TWM641863U - Chemical liquid supply equipment - Google Patents

Chemical liquid supply equipment Download PDF

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TWM641863U
TWM641863U TW112200235U TW112200235U TWM641863U TW M641863 U TWM641863 U TW M641863U TW 112200235 U TW112200235 U TW 112200235U TW 112200235 U TW112200235 U TW 112200235U TW M641863 U TWM641863 U TW M641863U
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chemical
liquid supply
barrel
connection module
module
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TW112200235U
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Chinese (zh)
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陳炳旭
魯建國
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帆宣系統科技股份有限公司
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Priority to TW112200235U priority Critical patent/TWM641863U/en
Publication of TWM641863U publication Critical patent/TWM641863U/en

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Abstract

A chemical liquid supply equipment includes a casing, a connection module and a chemical drum rotating and conveying module. The casing has a chemical drum accommodating room, the connection module is installed in the chemical drum accommodating room of the casing, and the chemical drum rotating and conveying module is also installed in the chemical drum accommodating room of the casing to transport a chemical drum into the chemical drum accommodating room, and the chemical drum is rotated to align with the connecting module.

Description

化學液供給設備Chemical liquid supply equipment

本新型係有關於一種化學液供給設備。特別是有關於一種自動對準化學桶的化學液供給設備。The present invention relates to a chemical liquid supply device. In particular, it relates to a chemical liquid supply device for automatically aligning chemical barrels.

隨著近年來國內外半導體市場因電腦及其週邊產品材料之需求而蓬勃發展，半導體產業亦不斷的持續擴展，更替國家創造了大量的外匯收入。With the vigorous development of domestic and foreign semiconductor markets in recent years due to the demand for materials for computers and peripheral products, the semiconductor industry has also continued to expand, creating a large amount of foreign exchange income for the country.

半導體元件的製作流程非常複雜，所涉及的技術幾乎含蓋所有人類近代科學發展上最重要且關鍵的科技與新型。因此，半導體元件的生產不但是一項尖端科技的產業，也是一項需要龐大資金，以維持發展的需求。The manufacturing process of semiconductor components is very complicated, and the technologies involved cover almost all the most important and key technologies and new technologies in the development of modern human science. Therefore, the production of semiconductor components is not only a cutting-edge technology industry, but also a demand that requires huge funds to maintain development.

然而，由於半導體元件的設計日趨複雜，因此半導體元件製造技術愈趨精密與複雜化，所潛在的職業危害與財產損失也愈來愈複雜，舉凡半導體製程中的磊晶、擴散、離子植入、化學氣相沈積、蝕刻和微影等製程單元所常使用的化學品，雖然儲存量與使用量皆遠小於化學或石化工業所處理與使用量，但是由於具有著火性、可燃性、毒性、腐蝕性等特性，一旦發生洩漏或操作異常，亦造成人員傷亡，甚至可能造成重大財產損失。However, due to the increasingly complex design of semiconductor components, the manufacturing technology of semiconductor components is becoming more sophisticated and complex, and the potential occupational hazards and property losses are becoming more and more complicated. For example, epitaxy, diffusion, ion implantation, Chemical vapor deposition, etching, lithography and other process units often use chemicals, although the storage and usage are much smaller than the chemical or petrochemical industry’s processing and usage, but due to their flammability, flammability, toxicity, corrosion In the event of leakage or abnormal operation, it will also cause casualties, and may even cause heavy property losses.

在半導體工廠，化學液體以化學儲存容器儲存，使用時接上工廠中的供應線路。當化學液體使用完畢，則需進行化學儲存桶的更換。In semiconductor factories, chemical liquids are stored in chemical storage containers and connected to supply lines in the factory when used. When the chemical liquid is used up, the chemical storage barrel needs to be replaced.

如何能方便地進行化學儲存容器的更換，將有助於提升半導體廠工作的安全性，更有助於提升半導體廠的整體產能。How to easily replace the chemical storage container will help to improve the safety of the work of the semiconductor factory, and it will also help to improve the overall production capacity of the semiconductor factory.

新型內容旨在提供本揭示內容的簡化摘要，以使閱讀者對本揭示內容具備基本的理解。此新型內容並非本揭示內容的完整概述，且其用意並非在指出本新型實施例的重要/關鍵元件或界定本新型的範圍。The novel content is intended to provide a simplified summary of the disclosure to provide the reader with a basic understanding of the disclosure. This summary is not an exhaustive overview of the disclosure, and it is not intended to identify key/critical elements of embodiments of the invention or to delineate the scope of the invention.

本新型內容之一目的是在提供一種化學液供給設備，可以自動對準化學桶，以方便地供給生產所需的化學液，且方便地進行化學儲存容器的更換，提升更換化學儲存容器的安全性與便利性。One of the purposes of this new model is to provide a chemical liquid supply device, which can automatically align the chemical barrels, so as to conveniently supply the chemical liquid required for production, and conveniently replace the chemical storage container, improving the safety of changing the chemical storage container sex and convenience.

為達上述目的，本新型內容之一技術態樣係關於一種化學液供給設備包含有一機殼、一連接模組以及一化學桶旋轉輸送模組。機殼具有一化學桶容置空間，連接模組安裝於機殼的化學桶容置空間之中，而化學桶旋轉輸送模組亦安裝於機殼的化學桶容置空間之中，用以將一化學桶，輸送至化學桶容置空間之中，並旋轉化學桶以對準連接模組。In order to achieve the above purpose, one technical aspect of the present invention is related to a chemical liquid supply device including a casing, a connection module and a chemical barrel rotary conveying module. The casing has a chemical barrel accommodating space, the connection module is installed in the chemical barrel accommodating space of the casing, and the chemical barrel rotary conveying module is also installed in the chemical barrel accommodating space of the casing, for A chemical barrel is transported into the chemical barrel accommodating space, and the chemical barrel is rotated to align with the connecting module.

在一些實施例中，化學液供給設備更包含有一導引板，設置於機殼的化學桶容置空間之中，並位於連接模組以及化學桶旋轉輸送模組之間，以導引化學桶。In some embodiments, the chemical liquid supply device further includes a guide plate, which is arranged in the chemical barrel accommodating space of the casing, and is located between the connection module and the chemical barrel rotary conveying module, so as to guide the chemical barrel .

在一些實施例中，化學桶旋轉輸送模組包含有一第一傳動裝置以及一第二傳動裝置。第一傳動裝置以及第二傳動裝置，平行設置，用以平移或轉動化學桶。In some embodiments, the chemical drum rotary conveying module includes a first transmission device and a second transmission device. The first transmission device and the second transmission device are arranged in parallel to translate or rotate the chemical barrel.

在一些實施例中，第一傳動裝置以及第二傳動裝置分別包含有複數個第一動力滾筒、複數個第一無動力滾筒、複數個第二動力滾筒以及複數個第二無動力滾筒，彼此平行設置。In some embodiments, the first transmission device and the second transmission device respectively include a plurality of first driven pulleys, a plurality of first unpowered pulleys, a plurality of second powered pulleys, and a plurality of second unpowered pulleys, parallel to each other set up.

在一些實施例中，第一動力滾筒的長度大於第二動力滾筒的長度，而第一無動力滾筒的長度大於第二無動力滾筒的長度。In some embodiments, the length of the first powered pulley is greater than that of the second powered pulley, and the length of the first unpowered pulley is greater than that of the second unpowered pulley.

在一些實施例中，第一動力滾筒的長度等於第一無動力滾筒的長度，第二動力滾筒的長度等於第二無動力滾筒的長度。In some embodiments, the length of the first powered pulley is equal to the length of the first unpowered pulley, and the length of the second powered pulley is equal to the length of the second unpowered pulley.

在一些實施例中，連接模組包含有一第一連接模組，用以連接化學桶的一氣體開口，以及一第二連接模組，相對於第一連接模組設置，用以連接化學桶的一液體開口。In some embodiments, the connection module includes a first connection module for connecting to a gas opening of the chemical tank, and a second connection module disposed relative to the first connection module for connecting to the gas opening of the chemical tank. A liquid opening.

在一些實施例中，第一連接模組包含有一旋蓋裝置、一管路連接裝置以及一光學偵測器。旋蓋裝置用以旋轉化學桶的氣體開口之一化學桶密封蓋，管路連接裝置用以連接化學桶的氣體開口，而光學偵測器設置於旋蓋裝置以及管路連接裝置之間，用以偵測化學桶的氣體開口的位置。In some embodiments, the first connection module includes a screw cap device, a pipeline connection device and an optical detector. The screw cap device is used to rotate one of the gas openings of the chemical tank, the chemical tank sealing cover, the pipeline connection device is used to connect the gas opening of the chemical tank, and the optical detector is arranged between the screw cap device and the pipeline connection device. To detect the position of the gas opening of the chemical barrel.

在一些實施例中，第二連接模組包含有一旋蓋裝置、一管路連接裝置以及一光學偵測器。旋蓋裝置用以旋轉化學桶的液體開口之一化學桶密封蓋，管路連接裝置用以連接液體開口，以抽取或回流化學桶的化學液體，而光學偵測器設置於第二連接模組的旋蓋裝置以及管路連接裝置之間，用以偵測化學桶的液體開口的位置。In some embodiments, the second connection module includes a screw cap device, a pipeline connection device and an optical detector. The cap screwing device is used to rotate one of the liquid openings of the chemical barrel, the sealing cap of the chemical barrel, the pipeline connection device is used to connect the liquid opening to extract or return the chemical liquid of the chemical barrel, and the optical detector is arranged on the second connection module Between the screw cap device and the pipeline connection device, it is used to detect the position of the liquid opening of the chemical barrel.

在一些實施例中，第一連接模組的旋蓋裝置與第二連接模組的旋蓋裝置相距180度，而第一連接模組的管路連接裝置與第二連接模組的管路連接裝置相距180度。In some embodiments, the capping device of the first connection module is 180 degrees away from the capping device of the second connection module, and the pipeline connection device of the first connection module is connected to the pipeline of the second connection module The units are 180 degrees apart.

綜上所述，化學液供給設備可以安全與可靠地將化學桶連接至連接模組，且利用化學桶旋轉輸送模組更可以方便且準確地進行對準，有效地簡化管路長度並降低管路所需的轉動角度，提升化學液供給設備安裝與移除化學桶的效率與精確度。To sum up, the chemical liquid supply equipment can safely and reliably connect the chemical barrel to the connection module, and the chemical barrel rotary delivery module can be used for more convenient and accurate alignment, effectively simplifying the length of the pipeline and reducing the pipe length. The rotation angle required by the road improves the efficiency and accuracy of chemical liquid supply equipment installation and removal of chemical barrels.

下文係舉實施例配合所附圖式進行詳細說明，但所提供之實施例並非用以限制本揭露所涵蓋的範圍，而結構運作之描述非用以限制其執行之順序，任何由元件重新組合之結構，所產生具有均等功效的裝置，皆為本揭露所涵蓋的範圍。另外，圖式僅以說明為目的，並未依照原尺寸作圖。為使便於理解，下述說明中相同元件或相似元件將以相同之符號標示來說明。The following is a detailed description of the embodiments in conjunction with the accompanying drawings, but the provided embodiments are not used to limit the scope of the disclosure, and the description of the structure and operation is not used to limit the order of its execution. Any recombination of components The structure and the devices with equivalent functions are all within the scope of this disclosure. In addition, the drawings are for illustrative purposes only and are not drawn to original scale. To facilitate understanding, the same elements or similar elements will be described with the same symbols in the following description.

另外，在全篇說明書與申請專利範圍所使用之用詞（terms），除有特別註明外，通常具有每個用詞使用在此領域中、在此揭露之內容中與特殊內容中的平常意義。某些用以描述本揭露之用詞將於下或在此說明書的別處討論，以提供本領域技術人員在有關本揭露之描述上額外的引導。In addition, the words (terms) used in the entire specification and the scope of the patent application, unless otherwise specified, generally have the ordinary meaning of each word used in this field, in the disclosed content and in the special content . Certain terms used to describe the disclosure are discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance in describing the disclosure.

於實施方式與申請專利範圍中，除非內文中對於冠詞有所特別限定，否則『一』與『該』可泛指單一個或複數個。而步驟中所使用之編號僅係用來標示步驟以便於說明，而非用來限制前後順序及實施方式。In the embodiments and the scope of the patent application, unless the article is specifically limited in the context, "a" and "the" can generally refer to a single or plural. The numbers used in the steps are only used to mark the steps for the convenience of description, and are not used to limit the sequence and implementation.

其次，在本文中所使用的用詞『包含』、『包括』、『具有』、『含有』等等，均為開放性的用語，即意指包含但不限於。Secondly, the words "comprising", "including", "having", "containing" and so on used in this article are all open terms, meaning including but not limited to.

第1圖係繪示一種化學液供給設備之示意圖，第2圖是繪示化學液供給設備之連接模組之示意圖，第3圖則是繪製化學液供給設備之化學桶旋轉輸送模組之示意圖。此外，第4圖是一種化學液供應方法之流程圖，而第5圖則是化學液供應方法之化學桶移除步驟之流程圖。Figure 1 is a schematic diagram of a chemical liquid supply equipment, Figure 2 is a schematic diagram of the connection module of the chemical liquid supply equipment, and Figure 3 is a schematic diagram of the chemical barrel rotary conveying module of the chemical liquid supply equipment . In addition, FIG. 4 is a flowchart of a chemical liquid supply method, and FIG. 5 is a flowchart of a chemical tank removal step of the chemical liquid supply method.

首先參閱第1圖，如圖中所示，化學液供給設備100包含有一機殼110、一連接模組120以及一化學桶旋轉輸送模組130。機殼110具有至少一化學桶容置空間160，而每一個化學桶容置空間160安裝有一連接模組120。此外，化學桶旋轉輸送模組130亦安裝於機殼110的化學桶容置空間160之中，以將一化學桶140，輸送至化學桶容置空間160之中，並可旋轉化學桶140以對準連接模組120。Firstly, referring to FIG. 1 , as shown in the figure, the chemical liquid supply device 100 includes a casing 110 , a connection module 120 and a chemical barrel rotary delivery module 130 . The casing 110 has at least one chemical barrel accommodating space 160 , and each chemical barrel accommodating space 160 is installed with a connection module 120 . In addition, the chemical barrel rotary delivery module 130 is also installed in the chemical barrel accommodating space 160 of the casing 110, so as to transport a chemical barrel 140 into the chemical barrel accommodating space 160, and can rotate the chemical barrel 140 to Align the connection module 120 .

藉由化學桶旋轉輸送模組130，定位並旋轉化學桶140，可以使化學桶140對準連接模組120。因此，連接模組120所需的管路長度，可以有效地被縮減，且連接模組120所需的轉動角度亦可以有效地被縮減，例如是僅需左右旋轉約30度，而無需如傳統的連接模組需要旋轉至正負180度或正負200度方能確保正確地連接至化學桶140，而連接模組120所需的位移距離更可以有效地被縮減。因此，本新型之化學液供給設備100可以簡化連接模組120的結構以及降低化學液供給設備100的生產成本，更能提升化學液供給設備100的供應化學液體的品質與效率。The chemical barrel 140 can be aligned with the connection module 120 by positioning and rotating the chemical barrel 140 through the chemical barrel rotating delivery module 130 . Therefore, the length of the pipeline required for connecting the module 120 can be effectively reduced, and the rotation angle required for connecting the module 120 can also be effectively reduced, for example, it only needs to rotate about 30 degrees left and right, without the traditional The connection module needs to be rotated to plus or minus 180 degrees or plus or minus 200 degrees to ensure correct connection to the chemical barrel 140, and the displacement distance required for the connection module 120 can be effectively reduced. Therefore, the chemical liquid supply device 100 of the present invention can simplify the structure of the connection module 120 and reduce the production cost of the chemical liquid supply device 100 , and can further improve the quality and efficiency of the chemical liquid supply device 100 supplying chemical liquid.

在一些實施例中，化學液供給設備100更包含至少一導引板150，設置於機殼110的化學桶容置空間160之中，並位於連接模組120以及化學桶旋轉輸送模組130之間，用以有效地導引化學桶140的。其中，導引板150接觸化學桶140的一側，具有與化學桶140外型相似的弧線造型，當化學桶140接觸到導引板150，導引板150可以限制化學桶140進一步向內側移動，亦可以有效地限制化學桶140的左右位移，以提升化學桶140對準連接模組120效率以及精度，且能簡化連接模組120後端的管路長度並降低管路所需的轉動角度。In some embodiments, the chemical liquid supply device 100 further includes at least one guide plate 150 disposed in the chemical barrel accommodating space 160 of the casing 110 and located between the connection module 120 and the chemical barrel rotary transport module 130 space for effectively guiding the chemical barrel 140. Wherein, the side of the guide plate 150 contacting the chemical barrel 140 has an arc shape similar to the appearance of the chemical barrel 140. When the chemical barrel 140 touches the guide plate 150, the guide plate 150 can limit the further movement of the chemical barrel 140 to the inside , can also effectively limit the left and right displacement of the chemical barrel 140, so as to improve the efficiency and accuracy of the alignment of the chemical barrel 140 with the connection module 120, and can simplify the length of the pipeline at the rear end of the connection module 120 and reduce the required rotation angle of the pipeline.

同時參閱第3圖，在一些實施例中，化學桶旋轉輸送模組130包含有一第一傳動裝置310以及一第二傳動裝置320。第一傳動裝置310以及第二傳動裝置320，較佳地係左右平行設置，用以平移或轉動化學桶140。Also referring to FIG. 3 , in some embodiments, the chemical drum rotary conveying module 130 includes a first transmission device 310 and a second transmission device 320 . The first transmission device 310 and the second transmission device 320 are preferably arranged parallel to the left and right for translation or rotation of the chemical barrel 140 .

在一些實施例中，第一傳動裝置310包含有複數個第一動力滾筒312、複數個第一無動力滾筒314、複數個第二動力滾筒316以及複數個第二無動力滾筒318。第一動力滾筒312、第一無動力滾筒314、第二動力滾筒316以及第二無動力滾筒318較佳地相互前後平行設置。In some embodiments, the first transmission device 310 includes a plurality of first driven pulleys 312 , a plurality of first unpowered pulleys 314 , a plurality of second powered pulleys 316 and a plurality of second unpowered pulleys 318 . The first powered pulley 312 , the first unpowered pulley 314 , the second powered pulley 316 and the second unpowered pulley 318 are preferably arranged parallel to each other front and back.

在一些實施例中，第二傳動裝置320包含有複數個第一動力滾筒322、複數個第一無動力滾筒324、複數個第二動力滾筒326以及複數個第二無動力滾筒328。第一動力滾筒322、第一無動力滾筒324、第二動力滾筒326以及第二無動力滾筒328較佳地相互前後平行設置。In some embodiments, the second transmission device 320 includes a plurality of first driven pulleys 322 , a plurality of first unpowered pulleys 324 , a plurality of second powered pulleys 326 and a plurality of second unpowered pulleys 328 . The first powered pulley 322 , the first unpowered pulley 324 , the second powered pulley 326 and the second unpowered pulley 328 are preferably arranged parallel to each other front and back.

換言之，當第一傳動裝置310與第二傳動裝置320均向同方向轉動時，可將化學桶140移入至化學桶容置空間160之中，或者將化學桶140由化學桶容置空間160之中移出。而當第一傳動裝置310與第二傳動裝置320以不同方向轉動時，則可以旋轉化學桶140的角度，以用來將化學桶140對準連接模組120。In other words, when the first transmission device 310 and the second transmission device 320 both rotate in the same direction, the chemical bucket 140 can be moved into the chemical bucket accommodating space 160 , or the chemical bucket 140 can be moved out of the chemical bucket accommodating space 160 removed. And when the first transmission device 310 and the second transmission device 320 rotate in different directions, the angle of the chemical bucket 140 can be rotated so as to align the chemical bucket 140 with the connection module 120 .

在一些實施例中，第一動力滾筒312的長度大於第二動力滾筒316的長度，而第一無動力滾筒314的長度大於第二無動力滾筒318的長度。In some embodiments, the length of the first powered roller 312 is greater than the length of the second powered roller 316 , and the length of the first unpowered roller 314 is greater than the length of the second unpowered roller 318 .

在一些實施例中，第一動力滾筒312的長度等於第一無動力滾筒314的長度，第二動力滾筒316的長度等於第二無動力滾筒318的長度。In some embodiments, the length of the first powered roller 312 is equal to the length of the first unpowered roller 314 , and the length of the second powered roller 316 is equal to the length of the second unpowered roller 318 .

相同地，第二傳動裝置320的第一動力滾筒322的長度大於第二動力滾筒326的長度，而第一無動力滾筒324的長度大於第二無動力滾筒328的長度。Similarly, the length of the first power pulley 322 of the second transmission device 320 is greater than the length of the second power pulley 326 , and the length of the first unpowered pulley 324 is greater than the length of the second unpowered pulley 328 .

在一些實施例中，第一動力滾筒322的長度等於第一無動力滾筒324的長度，第二動力滾筒326的長度等於第二無動力滾筒328的長度。In some embodiments, the length of the first powered roller 322 is equal to the length of the first unpowered roller 324 , and the length of the second powered roller 326 is equal to the length of the second unpowered roller 328 .

此外，第一動力滾筒312以及第一動力滾筒322較佳地位於化學桶容置空間160的入口處，而第一無動力滾筒314以及第一無動力滾筒324則可以位於化學桶容置空間160的入口處第一動力滾筒312以及第一動力滾筒322的後方以及化學桶旋轉輸送模組130的末端，以減少所需的動力滾筒的數量。而位於第一傳動裝置310中間的第二動力滾筒316以及第二無動力滾筒318，以及第二傳動裝置320中間的第二動力滾筒326以及第二無動力滾筒328，由於長度較短，而可以在化學桶旋轉輸送模組130的中間形成一開口，且藉由較短的第二動力滾筒316、第二無動力滾筒318、第二動力滾筒326以及第二無動力滾筒328可以降低所需滾筒的長度以及成本，更能提升滾筒的支撐力量，避免變形，以更為精確地輸送與轉動化學桶140。In addition, the first power drum 312 and the first power drum 322 are preferably located at the entrance of the chemical drum accommodating space 160 , while the first unpowered drum 314 and the first unpowered drum 324 may be located in the chemical drum accommodating space 160 The entrance of the first power drum 312 and the rear of the first power drum 322 and the end of the chemical barrel rotary conveying module 130 are used to reduce the number of power drums required. And the second power pulley 316 and the second unpowered pulley 318 in the middle of the first transmission device 310, and the second power pulley 326 and the second unpowered pulley 328 in the middle of the second transmission device 320, due to the shorter length, can An opening is formed in the middle of the chemical barrel rotary conveying module 130, and the required rollers can be reduced by using shorter second powered rollers 316, second unpowered rollers 318, second powered rollers 326, and second unpowered rollers 328. The lower the length and the lower the cost, the supporting strength of the roller can be improved to avoid deformation, so that the chemical barrel 140 can be transported and rotated more accurately.

同時參閱第6圖，在一些實施例中，連接模組120包含有一第一連接模組210以及一第二連接模組220。第一連接模組210用以連接化學桶140的氣體開口610，而第二連接模組220相對於第一連接模組210設置，用以連接化學桶140的液體開口620。Also referring to FIG. 6 , in some embodiments, the connection module 120 includes a first connection module 210 and a second connection module 220 . The first connection module 210 is used to connect to the gas opening 610 of the chemical barrel 140 , and the second connection module 220 is disposed relative to the first connection module 210 to connect to the liquid opening 620 of the chemical barrel 140 .

在一些實施例中，第一連接模組210包含有一旋蓋裝置212、一管路連接裝置214以及一光學偵測器216。旋蓋裝置212用以旋轉化學桶140的氣體開口610之化學桶密封蓋630，管路連接裝置214則用以連接化學桶140的氣體開口610，而光學偵測器216設置於旋蓋裝置及管路連接裝置之間，用以偵測化學桶140的氣體開口610的位置。In some embodiments, the first connection module 210 includes a screw cap device 212 , a pipeline connection device 214 and an optical detector 216 . The capping device 212 is used to rotate the chemical barrel sealing cover 630 of the gas opening 610 of the chemical barrel 140, the pipeline connection device 214 is used to connect the gas opening 610 of the chemical barrel 140, and the optical detector 216 is arranged on the capping device and the gas opening 610 of the chemical barrel. The pipelines are connected between the devices to detect the position of the gas opening 610 of the chemical barrel 140 .

在一些實施例中，第二連接模組220包含有一旋蓋裝置222、一管路連接裝置224以及一光學偵測器226。旋蓋裝置222用以旋轉化學桶140的液體開口620之化學桶密封蓋640，管路連接裝置224連接液體開口620，以抽取或回流化學桶140的化學液體，而光學偵測器226則設置於第二連接模組220的旋蓋裝置222以及管路連接裝置224之間，用以偵測化學桶140的液體開口620的位置。In some embodiments, the second connection module 220 includes a screw cap device 222 , a pipeline connection device 224 and an optical detector 226 . The cap screwing device 222 is used to rotate the chemical barrel sealing cover 640 of the liquid opening 620 of the chemical barrel 140, the pipeline connection device 224 is connected to the liquid opening 620 to extract or return the chemical liquid of the chemical barrel 140, and the optical detector 226 is set Between the screw cap device 222 and the pipeline connection device 224 of the second connection module 220 , it is used to detect the position of the liquid opening 620 of the chemical barrel 140 .

在一些實施例中，氣體開口610的外徑大於液體開口620的外徑。In some embodiments, the outer diameter of the gas opening 610 is greater than the outer diameter of the liquid opening 620 .

在一些實施例中，第一連接模組210的旋蓋裝置212與第二連接模組220的旋蓋裝置222相距180度，而第一連接模組210的管路連接裝置214與第二連接模組220的管路連接裝置224相距180度。In some embodiments, the capping device 212 of the first connection module 210 is 180 degrees away from the capping device 222 of the second connection module 220, and the pipeline connection device 214 of the first connection module 210 is connected to the second connection The pipeline connection devices 224 of the modules 220 are 180 degrees apart.

根據本新型之另一態樣，係提供一種化學液供應方法400。參閱第4圖與第5圖，如圖中所示，化學液供應方法400包含有下列步驟，首先，步驟410，提供一化學桶140，然後，步驟420，將化學桶140輸送至化學液供給設備100的化學桶容置空間160中。步驟430，化學液供給設備100偵測化學桶140的開口位置，例如是氣體開口610及/或液體開口620。然後，步驟440，化學液供給設備100根據開口的位置，利用化學桶旋轉輸送模組130，旋轉化學桶140，以使化學桶140的開口對準連接模組120的旋蓋裝置，例如是旋蓋裝置212及/或旋蓋裝置222。According to another aspect of the present invention, a chemical liquid supply method 400 is provided. Referring to Fig. 4 and Fig. 5, as shown in the figure, the chemical liquid supply method 400 includes the following steps, first, step 410, a chemical tank 140 is provided, and then, step 420, the chemical tank 140 is delivered to the chemical liquid supply The chemical barrel accommodation space 160 of the device 100 is contained. In step 430 , the chemical liquid supply device 100 detects the opening positions of the chemical barrel 140 , such as the gas opening 610 and/or the liquid opening 620 . Then, in step 440, the chemical liquid supply device 100 uses the chemical barrel rotary delivery module 130 to rotate the chemical barrel 140 according to the position of the opening, so that the opening of the chemical barrel 140 is aligned with the screw capping device of the connection module 120, such as a screw cap. Cap device 212 and/or screw cap device 222 .

然後，步驟450，利用旋蓋裝置212及旋蓋裝置222，旋轉化學桶140的氣體開口610及液體開口620上的化學桶密封蓋630以及化學桶密封蓋640，以開啟化學桶140，並利用旋蓋裝置212及旋蓋裝置222握持化學桶密封蓋630以及化學桶密封蓋640。Then, in step 450, use the screw cap device 212 and the screw cap device 222 to rotate the chemical tank sealing cover 630 and the chemical tank sealing cover 640 on the gas opening 610 and the liquid opening 620 of the chemical tank 140 to open the chemical tank 140, and use The capping device 212 and the capping device 222 hold the chemical barrel sealing cap 630 and the chemical barrel sealing cap 640 .

接著，步驟460，利用管路連接裝置，例如是管路連接裝置214以及管路連接裝置224，連接化學桶140的氣體開口610及液體開口620。然後，步驟470，利用管路連接裝置224抽取化學液體，並利用管路連接裝置214進行排氣或者是進氣。Next, step 460 , connect the gas opening 610 and the liquid opening 620 of the chemical tank 140 by using the pipeline connection device, such as the pipeline connection device 214 and the pipeline connection device 224 . Then, step 470 , use the pipeline connection device 224 to extract the chemical liquid, and use the pipeline connection device 214 to exhaust or intake air.

接著，參閱第5圖，其係化學液供應方法400之化學桶移除步驟500之流程圖。當提供製程所需的化學液體的作業後，步驟510，化學液供給設備100可以自動地分離管路連接裝置214與化學桶140的氣體開口610以及管路連接裝置224與化學桶140的液體開口620。然後，步驟520，利用旋蓋裝置212及旋蓋裝置222將握持的化學桶密封蓋630以及化學桶密封蓋640，分別轉回氣體開口610及液體開口620，以將化學桶140密封。然後，步驟530，可以利用化學桶旋轉輸送模組130將化學桶140由化學桶容置空間160中移出。Next, refer to FIG. 5 , which is a flow chart of the chemical tank removal step 500 of the chemical liquid supply method 400 . After the operation of providing the chemical liquid required by the process, in step 510, the chemical liquid supply device 100 can automatically separate the gas opening 610 of the pipeline connection device 214 from the chemical tank 140 and the liquid opening 610 of the pipeline connection device 224 from the chemical tank 140 620. Then, step 520 , using the capping device 212 and the capping device 222 to turn the held chemical barrel sealing cap 630 and the chemical barrel sealing cap 640 back to the gas opening 610 and the liquid opening 620 respectively, so as to seal the chemical barrel 140 . Then, at step 530 , the chemical barrel 140 can be moved out of the chemical barrel accommodating space 160 by using the chemical barrel rotary transport module 130 .

綜上所述，化學液供給設備可以安全與可靠地將化學桶連接至連接模組，且利用化學桶旋轉輸送模組更可以方便且準確地進行對準，有效地簡化管路長度並降低管路所需的轉動角度，提升化學液供給設備安裝與移除化學桶的效率與精確度。To sum up, the chemical liquid supply equipment can safely and reliably connect the chemical barrel to the connection module, and the chemical barrel rotary delivery module can be used for more convenient and accurate alignment, effectively simplifying the length of the pipeline and reducing the pipe length. The rotation angle required by the road improves the efficiency and accuracy of chemical liquid supply equipment installation and removal of chemical barrels.

雖然本揭露已以實施方式揭露如上，然其並非用以限定本揭露，任何本領域具通常知識者，在不脫離本揭露之精神和範圍內，當可作各種之更動與潤飾，因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。Although the present disclosure has been disclosed above in terms of implementation, it is not intended to limit this disclosure. Any person with ordinary knowledge in the field may make various changes and modifications without departing from the spirit and scope of this disclosure. Therefore, this disclosure The scope of protection shall be determined by the scope of the attached patent application.

100:化學液供給設備 110:機殼 120:連接模組 130:化學桶旋轉輸送模組 140:化學桶 150:導引板 160:化學桶容置空間 210:第一連接模組 212:旋蓋裝置 214:管路連接裝置 216:光學偵測器 220:第二連接模組 222:旋蓋裝置 224:管路連接裝置 226:光學偵測器 310:第一傳動裝置 312:第一動力滾筒 314:第一無動力滾筒 316:第二動力滾筒 318:第二無動力滾筒 320:第二傳動裝置 322:第一動力滾筒 324:第一無動力滾筒 326:第二動力滾筒 328:第二無動力滾筒 400:化學液供應方法 410~470:步驟 500:化學桶移除步驟 510~530:步驟 610:氣體開口 620:液體開口 630:化學桶密封蓋 640:化學桶密封蓋100: chemical liquid supply equipment 110: Chassis 120: Connection module 130:Chemical barrel rotary conveying module 140: chemical bucket 150: guide plate 160: storage space for chemical barrels 210: The first connection module 212: capping device 214: pipeline connection device 216: Optical detector 220: Second connection module 222: Capping device 224: pipeline connection device 226: Optical detector 310: first transmission 312: The first power roller 314: The first unpowered roller 316: The second power roller 318: The second unpowered roller 320:Second transmission 322: The first power roller 324: The first unpowered roller 326: The second power roller 328: The second unpowered roller 400: chemical liquid supply method 410~470: Steps 500: chemical barrel removal step 510~530: Steps 610: gas opening 620: liquid opening 630:Chemical bucket sealing cover 640:Chemical bucket sealing cover

為讓本揭露之上述和其他目的、特徵、優點與實施例能更明顯易懂，所附圖式之說明如下： 第1圖是依照本新型一實施例所繪示的一種化學液供給設備之示意圖。 第2圖是第1圖的化學液供給設備之連接模組之示意圖。 第3圖是第1圖的化學液供給設備之化學桶旋轉輸送模組之示意圖。 第4圖是本新型之另一實施態樣之化學液供應方法之流程圖。 第5圖是化學液供應方法之化學桶移除步驟之流程圖。 第6圖是化學桶之示意圖。 In order to make the above and other purposes, features, advantages and embodiments of the present disclosure more comprehensible, the accompanying drawings are described as follows: Fig. 1 is a schematic diagram of a chemical liquid supply device according to an embodiment of the present invention. Fig. 2 is a schematic diagram of the connection module of the chemical liquid supply equipment in Fig. 1. Fig. 3 is a schematic diagram of the chemical tank rotary conveying module of the chemical liquid supply equipment in Fig. 1 . Fig. 4 is a flowchart of a chemical liquid supply method in another embodiment of the present invention. Fig. 5 is a flowchart of the chemical tank removal step of the chemical liquid supply method. Fig. 6 is a schematic diagram of a chemical barrel.

100:化學液供給設備 100: chemical liquid supply equipment

110:機殼 110: Chassis

120:連接模組 120: Connection module

130:化學桶旋轉輸送模組 130:Chemical barrel rotary conveying module

140:化學桶 140: chemical bucket

150:導引板 150: guide plate

160:化學桶容置空間 160: storage space for chemical barrels

Claims (10)

一種化學液供給設備，包含： 一機殼，具有一化學桶容置空間； 一連接模組，安裝於該機殼的該化學桶容置空間之中；以及 一化學桶旋轉輸送模組，亦安裝於該機殼的該化學桶容置空間之中，用以將一化學桶，輸送至該化學桶容置空間之中，並旋轉該化學桶以對準該連接模組。 A chemical liquid supply device, comprising: A machine case with a chemical barrel accommodating space; a connection module, installed in the chemical barrel accommodating space of the casing; and A chemical barrel rotary conveying module is also installed in the chemical barrel accommodating space of the casing, and is used to transport a chemical barrel into the chemical barrel accommodating space, and rotate the chemical barrel to align The connection module. 如請求項1所述之化學液供給設備，更包含： 一導引板，設置於該機殼的該化學桶容置空間之中，並位於該連接模組以及該化學桶旋轉輸送模組之間，以導引該化學桶。 The chemical liquid supply equipment as described in Claim 1 further includes: A guide plate is arranged in the chemical barrel accommodating space of the casing, and is located between the connection module and the chemical barrel rotary conveying module to guide the chemical barrel. 如請求項1所述之化學液供給設備，其中該化學桶旋轉輸送模組，包含： 一第一傳動裝置；以及 一第二傳動裝置，該第一傳動裝置以及該第二傳動裝置，平行設置，用以平移或轉動該化學桶。 The chemical liquid supply equipment as described in claim 1, wherein the chemical barrel rotary conveying module includes: a first transmission; and A second transmission device, the first transmission device and the second transmission device are arranged in parallel, and are used to translate or rotate the chemical barrel. 如請求項3所述之化學液供給設備，其中該第一傳動裝置以及該第二傳動裝置，分別包含： 複數個第一動力滾筒； 複數個第一無動力滾筒，平行該些第一動力滾筒設置； 複數個第二動力滾筒，平行該些第一動力滾筒以及該些第一無動力滾筒設置；以及 複數個第二無動力滾筒，平行該些第一動力滾筒、該些第一無動力滾筒以及該些第二無動力滾筒設置。 The chemical liquid supply equipment as described in Claim 3, wherein the first transmission device and the second transmission device respectively include: a plurality of first power drums; A plurality of first unpowered rollers are arranged parallel to the first powered rollers; A plurality of second powered rollers are arranged parallel to the first powered rollers and the first unpowered rollers; and A plurality of second unpowered rollers are arranged parallel to the first powered rollers, the first unpowered rollers and the second unpowered rollers. 如請求項4所述之化學液供給設備，其中該些第一動力滾筒的長度大於該些第二動力滾筒的長度，而該些第一無動力滾筒的長度大於該些第二無動力滾筒的長度。The chemical liquid supply equipment as described in Claim 4, wherein the length of the first powered rollers is greater than the length of the second powered rollers, and the length of the first non-powered rollers is longer than that of the second non-powered rollers length. 如請求項5所述之化學液供給設備，其中該些第一動力滾筒的長度等於該些第一無動力滾筒的長度，該些第二動力滾筒的長度等於該些第二無動力滾筒的長度。The chemical liquid supply equipment as described in Claim 5, wherein the length of the first powered rollers is equal to the length of the first unpowered rollers, and the length of the second powered rollers is equal to the length of the second unpowered rollers . 如請求項1所述之化學液供給設備，其中該連接模組，包含： 一第一連接模組，用以連接該化學桶的一氣體開口；以及 一第二連接模組，相對於該第一連接模組設置，用以連接該化學桶的一液體開口。 The chemical liquid supply device as described in claim 1, wherein the connection module includes: a first connecting module for connecting to a gas opening of the chemical barrel; and A second connecting module is arranged relative to the first connecting module, and is used for connecting to a liquid opening of the chemical tank. 如請求項7所述之化學液供給設備，其中該第一連接模組，包含： 一旋蓋裝置，用以旋轉該化學桶的該氣體開口之一化學桶密封蓋； 一管路連接裝置，用以連接該化學桶的該氣體開口；以及 一光學偵測器，設置於該旋蓋裝置以及該管路連接裝置之間，用以偵測該化學桶的該氣體開口的位置。 The chemical liquid supply device as described in Claim 7, wherein the first connection module includes: A screw cap device for rotating one of the chemical tank sealing caps of the gas opening of the chemical tank; a plumbing connection to the gas opening of the chemical tank; and An optical detector is arranged between the screw cap device and the pipeline connection device to detect the position of the gas opening of the chemical barrel. 如請求項8所述之化學液供給設備，其中該第二連接模組，包含： 一旋蓋裝置，用以旋轉該化學桶的該液體開口之一化學桶密封蓋； 一管路連接裝置，用以連接該液體開口，以抽取或回流該化學桶的一化學液體；以及 一光學偵測器，設置於該第二連接模組的該旋蓋裝置以及該管路連接裝置之間，用以偵測該化學桶的該液體開口的位置。 The chemical liquid supply device as described in Claim 8, wherein the second connection module includes: A cap screwing device for rotating one of the chemical tank sealing caps of the liquid opening of the chemical tank; a pipe connection device for connecting the liquid opening to draw or return a chemical liquid in the chemical drum; and An optical detector is arranged between the screw cap device and the pipeline connection device of the second connection module to detect the position of the liquid opening of the chemical barrel. 如請求項9所述之化學液供給設備，其中該第一連接模組的旋蓋裝置與該第二連接模組的旋蓋裝置相距180度，而該第一連接模組的管路連接裝置與該第二連接模組的管路連接裝置相距180度。The chemical liquid supply equipment as described in claim 9, wherein the capping device of the first connection module is 180 degrees away from the capping device of the second connection module, and the pipeline connection device of the first connection module It is 180 degrees away from the pipeline connection device of the second connection module.
TW112200235U 2023-01-07 2023-01-07 Chemical liquid supply equipment TWM641863U (en)

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