CN210157098U - Precise piezoelectric linear moving platform driven by square frame structure - Google Patents

Abstract

The utility model discloses a square frame structure driven precise piezoelectric linear moving platform, wherein a convex driving foot is arranged at the middle position of the inner side of a square frame structure vibrator base body, an in-plane bending vibration exciting ceramic is pasted at the outer side of the square frame structure vibrator base body opposite to the driving foot, an out-plane bending vibration exciting ceramic is pasted at the two sides of the square frame structure vibrator base body corresponding to the in-plane bending vibration exciting ceramic and the driving foot respectively, and a guide rail on a base is perpendicular to a groove in a cross way; the square frame structure vibrator base body is internally provided with a movable platform, the frame edge of the movable platform is correspondingly contacted with the driving foot at the inner side of the square frame structure vibrator base body, and the lower frame edge of the movable platform is corresponding to the guide rail. The utility model discloses a linear motion platform adopts a plurality of drive feet to promote the mobile station, can increase at double and exert oneself density, speed and make its operation more stable.

Description

Precise piezoelectric linear moving platform driven by square frame structure

Technical Field

The utility model belongs to piezoelectricity precision drive technique, in particular to square frame structure driven precision piezoelectricity linear movement platform.

Background

An ultrasonic motor (a piezoelectric motor) is used as a direct drive device, the working principle of the ultrasonic motor is different from that of a traditional electromagnetic motor, the ultrasonic motor utilizes the inverse piezoelectric effect of a piezoelectric material to convert electric energy into mechanical energy of elastomer vibration, so that mass points on the surface of an elastomer generate periodic track motion, and the microscopic vibration is converted into the macroscopic motion of a rotor through the frictional coupling between a stator and the rotor; in addition, the ultrasonic motor drives the rotor by means of micron-level vibration of particles on the surface of the stator, and the submicron-level positioning precision can be achieved. Therefore, the motor has wider application than the traditional electromagnetic motor in the high-precision occasions with special requirements such as aerospace, weaponry, high-precision instruments and the like. Since the 80 th century, many domestic and foreign scholars have been dedicated to research and development of a novel micro motor, namely an ultrasonic motor, so that the ultrasonic motor has rapidly developed in the world with its own unique advantages, and has been paid attention by many scientific research institutions and related industries. The ultrasonic motor can be divided into a linear type and a rotary type according to the motion form of the rotor, wherein the rotary type ultrasonic motor technology is mature day by day, and on the contrary, the technical conflict of the linear type ultrasonic motor is increased rapidly because the internal mechanical property of the linear type ultrasonic motor is subjected to the coupling action of various external factors, the design is complex, and the development is slow. Nevertheless, the linear ultrasonic motor has strong environmental compatibility, and is more suitable for the fields of robotics, biomedical engineering, micro-electro-mechanical systems and the like which have high requirements on linear motion. Therefore, it becomes necessary to develop a linear ultrasonic motor. In the aspect of foreign research, the first linear ultrasonic motor in the world is a traveling wave type linear ultrasonic motor proposed by japanese scholars in 1982 and referred to by field-aged people, and since then, japan is in the forefront of ultrasonic motor technology research and application. In 1989, scholars Tomikawa developed a standing wave linear ultrasonic motor, which became the first to introduce the lus into the field of standing waves; in 1998, Kurosawa develops an ultrasonic motor of a stator with a V-shaped structure by using out-of-plane modes of two Langewen oscillators forming an angle theta with each other, and synthesizes an elliptical motion track at the vertex of the V-shaped structure so as to drive a slide bar to do horizontal linear motion; in 2000, Israel Kyoccra company successfully uses a standing wave type linear ultrasonic motor to drive a two-dimensional precision motion platform, the positioning precision of ultra-low speed type products reaches 10nm, the position resolution exceeds 1nm, and the lowest speed reaches 10 nm/s; the German PI company Vyshnevsky proposes a single-phase driving linear ultrasonic motor in 2005 and is successfully commercialized, wherein the stator of the M-661 type linear moving platform has the weight of only 10g, the maximum speed reaches 600mm/s, and the thrust can reach 1.5N. In China, 2009, Zhaochun et al, Zhaochun, Ming and Sheng, the earliest national research on ultrasonic motor driving technology, developed a patch type linear ultrasonic motor, and derived the space motion trajectory equation of the motor stator through dynamics calculation, wherein the output thrust reaches 5.2N, and the no-load speed reaches 7 mm/s; the inventor of Hagongda Liu Yingxin thinking doctor and the like provides a double-foot driving linear ultrasonic motor based on longitudinal vibration composite mode in 2012, utilizes a horizontal piezoelectric transduction structure to connect two vertically placed piezoelectric transducers, and the structure adopts a hard aluminum alloy integrated form, and test results show that under an electric excitation signal with the frequency of 25.3KHz and the voltage amplitude of 200V, the double-driving foot end of the motor can output the maximum speed of 610mm/s and the thrust of 32N. In general, the structural form of the linear ultrasonic motor which is proposed at present is extremely limited, and the performance of the linear ultrasonic motor is greatly improved.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a frame structure driven accurate piezoelectricity linear motion platform makes this linear motion platform's motion position resolution ratio can reach the micron order, has millisecond level response speed, produces higher operating speed and exports great thrust.

In view of the above purpose, the present invention adopts the following technical solutions: the precise piezoelectric linear moving platform based on the square frame structure drive comprises a vibrator component, a moving platform and a base, wherein the vibrator component comprises a square frame structure vibrator base body, in-plane bending vibration excitation ceramic and out-of-plane bending vibration excitation ceramic; the square frame structure vibrator base body is formed by enclosing an upper rod body, a lower rod body, a left rod body and a right rod body, wherein the upper rod body, the lower rod body, the left rod body and the right rod body are all cuboid, and a raised driving foot is arranged in the middle of the inner side of each of the upper rod body, the lower rod body, the left rod body and the right rod body; connecting ends are arranged at four corners of the square frame structure vibrator base body, the thickness of each connecting end is slightly thinner than that of the rod body, and through holes are formed in the connecting ends; the outer sides of the square frame structure vibrator base body opposite to the driving feet are respectively adhered with an inner bending vibration exciting ceramic, the two sides of the square frame structure vibrator base body corresponding to the inner bending vibration exciting ceramic and the driving feet are respectively adhered with an outer bending vibration exciting ceramic, and the square frame structure vibrator base bodies at the two ends of the inner bending vibration exciting ceramic are provided with screw holes;

the mobile station is of a cross-shaped long strip structure and comprises an L-shaped plate, an elastic gasket and an adjusting screw; the L-shaped plate is composed of mutually vertical frame plates and horizontal plates of a solid structure, the two frame plates of the L-shaped plate are opposite and mutually connected through an adjusting screw, the two horizontal structure plates are opposite and mutually connected through the adjusting screw, and an elastic gasket is arranged between the mutual connection of the L-shaped plates;

the base comprises a rectangular plate, a guide rail is arranged on the upper surface of the rectangular plate along the longitudinal central line, a groove is arranged on the upper surface of the rectangular plate along the transverse central line, the guide rail and the groove are mutually crossed and vertical, and the surface of the groove is lower than the guide rail; the bottom surface of the groove is provided with an elastic washer, and fixing bolts are arranged below four corners of the rectangular plate;

the lower rod body of the vibrator assembly is fixedly arranged in the groove of the base through a bolt; the square frame structure vibrator base body is internally provided with a movable platform, the frame edge of the movable platform is correspondingly contacted with the driving foot at the inner side of the square frame structure vibrator base body, and the lower frame edge of the movable platform is corresponding to the guide rail.

The technical effects of the utility model reside in that: 1. the precise piezoelectric linear moving platform driven by a square frame structure can realize precise motion, and the repeated positioning precision can reach micron and submicron level; 2. the square frame structure vibrator base body is adopted to directly push the mobile station, so that the response speed and efficiency of the linear mobile platform can be improved; 3. the plurality of driving feet are adopted to push the mobile station, so that the output density and speed can be multiplied, and the operation is more stable. Has wide application prospect in industrial precision positioning, micro servo actuator precision driving and other applications.

Description of the drawings:

fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic plan view of the vibrator assembly 1 of the present invention;

fig. 3 is a schematic perspective view of the mobile station 2 according to the present invention;

fig. 4 is a schematic perspective view of the L-shaped plate 21 of the present invention;

fig. 5 is a schematic perspective view of the middle base 3 of the present invention;

fig. 6 is a schematic plan view of an in-plane bending mode of the middle vibrator component 1 according to the present invention;

fig. 7 is a schematic perspective view of an out-of-plane bending mode of the middle vibrator component 1 according to the present invention;

fig. 8 is a schematic plan view of the piezoelectric ceramic position arrangement and its piezoelectric polarization and power supply configuration of the vibrator assembly 1 according to the present invention;

fig. 9a is a schematic plan view of a first step of pushing the mobile station to make linear motion by the vibrator base 11 with a square frame structure in a vibration period; FIG. 9b is a side view of FIG. 9 a; FIG. 9c is a top view of FIG. 9 a;

fig. 10a is a schematic plan view of a second step of the square-frame structure vibrator base 11 pushing the mobile station to make linear motion in one vibration period; FIG. 10b is a side view of FIG. 10 a; FIG. 10c is a top view of FIG. 10 a;

fig. 11a is a schematic plan view of the third step of the square-frame structure vibrator base 11 pushing the mobile station to make linear motion within one vibration period; FIG. 11b is a side view of FIG. 11 a; FIG. 11c is a top view of FIG. 11 a;

fig. 12a is a schematic plan view of the square-frame structure vibrator base 11 pushing the mobile station to make a linear motion in a fourth step within a vibration period; FIG. 12b is a side view of FIG. 12 a; FIG. 12c is a top view of FIG. 12 a;

in the figure: 1-vibrator component, 11-vibrator base body with a square frame structure, 111-upper rod body, 112-lower rod body, 113-left rod body, 114-right rod body, 115-driving foot, 116-connecting end, 12-in-plane bending vibration excitation ceramic and 13-out-of-plane bending vibration excitation ceramic;

2-moving table, 21-L-shaped plate, 211-frame plate, 212-horizontal plate, 22-elastic gasket and 23-adjusting screw;

3-base, 31-rectangular plate, 311-guide, 312-groove, 32-elastic washer, 33-fixing bolt.

Detailed Description

The invention will be further explained with reference to the following figures and examples:

as shown in fig. 1 to 5, the precise piezoelectric linear motion platform driven by a block structure comprises a vibrator assembly 1, a motion stage 2 and a base 3. The vibrator component 1 is composed of a square frame structure vibrator base body 11, an in-plane bending vibration excitation ceramic 12 and an out-of-plane bending vibration excitation ceramic 13; the square-frame-structure vibrator base body 11 is formed by enclosing an upper rod body 111, a lower rod body 112, a left rod body 113 and a right rod body 114, wherein the upper rod body, the lower rod body, the left rod body and the right rod body are cuboid, and a raised driving foot 115 is arranged in the middle of the inner side of each of the upper rod body, the lower rod body, the left rod body and the right rod body; connecting ends 116 are arranged at four corners of the square-frame-structure vibrator base body 11, the thickness of each connecting end 116 is slightly thinner than that of each rod body, and through holes are formed in the connecting ends to reduce the rigidity of each rod body and increase the amplitude of a working mode; the in-plane bending vibration excitation ceramic 12 comprises 4 piezoelectric ceramic pieces and is respectively adhered to the outer sides of the square-frame structure vibrator base body 11 opposite to the driving feet 115, and the out-plane bending vibration excitation ceramic 13 comprises 8 piezoelectric ceramic pieces and is respectively symmetrically adhered to two sides of the square-frame structure vibrator base body 11 corresponding to the in-plane bending vibration excitation ceramic 12 and the driving feet 115; the square frame structure vibrator base body 11 at two ends of the in-plane bending vibration excitation ceramic 12 is provided with a screw hole for fixedly connecting the vibrator component 1 with the base 3;

the moving platform 2 is composed of an L-shaped plate 21, an elastic gasket 22 and an adjusting screw 23, the whole moving platform is in a cross-shaped structure, and four frame edges of the moving platform are correspondingly contacted with a driving foot 115 on the inner side of the square-frame-structure vibrator base body 11; the L-shaped plate 21 is composed of frame plates 211 and horizontal plates 212 which are vertical to each other, the two frame plates 211 of the L-shaped plate 21 are opposite and are connected with each other through adjusting screws 23, the two horizontal structure plates 212 are opposite and are connected with each other through adjusting screws 23, an elastic gasket 22 is arranged between the L-shaped plates 21 which are connected with each other, and the distance between the L-shaped plates can be adjusted by utilizing the elastic gasket 22 and the adjusting screws 23, so that the purpose of adjusting the pre-pressure between the vibrator assembly 1 and the mobile platform 2 is achieved;

the base 3 is composed of a rectangular plate 31, an elastic washer 32 and a fixing bolt 33, a guide rail 311 is arranged on the upper surface of the rectangular plate 31 along the longitudinal central line, a groove 312 is arranged on the transverse central line, the guide rail 311 and the groove 312 are mutually crossed and vertical, the surface of the groove is lower than the guide rail 311, and the lower frame edge of the mobile station 2 corresponds to the guide rail 311; screw holes are formed in two ends of the transverse center line of the groove 312, the lower rod body 112 of the vibrator assembly 1 is fixedly arranged in the groove 312 through bolts, and an elastic washer 32 is arranged between the connection part of the lower rod body 112 of the vibrator assembly 1 and the groove 312 to prevent the direct contact of the lower rod body 112 and the groove and provide pretightening force; fixing bolts 33 are installed below four corners of the rectangular plate 31.

As shown in fig. 6 to 7, the working modes of the precision piezoelectric linear motion platform driven based on the frame structure include an in-plane bending mode and an out-of-plane bending mode of the vibrator assembly 1:

the in-plane bending vibration mode is bending vibration of the upper rod body 111, the lower rod body 112, the left rod body 113 and the right rod body 114 towards or away from the center of the plane of the square-frame-structure vibrator base body 11, the in-plane bending vibration mode is excited by inverse piezoelectric effect, and cosine excitation voltage is applied to the in-plane bending vibration excitation ceramic 12 to excite the upper rod body 111, the lower rod body 112, the left rod body 113 and the right rod body 114 to perform reciprocating vibration according to the vibration mode of the in-plane bending vibration mode; the upper rod body 111 and the lower rod body 112 are in the same vibration state, and perform reciprocating vibration towards the plane center or away from the plane center of the square-frame-structured vibrator base body 11; the left rod body 113 and the right rod body 114 have the same vibration state, and perform reciprocating vibration towards the center of the plane of the square-frame-structured vibrator base body 11 or away from the center, and the vibration states of the upper rod body 111 and the lower rod body 112 are symmetrically opposite to the vibration states of the left rod body 113 and the right rod body 114 due to the momentum conservation theorem, so that the driving feet 115 of the upper rod body 111 and the lower rod body 112 and the driving feet 115 of the left rod body 113 and the right rod body 114 are alternately kept in contact with or separated from the moving table 2;

the out-of-plane bending vibration mode is bending vibration of the upper rod body 111, the lower rod body 112, the left rod body 113 and the right rod body 114 along the positive and negative directions perpendicular to the plane of the square frame structure vibrator base body 11 based on the plane of the square frame structure vibrator base body 11; the out-of-plane bending vibration mode is excited by an inverse piezoelectric effect, and the upper rod body 111, the lower rod body 112, the left rod body 113 and the right rod body 114 are excited to perform reciprocating vibration according to the vibration mode of the out-of-plane bending vibration mode by applying a sinusoidal excitation voltage to the out-of-plane bending vibration excitation ceramic 13; the upper rod body 111 and the lower rod body 112 have the same vibration state and perform reciprocating vibration along the positive and negative directions vertical to the plane of the square frame structure vibrator base body 11; the left rod body 113 and the right rod body 114 have the same vibration state and perform reciprocating vibration along the positive and negative directions vertical to the plane of the square frame structure vibrator base body 11; and due to the law of conservation of momentum, the vibration states of the upper rod body 111 and the lower rod body 112 are symmetrically opposite to the vibration states of the left rod body 113 and the right rod body 114; the driving feet 115 of the upper rod 111 and the lower rod 112 and the driving feet 115 of the left rod 113 and the right rod 114 alternately push the mobile station 2 to move;

the center of the square frame structure vibrator base body 11 is taken as the origin of coordinates, and the plane of the square frame structure vibrator base body 11 is taken as the planexoyThe normal direction of the plane of the square frame structure vibrator base body 11 iszThe direction of the linear moving platform is that the linear moving platform can excite the inner bending vibration mode and the outer bending vibration mode and utilize the vibration coupling when working, so that the driving feet 115 of the upper rod body 111 and the lower rod body 112 are arranged at the positions of the upper rod body and the lower rod bodyxozThe surfaces are coupled to form an elliptic motion track, and the driving feet 115 of the left rod body 113 and the right rod body 114 are arranged atyozThe surfaces are coupled to form an elliptical motion track, thereby alternately pushing the mobile station 2 alongzAnd (4) moving in the upward direction.

Example (b): the utility model discloses accurate piezoelectricity linear movement platform of square frame structure driven, including vibrator subassembly 1, mobile station 2 and base 3, refer to fig. 1 to 5. The mobile station 2 is arranged in the vibrator component 1 and correspondingly contacts with the driving foot 115 on the inner side of the square frame structure vibrator base body 11 through four frame edges; meanwhile, the lower frame of the mobile station 2 is located on the guide rail 311 of the base 3, and the lower rod 112 of the vibrator assembly 1 is fixedly mounted in the groove 312 of the base 3 by bolts.

As shown in fig. 2, the vibrator module 1 includes a square frame structure vibrator base 11, an in-plane bending vibration excitation ceramic 12, and an out-of-plane bending vibration excitation ceramic 13. The square-frame-structure vibrator base body 11 is formed by enclosing an upper rod body 111 and a lower rod body 112 which are symmetrical up and down, and a left rod body 113 and a right rod body 114 which are symmetrical left and right, connecting ends 116 are arranged at four corners of the square-frame-structure vibrator base body 11, the thickness of each connecting end 116 is slightly thinner than that of each rod body, and a through hole is formed in each connecting end for reducing the rigidity of each rod body and increasing the amplitude of a working mode. The upper, lower, left and right rod bodies are cuboid and are provided with raised driving feet 115 at the middle positions of the inner sides. The in-plane bending vibration excitation ceramic 12 comprises 4 piezoelectric ceramic pieces and is respectively adhered to the outer side of the square-frame structure vibrator base body 11 opposite to the driving foot 115, and the out-plane bending vibration excitation ceramic 13 comprises 8 piezoelectric ceramic pieces and is respectively and symmetrically adhered to two sides of the square-frame structure vibrator base body 11 corresponding to the in-plane bending vibration excitation ceramic 12 and the driving foot 115. The thickness of the driving foot 115 is larger than that of the piezoelectric ceramic plate, and the surface of the driving foot 115 parallel to the in-plane bending vibration excitation ceramic 12 is coated with a high-friction-coefficient wear-resistant material to increase the friction driving force between the driving foot 115 and the moving platform 2, the thrust of the linear moving platform and the service life. And screw holes are formed in the square-frame structure vibrator base body 11 at two ends of the in-plane bending vibration excitation ceramic 12 and used for fixedly connecting the vibrator component 1 with the base 3.

As shown in fig. 1, 3 and 4, the mobile station 2 includes an L-shaped plate 21, an elastic gasket 22, an adjusting screw 23, and is in a cross-shaped structure as a whole, and four frame edges thereof are in direct contact with a driving foot 115 inside the square-frame structure vibrator base 11; the L-shaped plate 21 is a solid plate 212 in the horizontal direction, and screw holes are formed in two side corners of the right end; the vertical direction is a frame plate 211, and two corners at the upper end are provided with screw holes; the two frame plates 211 of the L-shaped plate 21 are opposite and connected with each other through an adjusting screw 23, and the two horizontal structural plates 212 are opposite and connected with each other through an adjusting screw 23; elastic gaskets 22 are arranged between the L-shaped plates 21 in a mutual connection mode, and the number of the elastic gaskets 22 is 8; the distance between the L-shaped plates can be adjusted by the elastic gasket 22 and the adjusting screw 23, so that the aim of adjusting the pre-pressure between the vibrator assembly 1 and the mobile station 2 is fulfilled.

As shown in fig. 1 and 5, the base 3 includes a rectangular plate 31, an elastic washer 32, and a fixing bolt 33, a guide rail 311 is disposed on a longitudinal center line of the rectangular plate 31, a groove 312 is disposed on a transverse center line, the guide rail 311 and the groove 312 are perpendicular to each other, a groove surface is lower than the guide rail 311, a lower frame edge of the mobile station 2 corresponds to the guide rail 311, screw holes are disposed at two ends of the transverse center line of the groove 312, the lower rod 112 of the vibrator assembly 1 is fixedly mounted in the groove 312 through the bolt, and the elastic washer 32 is disposed between the connection of the lower rod 112 of the vibrator base 11 and the groove 312 to prevent the two from directly contacting each other and provide. The number of the elastic washers 32 is 2. Fixing bolts 33 are installed below four corners of the rectangular plate 31 to fixedly mount the base 3 on other mechanisms.

As shown in fig. 6 and 7, the working mode of the linear motion platform of the present invention includes the upper rod 111 and the lower rod 112 which are vertically symmetrical and the left rod 113 and the right rod 114 which are horizontally symmetrical with respect to the vibrator assembly 1xoyIn-plane bending mode with plane facing towards or away from origin of coordinates, and edgezAn out-of-plane bending mode of reciprocating vibration, wherein the in-plane bending mode realizes dynamic contact or separation between the driving feet 115 and the mobile station 2, and the out-of-plane bending mode realizes that the driving feet 115 alternately push the mobile station 2 alongzAnd (4) moving in the upward direction.

The in-plane bending vibration exciting ceramic 12 and the out-of-plane bending vibration exciting ceramic 13 are used for exciting the resonance or near resonance of two-phase working modes of the rod body, so as to drive the driving feet 115 arranged at the inner sides of the upper rod body 111 and the lower rod body 112 to be positioned atxozMaking the surface do elliptic motion; the driving feet 115 on the inner sides of the left rod body 113 and the right rod body 114 are arranged atyozThe surface makes an elliptical motion, and the movable table 2 is pushed along by the friction coupling effect between the driving feet 115 and the movable table 2zMove in a straight line.

In order to make the driving feet 115 inside the upper rod 111, the lower rod 112, the left rod 113 and the right rod 114 respectively arranged atxoz、yozThe surface coupling forms an elliptical motion trajectory, and the natural frequencies of the two working modes of the rod body are required to be as close to or equal to each other as possible. In order to prevent excessive mechanical noise generated during operation of the linear motion platform, especially to enable the linear motion platform to output a large speed, the two-phase modal frequencies need to be consistent and in the ultrasonic frequency domain by properly configuring the structural size of the vibrator assembly 1.

As shown in fig. 2, 6 and 7, the in-plane bending vibration excitation ceramic 12 includes 4 high-performance PZT8 piezoelectric ceramic plates, which are respectively located on the outer sides of the square-frame structure vibrator base 11 opposite to the driving foot 115 and respectively adhered to the peaks and valleys of the bending vibration mode in the rod body plane.

As shown in fig. 2, 6 and 7, the out-of-plane bending vibration excitation ceramic 13 includes 8 high-performance PZT8 piezoelectric ceramic plates, which are respectively located on two sides of the square-frame structure vibrator base 11 corresponding to the in-plane bending vibration excitation ceramic 12 and the driving foot 115 and respectively adhered to the peak and the trough of the out-of-plane bending vibration mode of the rod body.

As shown in fig. 8, in order to effectively and correctly excite the in-plane bending vibration mode, the in-plane bending vibration excitation ceramics 12 needs to be reasonably polarized and configured for power supply, the in-plane bending vibration excitation ceramics 12 can be divided into two groups according to symmetry, the in-plane bending vibration excitation ceramics 12 on the surfaces of the upper rod 111 and the lower rod 112 are one group, the in-plane bending vibration excitation ceramics 12 on the surfaces of the left rod 113 and the right rod 114 are one group, and the piezoelectric ceramic plates in the same group adopt the same polarization direction. As shown in fig. 8, "+" indicates that the piezoelectric polarization direction is perpendicular to the pasted surface and faces away from the square-frame structure vibrator base 11 in the same direction as the normal line, and "-" indicates that the piezoelectric polarization direction is perpendicular to the pasted surface and faces toward the square-frame structure vibrator base 11 in the opposite direction to the normal line. Therefore, the requirements are as follows: the in-plane bending vibration excitation ceramic 12 adhered to the surfaces of the upper rod body 111 and the lower rod body 112 is perpendicular to the adhering surface and is polarized in the direction opposite to the square frame structure vibrator base body 11 in the same direction as the normal direction; the in-plane bending vibration excitation ceramic 12 adhered to the surfaces of the left rod body 113 and the right rod body 114 is perpendicular to the adhering surface and is polarized in a direction opposite to the normal direction and pointing to the square frame structure vibrator base body 11; the same frequency cosine excitation voltage is applied to the surfaces of all the in-plane bending vibration excitation ceramics 12

. Meanwhile, the bonding surfaces of the in-plane bending vibration excitation ceramic 12 and the square-frame structure vibrator base body 11 are required to be grounded and connected with zero excitation voltage.

As shown in FIG. 8, in order to effectively and correctly excite the out-of-plane bending vibration mode, the out-of-plane bending vibration excitation ceramic is requiredThe porcelain 13 is reasonably polarized and configured to supply power, the out-of-plane bending vibration excitation ceramics 13 can be divided into two groups according to symmetry, the out-of-plane bending vibration excitation ceramics 13 on the surfaces of the upper rod body 111 and the lower rod body 112 form one group, and the out-of-plane bending vibration excitation ceramics 13 on the surfaces of the left rod body 113 and the right rod body 114 form one group. Therefore, the requirements are as follows: the out-of-plane bending vibration excitation ceramics 13 pasted on the front surfaces of the upper rod body 111 and the lower rod body 112 are both vertical to the pasting surface and are polarized in the direction opposite to the square frame structure vibrator base body 11 in the same direction with the normal direction; the out-of-plane bending vibration excitation ceramic 13 adhered to the opposite surfaces of the upper rod 111 and the lower rod 112 is perpendicular to the adhering surface and is polarized in a direction opposite to the normal direction and toward the square frame structure vibrator base 11. The out-of-plane bending vibration excitation ceramic 13 adhered to the front surfaces of the left rod body 113 and the right rod body 114 is perpendicular to the adhering surface, and is polarized in a direction opposite to the normal direction and pointing to the square-frame structure vibrator base body 11. The out-of-plane bending vibration excitation ceramic 13 adhered to the reverse surfaces of the left rod 113 and the right rod 114 is perpendicular to the adhering surface and is polarized in the same direction as the normal direction and in the direction opposite to the square frame structure vibrator base 11. The same-frequency sinusoidal excitation voltage is applied to the surfaces of all the out-of-plane bending vibration excitation ceramics 13

Meanwhile, the sticking surfaces of the out-of-plane bending vibration excitation ceramic 13 and the square-frame structure vibrator base body 11 are required to be grounded and connected with zero excitation voltage.

As shown in FIGS. 9 a-12 c, the drive foot 115 is shownxoz、yozThe elliptical motion trajectory of the surface is formed by coupling the out-of-plane bending mode with the vibration of the in-plane bending mode of the upper rod 111, the lower rod 112, the left rod 113, and the right rod 114, respectively. If one vibration period T of the square-frame-structure-oscillator base 11 is equally divided into four stages, and it is assumed that the initial state of the square-frame-structure-oscillator base 11 is: the upper rod body 111 is in the maximum upward bending shape in the plane, the lower rod body 112 is in the maximum downward bending shape in the plane, the left rod body 113 is in the maximum right bending shape in the plane, and the right rod body 114 is in the maximum left bending shape in the plane; each rod body is in an out-of-plane zero-bending shape, and the elliptical motion track is formed through the following four stages:

as shown in FIGS. 9a to 9c (Step 1), the in-plane bending mode makes the left rod 113 most in-plane in the time interval of 0 to T/4The large right bending shape returns to the in-plane zero bending shape, the right rod body 114 returns to the in-plane zero bending shape from the in-plane maximum left bending shape, the out-of-plane bending mode enables the left rod body 113 and the right rod body 114 to be bent from the out-of-plane zero bending shape to the out-of-plane maximum forward bending shape, so that the driving feet 115 on the inner sides of the left rod body 113 and the right rod body 114 are in contact with the mobile station 2, the driving feet 115 on the inner side of the left rod body 113 run from A1 to A2, the driving feet 115 on the inner side of the right rod body 114 run from B1 to B2zMoving in one step in the positive direction of the axis; meanwhile, the in-plane bending mode enables the upper rod body 111 to be restored from the in-plane maximum upward bending state to the in-plane zero bending state, the lower rod body 112 is restored from the in-plane maximum downward bending state to the in-plane zero bending state, the out-of-plane bending mode enables the upper rod body 111 and the lower rod body 112 to be bent from the out-of-plane zero bending state to the out-of-plane maximum backward bending state, so that the driving feet 115 on the inner sides of the upper rod body 111 and the lower rod body 112 are separated from the mobile station 2, the driving feet 115 on the inner sides of the upper rod body 111 run from C1 to C2, and the driving feet 115 on the inner sides of the lower.

As shown in fig. 10a to 10c (Step 2), in the time period of T/4 to T/2, the in-plane bending mode causes the left stick 113 to bend from the in-plane zero-bending state to the in-plane maximum left-bending state, the right stick 114 to bend from the in-plane zero-bending state to the in-plane maximum right-bending state, the out-of-plane bending mode causes the left stick 113 and the right stick 114 to return from the out-of-plane maximum front-bending state to the out-of-plane zero-bending state, so that the driving feet 115 inside the left stick 113 and the right stick 114 are separated from the mobile station 2, the driving foot 115 inside the left stick 113 runs from a2 to A3, and the driving foot 115 inside the right stick 114 runs from B2 to B3; meanwhile, the in-plane bending mode causes the upper rod 111 to bend from the in-plane zero-bending state to the in-plane maximum downward bending state, the lower rod 111 to bend from the in-plane zero-bending state to the in-plane maximum upward bending state, the out-of-plane bending mode causes the upper rod 111 and the lower rod 112 to return from the out-of-plane maximum backward bending state to the out-of-plane zero-bending state, so that the driving feet 115 on the inner sides of the upper rod 111 and the lower rod 112 are in contact with the mobile station 2, the driving feet 115 on the inner side of the upper rod 111 run from C2 to C3, the driving feet 115 on the inner side of the lower rod 112 run from D2 to D3zThe positive axial direction moves one step.

As shown in FIGS. 11a to 11c (Step 3), in the time period of T/2 to 3T/4, the in-plane bending vibration mode restores the left rod 113 from the maximum in-plane left bending state to the zero in-plane bending state, and the right rod 114 from the planeThe inner maximum right bending state is restored to the in-plane zero bending state, the out-of-plane bending vibration mode enables the left rod body 113 and the right rod body 114 to be bent from the out-of-plane zero bending state to the out-of-plane maximum back bending state, so that the driving feet 115 on the inner sides of the left rod body 113 and the right rod body 114 are separated from the mobile station 2, the driving feet 115 on the inner side of the left rod body 113 run from A3 to A4, and the driving feet 115 on the inner side of the right rod body 114 run from B3 to B4; meanwhile, the in-plane bending mode causes the upper rod 111 to be restored from the in-plane maximum downward bending state to the in-plane zero bending state, the lower rod 111 is restored from the in-plane maximum upward bending state to the in-plane zero bending state, the out-of-plane bending mode causes the upper rod 111 and the lower rod 112 to be bent from the out-of-plane zero bending state to the out-of-plane maximum forward bending state, so that the driving feet 115 on the upper rod 111 and the lower rod 112 are in contact with the mobile station 2, the driving foot 115 on the inner side of the upper rod 111 is moved from C3 to C4, the driving foot 115 on the inner side of the lower rod 112 is moved from D3 to D4, and thezThe positive axial direction moves one step.

As shown in fig. 12a to 12c (Step 4), in the in-plane bending mode, the left rod 113 is bent from the in-plane zero-bending state to the in-plane maximum right-bending state, and the right rod 114 is bent from the in-plane zero-bending state to the in-plane maximum left-bending state within 3T/4 to T. The out-of-plane bending mode causes the left rod 113 and the right rod 114 to return from the out-of-plane maximum backward bending state to the out-of-plane zero bending state. The driving feet 115 on the inner sides of the left rod 113 and the right rod 114 are contacted with the mobile station 2, the driving feet 113 on the inner side of the left rod 113 move from A4 to A1, the driving feet 115 on the inner side of the right rod 114 move from B4 to B1, and the mobile station 2 is pushed to move alongzThe positive axial direction moves one step. Meanwhile, the in-plane bending vibration mode enables the upper rod body 111 to be bent from the in-plane zero-bending state to the in-plane maximum upward bending state, the lower rod body 111 is bent from the in-plane zero-bending state to the in-plane maximum downward bending state, the out-of-plane bending vibration enables the upper rod body 111 and the lower rod body 112 to be restored from the out-of-plane maximum forward bending state to the out-of-plane zero-bending state, so that the driving feet 115 on the inner sides of the upper rod body 111 and the lower rod body 112 are separated from the mobile station 2, the driving feet 115 on the inner sides of the upper rod body 111 run from C4 to C1, and the driving feet 115 on the.

As shown in fig. 9a to 12c, the square-frame-structured vibrator base 11 completes one vibration period T every timeyozIn a flat plane, the driving foot 115 on the inner side of the left rod 113 will complete the elliptical motion track through A1-A2-A3-A4-A1, and the driving foot 11 on the inner side of the right rod 1145 will complete an elliptical motion trajectory through B1-B2-B3-B4-B1; in thatxozIn a plane, the driving feet 115 on the inner side of the upper rod body 111 complete the elliptical motion track passing through C1-C2-C3-C4-C1, and the driving feet 115 on the inner side of the lower rod body 112 complete the elliptical motion track passing through D1-D2-D3-D4-D1, so as to alternately push the mobile station 2 to move alongzThe axis moves in four steps in the positive direction. When the square frame structure vibrator base body 11 continuously repeats the vibration cycle, the moving platform 2 is pushed to continuously followzThe forward direction of the axis is forward, and if the lead-lag phase relationship of the driving voltages of the in-plane bending vibration excitation ceramic 12 and the out-of-plane bending vibration excitation ceramic 13 is reversed, the moving direction of the moving stage 2 is reversed.

Claims (1)

1. The precise piezoelectric linear moving platform driven by the square frame structure comprises a vibrator component, a moving platform and a base, and is characterized in that the vibrator component comprises a square frame structure vibrator base body, in-plane bending vibration excitation ceramic and out-plane bending vibration excitation ceramic; the square frame structure vibrator base body is formed by enclosing an upper rod body, a lower rod body, a left rod body and a right rod body, wherein the upper rod body, the lower rod body, the left rod body and the right rod body are all cuboid, and a raised driving foot is arranged in the middle of the inner side of each of the upper rod body, the lower rod body, the left rod body and the right rod body; connecting ends are arranged at four corners of the square frame structure vibrator base body, the thickness of each connecting end is slightly thinner than that of the rod body, and through holes are formed in the connecting ends; the outer sides of the square frame structure vibrator base body opposite to the driving feet are respectively adhered with an inner bending vibration exciting ceramic, the two sides of the square frame structure vibrator base body corresponding to the inner bending vibration exciting ceramic and the driving feet are respectively adhered with an outer bending vibration exciting ceramic, and the square frame structure vibrator base bodies at the two ends of the inner bending vibration exciting ceramic are provided with screw holes;

the mobile station is of a cross-shaped long strip structure and comprises an L-shaped plate, an elastic gasket and an adjusting screw; the L-shaped plate is composed of mutually vertical frame plates and horizontal plates of a solid structure, the two frame plates of the L-shaped plate are opposite and mutually connected through an adjusting screw, the two horizontal structure plates are opposite and mutually connected through the adjusting screw, and an elastic gasket is arranged between the mutual connection of the L-shaped plates;

the base comprises a rectangular plate, a guide rail is arranged on the upper surface of the rectangular plate along the longitudinal central line, a groove is arranged on the upper surface of the rectangular plate along the transverse central line, the guide rail and the groove are mutually crossed and vertical, and the surface of the groove is lower than the guide rail; the bottom surface of the groove is provided with an elastic washer, and fixing bolts are arranged below four corners of the rectangular plate;

the lower rod body of the vibrator assembly is fixedly arranged in the groove of the base through a bolt; the square frame structure vibrator base body is internally provided with a movable platform, the frame edge of the movable platform is correspondingly contacted with the driving foot at the inner side of the square frame structure vibrator base body, and the lower frame edge of the movable platform is corresponding to the guide rail.

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