CN211785799U - Scanning probe resistance test system - Google Patents
Scanning probe resistance test system Download PDFInfo
- Publication number
- CN211785799U CN211785799U CN202020121747.3U CN202020121747U CN211785799U CN 211785799 U CN211785799 U CN 211785799U CN 202020121747 U CN202020121747 U CN 202020121747U CN 211785799 U CN211785799 U CN 211785799U
- Authority
- CN
- China
- Prior art keywords
- axis displacement
- displacement platform
- displacement table
- probe
- axle displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Tests Of Electronic Circuits (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model provides a scanning probe resistance test system, including the benchmark flat board, Y axle displacement platform, bearing structure, X axle displacement platform, Z axle displacement platform, the micro-camera, the probe head, the wire, measuring instrument, a computer, displacement platform controller, the data line, the sample tray, be equipped with Y axle displacement platform on the benchmark flat board, the vertical bearing structure that is equipped with on the benchmark flat board of Y axle displacement platform one end, the bearing structure top is equipped with X axle displacement platform, X axle displacement platform intermediate position is equipped with Z axle displacement platform, fixed mounting has the probe head on the Z axle displacement platform, one side of benchmark flat board is equipped with the computer. The utility model has the advantages that: the system comprises a micro camera for monitoring the testing process, positioning the position of the sample point, observing the states of the sample and a probe and the like, and a reference flat plate is used for providing a reference plane and is beneficial to accurate positioning of the sample.
Description
Technical Field
The utility model relates to a test system especially relates to a scanning probe resistance test system.
Background
The resistance tester is widely applied to occasions such as electrical safety inspection and grounding engineering completion inspection, and the types of the resistance tester are many, and the resistance tester comprises a ground resistance tester, an insulation resistance tester, a ground resistance tester, a direct current resistance measuring instrument, a surface resistance tester and a loop resistance tester.
The traditional resistance measuring instrument adopts a manual method to position the position of a test point, only one sample can be measured at a time, and the method is acceptable for a small amount of samples, but is insufficient for a large amount of samples, particularly for the test tasks of the resistance distribution of a film layer. Therefore, it is desirable to design a test system that can test a large number of samples.
Disclosure of Invention
According to the technical problem above, the utility model provides a scanning probe resistance test system, including benchmark flat board, Y axle displacement platform, bearing structure, X axle displacement platform, Z axle displacement platform, micro-camera, probe, wire, measuring instrument, computer, displacement platform controller, data line, sample tray, be equipped with Y axle displacement platform on the benchmark flat board, the vertical bearing structure that is equipped with on the benchmark flat board of Y axle displacement platform one end, the bearing structure top is equipped with X axle displacement platform, X axle displacement platform one end is equipped with micro-camera, X axle displacement platform intermediate position is equipped with Z axle displacement platform, fixed mounting has the probe on the Z axle displacement platform, the probe passes through the bolt and realizes the fixed with Z axle displacement platform, one side of benchmark flat board is equipped with the computer, the computer is respectively through data line and measuring instrument controller, the probe is fixed to be equipped with on the Z axle displacement platform, the probe is fixed with the probe, the probe is fixed with, The displacement platform controller is connected, the computer is connected with the micro camera through a lead, the measuring instrument and the probe head are electrically connected with the displacement platform controller, the Y-axis displacement platform, the X-axis displacement platform and the Z-axis displacement platform through leads respectively, a sample tray is arranged on the Y-axis displacement platform, and the sample tray is fixedly connected with the Y-axis displacement platform through a bolt.
Furthermore, the support structure is two upright columns which are symmetrically arranged relative to the center line of the reference flat plate.
Furthermore, the Y-axis displacement table, the X-axis displacement table and the Z-axis displacement table are all linear guide rails.
Furthermore, the Y-axis displacement table, the X-axis displacement table and the Z-axis displacement table are all driven by motors.
Furthermore, encoders or grating rulers are further arranged on the Y-axis displacement table, the X-axis displacement table and the Z-axis displacement table.
Further, the measuring instrument is a direct current ohmmeter, a direct current bridge, an alternating current bridge, an electrochemical workstation or an alternating current impedance tester.
The utility model has the advantages that: the utility model relates to a scanning probe resistance test system, this system realizes the location of sample test point and the contact and the disconnection of probe and sample with the three-dimensional displacement platform of computer control, can realize like this with procedure automatic measure and change sample point, thereby accomplish the measurement of a large amount of samples especially sample resistance distribution, the motion control of displacement platform, resistance test, data storage and visualization are accomplished by installing the software automation on the computer, this system can the wide application in semiconductor technology detection, a great deal of fields such as flat panel display technology detection and new material development, the system contains micro camera, be used for the control test process, fix a position the sample point position, observe sample and probe state etc, the benchmark flat board is used for providing the reference plane, help the accurate positioning of sample.
Drawings
FIG. 1 is a view of the main structure of the present invention;
FIG. 2 shows an arrangement of one of four probes;
FIG. 3 shows another arrangement of four probes.
As shown in the figure, the device comprises a reference flat plate-1, a Y-axis displacement table-2, a support structure-3, an X-axis displacement table-4, a Z-axis displacement table-5, a micro camera-6, a probe-7, a lead-8, a measuring instrument-9, a computer-10, a displacement table controller-11, a data line-12, a sample tray-13 and a sample-14.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings: the utility model relates to a scanning probe resistance test system, including benchmark flat board 1, Y axle displacement platform 2, bearing structure 3, X axle displacement platform 4, Z axle displacement platform 5, micro-camera 6, probe 7, wire 8, measuring instrument 9, computer 10, displacement platform controller 11, data line 12, sample tray 13, be equipped with Y axle displacement platform 2 on the benchmark flat board 1, the upright bearing structure 3 that is equipped with on the benchmark flat board 1 of Y axle displacement platform 2 one end, the bearing structure 3 top is equipped with X axle displacement platform 4, X axle displacement platform 4 one end is equipped with micro-camera 6, X axle displacement platform 4 intermediate position is equipped with Z axle displacement platform 5, fixed mounting has probe 7 on Z axle displacement platform 5, probe 7 realizes fixing with Z axle displacement platform 5 through the bolt, one side of benchmark flat board 1 is equipped with computer 10, the computer 10 is respectively connected with the measuring instrument 9 and the displacement platform controller 11 through data lines 12, the computer 10 is connected with the microscope camera 6 through a lead 8, the measuring instrument 9 is electrically connected with the probe head 7, the displacement platform controller 11 is electrically connected with the Y-axis displacement platform 2, the X-axis displacement platform 4 and the Z-axis displacement platform 5 through leads 8, a sample tray 13 is arranged on the Y-axis displacement platform 2, and the sample tray 13 is fixedly connected with the Y-axis displacement platform 2 through bolts.
Further, the support structure 3 is two columns symmetrically arranged relative to the centerline of the reference plate 1.
Further, the Y-axis displacement table 2, the X-axis displacement table 4, and the Z-axis displacement table 5 are all linear guide rails.
Further, the Y-axis displacement table 2, the X-axis displacement table 4 and the Z-axis displacement table 5 are all driven by motors.
Further, encoders or grating rulers are further arranged on the Y-axis displacement table 2, the X-axis displacement table 4 and the Z-axis displacement table 5.
Further, the measuring instrument 9 is a direct current ohmmeter, a direct current bridge, an alternating current bridge, an electrochemical workstation, or an alternating current impedance tester.
The working principle is as follows: the system uses a computer to control a three-dimensional displacement platform to realize the positioning of a sample test point and the contact and disconnection of a probe and a sample, thus realizing the automatic measurement and the replacement of the sample point by a program, thereby completing the measurement of a large number of samples, particularly the resistance distribution of the samples, according to the test requirements, different probe combination forms such as two probes, three probes or four probes can be used, the arrangement mode of the probes in a four-probe mode can be linear equidistant arrangement, van der Waals arrangement or any other arrangement mode, the probes can be different types such as spring probes or cantilever beam probes, the motion control, the resistance test, the data storage and the visualization of the displacement platform are automatically completed by software arranged on the computer 10, the system can be widely applied to the fields such as semiconductor process detection, flat panel display process detection and new material development, and the like, and comprises a microscopic camera 6, the reference flat plate 1 is used for monitoring a test process, positioning the position of a sample point, observing the states of the sample and a probe and the like, and is used for providing a reference plane, so that the accurate positioning of the sample is facilitated.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications can be made without departing from the principle of the present invention, and these modifications should also be regarded as the protection scope of the present invention.
Claims (6)
1. A resistance testing system of a scanning probe is characterized by comprising a reference flat plate, a Y-axis displacement table, a supporting structure, an X-axis displacement table, a Z-axis displacement table, a micro camera, a probe head, a lead, a measuring instrument, a computer, a displacement table controller, a data line and a sample tray, wherein the Y-axis displacement table is arranged on the reference flat plate, the supporting structure is vertically arranged on the reference flat plate at one end of the Y-axis displacement table, the X-axis displacement table is arranged at the top of the supporting structure, the micro camera is arranged at one end of the X-axis displacement table, the Z-axis displacement table is arranged in the middle of the X-axis displacement table, the probe head is fixedly arranged on the Z-axis displacement table, the probe head is fixed with the Z-axis displacement table through bolts, the computer is arranged on one side of the reference flat plate and is respectively connected with the measuring instrument and the displacement table controller through the data line, the computer is connected with the micro camera through a lead, the measuring instrument is electrically connected with the probe head, the displacement table controller is electrically connected with the Y-axis displacement table, the X-axis displacement table and the Z-axis displacement table through leads, a sample tray is arranged on the Y-axis displacement table, and the sample tray is fixedly connected with the Y-axis displacement table through a bolt.
2. A scanning probe resistance testing system according to claim 1 wherein said support structure is two columns symmetrically disposed about the reference plate centerline.
3. The system for testing the resistance of a scanning probe according to claim 1, wherein said Y-axis displacement stage, X-axis displacement stage, and Z-axis displacement stage are linear guides.
4. The system for testing the resistance of a scanning probe of claim 3 wherein said Y-axis displacement stage, X-axis displacement stage and Z-axis displacement stage are each motor driven.
5. The system for testing the resistance of a scanning probe according to claim 1, wherein an encoder or a grating scale is further provided on the Y-axis displacement stage, the X-axis displacement stage, and the Z-axis displacement stage.
6. A scanning probe resistance testing system according to claim 1 wherein said meter is a dc ohmmeter, or a dc bridge, or an ac bridge, or an electrochemical workstation, or an ac impedance tester.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020121747.3U CN211785799U (en) | 2020-01-19 | 2020-01-19 | Scanning probe resistance test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020121747.3U CN211785799U (en) | 2020-01-19 | 2020-01-19 | Scanning probe resistance test system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211785799U true CN211785799U (en) | 2020-10-27 |
Family
ID=72894084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020121747.3U Active CN211785799U (en) | 2020-01-19 | 2020-01-19 | Scanning probe resistance test system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211785799U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112285609A (en) * | 2020-12-30 | 2021-01-29 | 季华科技有限公司 | Conduction detection device and method for plug-in wiring harness, controller and assembling device |
| CN113358936A (en) * | 2021-07-07 | 2021-09-07 | 广东鸿图科技股份有限公司 | Resistance measuring device for conductive adhesive tape in shielding cover |
| CN113504397A (en) * | 2021-07-15 | 2021-10-15 | 合肥市华达半导体有限公司 | Intelligent probe card based on 32-bit MCU chip test |
-
2020
- 2020-01-19 CN CN202020121747.3U patent/CN211785799U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112285609A (en) * | 2020-12-30 | 2021-01-29 | 季华科技有限公司 | Conduction detection device and method for plug-in wiring harness, controller and assembling device |
| CN113358936A (en) * | 2021-07-07 | 2021-09-07 | 广东鸿图科技股份有限公司 | Resistance measuring device for conductive adhesive tape in shielding cover |
| CN113358936B (en) * | 2021-07-07 | 2024-04-05 | 广东鸿图科技股份有限公司 | Resistance measuring device for conductive adhesive tape in shielding cover |
| CN113504397A (en) * | 2021-07-15 | 2021-10-15 | 合肥市华达半导体有限公司 | Intelligent probe card based on 32-bit MCU chip test |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211785799U (en) | Scanning probe resistance test system | |
| CN101271145B (en) | Inspection apparatus and method | |
| CN107796321B (en) | Cylinder inner diameter detection equipment | |
| CN111781493A (en) | Circuit board electrical parameter measurement system | |
| CN105372499A (en) | Micro-resistance measurement equipment and measurement method | |
| CN201983737U (en) | Brake disc thickness difference detection tool | |
| CN107449969A (en) | The measurement apparatus and measuring method of the resistance of Electric radiant Heating Film | |
| CN101793499A (en) | Multi-measuring-head measuring method and device for micro/nano coordinate measurement | |
| CN117092577B (en) | Multi-performance full-flow automatic test method, system and device for probe card | |
| CN111872743B (en) | Device and method for detecting thermotropic straightness-verticality error of horizontal machining center | |
| CN102607387B (en) | System for quantitatively measuring detecting hole and detecting surface of welding hole of white automobile body | |
| KR102251805B1 (en) | Rigidity test device of semiconductor inspection equipment module | |
| CN212379520U (en) | Circuit board electrical parameter measurement system | |
| CN210181111U (en) | Resistance measuring device | |
| CN111880024A (en) | Device and method for testing conductivity change in flexible deformation process of metal fiber | |
| CN204514280U (en) | A kind of contactless sample surface profiles proving installation | |
| CN213579239U (en) | Industrial robot position appearance degree of accuracy and position appearance repeatability detection device | |
| CN101169319A (en) | Nuclear fuel material board thickness automatic detection device | |
| CN202471029U (en) | Automotive body in white welding line hole detection hole quantitative measurement device | |
| CN213714256U (en) | Sensor linear inspection machine | |
| CN217465695U (en) | Full-automatic numerical control linear displacement sensor linearity testing machine | |
| CN109959504A (en) | Planar motor experimental provision | |
| CN220019770U (en) | Magnetic field interference test fixture | |
| CN103017646A (en) | Large-range crack length measurement device | |
| CN205300469U (en) | Measure device that both ends identity distance leaves |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |