CN210548691U

CN210548691U - Seal cover separating device of MEMS device

Info

Publication number: CN210548691U
Application number: CN201921479855.1U
Authority: CN
Inventors: 龚慧兰; 其他发明人请求不公开姓名
Original assignee: Xiamen Analytical Testing Technology Co Ltd
Current assignee: Xiamen Analytical Testing Technology Co Ltd
Priority date: 2019-09-06
Filing date: 2019-09-06
Publication date: 2020-05-19
Anticipated expiration: 2029-09-06

Abstract

The utility model provides a closing cap separator of MEMS device, including MEMS device anchor clamps, locate the heating element of MEMS device anchor clamps upper end to and the closing cap isolating component of locating MEMS device anchor clamps one side, closing cap isolating component is including locating the vacuum suction nozzle of MEMS device anchor clamps one side, locating the support at vacuum suction nozzle middle part, and the vacuum generator who is connected with vacuum suction nozzle, vacuum suction nozzle with the leg joint is rotated. Above-mentioned closing cap separator of MEMS device, during the use, pass through MEMS device anchor clamps with the MEMS device and press from both sides tightly, then heat the closing cap of MEMS device through heating element, make the joint compound hot melt of closing cap lower extreme, the joint compound loses viscidity, vacuum generator among the rethread closing cap separator, make the vacuum nozzle inhale the closing cap tightly, make the vacuum nozzle rotate around the support at last, make the vacuum nozzle drive closing cap rebound, break away from being connected with other parts of MEMS device, realize high-efficient, the closing cap is demolishd to the not damaged, and the success rate is high.

Description

Seal cover separating device of MEMS device

Technical Field

The utility model relates to an electron device unsolder equipment technical field, in particular to closing cap separator of MEMS device.

Background

The structure of the conventional common semiconductor device (IC) is mainly a single silicon chip structure or a stacked silicon chip structure, and an MEMS (Micro Electro Mechanical Systems, abbreviated as MEMS, chinese) device is different from the common semiconductor device in structure, although it belongs to the field of semiconductor devices. The MEMS chip packaging structure comprises a sealing cover and an MEMS chip carrier, wherein the MEMS chip carrier can form a cavity with the sealing cover, the sealing cover is bonded on the chip carrier through a physical or chemical method and forms a cavity with the chip carrier, and the cavity is used for placing an MEMS chip and packaging the MEMS chip.

When the MEMS device fails, the cap of the MEMS device is generally separated from the chip carrier to expose the MEMS chip, so as to perform failure analysis to obtain a failure mechanism. Thereby improving the chip design and process, increasing the yield and reducing the cost.

The existing MEMS device sealing cover separation technology is mainly manual detachment, the method is complex to operate, the MEMS chip is extremely easy to damage, and the success rate is not high.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a closing cap separator of MEMS device to solve the current not high problem of method success rate of removing the closing cap of MEMS device.

The utility model provides a closing cap separator of MEMS device, include MEMS device anchor clamps, locate heating element of MEMS device anchor clamps upper end, and locate the closing cap isolating component of MEMS device anchor clamps one side, closing cap isolating component is including locating the vacuum nozzle of MEMS device anchor clamps one side, locating the support at vacuum nozzle middle part, and with the vacuum generator that vacuum nozzle connects, vacuum nozzle with the support rotates and connects.

Above-mentioned closing cap separator of MEMS device, during the use, pass through MEMS device anchor clamps with the MEMS device and press from both sides tightly, then heat the closing cap of MEMS device through heating element, make the joint compound hot melt of closing cap lower extreme, the joint compound loses viscidity, vacuum generator among the rethread closing cap separator, make the vacuum nozzle inhale the closing cap tightly, make the vacuum nozzle rotate around the support at last, make the vacuum nozzle drive closing cap rebound, break away from being connected with other parts of MEMS device, realize high-efficient, the closing cap is demolishd to the not damaged, and the success rate is high.

Further, the heating assembly comprises an air pump and an air heating device connected with the air pump, and an air outlet of the air heating device is arranged at the upper end of the MEMS device clamp.

Further, the lower end of the gas heating device is provided with an air outlet pipe, and the air outlet pipe faces the MEMS device clamp.

Furthermore, one end of the vacuum suction nozzle, which is far away from the MEMS device clamp, is provided with a telescopic motor.

Furthermore, a ball block is arranged at the upper end of the support, and a containing groove is formed in the position, corresponding to the ball block, of the vacuum suction nozzle.

Further, the vacuum suction nozzle comprises a fixing rod and a vacuum sucker arranged at the tail end of the fixing rod, the vacuum sucker faces towards the MEMS device clamp, and the fixing rod is rotatably connected with the support.

Further, the vacuum chucks are arranged in a plurality and are uniformly distributed at the upper end of the MEMS device clamp.

Drawings

Fig. 1 is a schematic structural diagram of a MEMS device according to a first embodiment of the present invention;

FIG. 2 is a schematic diagram of a MEMS device;

fig. 3 is a schematic structural diagram of a cap separating assembly in a MEMS device according to a first embodiment of the present invention;

fig. 4 is a schematic structural view of the stent of fig. 3.

Description of the main element symbols:

the following detailed description of the invention will be further described in conjunction with the above-identified drawings.

Detailed Description

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. Several embodiments of the invention are given in the accompanying drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, a first embodiment of the present invention provides a cap separating apparatus for a MEMS device, for unsealing a MEMS device 100, wherein the MEMS device 100 includes a carrier 101, a bonding agent 102 disposed on an upper end of the carrier 101, a cap 103 disposed on an upper end of the bonding agent 102, and a MEMS chip 104 disposed on the carrier 101.

The sealing cover separating device of the MEMS device comprises an MEMS device clamp 10, a heating component 20 arranged at the upper end of the MEMS device clamp 10 and a sealing cover separating component 30 arranged on one side of the MEMS device clamp 10, wherein the sealing cover separating component 30 comprises a vacuum suction nozzle 31 arranged on one side of the MEMS device clamp 10, a support 32 arranged in the middle of the vacuum suction nozzle 31 and a vacuum generator 33 connected with the vacuum suction nozzle 31, and the vacuum suction nozzle 31 is rotationally connected with the support 32.

Referring to fig. 1 and 2, when the cap separating apparatus for the MEMS device is used, the carrier 101 of the MEMS device 100 is clamped by the MEMS device clamp 10, the cap 103 of the MEMS device 100 is heated by the heating assembly 20, the bonding agent 102 at the lower end of the cap 103 is melted, the bonding agent 102 loses viscosity, the vacuum generator 33 in the cap separating assembly 30 is used to enable the vacuum nozzle 31 to tightly suck the cap 103, and finally the vacuum nozzle 31 rotates around the support 20, so that the vacuum nozzle 31 drives the cap 103 to move upwards to separate from connection with other parts of the MEMS device 100, thereby realizing efficient and damage-free cap removal with high success rate.

Specifically, in this embodiment, the vacuum suction nozzle 31 can be manually operated to rotate around the bracket 32, and the vacuum generator 33 can also be manually started after the mains supply is connected.

Specifically, in this embodiment, the heating assembly 20 includes an air pump 21 and an air heating device 22 connected to the air pump 21, and an air outlet of the air heating device 22 is disposed at an upper end of the MEMS device clamp 10. When the MEMS device clamp is used, the mains supply is connected, the air pump 21 blows air, the air enters the air heating device 22 and is converted into hot air to heat the cover 103 on the MEMS device clamp 10, the heat is conducted to the joint compound 102, and then the joint compound 102 is melted. Wherein the working principle and the structure of the air heating device 22 and the air pump 21 are the same as those of the electric heating blower.

Specifically, in this embodiment, in order to conveniently control the gas outlet position of the gas heating device 22, the lower end of the gas heating device 22 is provided with a gas outlet pipe 23, the gas outlet pipe 23 faces the MEMS device clamp 10 to gather hot gas, so as to improve the heating effect, and meanwhile, the orientation of the gas outlet pipe 23 can be manually controlled, so that the heating position can be changed.

Referring to fig. 3 and 4, a difference between the second embodiment and the first embodiment of the present invention is that, in the second embodiment, a telescopic motor 34 is disposed at one end of the vacuum suction nozzle 31 away from the MEMS device clamp 10, and the telescopic motor 34 is powered by a power supply or a commercial power supply and can drive the vacuum suction nozzle 31 to perform a lever motion around the bracket 32, so as to achieve automatic lifting of the sealing cover 103.

Specifically, in this embodiment, the vacuum suction nozzle 31 includes a fixing rod 311 and a vacuum chuck 312 disposed at a distal end of the fixing rod 311, the vacuum chuck 312 is disposed toward the MEMS device clamp 10, and the fixing rod 311 is rotatably connected to the bracket 32. Meanwhile, in order to improve the height of the bracket 32, a ball block 321 is arranged at the upper end of the bracket 32, and an accommodating groove is arranged at the position of the vacuum suction nozzle 31 corresponding to the ball block 321, so that the bracket 32 is prevented from being separated from the fixing rod 311 of the vacuum suction nozzle 31.

It is understood that in other embodiments of the present invention, the number of the vacuum cups 312 can be adjusted according to the size of the cap 103 of the MEMS device 100, specifically, the larger the cap 103 is, the more the number of the vacuum cups 312 is, and the plurality of the vacuum cups 312 are uniformly distributed on the upper end of the MEMS device clamp 10, so as to uniformly adsorb the upper end of the cap 103, and the better the cap 103 is removed.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. The utility model provides a closing cap separator of MEMS device, its characterized in that includes MEMS device anchor clamps, locates the heating element of MEMS device anchor clamps upper end, and locate the closing cap separator of MEMS device anchor clamps one side, closing cap separator is including locating the vacuum nozzle of MEMS device anchor clamps one side, locating the support in vacuum nozzle middle part, and with the vacuum generator that the vacuum nozzle is connected, the vacuum nozzle with the support rotates and is connected.

2. The cover separating device of the MEMS device, as claimed in claim 1, wherein the heating assembly comprises an air pump and a gas heating device connected to the air pump, and the air outlet of the gas heating device is disposed at the upper end of the MEMS device clamp.

3. The cap separating apparatus for a MEMS device as claimed in claim 2, wherein the gas heating means has a gas outlet pipe at a lower end thereof, the gas outlet pipe being disposed toward the MEMS device holder.

4. A cap separating apparatus for a MEMS device as claimed in claim 1, wherein an end of the vacuum nozzle remote from the MEMS device holder is provided with a telescopic motor.

5. The cap separating apparatus for a MEMS device as defined by claim 1, wherein a ball block is disposed at an upper end of the holder, and a receiving groove is disposed at a position of the vacuum nozzle corresponding to the ball block.

6. The cap separating apparatus for a MEMS device as claimed in claim 1, wherein the vacuum nozzle comprises a fixing rod and a vacuum chuck disposed at a distal end of the fixing rod, the vacuum chuck is disposed toward the MEMS device clamp, and the fixing rod is rotatably connected to the support.

7. The cap separating apparatus for a MEMS device as claimed in claim 6, wherein the vacuum chucks are provided in plural numbers, and the plural vacuum chucks are uniformly distributed on the upper end of the MEMS device holder.