CN102419250B - Active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging - Google Patents

Active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging Download PDF

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CN102419250B
CN102419250B CN2011104135875A CN201110413587A CN102419250B CN 102419250 B CN102419250 B CN 102419250B CN 2011104135875 A CN2011104135875 A CN 2011104135875A CN 201110413587 A CN201110413587 A CN 201110413587A CN 102419250 B CN102419250 B CN 102419250B
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fluorescence
propagation constant
guided
waveguide
microcobjective
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CN102419250A (en
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陈漪恺
张斗国
王向贤
傅强
王沛
明海
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University of Science and Technology of China USTC
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Abstract

The invention discloses an active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging. By utilizing a high numerical aperture microscopic object lens, a fluorescence imaging apparatus is established, an incident laser is focused by a high numerical aperture immersion microscopic object lens and is irradiated to an active polymer film, and an active substance doped in the film is excited to emit fluorescence which can be coupled to be a guided wave transmitted in a planar waveguide. In a transmission process of the guided wave, partial light energy leaks radiation to a far field along specific angles from one side of the waveguide and is collected by a same object lens for imaging at a CCD image sensor. The specific angles and optical field distribution of radiated fluorescence are associated with a propagation constant of the guided wave, the above matters are reflected on a fluorescence image recorded by a CCD, and propagation constants of various guided waves in the planar waveguide can be derived through the fluorescence image. The invention has the advantages of simple and compact structure and a high spatial resolution, and is suitable for real-time monitoring and rapid measurement of an active polymer planar waveguide propagation constant.

Description

A kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging
Technical field
The intrinsic parameters that the present invention relates to fiber waveguide device is measured and the technical field of calculating, particularly a kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging.
Background technology
Integrated and the microminiaturization of optical information processing system makes polymer plane waveguide rely on the advantages such as its easily processing, low-loss to develop rapidly, and one of base attribute of fiber waveguide device propagation constant is more indispensable in the optical device design and research of integrated optics.Active material (incandescnet particle) is doped in slab guide, but the loss of effective compensation waveguide, also for developing various active waveguide optical device, as waveguide laser and orthoron.Therefore the measuring method of studying various guided wave propagation constants in active material polymer waveguide has significant application value.The existing comparatively method of ripe measurement plane waveguide propagation constant mainly is based on the angle scanning method (M collimation method) of prism, and solves transcendental equation and obtain waveguide parameter.Its problem mainly existed is:
1, process is loaded down with trivial details, and measuring speed is slow.The effective refractive index of M line measurement waveguide needs specific prism-coupled instrument (θ-2 θ instrument), and needs the point by point scanning of angle, and speed is slow, and length consuming time can not realize real-time monitored.
2, spatial resolution is low.Its structure can only, at one-dimensional square to excitation resonance guided mode, there is no the high-NA objective focusing system, thereby spatial resolution be lower simultaneously.
3, limitation.This kind of method is difficult for the imaginary part of direct computational representation propagation constant, i.e. the spread length of guided wave.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging has been proposed, it is simple and compact for structure, spatial resolution is high, without angle scanning, but Real-Time Monitoring, be suitable for efficient, the perfect measurement of slab guide propagation constant.
The present invention realizes that the technical scheme of above-mentioned purpose is as follows:
A kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging: it comprises: LASER Light Source, extender lens group, beam splitter, high-NA oil immersion microcobjective, index-matching oil, slab guide, optical filter, convex lens and ccd image sensor; Wherein,
Described active polymer plane waveguide, by substrate of glass, metallic film, be mixed with the thin polymer film of source material and the four-layer structure that the top air layer forms, its preparation process is: evaporation or sputtered metal film on substrate of glass, and the polymer solution of the active material doping of spin coating on metallic film form active material thin polymer film, wherein, active material is fluorescence molecule;
Described LASER Light Source institute Emission Lasers, by the extender lens group, expand by catoptron, high-NA oil immersion microcobjective, index-matching oil, with the wide range focusing radiation to active thin polymer film, fluorescence molecule stimulated radiation fluorescence in thin polymer film, fluorescence is coupled into the guided wave be transmitted in slab guide; Under some special angle, the portion of energy of the guided wave of transmission goes out waveguiding structure from substrate of glass one side compromising emanation, through microcobjective, collect, by present the bright ring of different radii size after beam splitter, optical filter and convex lens on ccd image sensor, these special angles are corresponding one by one with the bright ring radius on the back focal plane optical image, simultaneously corresponding one by one with the real part of the various mode propagation constants that exist in waveguiding structure, by the radius of bright ring in the analysis of fluorescence picture and known microcobjective numerical aperture, calculate the real part of guided mode propagation constant;
Calculate the imaginary part that obtains propagation constant by the reflection light field optical image on back focal plane, its the Fitting Calculation step is as follows: reading images, record is wherein along diametric fluorescence intensity distribution curve, and with Lorentz type curve to its matching, obtain the halfwidth of fluorescence intensity distribution curve on diametric(al), calculate spread length; It is corresponding to the imaginary part of guided mode propagation constant.
Further, described LASER Light Source, by after expanding, covers the entrance pupil of whole high-NA oil immersion microcobjective, takes full advantage of the high-NA of object lens, obtains the focal beam spot of reduced size, thereby improves the spatial resolution of measuring, and realizes the microcell measurement; Utilize same object lens to realize collection and the imaging to fluorescence signal simultaneously, simplified apparatus structure.
The principle of technical solution of the present invention is:
Exciting light focuses on and irradiates in active polymer plane waveguide through the high-NA microscope, make to be doped in active material (fluorescence molecule) emitting fluorescence wherein, utilize the method for imaging, take the intensity distribution image of fluorescence on the object lens back focal plane, by light distribution on image being analyzed to, is derived the propagation constant that is present in various guided modes in this slab guide.The propagation constant of guided mode comprises real part and imaginary part two parts, and real part is corresponding to the effective refractive index of guided mode, and imaginary part corresponding to this kind of pattern the spread length in waveguiding structure.Concrete,
Described LASER Light Source, by designed light path, realize the waveguide of strong focusing irradiated plane, fluorescence excitation in microcell, and fluorescence-conjugated becomes the guided wave transmitted in slab guide.Existence due to the glass of high refractive index substrate, under some specific angle, these guided waves are in the process of transmission, and some energy can be from substrate of glass one end compromising emanation to far field, and then are being positioned at the bright ring that produces various different radiis on oil immersion microcobjective back focal plane.Calculate bright ring radius (half of peak-to-peak value) and visual field radius (r=fnsin θ is the bright ring radius, the focal length that f is high-NA oil immersion microcobjective, the refractive index that n is index-matching oil, θ is guided mode excites angle, R=fnsin θ mfor visual field radius, θ mmaximum visual angle, corresponding to the numerical aperture of microcobjective) ratio, what calculate different guided modes excites angle or wave number, corresponding to the real part of propagation constant.Further, the fluorescence of radiation carried out to Lorentz type curve along the diametric intensity distributions of bright ring.By the full width at half maximum W of calculated curve, obtain the propagation distance (W of guided wave -1), corresponding to the imaginary part of propagation constant.
The advantage that the present invention compares with conventional art is:
1, simple in structure: microcobjective both had been used to focus on exciting light in this device, realized exciting various guided modes in microcell, also was used to collect fluorescence and carried out imaging.To the imaging of object lens back focal plane, utilize the propagation constant of all guided modes of the direct measurements and calculations of fluorescence picture by CCD, it is simple and compact for structure;
2, high-level efficiency: without carrying out angle scanning, directly by the method for imaging, measured, its Measuring Time is short, easy to operate, and efficiency is high; But while real-time dynamic monitoring extraneous factor, as the impact on the guided mode effective refractive index such as temperature, humidity;
3, high resolving power: utilize the high-NA characteristic of oil immersion microcobjective, can realize the high spatial resolution measurement;
4, pattern analysis is convenient: utilize ccd image sensor to observe bright ring radius and the light distribution thereof in fluoroscopic image, the propagation constant of the various guided modes of the Fitting Calculation.
The accompanying drawing explanation
The structural representation that Fig. 1 is a kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging of the present invention;
Fig. 2 is measurement procedure figure;
Fig. 3 is the fluorescence picture on the microcobjective back focal plane;
Fig. 4 is the fluorescence intensity distribution curve along (along diameter) each point on dotted line shown in Fig. 3
Wherein, 1, LASER Light Source; 2 extender lens groups; 3, beam splitter; 4, high-NA oil immersion microcobjective; 5, index-matching oil; 6, substrate of glass; 7, metallic film; 8, active thin polymer film; 9, optical filter; 10, convex lens; 11, ccd image sensor.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further described in detail, and label identical in accompanying drawing means identical parts all the time.
A kind of active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging with reference to shown in Fig. 1 comprises: LASER Light Source 1 (as wavelength 532nm laser instrument), extender lens group 2, beam splitter 3, high-NA oil immersion microcobjective 4 (hereinafter to be referred as microcobjective 4), index-matching oil 5, substrate of glass 6, metallic film 7, active thin polymer film 8 (in embodiment, active material is the dyestuff rhodamine B), optical filter 9, convex lens 10, ccd image sensor 11.Wherein, concrete measurement procedure is as Fig. 2.The preparation method of active polymer plane waveguide is, evaporation or the thick silverskin of sputter one deck 45nm on substrate of glass 6, rhodamine B powder (being active material) is dissolved in to the methyl phenyl ethers anisole solution of polymethylmethacrylate (PMMA), then be spun on the previous substrate of glass that deposits the 45nm silverskin and dry, being prepared into active polymer plane waveguide.The waveguide prepared is joined with microcobjective 4 (as 60X, N.A.=1.42) by the coupling oily 5 of refractive index 1.516, the 532nm laser that LASER Light Source 1 is launched, through extender lens group 2, make incident light expand the entrance pupil face that can cover whole microcobjective 4, after beam splitter 3 reflections, converge to fluorescence excitation molecular emission fluorescence on waveguiding structure through microcobjective 4, through microcobjective 4, collect, by optical filter 9 (as centre wavelength 580nm, the narrow band pass filter of bandwidth 10nm), elimination 532nm exciting light, only allow fluorescence pass through, and by convex lens 10, the fluorescence intensity on microcobjective 4 back focal planes is distributed and images in the photosurface of ccd image sensor 11, and then can obtain the fluorescence picture of object lens back focal plane.
As shown in Figure 3, based on first lap bright ring in above-mentioned condition and the formed visual field of parameter, its ratio with the visual field radius is 0.9436, and then learns that the angle that excites of this pattern is 61.83 °, the guided mode that corresponding effective refractive index is 1.34.The second circle bright ring radius and visual field radius ratio are 0.8232, and the angle that excites of this pattern is 50.27 °, the guided mode that corresponding effective refractive index is 1169.In like manner, innermost circle bright ring radius and visual field radius ratio are 0.7112, so the angle that excites of this pattern is 41.64 °, its effective refractive index is 1.01.
Further, the intensity distributions of bright ring is carried out to the Lorentz curve matching, be respectively 0.033K thereby calculate its full width at half maximum 0, 0.0182K 0, 0.0143K 0.Corresponding above-mentioned three kinds of patterns respectively, its spread length is respectively 2.80 μ m, 5.07 μ m and 6.46 μ m.
The part that the present invention does not elaborate belongs to techniques well known.Above embodiment is only in order to technical scheme of the present invention to be described but not be limited in the scope of embodiment; to those skilled in the art; as long as various variations claim limit and definite the spirit and scope of the present invention in; these variations are apparent, and all innovation and creation that utilize the present invention to conceive are all at the row of protection.

Claims (1)

1. the measuring method of the propagation constant of various guided modes in the slab guide of the active polymer plane waveguide propagation constant measuring instrument based on fluorescence imaging, this measuring instrument comprises: LASER Light Source (1), extender lens group (2), beam splitter (3), high-NA oil immersion microcobjective (4), index-matching oil (5), active polymer plane waveguide, optical filter (9), convex lens (10) and ccd image sensor (11); Wherein,
Active polymer plane waveguide is by substrate of glass (6), metallic film (7), the four-layer structure that active material thin polymer film (8) and top air layer form, its preparation process is: at the upper evaporation of substrate of glass (6) or sputtered metal film (7), and the polymer solution adulterated at the active material of the upper spin coating of metallic film (7), form active material thin polymer film (8), wherein, active material is fluorescence molecule;
It is characterized in that: LASER Light Source (1) institute Emission Lasers, by extender lens group (2), expand by beam splitter (3), high-NA oil immersion microcobjective (4), index-matching oil (5), with the wide range focusing radiation on active material thin polymer film (8), fluorescence molecule stimulated radiation fluorescence in active material thin polymer film, fluorescence is coupled into the guided wave be transmitted in slab guide, under some special angle, the portion of energy of the guided wave of transmission goes out waveguiding structure from substrate of glass one side compromising emanation, through high-NA oil immersion microcobjective (4), collect, by beam splitter (3), optical filter (9) and convex lens (10) present the bright ring of different radii size on ccd image sensor (11), these special angles are corresponding one by one with the bright ring radius on the back focal plane optical image, simultaneously corresponding one by one with the real part of the various mode propagation constants that exist in waveguiding structure, by the radius of bright ring in the analysis of fluorescence picture and known microcobjective numerical aperture, calculate the real part of guided mode propagation constant,
Calculate the imaginary part that obtains propagation constant by the reflection light field optical image on back focal plane, its the Fitting Calculation step is as follows: reading images, record is wherein along diametric fluorescence intensity distribution curve, and with Lorentz type curve to its matching, obtain the halfwidth of fluorescence intensity distribution curve on diametric(al), calculate spread length; It is corresponding to the imaginary part of guided mode propagation constant;
Described LASER Light Source (1), by after expanding, covers the entrance pupil of whole high-NA oil immersion microcobjective (4), takes full advantage of the high-NA of object lens, obtains the focal beam spot of reduced size, thereby improves the spatial resolution of measuring, and realizes the microcell measurement; Utilize this high-NA oil immersion microcobjective (4) to realize collection and the imaging to fluorescence signal simultaneously, simplified apparatus structure;
Exciting light focuses on and irradiates in active polymer plane waveguide through the aobvious thing micro mirror of high-NA oil immersion, make to be doped in active material fluorescence molecule emitting fluorescence wherein, utilize the method for imaging, take the intensity distribution image of fluorescence on the object lens back focal plane, by light distribution on image being analyzed to, is derived the propagation constant that is present in various guided modes in this slab guide; The propagation constant of guided mode comprises real part and imaginary part two parts, and real part is corresponding to the effective refractive index of guided mode, and imaginary part corresponding to this kind of pattern the spread length in waveguiding structure, concrete,
Described LASER Light Source, by designed light path, realize the waveguide of strong focusing irradiated plane, fluorescence excitation in microcell, fluorescence-conjugated becomes the guided wave transmitted in slab guide, due to the existence of glass of high refractive index substrate, under some specific angle, these guided waves are in the process of transmission, and some energy can be from substrate of glass one end compromising emanation to far field, and then are being positioned at the bright ring that produces various different radiis on oil immersion microcobjective back focal plane; Calculating the bright ring radius is half of peak-to-peak value and the ratio of visual field radius, and r=fnsin θ is the bright ring radius, the focal length that f is high-NA oil immersion microcobjective, and the refractive index that n is index-matching oil, θ is guided mode excites angle, R=fnsin θ mfor visual field radius, θ mmaximum visual angle, corresponding to the numerical aperture of high-NA oil immersion microcobjective, what calculate different guided modes excites angle or wave number, corresponding to the real part of propagation constant; Further, the fluorescence of radiation is carried out to Lorentz type curve along the diametric intensity distributions of bright ring, by the full width at half maximum W of calculated curve, obtain the propagation distance (W of guided wave -1), corresponding to the imaginary part of propagation constant.
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