1-6 is θ 2[ ° ].

As described above, when the plurality of ultraviolet irradiation units 1 are arranged under the conditions that the radius r is 100[ mm ], the irradiation distance d is 30[ mm ] and the width W is 40[ mm ], six irradiation units 1-1 to 1-6 can be arranged at an angle θ 1 of 60 ° or less. When a plurality of ultraviolet irradiation units 1 are disposed under the conditions of the radius r of 100 mm, the irradiation distance d of 30 mm, and the width W of 40 mm, six irradiation units 1-1 to 1-6 can be disposed under the angle θ 2 of 60 °. With this configuration, the irradiation distance d can be ensured to be 30[ mm ]. By setting the irradiation distance d to 30[ mm ], even if the irradiation object 60 being transported and moved on the surface of the ultraviolet irradiation device 100 on the irradiation object 60 side is deformed by transportation and the window member 110 and the irradiation object 60 are brought close to each other, the adhesion of ink or the like to be irradiated with ultraviolet light applied to the irradiation object 60 to the window member 110 can be suppressed. Further, by setting the irradiation distance d to 30[ mm ], the ultraviolet irradiation device 100 can irradiate the irradiation object 60 with ultraviolet rays even when the irradiation object 60 is a thick sheet (sheet) or a three-dimensional object. Further, by setting the irradiation distance d to 30[ mm ], even when the ultraviolet irradiation device 100 cannot be disposed close to the irradiation target 60, that is, even when a conveyance mechanism or the like is provided in the vicinity of the irradiation target surface 60a of the irradiation target 60, the ultraviolet irradiation device 100 can be installed at a remote place to irradiate the irradiation target 60 with ultraviolet rays.

[ second embodiment ]

Fig. 6 is a front view showing an ultraviolet irradiation device according to a second embodiment. The ultraviolet irradiation apparatus 100A shown in fig. 6 has a structure in which the irradiation units 1-1 to 1-6 shown in fig. 1 are integrated.

That is, the ultraviolet irradiation apparatus 100A includes a cooling block 10A corresponding to the structure in which the cooling blocks 10 shown in fig. 1 are integrated on the back surface side of the substrate 11A on which the plurality of light emitting elements 12 are mounted. The cooling block 10A includes a plurality of flow paths 14A corresponding to positions where the plurality of light emitting elements 12 are arranged. The flow path 14A has an inflow flow path and an exhaust flow path, not shown, which extend from both ends in the longitudinal direction to the back side of the cooling block 10A on the opposite side to the light-emitting element 12 and communicate with the outside via a connecting member 17Aa and a connecting member 17 Ab. The flow path 14A, the connecting member 17Aa, and the connecting member 17Ab correspond to the flow path 14, the connecting member 17a, and the connecting member 17b of the first embodiment, respectively. An optical member 30A is provided on the front surface side of the substrate 11A, and the optical member 30A has a structure in which a plurality of optical members 30 shown in fig. 1 are integrated.

By providing the ultraviolet irradiation device 100A in which the irradiation units 1-1 to 1-6 are integrated as described above, the mounting accuracy of the light emitting element 12 is improved as compared with the case where a plurality of irradiation units 1-1 to 1-6 are disposed separately, the amount of ultraviolet light irradiated to the entire surface 60A of the object 60 to be irradiated can be equalized, and variations in illuminance value or illuminance distribution can be suppressed.

In the ultraviolet irradiation apparatus 100A, the irradiation units 1-1 to 1-6 are integrated, and therefore, the angle θ 2 defined by using the ultraviolet irradiation apparatus 100 having the plurality of irradiation units 1-1 to 1-6 can be generalized as follows. That is, the angle θ 2[ ° ] is an angle formed by a perpendicular line H extending perpendicularly from the irradiated surface 60A of the irradiated object 60 to the ultraviolet irradiation device 100A side and a line extending from the irradiated surface 60A of the irradiated object 60 to the light emitting elements 12 arranged on the outermost substrate 11A.

As described above, the ultraviolet irradiation apparatus 100 and the ultraviolet irradiation apparatus 100A according to the embodiment include the plurality of substrates 11 and 11A, the cooling block 10, and the cooling block 10A. The substrate 11 and the substrate 11A have a plurality of light-emitting elements 12 arranged on a front surface 11A. The cooling block 10 is disposed on the back surfaces 11b of the substrates 11 and 11A, and has a flow path 14 and a flow path 14A for flowing a fluid therein. The plurality of substrates 11, 11A are arranged as follows: an angle θ 1 formed by the irradiation surface 60a of the irradiation target 60 and the width direction of the substrate 11 and the substrate 11A intersecting the arrangement direction of the plurality of light emitting elements 12 is 60[ ° ] or less, and distances between the irradiation target 60 and the plurality of light emitting elements 12 are substantially equal. This improves the irradiation efficiency.

The ultraviolet irradiation apparatus 100 and the ultraviolet irradiation apparatus 100A according to the embodiment include a plurality of substrates 11 and 11A, a cooling block 10, and a cooling block 10A, and irradiate the irradiation object 60 with ultraviolet rays. In the substrate 11 and the substrate 11A, a plurality of light emitting elements 12 are arranged on the front surface 11A. The cooling block 10 is disposed on the back surfaces 11b of the substrates 11 and 11A, and has a flow path 14 and a flow path 14A for flowing a fluid therein. The ultraviolet irradiation device 100 and the ultraviolet irradiation device 100A are arranged as follows: an angle θ 2 formed by a perpendicular line H extending perpendicularly from the irradiated surface 60a of the irradiated object 60 toward the ultraviolet irradiation device 100 and a line extending from the irradiated surface 60a of the irradiated object 60 toward the light emitting elements 12 arranged on the outermost substrate 11 or substrate 11A is 60[ ° ] or less, and distances between the irradiated object 60 and the plurality of light emitting elements 12 are substantially equal. This improves the irradiation efficiency.

The cooling block 10 and the cooling block 10A of the embodiment have an inflow channel and an exhaust channel that communicate with the cooling block 10 and the back surface 10d of the cooling block 10A on the opposite side from the front surface 10A. This facilitates the arrangement of the plurality of ultraviolet irradiation units 1 in close proximity.

In the embodiment, a dimension B [ mm ] from an end of the light emitting element 12 located at an end of the substrate 11 to the end 10B of the cooling block 10 is a/2 ≦ B ≦ 6 when a distance between adjacent light emitting elements 12 is a [ mm ]. This can minimize the decrease in illuminance between the ultraviolet irradiation units when a plurality of ultraviolet irradiation units are arranged in line. This can minimize the decrease in illuminance between the ultraviolet irradiation units 1 when a plurality of ultraviolet irradiation units 1 are arranged in line.

In the above embodiments, the case where the light emitting elements 12 are arranged in a line along the longitudinal direction of the substrate 11 has been described, but the present invention is not limited to this, and for example, a so-called zigzag arrangement in which positions are alternately shifted in a direction intersecting the arrangement direction along the arrangement direction may be adopted.

In the ultraviolet irradiation apparatus 100A of the second embodiment, the substrates 11A are arranged individually so as to correspond to the rows of the plurality of light emitting elements 12, but the present invention is not limited thereto, and one or a plurality of substrates 11A corresponding to a plurality of rows of the plurality of light emitting elements 12 may be arranged in the cooling block 10A. In this case, the width direction of the substrate 11A as a reference of the angle θ 1 may be defined as a direction along the front surface of the substrate 11A intersecting the arrangement direction of the light emitting elements 12 at the positions where the plurality of light emitting elements 12 are mounted.

The embodiments of the present invention have been described, but these embodiments are merely examples and are not intended to limit the scope of the present invention. These embodiments may be implemented in other various forms, and various omissions, substitutions, and changes may be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.

Claims (6)

1. An ultraviolet irradiation apparatus, comprising:

a plurality of substrates on which a plurality of light emitting elements are arranged on a front surface; and

a cooling block disposed on the back surface of the substrate, having a flow path for flowing a fluid therein, and

the plurality of substrates are respectively configured in the following manner: an angle θ 1 between an irradiated surface of an irradiated object and a width direction of the substrate intersecting an arrangement direction of the plurality of light-emitting elements is 60 ° or less, and distances between the irradiated object and the plurality of light-emitting elements are substantially equal.

2. The ultraviolet irradiation apparatus according to claim 1,

the cooling block has an inflow channel and a discharge channel, and the inflow channel and the discharge channel communicate with a back surface of the cooling block opposite to the front surface.

3. The ultraviolet irradiation apparatus according to claim 1,

a dimension B mm in an arrangement direction of the plurality of light emitting elements from an end of the light emitting element located at the end of the substrate to an end of the cooling block is a/2 ≦ B ≦ 6 when a distance between adjacent light emitting elements is a mm.

4. An ultraviolet irradiation apparatus, comprising:

a plurality of substrates on which a plurality of light emitting elements are arranged on a front surface; and

a cooling block disposed on the back surface of the substrate, having a flow path for flowing a fluid therein, and

irradiating an irradiated object with ultraviolet rays, the ultraviolet irradiation apparatus,

are respectively configured in the following ways: an angle θ 2 between a perpendicular line extending perpendicularly from an irradiated surface of the irradiated object to the ultraviolet irradiation device side and a line extending from the irradiated surface of the irradiated object to the light emitting elements of the outermost substrate is 60 ° or less, and distances between the irradiated object and the plurality of light emitting elements are substantially equal to each other.

5. The ultraviolet irradiation apparatus according to claim 4,

the cooling block has an inflow channel and a discharge channel, and the inflow channel and the discharge channel communicate with a back surface of the cooling block opposite to the front surface.

6. The ultraviolet irradiation apparatus according to claim 4,

a dimension B mm in an arrangement direction of the plurality of light emitting elements from an end of the light emitting element located at the end of the substrate to an end of the cooling block is a/2 ≦ B ≦ 6 when a distance between adjacent light emitting elements is a mm.

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