CN210571951U - Multi-mode scanning microscope imaging system based on laser-induced photothermal effect - Google Patents
Multi-mode scanning microscope imaging system based on laser-induced photothermal effect Download PDFInfo
- Publication number
- CN210571951U CN210571951U CN201921368427.1U CN201921368427U CN210571951U CN 210571951 U CN210571951 U CN 210571951U CN 201921368427 U CN201921368427 U CN 201921368427U CN 210571951 U CN210571951 U CN 210571951U
- Authority
- CN
- China
- Prior art keywords
- detection light
- imaging system
- light source
- laser
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a multi-mode scanning microscope imaging system based on laser-induced photothermal effect, which comprises a pump light source, a pump light modulation device, a first beam splitting and beam combining device, a second beam splitting and beam combining device, a micro-imaging lens, a sample scanning movement device, a detection light source, a detection light spatial filter and a photoelectric detector, wherein the pump light source, the pump light modulation device, the first beam splitting and beam combining device, the second beam splitting and beam combining device, the micro-imaging lens, the sample scanning movement device, the detection light spatial filter and the photoelectric detector are sequentially arranged from front to back; the switching mechanism drives the detection light spatial filter to move into or out of the space between the second beam splitting and combining device and the photoelectric detector. The utility model discloses contained two kinds of observation modes of laser-induced reflectivity microimaging and the microimaging of laser-induced surface thermal lens, carried out the detection and analysis to a plurality of parameters such as absorption distribution, thermal conductivity, doping concentration, doping degree of depth of different samples, widened the application range of the micro-imaging system of light and heat greatly.
Description
Technical Field
The utility model relates to a microscopic imaging detection area specifically is a multi-mode scanning microscope imaging system based on laser-induced photothermal effect.
Background
The basic principle of the laser-induced photothermal effect is as follows: when a pump laser beam irradiates on the material, the material absorbs the laser energy to cause the physical properties of the material to change, including refractive index change, surface deformation, reflectivity change and the like. These changes in physical properties are related to parameters such as absorption, thermal conductivity, carrier concentration, etc. of the material. By detecting and analyzing the change of the physical characteristics, parameters such as material absorption, thermal conductivity, carrier concentration and the like can be obtained. The photo-thermal detection technology has the advantages of high sensitivity, high-resolution microscopic measurement and the like. Due to the fact that physical property changes caused by the photo-thermal effect are more, different photo-thermal detection methods are derived by detecting different physical property changes, and the photo-thermal detection methods comprise a laser calorimetry method, a laser deflection method, a laser-induced reflectivity method, a laser-induced thermal lens method and the like. Each of these methods has advantages and disadvantages. In practical applications, only a single measurement method is often used. Therefore, the traditional photothermal detection system has the problems of single function and narrow application range.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a multi-mode scanning microscope imaging system based on laser-induced light and heat effect, contained two kinds of observation modes of laser-induced reflectivity micro-imaging and the micro-imaging of laser-induced surface thermal lens, carried out the detection and analysis to a plurality of parameters such as absorption distribution, thermal conductivity, doping concentration, doping degree of depth of different samples, widened the application scope of the micro-imaging system of light and heat greatly.
The technical scheme of the utility model is that:
a multi-mode scanning microscope imaging system based on laser-induced photothermal effect comprises a pumping light source, a pumping light modulation device, a detection light source, a first beam splitting and combining device, a second beam splitting and combining device, a microimaging lens, a detection light spatial filter, a photoelectric detector and a sample scanning movement device, wherein the pumping light source and the pumping light modulation device are sequentially arranged from front to back; the pump light beam emitted by the pump light modulation device is transmitted by a first beam splitter and combiner, the detection light beam emitted by the detection light source is reflected by the first beam splitter and combiner, the pump light beam transmitted by the first beam splitter and combiner and the reflected detection light beam are both transmitted by a second beam splitter and combiner, the pump light beam and the detection light beam transmitted by the second beam splitter and combiner are both focused on the surface of a sample to be detected on the sample scanning movement device by a microimaging lens, the detection light beam reflected by the surface of the sample to be detected is reflected by a microimaging lens and the second beam splitter and combiner in sequence, the switching mechanism is a driving mechanism which drives a detection light spatial filter to move into or out of a space between the second beam splitter and combiner and a photoelectric detector, and the detection light beam reflected by the second beam splitter and combiner enters the photoelectric detector to realize laser-induced reflectivity microimaging, the detection light beam reflected by the second beam splitting and combining device enters the photoelectric detector through the detection light spatial filter to realize laser-induced surface thermal lens imaging.
The pump light source and the detection light source are both monochromatic light sources.
The pump light source and the detection light source are both laser light sources.
The sample scanning motion device is a transverse and longitudinal horizontal moving mechanism, and drives the sample to be detected to horizontally move transversely or longitudinally, so that the irradiation points of the pumping light source and the detection light source perform two-dimensional point-by-point scanning on the surface of the sample to be detected.
And a wavelength selection filtering device is arranged in front of the photoelectric detector.
The rear end of the pump light modulation device is provided with a pump light beam expanding device, and pump light beams emitted by the pump light beam expanding device are transmitted out through a first beam splitting and combining device.
The rear end of the detection light source is provided with a detection light beam expanding device, and detection light beams emitted by the detection light beam expanding device are reflected out by the first beam splitting and combining device.
The utility model has the advantages that:
the utility model discloses combine together two kinds of observation modes of the micro-formation of image of laser-induced reflectivity and the micro-formation of image of laser-induced surface thermal lens, not only can be used for the high-resolution formation of image of the absorption defect of multiple material to detect, can also be used for the detection and analysis of a plurality of physical parameters such as material thermal conductivity, thermal diffusivity, ion doping concentration, the range of application includes but not limited to optical material and component, semiconductor wafer etc, the utility model provides a problem that traditional scanning light and heat micro-imaging system function is single, the application face is narrow.
Drawings
Fig. 1 is a schematic diagram of the operation of the present invention in the laser-induced reflectance micro-imaging observation mode.
Fig. 2 is a working principle diagram of the present invention in the observation mode of laser-induced surface thermal lens micro-imaging.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and fig. 2, a multi-mode scanning microscope imaging system based on a laser-induced photothermal effect includes a pump light source 1, a pump light modulation device 2 and a pump light beam expanding device 3 which are sequentially arranged from front to back, a probe light source 9 and a probe light beam expanding device 10 which are sequentially arranged from front to back, a first beam splitter and combiner 4, a second beam splitter and combiner 5, a micro-imaging lens 6, a probe light spatial filter 11 fixed on a switching mechanism 12, a wavelength selection filter device 13, a photoelectric detector 14 and a sample scanning movement device 8 for driving a sample 7 to be detected to move;
the method comprises the following steps that a pump beam emitted by a pump light source 1 is modulated after passing through a pump beam modulation device 2, and is expanded and adjusted by a pump beam expansion device 3, the pump beam emitted by the pump beam expansion device 3 is transmitted out through a first beam splitting and combining device 4, the pump beam transmitted out by the first beam splitting and combining device 4 is transmitted out through a second beam splitting and combining device 5, and then is focused on the surface of a sample 7 to be measured on a sample scanning movement device 8 after passing through a microscopic imaging lens 6;
after the detection beam emitted by the detection light source 9 is expanded and adjusted by the detection beam expander 10 in sequence, the detection beam emitted by the detection beam expander 10 is reflected by the first beam splitter and combiner 4, the detection beam reflected by the first beam splitter and combiner 4 is transmitted by the second beam splitter and combiner 5, the detection beam transmitted by the second beam splitter and combiner 5 is focused on the surface of the sample 7 to be detected on the sample scanning motion device 8 by the microscopic imaging lens 6, the detection beam reflected by the surface of the sample 7 to be detected is reflected by the microscopic imaging lens 6 and the second beam splitter and combiner 5 in sequence, the switching mechanism 12 is a driving mechanism, the detection light spatial filter 11 is driven to move into or out of the space between the second beam splitter and combiner 5 and the wavelength selective filter 13, the detection beam reflected by the second beam splitter and combiner 5 enters the photoelectric detector 14 through the wavelength selective filter 13 to realize laser-induced reflectivity microimaging (see fig. 1), the light reflected by the second beam splitter/combiner 5 sequentially passes through the detection light spatial filter 11 and the wavelength selection filter device 13 and enters the photodetector 14 to realize laser-induced surface thermal lens imaging (see fig. 2).
The pump light source 1 and the detection light source 9 are both monochromatic light sources, preferably laser light sources.
The sample scanning movement device 8 is a transverse and longitudinal horizontal movement mechanism, the sample scanning movement device 8 drives the sample 7 to be detected to horizontally or longitudinally move, and irradiation points of the pumping light source 1 and the detection light source 9 are subjected to two-dimensional point-by-point scanning on the surface of the sample 7 to be detected, so that a reflectivity change distribution image and a deformation distribution image of the surface of the whole sample 1 to be detected are obtained.
The output signal of the photodetector 14 is detected by a phase-lock detection technique, and at this time, an ac signal having the same modulation frequency as the modulated pump beam is used as a reference signal for phase-lock detection, and only the photothermal signal induced by the pump beam can be detected by the phase-lock amplifier, and other external noise is filtered out.
Wherein, the laser-induced reflectivity microscopic imaging process comprises the following steps: when a modulated pump laser irradiates the surface of a material, it interacts with the material, causing a change in the reflectivity of the surface. This change in reflectivity is caused by the material absorbing laser energy causing an increase in temperature or the generation of photogenerated carriers. This laser induced reflectivity change is detected using a probe laser. The detection laser passes through the pump laser irradiation area, the intensity of the detection light reflected by the surface of the sample can be changed, and the intensity change of the reflected detection light is measured, so that the laser-induced reflectivity change quantity of the irradiation area can be obtained. And (3) performing two-dimensional point-by-point scanning on the surface of the sample to be detected by the laser irradiation point to obtain a reflectivity change distribution image of the whole surface of the sample to be detected. The spatial resolution of this imaging mode is determined by the sample surface pump spot size. Laser induced reflectivity microscopy can be achieved when the pump beam is focused to very small dimensions, such as micron or even sub-micron dimensions. The laser-induced reflectivity microscopic imaging mode can acquire information such as photo-generated carrier concentration distribution of a sample, and can be used for detecting doping concentration, doping depth and the like of materials such as a semiconductor wafer and the like.
The process of laser-induced surface thermal lens microimaging is as follows: the modulated pump laser irradiates the surface of the material, and the material absorbs the laser energy to cause the temperature to rise so as to cause the surface to be thermally deformed. The laser-induced surface thermal deformation is detected using a probe laser. The detection laser passes through the pump laser irradiation area, and the propagation characteristic of the detection light reflected by the surface of the sample to be detected can change, which is equivalent to newly adding a lens. By measuring the change in the intensity of the probe light, the amount of laser-induced surface deformation of the irradiated region can be obtained. And (3) performing two-dimensional point-by-point scanning on the surface of the sample to be detected by the laser irradiation point to obtain the whole surface deformation distribution image of the sample to be detected. The spatial resolution of the imaging mode is also determined by the size of the pumping light spot on the surface of the sample to be measured. Laser induced surface thermal lens microscopy can be achieved when the pump beam is focused to very small dimensions, such as micron or even sub-micron dimensions. The laser-induced surface thermal lens microscopic imaging mode can acquire information such as surface absorption distribution, thermal conductivity distribution and the like of a sample.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a multimode scanning microscope imaging system based on laser-induced photothermal effect which characterized in that: the device comprises a pumping light source, a pumping light modulation device, a detection light source, a first beam splitting and combining device, a second beam splitting and combining device, a microscopic imaging lens, a detection light spatial filter, a photoelectric detector and a sample scanning movement device, wherein the pumping light source and the pumping light modulation device are sequentially arranged from front to back; the pump light beam emitted by the pump light modulation device is transmitted by a first beam splitter and combiner, the detection light beam emitted by the detection light source is reflected by the first beam splitter and combiner, the pump light beam transmitted by the first beam splitter and combiner and the reflected detection light beam are both transmitted by a second beam splitter and combiner, the pump light beam and the detection light beam transmitted by the second beam splitter and combiner are both focused on the surface of a sample to be detected on the sample scanning movement device by a microimaging lens, the detection light beam reflected by the surface of the sample to be detected is reflected by a microimaging lens and the second beam splitter and combiner in sequence, the switching mechanism is a driving mechanism which drives a detection light spatial filter to move into or out of a space between the second beam splitter and combiner and a photoelectric detector, and the detection light beam reflected by the second beam splitter and combiner enters the photoelectric detector to realize laser-induced reflectivity microimaging, the detection light beam reflected by the second beam splitting and combining device enters the photoelectric detector through the detection light spatial filter to realize laser-induced surface thermal lens imaging.
2. The imaging system of claim 1, wherein the imaging system comprises: the pump light source and the detection light source are both monochromatic light sources.
3. The imaging system of claim 2, wherein the imaging system comprises: the pump light source and the detection light source are both laser light sources.
4. The imaging system of claim 1, wherein the imaging system comprises: the sample scanning motion device is a transverse and longitudinal horizontal moving mechanism, and drives the sample to be detected to horizontally move transversely or longitudinally, so that the irradiation points of the pumping light source and the detection light source perform two-dimensional point-by-point scanning on the surface of the sample to be detected.
5. The imaging system of claim 1, wherein the imaging system comprises: and a wavelength selection filtering device is arranged in front of the photoelectric detector.
6. The imaging system of claim 1, wherein the imaging system comprises: the rear end of the pump light modulation device is provided with a pump light beam expanding device, and pump light beams emitted by the pump light beam expanding device are transmitted out through a first beam splitting and combining device.
7. The imaging system of claim 1, wherein the imaging system comprises: the rear end of the detection light source is provided with a detection light beam expanding device, and detection light beams emitted by the detection light beam expanding device are reflected out by the first beam splitting and combining device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921368427.1U CN210571951U (en) | 2019-08-22 | 2019-08-22 | Multi-mode scanning microscope imaging system based on laser-induced photothermal effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921368427.1U CN210571951U (en) | 2019-08-22 | 2019-08-22 | Multi-mode scanning microscope imaging system based on laser-induced photothermal effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210571951U true CN210571951U (en) | 2020-05-19 |
Family
ID=70645548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921368427.1U Active CN210571951U (en) | 2019-08-22 | 2019-08-22 | Multi-mode scanning microscope imaging system based on laser-induced photothermal effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210571951U (en) |
-
2019
- 2019-08-22 CN CN201921368427.1U patent/CN210571951U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109668838B (en) | Device and method capable of simultaneously detecting surface and subsurface defects of optical element | |
| CN102680213B (en) | Rapid detecting method and device for optical property of heavy-caliber optical element | |
| JP5187843B2 (en) | Semiconductor inspection apparatus and inspection method | |
| CN105548099B (en) | The lossless three-dimensional imaging of historical relic based on two-photon fluorescence excitation and Components identification method | |
| CN104359892A (en) | Different modal molecular vibration spectrum detection and imaging device and method | |
| CN104458216B (en) | Device and method for detecting weak absorption of optical element | |
| CN103149217B (en) | Infrared phase locking and imaging method and device for surface and subsurface defect detection of optimal element | |
| CN106691394A (en) | high resolution long focal depth OCT imaging system based on optical path code and method thereof | |
| WO2013091584A1 (en) | Method and device for detecting defects in substrate | |
| CN109238968A (en) | A kind of photo-thermal heterodyne micro-imaging detection system and method | |
| CN212489863U (en) | Stimulated Raman scattering imaging system with rapid and efficient adaptive optical compensation | |
| CN102721664B (en) | A kind of multi-beam laser induction infrared radiation imaging device and method | |
| CN112485235A (en) | Transmission electron microscope sample rod system with ultrafast time resolution spectral capability and application | |
| CN203069523U (en) | High-resolution detection device for optical surface and subsurface absorption defect | |
| CN102419250B (en) | Active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging | |
| CN210571951U (en) | Multi-mode scanning microscope imaging system based on laser-induced photothermal effect | |
| CN107490566B (en) | Airy beam light sheet illumination microscopic imaging device based on binary optical element | |
| CN112525952A (en) | Active infrared nondestructive testing device and testing method thereof | |
| CN111289479B (en) | Phase defect detection device and method based on nonlinear thermography inversion | |
| WO2024087614A1 (en) | Ratiometric fluorescence emission super-resolution imaging method | |
| CN202403893U (en) | Active polymer planar waveguide propagation constant measuring instrument based on fluorescence imaging | |
| KR20140144673A (en) | Method and apparatus for detecting defects | |
| CN103091334B (en) | High-resolution detection method and device for optical surface and subsurface absorption defects | |
| CN210533985U (en) | Three-dimensional absorption characteristic detection device based on laser-induced photothermal effect | |
| CN115356262A (en) | Efficient detection method for quartz glass processing subsurface damage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |