CN212018248U

CN212018248U - Liquid gasifying device

Info

Publication number: CN212018248U
Application number: CN202020068736.3U
Authority: CN
Inventors: 林彦璋; 邵明轩
Original assignee: Changxin Memory Technologies Inc
Current assignee: Changxin Memory Technologies Inc
Priority date: 2020-01-10
Filing date: 2020-01-10
Publication date: 2020-11-27
Anticipated expiration: 2030-01-10

Abstract

The utility model relates to an industrial production field discloses a liquid gasification equipment, include: a gasification chamber having an outer shell and a gasification space; the shell is provided with an input end and a first output end, and the input end and the first output end are communicated with the gasification space; a conduit connected to the input end and having one end extending into the gasification space, the one end being located below the first output end, and the one end having an opening; a gas nozzle disposed on the housing, the gas nozzle facing the gasification space and distributed around the one end; the opening is arranged to supply liquid into the range of action of the gas nozzle. Compared with the prior art, the liquid gasification device and the method provided by the embodiment of the utility model have the advantage of improving the gasification efficiency.

Description

Liquid gasifying device

Technical Field

The utility model relates to an industrial production field, in particular to liquid gasification equipment.

Background

In the industrial production process, many raw materials which are liquid at room temperature need to be heated and gasified, and then converted into gaseous raw materials to be used in the next industrial production, for example, in the semiconductor process, ZAC (tris-dimethylamino-pentacyclo-dienyl-zirconium) is usually used as a precursor in the atomic layer deposition process, and is liquid at room temperature, and when applied to the atomic layer deposition technology, it needs to be converted into gaseous raw materials to be applied to the semiconductor process. In the prior art, ZAC is usually directly heated and gasified, as shown in fig. 1, a schematic structural diagram of a heating and gasifying device in the prior art is shown, 101 is a liquid inlet, 102 is a gas outlet, and 103 is a gas blowing port, after liquid is heated and gasified, the liquid is blown to the gas outlet 102 by gas flow flowing in the gas blowing port 103 and discharged, in order to increase the heating surface area, a built-in filler 401 is usually required to be arranged, and the contact area between the heating device and the liquid is increased through the surface area of the built-in filler 401, so that the heating surface area can be increased.

However, the inventor of the present invention found that the arrangement of the filler 401 can increase the heating surface area, but can block the gas channel, reduce the usable space, reduce the flow rate that the gas can pass through, even completely block the gas channel, and cause the gas channel to be unable to circulate, resulting in lower gasification efficiency.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the utility model is to provide a liquid gasification equipment for gasification efficiency promotes.

In order to solve the above technical problem, an embodiment of the present invention provides a liquid vaporizer, including: a gasification chamber having an outer shell and a gasification space; the shell is provided with an input end and a first output end, and the input end and the first output end are communicated with the gasification space; a conduit connected to the input end and having one end extending into the gasification space, the one end being located below the first output end, and the one end having an opening; a gas nozzle disposed on the housing, the gas nozzle facing the gasification space and distributed around the one end; the opening is arranged to supply fluid into the range of action of the gas nozzle.

Compared with the prior art, one end of the guide pipe extends to the gasification space, an opening is arranged at one end of the guide pipe, liquid is supplied to the action range of the gas nozzle through the opening, the liquid is smashed through the airflow jetted from the gas nozzle, and the liquid is granulated to form granular small liquid drops; in addition, additional fillers are not required to be arranged, so that the channel is not blocked, and the gasification efficiency is effectively improved.

In addition, the housing includes a side wall, a top cover, and a bottom cover surrounding the gasification space, and the gas nozzle is disposed on the side wall.

In addition, the top cover is conical, and the vertex of the top cover is higher than the side wall. The top cover is conical, and the vertex is higher than the side wall, so that the liquid attached to the top cover can flow down to the gas nozzle along the top cover for secondary granulation, and the gasification efficiency is further improved.

In addition, the bottom cover is conical, and the vertex of the bottom cover is lower than the side wall. The bottom cover is conical, and the top point of the bottom cover is lower than the side wall, so that the impurities which cannot be gasified can be conveniently concentrated and recovered.

In addition, the liquid crystal display further comprises a second output end which is arranged at the top point of the bottom cover. The second output end is arranged at the vertex of the conical bottom cover, so that impurities and the like which cannot be gasified can be conveniently discharged.

In addition, the atomizing nozzle is arranged at the opening. The opening is provided with the atomizing nozzle, liquid is atomized, and the gasification efficiency can be further improved.

In addition, the conduit includes a liquid conduit and a gas conduit disposed around the liquid conduit.

In addition, the opening is a plurality of. Set up a plurality of openings, can effectual promotion liquid's exhaust velocity, and then promote the gasification speed of liquid.

In addition, the gas nozzle is disposed toward the top cover. Gas nozzle sets up towards the top cap, and the air current flow direction that erupts also faces the top cap, and graininess liquid drop can follow the direction motion of air current flow direction orientation top cap, and it is long when the whereabouts of promotion liquid drop promotes the gasification efficiency of liquid.

In addition, the gasification furnace also comprises a temperature control heater for heating the gasification chamber.

Drawings

FIG. 1 is a schematic view of a prior art heating and vaporizing apparatus;

FIG. 2 is a schematic structural view of a liquid vaporizer according to a first embodiment of the present invention;

FIG. 3 is a schematic structural view of a liquid vaporizer according to a second embodiment of the present invention;

fig. 4 is a schematic structural view of a liquid vaporizer according to a third embodiment of the present invention;

fig. 5 is a schematic structural view of an atomizing nozzle in a liquid vaporizer according to a third embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the following will explain in detail each embodiment of the present invention with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in various embodiments of the invention, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.

The first embodiment of the present invention relates to a liquid vaporizer. The specific structure is shown in fig. 2, and comprises: a gasification chamber 201, the gasification chamber 201 comprising a housing 2011 and a gasification space 2012; an input end 2013 and a first output end 2014 are arranged on the shell 2011, and the input end 2013 and the first output end 2014 are communicated with the gasification space 2012; a conduit 202 connected to the input end 2013, the conduit 202 having an end extending into the gasification space 2012, the end of the conduit 202 extending into the gasification space 2012 below the first output end 2014 and having an opening 2021; a gas nozzle 203 disposed on the housing 2011, the gas nozzle 203 being distributed toward the gas space 2012 and around an end of the conduit 202 extending into the gasification space 2012; the opening 2021 is used to supply liquid into the active region of the gas nozzle 203.

Compared with the prior art, the utility model discloses in the liquid gasification equipment that the first embodiment provided, supply liquid to gas nozzle 203's application scope through opening 2021, liquid moves to gas nozzle 203's application scope after, is smashed by the air current that gas nozzle 203 erupted, and the graininess is formed in graininess droplet suspension in gasification space 2012, through the heating of vaporizer 201 to with the suspension liquid droplet gasification of graininess. After the liquid is atomized to form the particle suspension liquid drop, the heating surface area is obviously increased, and the heating and gasifying efficiency is also increased. In addition, additional fillers are not required to be arranged, and the channel cannot be blocked, so that the gasification efficiency is effectively improved.

Specifically, in the present embodiment, the housing 2011 includes a side wall 2011a, a top cap 2011b, and a bottom cap 2011c that surround the gasification space 2012, and the gas nozzle 203 is provided on the side wall 2011 a. It is to be understood that the provision of the gas nozzle 203 on the side wall 2011a is merely a specific illustration of one embodiment. In other embodiments of the present invention, the gas nozzle 203 may be disposed on the top cap 2011b and/or 2011c, and may be flexibly disposed according to actual needs.

In the present embodiment, the gas nozzle 203 is provided toward the top cap 2011 b. Gas nozzle 203 sprays the air current towards top cap 2011b, can blow the top of suspended liquid drop to vaporizing chamber 201, and the whereabouts of promotion liquid drop is long, and the heating of promotion liquid is long, promotes the gasification efficiency of liquid.

Further, in the present embodiment, the top cap 2011b has a conical shape, and the apex of the conical top cap 2011b is higher than the side wall 2011 a. The conical top cap 2011b is positioned such that the apex is higher than the sidewall 2011a, allowing liquid attached to the top cap 2011b to flow down the top cap 2011b onto the sidewall 2011 a. Because the gas nozzle 203 is arranged on the side wall 2011a, the liquid flowing downwards can be granulated again through the gas flow jetted by the gas nozzle 203, so that the heating area of the liquid drops is further increased, and the heating atomization efficiency is improved.

In the present embodiment, the number of the openings 2021 may be plural. A plurality of openings 2021 are provided in the portion of the conduit 202 that extends into the gasification space 2012. The plurality of openings 2021 are provided, so that the discharge speed of the liquid can be effectively increased, and the vaporization speed of the liquid can be increased.

Further, a temperature control heater 204 for heating the vaporizing chamber 201 is also included.

It is understood that the gas component ejected from the gas nozzle 203 is a gas that does not react with the liquid to be atomized, such as nitrogen, an inert gas, or the like.

The second embodiment of the present invention relates to a liquid vaporizer. The second embodiment of the present invention is substantially the same as the first embodiment, and includes: a gasification chamber 201, a conduit 202, and a gas nozzle 203. The difference is that in this embodiment, the apparatus further includes a second output terminal 2015 provided in the housing 2011 and configured to output impurities. The specific structure is shown in fig. 3.

Compared with the prior art, the utility model discloses the liquid gasification equipment that the second embodiment provided sets up second output 2015 on shell 2011 when keeping the whole technological effect of first embodiment, and the material that is not gasified can be exported from second output 2015.

In the present embodiment, the bottom cover 2011c has a conical shape, the vertex of the conical bottom cover 2011c is lower than the side wall 2011a, and the second output terminal 2015 is disposed at the vertex of the conical bottom cover 2011 c. The apex of the conical bottom cap 2011c is disposed lower than the side wall 2011a, so that impurities and the like that cannot be gasified can flow to the apex along the bottom cap 2011c and be discharged along the second output terminal 2015, thereby facilitating collection and discharge of non-gasified substances.

The third embodiment of the present invention relates to a liquid vaporizer. The third embodiment of the present invention is substantially the same as the first embodiment, and includes: a gasification chamber 201, a conduit 202, and a gas nozzle 203. Except that, in the present embodiment, an atomizing nozzle 205 provided at the opening 2021 is further included. The specific structure is shown in fig. 4.

Compared with the prior art, the utility model discloses the liquid gasification equipment that the third embodiment provided is when keeping the whole technological effects of first embodiment, through setting up atomizing nozzle 205 at opening 2021 play, atomizes liquid, promotion gasification efficiency that can be further.

Specifically, in the present embodiment, the atomizing nozzle 205 is a gas atomizing nozzle, and the conduit 202 includes a liquid conduit 2022 and a gas conduit 2023 disposed around the liquid conduit 2022. As shown in fig. 5, the atomizing nozzle 205 includes a liquid passage 2051 for connection with the liquid conduit 2022 and a gas passage 2052 for communication with the gas conduit 2023, an outlet of the gas passage 2052 extending toward a direction close to the liquid passage 2051. The liquid enters the liquid channel 2051, is accelerated and then is sprayed out of the liquid channel 2051, and is in a cylindrical jet flow shape; the gas enters the gas channel 2052 and is sprayed out from the opening of the gas channel 2052; because the outlet of the gas channel 2052 extends towards the direction close to the liquid channel 2051, the liquid jet and the high-speed airflow impact at the outlet of the nozzle, the low-speed liquid jet is torn by the high-speed airflow and gradually broken, and finally liquid mist consisting of fine liquid drops is generated. It is to be understood that the above description is only an example of one specific configuration of the gas atomizing nozzle and is not intended to be limiting. In addition, the atomizing nozzle 205 is a gas atomizing nozzle, which is also a specific application example in this embodiment, in other embodiments of the present invention, the atomizing nozzle 205 may also be an atomizing nozzle with other structures such as a mechanical atomizing nozzle, an ultrasonic atomizing nozzle, etc., as long as its function is to atomize liquid, which can be used in this application, and it is not listed here one by one, and it can be flexibly set according to actual needs.

It is to be understood that, in the present embodiment, the gas for atomizing the liquid in the gas passage 2052 is a high-speed gas flow whose composition is a gas that does not react with the liquid to be atomized, such as nitrogen, an inert gas, or the like.

Claims

1. A liquid vaporizing apparatus, comprising:

a gasification chamber having an outer shell and a gasification space;

the shell is provided with an input end and a first output end, and the input end and the first output end are communicated with the gasification space;

a conduit connected to the input end and having one end extending into the gasification space, the one end being located below the first output end, and the one end having an opening;

a gas nozzle disposed on the housing, the gas nozzle facing the gasification space and distributed around the one end;

the opening is arranged to supply liquid into the range of action of the gas nozzle.

2. The liquid vaporization device of claim 1, wherein the housing includes a side wall, a top cover, and a bottom cover surrounding the space forming the vaporization space, the gas nozzle being disposed on the side wall.

3. The liquid vaporization device of claim 2, wherein the top cap is tapered, the top cap having an apex that is higher than the side wall.

4. The liquid vaporization device of claim 2, wherein the bottom cover is conical, and an apex of the bottom cover is lower than the side walls.

5. The liquid vaporization device of claim 4, further comprising a second output in communication with the vaporization space, the second output being disposed at a vertex of the bottom cover.

6. The liquid vaporization device of claim 1, further comprising an atomizing nozzle disposed at the opening.

7. The liquid vaporization device of claim 1, wherein the conduit comprises a liquid conduit and a gas conduit disposed about the liquid conduit.

8. The liquid vaporization device of claim 1, wherein the opening is plural.

9. The liquid vaporization device of claim 2, wherein the gas nozzle is disposed toward the top cover.

10. The liquid vaporization device of claim 1, further comprising a temperature controlled heater for heating the vaporization chamber.