CN210555719U

CN210555719U - Cap screwing device

Info

Publication number: CN210555719U
Application number: CN201920934564.0U
Authority: CN
Inventors: 陈炳旭; 鲁建国; 彭启元; 叶启达; 张绍赐
Original assignee: Marketech International Corp
Current assignee: Marketech International Corp
Priority date: 2019-06-20
Filing date: 2019-06-20
Publication date: 2020-05-19
Anticipated expiration: 2029-06-20

Abstract

A cap screwing device comprises a cap screwing device, a liquid conveyor and an optical detector. The liquid conveyer is arranged at one side of the cap screwing device, and the optical detector is arranged between the cap screwing device and the liquid conveyer. The optical detector is used for detecting the position of the sealing cover of the chemical barrel so as to enable the cap screwing device to be aligned to the sealing cover, the sealing cover is opened by the cap screwing device, and then the chemical liquid is transmitted by the liquid conveyor so as to be convenient for replacing the chemical storage barrel.

Description

Cap screwing device

Technical Field

The utility model relates to a spiral cover device. In particular to a multifunctional cap screwing device.

Background

With the rapid development of the semiconductor market at home and abroad due to the demand of computer and peripheral product materials, the semiconductor industry is continuously expanded, and a large amount of foreign exchange income is created for the country.

The fabrication process of semiconductor devices is very complex, and the related technologies cover almost all the most important and critical technologies and new types in recent scientific development of human beings. Therefore, the production of semiconductor devices is not only a sophisticated technology industry, but also a capital intensive need to maintain the need for development.

However, as semiconductor devices are increasingly designed to be more complex, the manufacturing technology of the semiconductor devices is becoming more sophisticated and complex, and the potential occupational hazards and property losses are becoming more complex, and although the storage and usage of chemicals commonly used in units of the manufacturing processes such as epitaxy, diffusion, ion implantation, chemical vapor deposition, etching and photolithography during the semiconductor manufacturing process are much smaller than those handled and used in the chemical or petrochemical industry, due to the characteristics of ignitability, flammability, toxicity, corrosivity, etc., once leakage or abnormal operation occurs, casualties are also caused, and even significant property losses may be caused.

In a semiconductor factory, chemical liquid is stored in chemical storage tanks and used by connecting to supply lines in the factory. When the chemical liquid is used up, the chemical storage barrel needs to be replaced.

How to conveniently replace the chemical storage barrel is helpful for improving the working safety of the semiconductor factory and further is helpful for improving the overall productivity of the semiconductor factory.

Disclosure of Invention

The novel summary is intended to provide a simplified summary of the disclosure in order to provide a basic understanding to the reader. This summary is not an extensive overview of the disclosure and is intended to neither identify key/critical elements of the embodiments nor delineate the scope of the embodiments.

It is an object of the present invention to provide a cap screwing device that can easily open or close the sealing cap of a chemical storage barrel to improve the safety and convenience of replacing the chemical storage barrel.

To achieve the above objective, one aspect of the present invention relates to a cap screwing device, which includes a cap screwing device, a liquid conveyer and an optical detector. The liquid conveyer is arranged at one side of the cap screwing device, and the optical detector is arranged between the cap screwing device and the liquid conveyer. The optical detector is used for detecting the position of the sealing cover of the chemical barrel so as to enable the cap screwing device to be aligned to the sealing cover, the sealing cover is opened by the cap screwing device, and then the chemical liquid is transmitted by the liquid conveyor.

In some embodiments, the liquid transporter includes a liquid extractor to extract the chemical liquid.

In some embodiments, the liquid delivery device includes a liquid reflux device to reflux the chemical liquid to the chemical tank.

In some embodiments, the cap screwing device further comprises a fixing plate, two up-and-down moving devices and two horizontal moving devices. The two up-down moving devices are respectively connected between the fixing plate and the cap screwing device and between the fixing plate and the liquid conveyor to respectively move the cap screwing device and the liquid conveyor up and down. The two horizontal moving devices are connected with the fixed plate so that the fixed plate can move horizontally.

In some embodiments, the capping device further comprises a separation plate and two elastic separation covers, wherein the two elastic separation covers are connected between the separation plate and the fixing plate to separate the chemical gas volatilized by the chemical barrel.

In some embodiments, the capping device further comprises a first motor coupled to the liquid delivery device to couple the liquid delivery device to the opening of the chemical vat. The cover screwing device also comprises a second motor which is connected with the cover screwing device so as to open or close the sealing cover from the opening of the chemical barrel by utilizing the cover screwing device.

In some embodiments, the first motor and the second motor are torque motors and the actual torque value can be detected.

In some embodiments, the screw cap device further comprises a liquid delivery pipe connected to the liquid conveyer to directly deliver the chemical liquid from the opening of the chemical barrel.

In some embodiments, the up-and-down moving device comprises a pneumatic cylinder and a position detector respectively, so as to detect the working position of the pneumatic cylinder.

In some embodiments, the screw-on cap and the liquid delivery device may select a corresponding cap-off joint according to the form of the sealing cap of the chemical bucket.

In summary, the capping device can precisely align the chemical barrel with the optical detector, open or close the sealing cap on the chemical barrel with the capping device, and connect the opened opening of the sealing cap with the liquid conveyor. The cap screwing device can further utilize the liquid conveying pipe to directly suck the chemical liquid from the chemical barrel, so that the contact points are reduced, and the leakage and the pollution of the chemical liquid are avoided. In addition, the cap screwing device can further utilize the torque value of the torque motor and a position detector to ensure the accuracy and the safety of opening and closing the sealing cap.

Drawings

The foregoing and other objects, features, advantages and embodiments of the disclosure will be more readily understood from the following description taken in conjunction with the accompanying drawings in which:

fig. 1 is a schematic view illustrating a cap screwing device applied to a multifunctional cap changing module according to an embodiment of the present invention.

Fig. 2 is a schematic view illustrating a cap screwing device applied to another multifunctional cap changing module according to an embodiment of the present invention.

Fig. 3 is a schematic view illustrating a cap screwing device applied to a cap screwing module according to an embodiment of the present invention.

Fig. 4 is a schematic view of a cap screwing device according to an embodiment of the present invention.

[ description of main reference symbols ]

100: the multifunctional cover changing module 110: rotary cover module

112: the seal wall 120: rotary cover module

130: capping module support 210: rotary cover module

230: screw-on module holder 300: rotary cover module

310: screw-cap module center column 320: first cap screwing device

322: the cap screwing device 324: liquid conveyer

326: the optical detector 328: liquid delivery pipe

330: the second cap screwing device 332: cap screwing device

334: liquid conveyor 336: optical detector

338: liquid delivery pipe 340: ventilating duct

342: air inlet 346: air outlet

350: the partition plate 360: substrate

370: the elastic isolation cover 380: up-down moving device

385: horizontal movement device 390: fixing plate

410: first motor 420: second motor

430: the position detector 500: chemical barrel containing device

510: the support frame 520: chemical barrel

522: sealing cover 524: sealing cover

530: chemical barrel 532: sealing cover

534: sealing cover

Detailed Description

The following detailed description of the embodiments with reference to the drawings is provided for the purpose of limiting the scope of the present disclosure, and the description of the structural operations is not intended to limit the order of execution, any structures described by the combination of elements, or the like, to the extent that they provide equivalent functionality. In addition, the drawings are for illustrative purposes only and are not drawn to scale. For ease of understanding, the same or similar components will be described with the same reference numerals in the following description.

Further, the terms (terms) used throughout the specification and claims have the ordinary meaning as commonly understood in the art, in the disclosure herein and in the claims, unless otherwise indicated. Certain terms used to describe the present disclosure will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present disclosure.

In the description and claims, unless the context requires otherwise, the word "a" or "an" may mean "one or more". The numbers used in the steps are only used for indicating the steps for convenience of description, and are not used for limiting the sequence and the implementation manner.

Furthermore, the terms "comprising," "including," "having," "containing," and the like, as used herein, are intended to be open-ended terms that mean including, but not limited to.

Referring to fig. 1-4, fig. 1 is a schematic view of a capping device applied to a multi-functional capping module, fig. 2 is a schematic view of a capping device applied to another multi-functional capping module, fig. 3 is a schematic view of a capping device applied to a capping module, and fig. 4 is a schematic view of a capping device.

Referring first to fig. 1, as shown therein, the multi-functional module 100 includes a capping module support 130, a capping module 110, and another capping module 120. The capping module 110 and the other capping module 120 are installed below the capping module supporter 130, and the capping module supporter 130 is installed above the chemical bucket container 500. The chemical barrel housing apparatus 500 includes a support frame 510 for housing at least one chemical barrel, such as a chemical barrel 520 and a chemical barrel 530, and the capping module support 130 may be additionally disposed above the support frame 510.

Referring to fig. 3, as shown in the drawing, the capping module 300 can be applied to the capping

modules

110 and 120 in fig. 1, and the capping module 300 includes more than one set of capping devices, such as the first capping device 320 and the second capping device 330 shown in the drawing, wherein the first capping device 320 can open the sealing cap 532 of the chemical tank 530 and extract the chemical liquid from the chemical tank 530, and the second capping device 330 can open the other sealing cap 534 of the chemical tank 530 and allow the chemical liquid to flow back to the chemical tank 530, so as to provide the chemical liquid required by the manufacturing process in the factory. Both the first capping device 320 and the second capping device 330 may have the same structure so as to provide the chemical liquid required for the manufacturing process in the factory.

In addition, the capping module 300 further comprises a substrate 360 and a capping module center post 310 connected to the substrate 360, wherein the first capping device 320 and the second capping device 330 are movably mounted on the substrate 360.

In some embodiments, the multi-function module 100 further comprises a fixing plate 390, an up-down moving device 380, and a horizontal moving device 385. The up-down moving device 380, such as a cylinder or a hydraulic cylinder, is connected between the fixing plate 390 and the first cap screwing device 320 or the second cap screwing device 330 for moving the first cap screwing device 320 or the second cap screwing device 330 up and down, and the horizontal moving device 385 is disposed between the fixing plate 390 and the base plate 360 for enabling the first cap screwing device 320 or the second cap screwing device 330 to move horizontally.

In some embodiments, the first capping device 320 comprises a capping unit 322, a liquid delivery unit 324, an optical detector 326, and a liquid delivery pipe 328. The liquid transporter 324 is, for example, a liquid extractor. The optical detector 326 detects the position of the sealing cap 532 of the chemical tank 530, so that the cap rotator 322 can be accurately aligned with the sealing cap 532, the sealing cap 532 is opened by the cap rotator 322, the liquid conveyor 324 is moved to the position of the sealing cap 532 and sealed, and the chemical liquid is pumped by the liquid conveyor 324 and then conveyed to the machines in the factory building through the liquid conveying pipe 328 for use.

In some embodiments, the second capping device 330 comprises a capping unit 332, a liquid delivery unit 334, an optical detector 336, and a liquid delivery tube 338. Liquid transporter 334 is, for example, a liquid reflux vessel. The optical detector 336 of the second capping device 330 can detect the position of another sealing cover 534 of the chemical tank 530, so that the capping device 332 of the second capping device 330 is aligned with the other sealing cover 534, the sealing cover 534 is opened by the capping device 332 of the second capping device 330, the liquid conveyer 334 is moved to the position of the sealing cover 534 and sealed, and the chemical liquid is returned to the chemical tank 530 by the liquid conveyer 334.

Referring to fig. 4, as shown in the drawings, taking the second cap screwing device 330 as an example, the second cap screwing device 330 further comprises a first motor 410 and a second motor 420. The first motor 410 is connected to the liquid transporter 334 to connect the liquid transporter 334 to the opening of the chemical tub 530. The second motor 420 is connected to the cap driver 332 to open or close the sealing cap 532 from the opening of the chemical tank 530 using the cap driver 332.

In some embodiments, the first motor 410 and the second motor 420 are torque motors, which can precisely control the opening and closing of the sealing cap 532 by the cap driver 332 and the liquid transporter 334, and when the sealing cap 532 is closed, the torque motors can correctly seal the opening of the sealing cap 532 in the chemical tank 530 when a predetermined torque is reached.

In some embodiments, the second cap screwing device 330 further comprises a liquid conveying pipe 338 connected to the liquid conveyer 334 for directly conveying the chemical liquid from the opening of the chemical tank 530, so as to avoid the occurrence of leakage of the chemical liquid and the like, and effectively reduce the pollution of the factory building.

In some embodiments, the first cap screwing device 320 and the second cap screwing device 330 use two sets of same or similar components to extract and reflow the chemical liquid, however, the present invention is not limited thereto, and the first cap screwing device 320 and the second cap screwing device 330 may also use two sets of components with different structures to extract and reflow the chemical liquid, without departing from the spirit and scope of the present invention.

In some embodiments, the cap screw 322 and the liquid feeder 324 have independent up-and-down moving devices 380 to control the up-and-down movement of the cap screw 322 and the liquid feeder 324, respectively. In addition, the cap screwing device 332 and the liquid delivering device 334 are also provided with independent up-down moving devices 380 respectively to control the up-down movement of the cap screwing device 332 and the liquid delivering device 334 respectively.

Referring to fig. 4, as shown in the drawing, the up-down moving device 380 is composed of a pneumatic cylinder and a position detector 430, and the position detector 430 can detect the actual working position of the pneumatic cylinder to more accurately determine whether the sealing cover 532 is correctly opened or closed from the opening of the chemical barrel 530, taking the second cap screwing device 330 as an example.

In some embodiments, the multi-function cap-changing module 100 further comprises a spacer 350 and a resilient spacer 370. The partition 350 has two openings for passing the screw cap 322 and the liquid feeder 324, or the screw cap 332 and the liquid feeder 334, respectively. The elastic isolation cover 370 connects the isolation plate 350 and the substrate 360 to prevent the chemical gas volatilized from the chemical barrel 530 from directly contacting the internal components of the capping module 300, thereby causing corrosion or contamination. The isolation plate 350 of the first cap screwing device 320 and the isolation plate 350 of the second cap screwing device 330 have the same shape and function, which are not shown here, so as to expose the components therein.

In some embodiments, referring to fig. 1, the multi-functional lid-changing module 100 effectively isolates the volatilized chemical gas from the internal components of the lid-turning module 110 and the lid-turning module 120 of the multi-functional lid-changing module 100 by using the substrate 360, the isolation plate 350 and the elastic isolation cover 370, thereby increasing the safety and stability of the multi-functional lid-changing module 100 in use. In addition, the capping module 110 further has a sealing wall 112 connecting the substrate 360 to prevent the volatilized chemical gas from contacting the inner components of the capping module 110 and the capping module 120 of the multi-functional capping module 100, thereby increasing the safety and stability of the multi-functional capping module 100 in use. The capping module 120 is not shown with a sealing wall to expose the internal components, so as to facilitate the description and understanding of the internal components of the capping module 110 and the capping module 120.

In some embodiments, the central column 310 of the capping module comprises a ventilation duct 340 having an air inlet 342 located in the substrate 360 and an air outlet 346 connected to an external air exhaust device to draw the chemical gas volatilized from the chemical barrels 520 and 530 away from the capping module 300, so as to avoid contamination and corrosion and prolong the service life of the multi-functional capping module 100.

In some embodiments, the capping module center post 310 may be rotated to facilitate positioning and uncapping of the first capping device 320 or the second capping device 330 to draw and reflow the chemical liquid.

Referring to fig. 2, the multi-functional module 200 utilizes a single capping module 210, and uses a horizontal moving module disposed in the capping module supporter 230 to move the capping module 210 between a plurality of chemical tanks, such as a chemical tank 520 and a chemical tank 530, and align them for performing the required chemical liquid extraction and backflow. Compared with the multifunctional cover changing module 100 shown in fig. 1, the multifunctional cover changing module 100 adopts a plurality of cover screwing modules to respectively connect with a plurality of chemical barrels so as to respectively extract and reflux the required chemical liquid. The multifunctional cover changing module 200 adopts a single cover turning module, and one of the chemical tanks is selectively connected to extract and return the required chemical liquid.

In some embodiments, the cap screw 332 and the front end of the liquid transporter 334 have a cap-opening joint, which can be selected flexibly according to the form of the sealing cap 532 of the chemical tank 530, without departing from the spirit and scope of the present invention.

In summary, the capping device can precisely align the chemical barrel with the optical detector, open or close the sealing cap on the chemical barrel with the capping device, and connect the opened opening of the sealing cap with the liquid conveyor. The cap screwing device can further utilize the liquid conveying pipe to directly suck the chemical liquid from the chemical barrel, so that the contact points are reduced, and the leakage and the pollution of the chemical liquid are avoided. In addition, the cap screwing device can further utilize a torque motor and a position detector to ensure the correctness and the safety of opening and closing the sealing cap.

The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above description, and although the present invention has been disclosed with the preferred embodiment, it is not limited to the present invention, and any skilled person in the art can make modifications or changes equivalent to the equivalent embodiment of the above embodiments without departing from the scope of the present invention, but all the modifications, changes and modifications of the above embodiments by the technical spirit of the present invention are within the scope of the present invention.

Claims

1. A capping device, comprising:

a cap screwing device;

the liquid conveyer is arranged on one side of the cap screwing device; and

the optical detector is arranged between the cap screwing device and the liquid conveyor, and is used for detecting the position of the sealing cover of the chemical barrel so as to enable the cap screwing device to be aligned with the sealing cover, opening the sealing cover by utilizing the cap screwing device and then conveying chemical liquid by the liquid conveyor.

2. The capping device of claim 1, wherein: wherein the liquid transporter comprises a liquid extractor to extract the chemical liquid.

3. The capping device of claim 1, wherein: wherein the liquid conveyor comprises a liquid reflux device for refluxing the chemical liquid to the chemical barrel.

4. The capping device of claim 1 further comprising:

a fixing plate;

two up-down moving devices respectively connected between the fixing plate and the cap screwing device and between the fixing plate and the liquid conveyor to respectively move the cap screwing device and the liquid conveyor up and down; and

two horizontal moving devices connected to the fixing plate to make the fixing plate move horizontally.

5. The capping device of claim 4 further comprising:

a separator plate; and

two elastic isolation covers connected to the isolation plate and the fixing plate to isolate the chemical gas volatilized by the chemical barrel.

6. The capping device of claim 5 wherein: also included is a first motor coupled to the liquid conveyor to couple the liquid conveyor to the opening of the chemical vat.

7. The capping device of claim 6, wherein: the second motor is connected with the cap screwing device so as to open or close the sealing cap from the opening of the chemical barrel by using the cap screwing device.

8. The capping device of claim 7, wherein: wherein the first motor and the second motor are torque motors.

9. The capping device of claim 8, wherein: and the liquid conveying pipe is connected to the liquid conveyer so as to directly convey the chemical liquid from the opening of the chemical barrel.

10. A capping device according to claim 9, wherein: the up-down moving device comprises a pneumatic cylinder and a position detector respectively to detect the working position of the pneumatic cylinder, and the cap screwing device and the liquid conveyor select a corresponding cap opening joint according to the form of the sealing cap of the chemical barrel.