CN212162048U

CN212162048U - Radial magnetron waveguide excitation cavity

Info

Publication number: CN212162048U
Application number: CN202021246168.8U
Authority: CN
Inventors: 袁博
Original assignee: Sichuan Sanzero Semiconductor Co ltd
Current assignee: Sichuan Sanzero Semiconductor Co ltd
Priority date: 2020-06-30
Filing date: 2020-06-30
Publication date: 2020-12-15
Anticipated expiration: 2030-06-30

Abstract

The utility model relates to a waveguide excitation chamber technical field specifically is radial magnetron waveguide excitation chamber for solve among the prior art magnetron antenna and rectangular waveguide's output port quadrature, thereby lead to the whole high bulky of microwave source, and the problem of space utilization step-down. The utility model discloses an excitation cavity and bottom apron of interconnect under from the top down, the excitation cavity is including the shaping rectangle waveguide section as an organic whole, turn waveguide section and matching waveguide section in proper order, it has the input port that can let the magnetron antenna stretch into in the rectangle waveguide section to open on the apron of bottom, the central line of input port is parallel to each other with the central line of matching waveguide section. The utility model discloses a turn waveguide section changes the direction of waveguide, and the long direction that finally makes the magnetron antenna is parallel to each other with the output port of matching waveguide section, and the mounting height of magnetron makes the microwave source volume littleer in can effectual compression microwave system like this, and space utilization is higher, and the microwave loss is lower.

Description

Radial magnetron waveguide excitation cavity

Technical Field

The utility model relates to a waveguide excitation chamber technical field, more specifically relate to radial magnetron waveguide excitation chamber.

Background

Drying required by industries such as food, medicine, wood, chemical products, tea, pharmacy, ceramics, paper and the like can be completed through industrial microwave equipment, and the industrial microwave equipment has the effects of sterilization, reaction, sintering, extraction, heating and the like. The application structure of the industrial microwave equipment comprises the following components: tunnel type, kiln type and cabinet type.

Microwave plasma technology has been used in semiconductor manufacturing processes for etching, sputtering, vapor deposition, oxidation of silicon wafers, and also for surface treatment of metals, alloys, and non-metals. Among them, the microwave plasma technology especially needs to use a high-power single microwave source to generate microwave plasma with high power density. It can be seen that the generation of microwaves is a necessary prerequisite for the use of microwave plasma technology.

The prior art device for generating microwaves is the Toshiba E33276 kW magnetron, which is used when the microwaves generated by the magnetron are coupled into a rectangular waveguide, and is referred to as an excitation cavity. In the prior art, an excitation cavity is a rectangular waveguide with an open top surface and a closed end, and a magnetron antenna is installed in a hole on the top surface and is installed orthogonally to the rectangular waveguide.

However, the magnetron antenna in the prior art is orthogonal to the output port of the rectangular waveguide, which causes the overall height of the microwave source to be high, the overall volume to be large, and the space utilization to be low. Therefore, a waveguide excitation cavity with lower overall height, smaller volume and higher space utilization rate of the microwave source is urgently needed.

SUMMERY OF THE UTILITY MODEL

Based on above problem, the utility model aims to: the radial magnetron waveguide excitation cavity is provided for solving the problems that the whole height of a microwave source is high, the volume is large and the space utilization rate is low due to the fact that a magnetron antenna is orthogonal to an output port of a rectangular waveguide in the prior art.

The utility model discloses a realize above-mentioned purpose and specifically adopt following technical scheme:

the radial magnetron waveguide excitation cavity comprises an excitation cavity body and a bottom cover plate which are connected with each other from top to bottom, wherein the excitation cavity body comprises a rectangular waveguide section, a turning waveguide section and a matched waveguide section which are sequentially formed into a whole, an input port capable of enabling a magnetron antenna to extend into the rectangular waveguide section is formed in the bottom cover plate, and the center line of the input port is parallel to the center line of the matched waveguide section.

As a preferable mode, the turning waveguide section includes a vertical surface and a horizontal surface which are integrally formed with each other, the vertical surface and the horizontal surface form an angle of 90 °, the vertical surface is perpendicular to a center line of the rectangular waveguide section, and the horizontal surface is perpendicular to a center line of the matched waveguide section.

In a preferred mode, the bottom surfaces of the rectangular waveguide section and the matching waveguide section are both provided with grooves.

Preferably, the side surface of the rectangular waveguide section is further provided with a plurality of heat dissipation exhaust holes.

The utility model has the advantages as follows:

(1) the utility model discloses a turn waveguide section changes the direction of waveguide, and the long direction that finally makes the magnetron antenna is parallel to each other with the output port of matching waveguide section, and the mounting height of magnetron makes the microwave source volume littleer in can effectual compression microwave system like this, and space utilization is higher, and the microwave loss is lower.

(2) The utility model discloses well rectangular waveguide section all opens flutedly with the bottom surface of matching waveguide section, can reduce the area of contact between excitation cavity and the bottom apron like this, and the packing force between cavity and the bottom apron is encouraged in the increase, guarantees good electric contact, makes the internal surface of encouraging cavity and bottom apron keep in succession.

(3) The utility model discloses well excitation cavity and bottom apron all can be by simple CNC milling process preparation to use bolted connection, removed ordinary required vacuum brazing technology in excitation chamber from, thereby reduced the requirement of encouraging cavity and bottom apron manufacturing process.

Drawings

FIG. 1 is a schematic view of the three-dimensional structure of the present invention;

FIG. 2 is a schematic diagram of the right side view structure of the present invention;

FIG. 3 is a schematic cross-sectional view taken along line A-A of FIG. 2 according to the present invention;

FIG. 4 is a schematic diagram of the sectional structure of the magnetron connected to the excitation chamber;

FIG. 5 is a schematic view of the front cross-sectional structure of the turn waveguide section of the present invention;

reference numerals: 1 bottom cover plate, 11 input ports, 2 excitation cavities, 21 rectangular waveguide sections, 22 turning waveguide sections, 221 vertical faces, 222 horizontal faces, 23 matching waveguide sections, 3 heat dissipation exhaust holes, 4 grooves and 5 magnetron antennas.

Detailed Description

For a better understanding of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and the following embodiments.

Example (b):

as shown in fig. 1-5, the radial magnetron waveguide excitation cavity includes an excitation cavity 2 and a bottom cover plate 1 connected with each other from top to bottom, the excitation cavity 2 includes a rectangular waveguide section 21, a turning waveguide section 22 and a matching waveguide section 23 formed as a whole in sequence, the bottom cover plate 1 is provided with an input port 11 allowing the magnetron antenna 5 to extend into the rectangular waveguide section 21, and a center line of the input port 11 is parallel to a center line of the matching waveguide section 23.

Wherein the turning waveguide section 22 comprises a vertical surface 221 and a horizontal surface 222 which are integrally formed with each other, the vertical surface 221 is at 90 ° to the horizontal surface 222, the vertical surface 221 is perpendicular to the centerline of the rectangular waveguide section 21, and the horizontal surface 222 is perpendicular to the centerline of the matched waveguide section 23.

The working principle is as follows: the magnetron is installed, the magnetron antenna 5 extends into the rectangular waveguide section 21 through the input port 11, the excitation cavity 2 uses a rectangular waveguide section 21 close to the BJ26 standard as a microwave coupling section, then the turning waveguide section 22 is used for twisting the direction of a microwave transmission line by ninety degrees, a matching waveguide section 23 is added, and microwaves are output from the matching waveguide section 23, so that a small-size waveguide can be converted into a large-size waveguide of the BJ22 standard, and the direction of the waveguide is changed through the turning waveguide section 22, so that the long direction of the magnetron antenna 5 is parallel to the output port of the matching waveguide section 23, and therefore the installation height of the magnetron in a microwave system can be effectively compressed, the microwave source is smaller in volume, the space utilization rate is higher, and the microwave loss is lower.

Preferably, the bottom surfaces of the rectangular waveguide section 21 and the matching waveguide section 23 are both provided with grooves 4, so that the contact area between the excitation cavity 2 and the bottom cover plate 1 can be reduced, the pressing force between the excitation cavity 2 and the bottom cover plate 1 can be increased, good electrical contact can be ensured, and the inner surfaces of the excitation cavity 2 and the bottom cover plate 1 can be kept continuous.

In order to better radiate the magnetron antenna 5, a plurality of radiating air exhaust holes 3 can be further formed in the side surface of the rectangular waveguide section 21, and the radiating air exhaust holes 3 can radiate the magnetron antenna 5 more uniformly and have better radiating effect.

The embodiment of the present invention is the above. The specific parameters in the above embodiments and examples are only for the purpose of clearly showing the verification process of the present invention, and are not used to limit the protection scope of the present invention, which is still subject to the claims, and all the equivalent structural changes made by using the contents of the specification and drawings of the present invention should be included in the protection scope of the present invention.

Claims

1. A radial magnetron waveguide excitation cavity characterized by: including from top to bottom interconnect's excitation cavity (2) and bottom apron (1), excitation cavity (2) are including forming rectangular waveguide section (21), turn waveguide section (22) and matching waveguide section (23) as an organic whole in proper order, it has input port (11) that can let magnetron antenna (5) stretch into rectangular waveguide section (21) to open on bottom apron (1), the central line of input port (11) and the central line of matching waveguide section (23) are parallel to each other.

2. The radial magnetron waveguide excitation cavity of claim 1, further comprising: the turning waveguide section (22) comprises a vertical surface (221) and a horizontal surface (222) which are integrally formed, the vertical surface (221) and the horizontal surface (222) form an angle of 90 degrees, the vertical surface (221) is perpendicular to the central line of the rectangular waveguide section (21), and the horizontal surface (222) is perpendicular to the central line of the matching waveguide section (23).

3. The radial magnetron waveguide excitation cavity of claim 1, further comprising: the bottom surfaces of the rectangular waveguide section (21) and the matched waveguide section (23) are both provided with grooves (4).

4. The radial magnetron waveguide excitation cavity of claim 1, further comprising: the side surface of the rectangular waveguide section (21) is also provided with a plurality of heat dissipation exhaust holes (3).