CN211347871U - KOH corrosion experimental facility - Google Patents
KOH corrosion experimental facility Download PDFInfo
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- CN211347871U CN211347871U CN202020017428.8U CN202020017428U CN211347871U CN 211347871 U CN211347871 U CN 211347871U CN 202020017428 U CN202020017428 U CN 202020017428U CN 211347871 U CN211347871 U CN 211347871U
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- fixedly connected
- mounting bracket
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- koh
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- 230000007797 corrosion Effects 0.000 title claims abstract description 23
- 238000005260 corrosion Methods 0.000 title claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 30
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 238000004321 preservation Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 11
- 239000007788 liquid Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 7
- 239000002912 waste gas Substances 0.000 abstract description 7
- 239000011521 glass Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000007246 mechanism Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 11
- 230000009471 action Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Abstract
The utility model discloses a KOH corrodes experimental facilities, including the frame subassembly, the frame subassembly includes the mounting bracket, the inside fixed mounting of mounting bracket has transparent protective housing, the top fixedly connected with drive assembly of mounting bracket, drive assembly includes the drive frame, the bottom of drive frame with fixed connection between the top of mounting bracket to the top fixedly connected with of drive frame carries the lifting motor, the top fixedly connected with control box of mounting bracket, the utility model relates to a chip production technical field. According to the KOH corrosion experimental equipment, the rotary mechanism is additionally arranged, so that the corrosive liquid flows, the temperature is more uniform, and the problem of temperature field uniformity is solved; the problem of poor KOH corrosion effect is solved through the customized nickel basket; through increasing transparent organic glass, can conveniently observe the process, restrict the waste gas that the heating process produced again, let it discharge through specific pipeline, improved and easily taken place the incident.
Description
Technical Field
The utility model relates to a chip production technical field specifically is a KOH corrodes experimental facilities.
Background
The wafer is a basic material for semiconductor integration and packaging, is increasingly in vigorous demand, needs to be subjected to corrosion test after the production of wafer products, is subjected to KOH corrosion test, and is suitable for production, research and use.
At present, no forming equipment exists in the market, the device is generally a self-built simple device, only simple experiments can be carried out, and the device has many defects, unstable temperature control, uneven temperature field, poor KOH corrosion effect, easy occurrence of safety accidents and the like.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art, the utility model provides a KOH corrodes experimental facilities has solved the inhomogeneous problem in temperature field.
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: the utility model provides a KOH corrodes experimental facilities includes the frame subassembly, the frame subassembly includes the mounting bracket, the inside fixed mounting of mounting bracket has transparent protecting box, the top fixedly connected with drive assembly of mounting bracket, drive assembly includes the drive frame, the bottom of drive frame with fixed connection between the top of mounting bracket to the top fixedly connected with of drive frame carries and draws the motor, the top fixedly connected with control box of mounting bracket, transparent protecting box inner wall rotate through the axis of rotation and is connected with heating element, the bottom of mounting bracket is provided with the block terminal, the back of mounting bracket is provided with the emission subassembly.
Further, carry the output fixedly connected with actuating lever of drawing motor, the surperficial threaded connection of actuating lever has the frame of drawing, the surface of drawing the frame with the surperficial sliding connection of actuating lever to fixed mounting has the rotating electrical machines on carrying the frame, the output fixedly connected with rotary electrical machines, run through the bottom of rotary electrical machines carry the frame to reach the mounting bracket just extends to the inside of transparent protective box.
Further, heating element includes the heating furnace, the bottom of heating furnace with the bottom fixed connection of transparent protective housing inner wall to the inside of heating furnace is provided with the nickel basket, the rotary rod extends to the inside one end fixedly connected with heat preservation lid of transparent protective housing.
Further, the exhaust assembly comprises an exhaust pipe, an exhaust fan is arranged between the exhaust pipe and the mounting frame, and the input end of the exhaust pipe is communicated with the inside of the transparent protection box.
Further, still include spacing collar, the surface of spacing collar with the internal surface fixed connection of blast pipe to the spread groove has been seted up on the left side of spacing collar, the outside of spread groove just is located seted up the internal thread face on the spacing collar, the left side of spacing collar is provided with the filter disc.
Further, the inboard fixedly connected with filter screen of filter disc, the filter screen adopts the structure of active carbon adsorption filter layer, the right side fixedly connected with go-between of filter disc.
Further, the outer surface of the connecting ring is provided with an outer thread surface, the outer thread surface is matched with the inner thread surface, the inner side and the outer side of the connecting ring are both provided with a sealing ring, and the left side of the filter disc is fixedly connected with a rotating rod.
Compared with the prior art, the beneficial effects of the utility model are that:
according to the KOH corrosion experimental equipment, the rotary mechanism is added, so that the corrosive liquid flows, the temperature is more uniform, and the problem of temperature field uniformity is solved; the problem of poor KOH corrosion effect is solved through the customized nickel basket; through increasing transparent organic glass, can conveniently observe the process, restrict the waste gas that the heating process produced again, let it discharge through specific pipeline, improved and easily taken place the incident.
Drawings
Fig. 1 is a three-dimensional view of a first embodiment provided by the present invention;
FIG. 2 is a front view of the ensemble shown in FIG. 1;
FIG. 3 is a cross-sectional view taken at A-A of FIG. 2;
fig. 4 is a schematic structural diagram of a second embodiment provided by the present invention;
fig. 5 is an enlarged view of fig. 4 at B.
In the figure: 1-frame component, 11-mounting rack, 12-transparent protective box, 2-driving component, 21-driving rack, 22-lifting motor, 23-driving rod, 24-lifting rack, 25-rotating motor, 26-rotating rod, 3-control box, 4-heating component, 41-heating furnace, 42-nickel basket, 43-heat preservation cover, 5-distribution box, 6-discharge component, 61-exhaust pipe, 62-exhaust fan, 7-limit mounting ring, 71-connecting groove, 72-internal thread surface, 8-filter disc, 81-filter screen, 82-connecting ring, 83-external thread surface, 84-sealing ring and 9-rotating rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a KOH corrodes experimental facilities includes frame subassembly 1, frame subassembly 1 includes mounting bracket 11, the inside fixed mounting of mounting bracket 11 has transparent protecting box 12, the top fixedly connected with drive assembly 2 of mounting bracket 11, drive assembly 2 includes drive frame 21, the bottom of drive frame 21 with fixed connection between the top of mounting bracket 11 to the top fixedly connected with of drive frame 21 carries and draws motor 22, the top fixedly connected with control box 3 of mounting bracket 11, transparent protecting box 12 inner wall is rotated through the axis of rotation and is connected with heating element 4, the bottom of mounting bracket 11 is provided with block terminal 5, the back of mounting bracket 11 is provided with emission subassembly 6.
Mounting bracket 11 and transparent protective housing 12 comprise aluminum alloy section bar frame and transparent box respectively, contain heating part and exhaust emission part in the transparent box, the inside of control box 3 is provided with automatic control system, automatic control system is controlled by the PLC touch-sensitive screen, according to the target temperature of setting for, carry out high frequency heating output automatically and adjust, ensure target sample temperature stability, security when in order to ensure the system operation, be equipped with overtemperature alarm device, earth leakage protection device, for operation and control convenience, adopt centralized control system, all electrical control part output control, temperature monitoring all can be realized through the touch-sensitive screen, and reserve spare interface, make things convenient for the data to derive.
The rotating mechanism is added on the mounting rack 11, so that corrosive liquid flows, the temperature is more uniform, and the problem of temperature field uniformity is solved; the problem of poor KOH corrosion effect is solved through the customized nickel basket 42; through adding transparent organic glass, not only can conveniently observe the technological process, but also limits the waste gas generated in the heating process, and enables the waste gas to be discharged through a specific pipeline, thereby improving the safety accident easily caused
The output end of the lifting motor 22 is fixedly connected with a driving rod 23, the surface of the driving rod 23 is in threaded connection with a lifting frame 24, the surface of the lifting frame 24 is in sliding connection with the surface of the driving frame 21, a rotating motor 25 is fixedly installed on the lifting frame 24, the output end of the rotating motor 25 is fixedly connected with a rotating rod 26, and the bottom of the rotating rod 26 penetrates through the lifting frame 24 and the mounting frame 11 and extends into the transparent protection box 12.
The pull motor 22 and the rotary motor 25 are both servo motors and are connected to an external power supply and control switch when in use.
The rotary lifting process is driven by two servo motors, one of the two servo motors realizes lifting, the lifting part drives the heat-insulating cover 43 in the inner cavity of the heating furnace 41 to lift together, the heat-insulating cover 43 is driven to be tightly changed on the heating furnace 41 in the pressing process, and the cavity is ensured to be closed in the corrosion process; the heat loss and the large discharge of waste gas are avoided; the other servo motor realizes the rotation function of the nickel basket 42, the wafer is placed in the nickel basket 42, the rotating part is immersed in the corrosive liquid, so that the corrosive liquid flows, the temperature is more uniform, and the problem of uniformity of the wafer in a temperature field is solved.
The heating assembly 4 comprises a heating furnace 41, the bottom of the heating furnace 41 is fixedly connected with the bottom of the inner wall of the transparent protection box 12, a nickel basket 42 is arranged inside the heating furnace 41, and one end of the rotating rod 26, which extends to the inside of the transparent protection box 12, is fixedly connected with a heat preservation cover 43.
The inside of heating furnace 41 is provided with corrosive liquid, and the heating part heats the corrosive liquid of heating furnace 41 inner chamber, and the furnace body inner chamber adopts high corrosion resistant material pure nickel, ensures to corrode safety to be equipped with the protective layer outside the chamber, also ensure to heat safety.
The exhaust assembly 6 comprises an exhaust pipe 61, an exhaust fan 62 is arranged between the exhaust pipe 61 and the mounting frame 11, and the input end of the exhaust pipe 61 is communicated with the inside of the transparent protective box 12.
The exhaust assembly 6 forms an exhaust gas exhaust part, which is composed of an exhaust fan 62 and an exhaust pipe 61, and exhaust gas generated when the inner cavity is heated and opened can be timely exhausted to the outside, so that safety accidents are prevented.
When in work:
the lifting part drives the heat-insulating cover 43 in the inner cavity of the heating furnace 41 to lift together, and the heat-insulating cover 43 is driven to be tightly changed on the heating furnace 41 in the pressing process, so that the chamber is closed in the corrosion process; the heat loss and the large discharge of waste gas are avoided; the other servo motor realizes the rotation function of the nickel basket 42, the wafer is placed in the nickel basket 42, the rotating part is immersed in the corrosive liquid, so that the corrosive liquid flows, the temperature is more uniform, the problem of uniformity of the wafer in a temperature field is solved,
by adding the rotating mechanism, the corrosive liquid flows, the temperature is more uniform, and the problem of uniformity of a temperature field is solved; the problem of poor KOH corrosion effect is solved through the customized nickel basket 42; through increasing transparent organic glass, can conveniently observe the process, restrict the waste gas that the heating process produced again, let it discharge through specific pipeline, improved and easily taken place the incident.
Second embodiment:
based on the KOH corrosion experimental facility provided in the first embodiment of the present application, the second embodiment of the present application provides another KOH corrosion experimental facility. The second embodiment is only the preferred mode of the first embodiment, and the implementation of the second embodiment does not affect the implementation of the first embodiment alone.
The present invention will be further described with reference to the accompanying drawings and embodiments.
Referring to fig. 4 and 5, the present invention provides another technical solution: still include spacing collar 7, the surface of spacing collar 7 with the internal surface fixed connection of blast pipe 61 to spread groove 71 has been seted up on the left side of spacing collar 7, spread groove 71's the outside just is located seted up internal thread face 72 on the spacing collar 7, the left side of spacing collar 7 is provided with filter disc 8.
The inboard fixedly connected with filter screen 81 of filter disc 8, filter screen 81 adopts the structure of active carbon adsorption filter layer, the right side fixedly connected with go-between 82 of filter disc 8.
The activated carbon is convenient for adsorbing and purifying the gas which is conveniently adsorbed by the activated carbon in the tail gas, thereby improving the safety of tail gas emission.
The outer surface of the connecting ring 82 is provided with an outer thread surface 83, the outer thread surface 83 is matched with the inner thread surface 72, the inner side and the outer side of the connecting ring 82 are both provided with a sealing ring 84, and the left side of the filter disc 8 is fixedly connected with the rotating rod 9.
The structure of the external thread surface 83 on the connecting ring 82 facilitates the filter disc 8 to be mounted on the internal thread surface 72 on the limiting mounting ring 7, thereby facilitating the replacement and maintenance of the filter disc 8 and ensuring the filtering quality and the filtering effect of the filter screen 81.
When in work:
the left internal thread face 72 structure of spacing collar 7 makes things convenient for the installation and the dismantlement of go-between 82 on the filter disc 8, adsorbs through active carbon adsorption's gas in to gas through filter screen 81 on the filter disc 8 to reach the purification of tail gas, improve exhaust emissions's security, the convenient maintenance and the change to filter disc 8 simultaneously.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A KOH corrosion experimental facility, includes frame subassembly (1), its characterized in that: frame subassembly (1) includes mounting bracket (11), the inside fixed mounting of mounting bracket (11) has transparent protective housing (12), top fixedly connected with drive assembly (2) of mounting bracket (11), drive assembly (2) are including drive frame (21), the bottom of drive frame (21) with fixed connection between the top of mounting bracket (11) to motor (22) is carried to the top fixedly connected with of drive frame (21), top fixedly connected with control box (3) of mounting bracket (11), be connected with heating element (4) through the axis of rotation of transparent protective housing (12) inner wall, the bottom of mounting bracket (11) is provided with block terminal (5), the back of mounting bracket (11) is provided with emission subassembly (6).
2. The KOH corrosion experimental facility of claim 1, wherein: the output end of the lifting motor (22) is fixedly connected with a driving rod (23), the surface of the driving rod (23) is in threaded connection with a lifting frame (24), the surface of the lifting frame (24) is in sliding connection with the surface of the driving frame (21), a rotating motor (25) is fixedly mounted on the lifting frame (24), the output end of the rotating motor (25) is fixedly connected with a rotating rod (26), and the bottom of the rotating rod (26) penetrates through the lifting frame (24) and the mounting frame (11) and extends to the inside of the transparent protection box (12).
3. The KOH corrosion experimental facility of claim 2, wherein: heating element (4) include heating furnace (41), the bottom of heating furnace (41) with the bottom fixed connection of transparent protective housing (12) inner wall to the inside of heating furnace (41) is provided with nickel basket (42), rotary rod (26) extend to the inside one end fixedly connected with heat preservation lid (43) of transparent protective housing (12).
4. The KOH corrosion experimental facility as claimed in claim 3, wherein: the exhaust assembly (6) comprises an exhaust pipe (61), an exhaust fan (62) is arranged between the exhaust pipe (61) and the mounting frame (11), and the input end of the exhaust pipe (61) is communicated with the inside of the transparent protection box (12).
5. The KOH corrosion experimental facility as claimed in claim 4, wherein: still include spacing collar (7), the surface of spacing collar (7) with the internal surface fixed connection of blast pipe (61) to spread groove (71) have been seted up on the left side of spacing collar (7), the outside of spread groove (71) just is located interior thread face (72) have been seted up on spacing collar (7), the left side of spacing collar (7) is provided with filter disc (8).
6. The KOH corrosion experimental facility as claimed in claim 5, wherein: the inboard fixedly connected with filter screen (81) of filter disc (8), filter screen (81) adopt the structure of active carbon adsorption filter layer, the right side fixedly connected with go-between (82) of filter disc (8).
7. The KOH corrosion experimental facility as claimed in claim 6, wherein: the surface of go-between (82) is provided with external thread face (83), external thread face (83) with looks adaptation between internal thread face (72) to the inboard and the outside of go-between (82) all are provided with sealing ring (84), the left side fixedly connected with dwang (9) of filter disc (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020017428.8U CN211347871U (en) | 2020-01-06 | 2020-01-06 | KOH corrosion experimental facility |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020017428.8U CN211347871U (en) | 2020-01-06 | 2020-01-06 | KOH corrosion experimental facility |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211347871U true CN211347871U (en) | 2020-08-25 |
Family
ID=72099488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020017428.8U Active CN211347871U (en) | 2020-01-06 | 2020-01-06 | KOH corrosion experimental facility |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211347871U (en) |
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2020
- 2020-01-06 CN CN202020017428.8U patent/CN211347871U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 10-101, Jinan Changqing International Enterprise Port, No. 2222, South Section of Yuqing Road, Changqing District, Jinan City, Shandong Province, 250000 Patentee after: Shandong Jingsheng Electronic Technology Co.,Ltd. Country or region after: China Address before: Room 1120, 49 Lishan Road, Lixia District, Jinan City, Shandong Province Patentee before: Shandong Jingsheng Electronic Technology Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |