CN113619936A

CN113619936A - Integrated cap screwing equipment

Info

Publication number: CN113619936A
Application number: CN202010372958.9A
Authority: CN
Inventors: 陈炳旭; 鲁建国; 张绍赐
Original assignee: Marketech International Corp
Current assignee: Marketech International Corp
Priority date: 2020-05-06
Filing date: 2020-05-06
Publication date: 2021-11-09

Abstract

An integrated cap screwing device comprises a cap screwing module supporter and a cap screwing module. The cap-rotating module includes a cap-rotating device, an integrated adapter device and an optical detector. The cap screwing device is used for opening the sealing cap of at least one chemical storage container, and the integrated pipe connecting device is used for connecting the opening of the chemical storage container so as to extract the chemical liquid from the chemical storage container and make the chemical liquid flow back to the chemical storage container. The optical detector is arranged between the cap screwing device and the integrated adapter device and is used for detecting the position of the sealing cover of the chemical storage container so as to respectively align the cap screwing device and the integrated adapter device with the sealing cover and the opening, and the sealing cover is opened by utilizing the cap screwing device so as to further extract the chemical liquid by utilizing the integrated adapter device.

Description

Integrated cap screwing equipment

Technical Field

The invention relates to a cap screwing device. In particular, to an integrated capping device.

Background

With the rapid development of the semiconductor market at home and abroad due to the demand of computer and peripheral product materials, the semiconductor industry is continuously expanded, and a large amount of foreign exchange income is created for the country.

The fabrication process of semiconductor devices is very complex, and the related technologies cover almost all the most important and critical technologies and inventions in human modern scientific development. Therefore, the production of semiconductor devices is not only a sophisticated technology industry, but also a capital intensive need to maintain the development of the industry.

However, as the design of semiconductor devices is becoming more complex, the manufacturing technology of semiconductor devices is becoming more precise and complex, and the potential occupational hazards and property loss are becoming more complex, and although the storage amount and usage amount of chemicals commonly used in the processing units of epitaxy, diffusion, ion implantation, chemical vapor deposition, etching, and photolithography in the semiconductor manufacturing process are far less than those handled and used in the chemical or petrochemical industry, due to the characteristics of ignitability, flammability, toxicity, corrosivity, etc., once leakage or abnormal operation occurs, casualties are also caused, and even significant property loss may be caused.

In a semiconductor factory, chemical liquids are stored in chemical storage containers and used in connection with supply lines in the factory. When the chemical liquid is used up, the chemical storage barrel needs to be replaced.

How to conveniently replace the chemical storage container is helpful to improve the safety of the work of the semiconductor factory and is more helpful to improve the overall productivity of the semiconductor factory.

Disclosure of Invention

This summary is provided to provide a simplified summary of the disclosure in order to provide a basic understanding to the reader. This summary is not an extensive overview of the disclosure and is intended to neither identify key/critical elements of the embodiments nor delineate the scope of the embodiments.

An objective of the present invention is to provide an integrated capping device, which can facilitate the replacement of a chemical storage container, thereby improving the safety and convenience of replacing the chemical storage container.

To achieve the above objects, an aspect of the present invention relates to an integrated capping apparatus, which includes a capping module supporter and a capping module installed on the capping module supporter. The cap-rotating module includes a cap-rotating device, an integrated adapter device and an optical detector.

The cap screwing device is used for opening the sealing cap of at least one chemical storage container, and the integrated pipe connecting device is used for connecting the opening of the chemical storage container so as to extract the chemical liquid from the chemical storage container and make the chemical liquid flow back to the chemical storage container. In addition, the optical detector is arranged between the cap screwing device and the integrated adapter device, wherein the optical detector is used for detecting the position of the sealing cover of the chemical storage container so as to respectively align the cap screwing device and the integrated adapter device with the sealing cover and the opening, the sealing cover is opened by using the cap screwing device, and then the chemical liquid is extracted by using the integrated adapter device.

In some embodiments, the integrated adapter device comprises an integrated connector, a liquid suction pipe connected to the integrated connector, a liquid return pipe connected to the integrated connector, and a gas input pipe connected to the integrated connector.

In some embodiments, the liquid withdrawal line, the liquid return line, and the gas inlet line each include a check valve.

In some embodiments, the capping module support comprises a horizontal movement module to move the capping module between the plurality of chemical storage containers and align one of the plurality of chemical storage containers.

In some embodiments, the plurality of capping modules respectively correspond to the plurality of chemical storage containers to respectively extract the chemical liquids in the chemical storage containers.

In some embodiments, the capping module support comprises a horizontal motion module to align the capping module with the chemical storage container, and the chemical storage container is a ton-square barrel.

In some embodiments, the integrated capping apparatus further comprises a chemical storage container accommodating device, the chemical storage container accommodating device comprises a support frame for accommodating a ton square barrel, and the capping module support is disposed above the support frame.

In some embodiments, the capping device comprises a cap screw, wherein the optical detector is configured to detect a position of a sealing cap of the chemical storage container, align the cap screw with the sealing cap, and open the sealing cap using the cap screw.

In some embodiments, the integrated capping apparatus further comprises a fixing plate, a vertical moving device and a horizontal moving device. The up-down moving device is connected between the fixing plate and the cap screwing device or the integrated pipe connecting device and is used for moving the cap screwing device or the integrated pipe connecting device up and down, and the horizontal moving device is connected between the fixing plate and the base plate so as to enable the cap screwing device or the integrated pipe connecting device to move horizontally.

In some embodiments, the integrated capping device further comprises a spacer and a flexible spacer. The elastic isolation cover is connected to the isolation plate and the substrate to isolate the chemical gas volatilized by the chemical storage container.

In summary, the integrated capping apparatus can be safely and reliably disposed above the existing chemical storage container, and the chemical liquid in the chemical storage container can be used by using the capping device and the integrated adapter device. The single integrated adapter device can perform the extraction and the backflow of the chemical liquid, and can provide the required gas at the same time. In addition, the integrated cap screwing equipment can further utilize the cap screwing module to extract and reflux liquid of one ton of square barrel.

Drawings

The foregoing and other objects, features, advantages and embodiments of the disclosure will be more readily understood from the following description taken in conjunction with the accompanying drawings in which:

fig. 1 is a schematic diagram illustrating an integrated capping apparatus according to an embodiment of the invention.

Fig. 2 is a schematic diagram of an integrated capping apparatus according to another embodiment of the present invention.

Fig. 3 is a schematic diagram illustrating a capping module of an integrated capping apparatus according to an embodiment of the invention.

Fig. 4 is a schematic view illustrating an integrated adapter of an integrated capping apparatus according to an embodiment of the invention.

Fig. 5 is a schematic diagram illustrating an integrated capping apparatus according to another embodiment of the present invention.

[ description of main element symbols ]

100: integrated capping device 110: rotary cover module

112: the seal wall 120: rotary cover module

130: screw-on module holder 200: integrated cap screwing equipment

210: the cap screwing module 230: spiral cover module supporter

232: the horizontal movement module 300: rotary cover module

310: screw-cap module center column 320: cap screwing device

322: cap screwing device 326: optical detector

330: integrated take-over device 334: integrated connector

336: gas input pipe 338: liquid extraction tube

339: liquid return pipe 340: ventilating duct

342: air inlet 346: air outlet

350: the partition plate 360: substrate

370: the elastic isolation cover 380: up-down moving device

385: horizontal movement device 390: fixing plate

400: integrated take-over device 410: liquid extraction tube

412: check valve 420: liquid return pipe

422: check valve 430: gas input pipe

432: check valve 440: integrated connector

500: chemical storage container housing apparatus 510: supporting frame

520: chemical barrel 522: sealing cover

530: chemical barrel 532: sealing cover

600: integrated capping device 610: rotary cover module

612: the cap screwing device 614: integrated pipe connecting device

630: capping module support 632: horizontal moving module

700: chemical storage container housing apparatus 710: supporting frame

720: chemical storage container 722: sealing cover

Detailed Description

The following detailed description of the embodiments with reference to the drawings is provided for the purpose of limiting the scope of the present disclosure, and the description of the structural operations is not intended to limit the order of execution, any structures resulting from the rearrangement of elements to produce an apparatus with equal efficacy, which is within the scope of the present disclosure. In addition, the drawings are for illustrative purposes only and are not drawn to scale. For ease of understanding, the same or similar elements will be described with the same reference numerals in the following description.

Further, the terms (terms) used throughout the specification and claims have the ordinary meaning as commonly understood in the art, in the disclosure herein and in the claims, unless otherwise indicated. Certain terms used to describe the present disclosure will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present disclosure.

In the description and claims, unless the context requires otherwise, the word "a" or "an" may mean "one or more". The numbers used in the steps are only used for indicating the steps for convenience of description, and are not used for limiting the sequence and the implementation manner.

Furthermore, the terms "comprising," "including," "having," "containing," and the like, as used herein, are intended to be open-ended terms that mean including, but not limited to.

Fig. 1 is a schematic diagram illustrating an integrated capping apparatus according to an embodiment of the present invention. Fig. 2 is a schematic diagram of an integrated capping apparatus according to another embodiment of the present invention. Fig. 3 is a schematic diagram of a capping module of the integrated capping apparatus. Fig. 4 is a schematic view of an integrated adapter of an integrated capping apparatus. Fig. 5 is a schematic diagram illustrating an integrated capping apparatus according to another embodiment of the present invention.

Referring first to fig. 1, as shown in the drawings, the integrated capping apparatus 100 includes a capping module support 130, a capping module 110 and another capping module 120. The capping module 110 and the other capping module 120 are mounted below the capping module support 130, and the capping module support 130 is mounted above the chemical storage container accommodating device 500. The chemical storage container accommodating apparatus 500 includes a support frame 510 for accommodating at least one chemical barrel, such as a chemical barrel 520 and a chemical barrel 530, and the capping module support 130 may be additionally disposed above the support frame 510.

Referring further to fig. 3, a capping module 300, which may be applied to the capping

modules

110 and 120 of fig. 1, is shown, wherein the capping module 300 includes a capping device 320, an integrated adapter 330, and an optical detector 326. The cap screwing device 320 can open the sealing cap 532 of the chemical barrel 530, and the integrated pipe connecting device 330 can be connected to the opening of the chemical barrel 530 with the sealing cap 532 opened, and can draw the chemical liquid from the chemical barrel 530 and also can make the chemical liquid flow back to the chemical barrel 530, so as to provide the chemical liquid required by the production process in the factory building. In addition, the integrated adapter 330 may further provide a gas, such as nitrogen or clean air (CDA), to the chemical tank 530 to balance the pressure inside and outside the chemical tank 530.

In some embodiments, the cap screwing device 320 comprises a cap screwing device 322. The optical detector 326 is used to detect the position of the sealing cap 532 of the chemical barrel 530, so that the cap screwing device 322 can be accurately aligned with the sealing cap 532, and the liquid extraction tube of the sealing cap 532 can be opened by the cap screwing device 322.

In some embodiments, the integrated adapter 330 includes a liquid extraction line 338, a liquid return line 339, and a gas input line 336. The liquid extraction pipe 338 extracts the chemical liquid and transmits the chemical liquid to the machine in the factory for use, and the liquid return pipe 339 can return the surplus chemical liquid to the chemical barrel 530. In addition, the gas inlet pipe 336 can provide nitrogen or clean air (CDA) to the chemical tank 530 to balance the pressure inside and outside the chemical tank 530.

The optical detector 326 is disposed between the cap screwing device 320 and the integrated pipe connecting device 330, and is used for detecting the position of the sealing cap 532 of the chemical barrel 530, so that the cap screwing device 322 can accurately align with the sealing cap 532, the sealing cap 532 is opened by using the cap screwing device 322, the integrated pipe connecting device 330 is moved to the opening of the sealing cap 532, the integrated pipe connecting device 330 is sealed with the opening, the chemical liquid is extracted by the liquid extracting pipe 338 and sent to a machine in a factory for use, and the liquid return pipe 339 can return the redundant chemical liquid to the chemical barrel 530. In addition, the gas inlet pipe 336 can provide nitrogen or clean air (CDA) to the chemical tank 530 to balance the pressure inside and outside the chemical tank 530.

In addition, the capping module 300 further comprises a base plate 360 and a capping module center post 310 connected to the base plate 360, wherein the capping device 320 and the integrated adapter device 330 are movably mounted on the base plate 360.

In some embodiments, the capping module 300 further comprises a fixing plate 390, an up-down moving device 380, and a horizontal moving device 385. The up-and-down moving device 380, such as a cylinder or a hydraulic cylinder, is connected between the fixing plate 390 and the cap-rotating device 320 or the integrated adapter 330 for moving the cap-rotating device 320 or the integrated adapter 330 up and down, and the horizontal moving device 385 is disposed between the fixing plate 390 and the base plate 360 for moving the cap-rotating device 320 or the integrated adapter 330 horizontally.

Referring to fig. 4, a schematic diagram of an integrated adapter of an integrated capping apparatus is shown. The integrated adapter device 400 includes an integrated connector 440 that is connected to an opening of a chemical storage container. In addition, the integrated adapter 400 further comprises a liquid suction pipe 410, a liquid return pipe 420 and a gas input pipe 430, which are respectively connected to the integrated connector 440 and are connected to the opening of the chemical storage container. In some embodiments, the liquid extraction line 410, the liquid return line 420, and the gas input line 430 include

check valves

412, 422, and 432, respectively, to prevent the liquid and gas from flowing in the opposite direction, thereby ensuring the quality of the chemical liquid required for production.

In some embodiments, the cap screwing device 320 and the integrated nozzle assembly 330 have independent up-and-down moving devices 380 respectively for controlling the up-and-down movement of the cap screwing device 320 and the integrated nozzle assembly 330 respectively. In addition, the upper and lower moving devices 380 can be used together with the integrated connectors of the cap screwing device 320 and the integrated adapter device 330 to control the upper and lower movement of the integrated connectors of the cap screwing device 320 and the integrated adapter device 330.

In some embodiments, the integrated capping apparatus 100 further comprises a spacer 350 and a resilient spacer 370. The partition 350 has openings for the screw cap 322, or the integrated connector 334, to pass through, respectively. The elastic isolation cover 370 connects the isolation plate 350 and the substrate 360 to prevent the chemical gas volatilized from the chemical barrel 530 from directly contacting the internal components of the capping module 300, thereby causing corrosion or contamination. The isolation plate 350 of the integrated adapter device 330 and the isolation plate 350 of the cap screwing device 320 may have the same shape and function, which are not shown here to expose the components therein, however, the invention is not limited thereto.

In some embodiments, referring to fig. 1, the integrated capping apparatus 100 utilizes the substrate 360, the isolation plate 350 and the elastic isolation cover 370 to effectively isolate the volatilized chemical gas from the internal components of the capping module 110 and the capping module 120 of the integrated capping apparatus 100, thereby increasing the safety and stability of the integrated capping apparatus 100 in use. In addition, the capping module 110 further has a sealing wall 112 connected to the substrate 360 to prevent the volatilized chemical gas from contacting the internal components of the capping module 110 and the capping module 120 of the integrated capping apparatus 100, thereby increasing the safety and stability of the integrated capping apparatus 100 in use. The capping module 120 is not shown to expose the internal components, so as to facilitate the description and understanding of the internal components of the capping module 110 and the capping module 120.

In some embodiments, the central column 310 of the capping module comprises a ventilation duct 340 having an air inlet 342 located in the substrate 360 and an air outlet 346 connected to an external air exhaust device to draw the chemical gas volatilized from the chemical barrels 520 and 530 away from the capping module 300, thereby avoiding contamination and corrosion and prolonging the service life of the integrated capping device 100.

In some embodiments, the flip module center post 310 may be rotated to facilitate positioning and uncapping of the flip device 320 or the integrated adapter device 330 to draw and reflow the chemical liquid.

Referring to fig. 2, the integrated capping apparatus 200 utilizes a single capping module 210, and a horizontal movement module 232 disposed in a capping module support 230, so that the capping module 210 can move between a plurality of chemical tanks, such as a chemical tank 520 and a chemical tank 530, and align with one of them to perform the required chemical liquid extraction and backflow. Compared to the integrated capping apparatus 100 shown in fig. 1, the integrated capping apparatus 100 employs a plurality of capping modules respectively connected to a plurality of chemical tanks to respectively extract and reflux the chemical liquids. The integrated capping apparatus 200 employs a single capping module selectively connected to one of a plurality of chemical tanks to extract and reflux the desired chemical liquid.

Referring to fig. 5, as shown in the drawings, the integrated capping apparatus 600 uses a capping module 610, and a horizontal moving module 632 disposed in a capping module supporter 630, so that the capping module 610 can align with a sealing cap 722 of a chemical storage container 720, and the capping device 612 opens the sealing cap 722, and then the integrated pipe adapter 614 is connected to an opening of the chemical storage container 720 to extract and reflux a desired chemical liquid and provide gas to balance the internal and external pressures of the chemical storage container 720.

In some embodiments, the screw-on lid module support 630 is mounted on the support frame 710 of the chemical storage container housing apparatus 700, and may also be mounted on the top of a building structure for storing the chemical storage container 720, such as the top ceiling of a chemical storage room, and the chemical storage container 720 is mounted on the floor of the building structure for replacement of the chemical storage container 720 and extraction of chemical liquid. The chemical storage Container 720 may be an Intermediate Bulk Container (IBC), which has the advantages of large capacity, light weight, high strength, acid and alkali resistance, corrosion resistance, space saving, and safe storage, and is used for transporting and storing chemical liquids, so as to facilitate transportation and use of a large amount of chemical liquids in a factory.

In summary, the integrated capping apparatus can be safely and reliably disposed above the existing chemical storage container, and the chemical liquid in the chemical storage container can be used by using the capping device and the integrated adapter device. The single integrated adapter device can perform the sucking and the backflow of the chemical liquid, and can provide the required gas at the same time. In addition, the integrated cap screwing apparatus can also be disposed in a dedicated chemical storage container accommodating device to use the chemical liquid in the chemical barrel, without departing from the spirit and scope of the present invention. In addition, the integrated capping device may further utilize a single capping module to perform liquid extraction and backflow for a plurality of chemical tanks, or a plurality of capping modules may perform liquid extraction and backflow for a plurality of chemical tanks simultaneously, without departing from the spirit and scope of the present invention. In addition, the integrated cap screwing device can further utilize the cap screwing module to perform liquid extraction and backflow of one ton of square barrels, and the spirit and the scope of the invention are not deviated.

While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. An integrated capping apparatus, comprising:

a capping module support; and

at least one spiral cover module, install in this spiral cover module supporter, wherein this spiral cover module contains:

a capping device to open a sealing cap of at least one chemical storage container;

an integrated adapter device for connecting to the opening of the chemical storage container to draw the chemical liquid from the chemical storage container and to return the chemical liquid to the chemical storage container; and

the optical detector is arranged between the cap screwing device and the integrated adapter device, wherein the optical detector is used for detecting the position of the sealing cap of the chemical storage container so as to respectively align the cap screwing device and the integrated adapter device with the sealing cap and the opening, and the cap screwing device is used for opening the sealing cap, so that the integrated adapter device is used for extracting the chemical liquid.

2. An integrated capping device according to claim 1, wherein the integrated adapter device comprises an integrated connector, a liquid suction line connected to the integrated connector, a liquid return line connected to the integrated connector, and a gas inlet line connected to the integrated connector.

3. An integrated capping apparatus according to claim 2, wherein the liquid extraction pipe, the liquid return pipe and the gas input pipe each comprise a check valve.

4. An integrated capping apparatus according to claim 3, wherein the capping module support comprises a horizontal movement module to move and align the capping module between the plurality of chemical storage containers.

5. An integrated capping apparatus according to claim 3, wherein the at least one capping module is plural in number and corresponds to plural chemical storage containers respectively, so as to extract the chemical liquids in the chemical storage containers respectively.

6. An integrated capping apparatus according to claim 3, wherein the capping module support comprises a horizontal motion module to align the capping module with the chemical storage container, and the chemical storage container is a ton-square barrel.

7. An integrated capping apparatus according to claim 6, further comprising a chemical storage container holder, the chemical storage container holder comprising a support frame for holding the ton-square barrel, and the capping module support disposed above the support frame.

8. An integrated capping apparatus according to claim 7, wherein the capping device comprises a cap screw, wherein the optical detector is configured to detect the position of the sealing cap of the chemical storage container, to align the cap screw with the sealing cap, and to open the sealing cap using the cap screw.

9. An integrated capping apparatus according to claim 8, further comprising:

a fixing plate;

the up-down moving device is connected between the fixing plate and the cap screwing device or the integrated pipe connecting device and is used for moving the cap screwing device or the integrated pipe connecting device up and down; and

and the horizontal moving device is connected between the fixed plate and the base plate so as to enable the rotary cover device or the integrated adapter device to horizontally move.

10. An integrated capping apparatus according to claim 9, further comprising:

a separator plate; and

and the elastic isolation cover is connected with the isolation plate and the substrate so as to isolate the chemical gas volatilized by the chemical storage container.