CN107834893B - Planar ultrasonic motor driven by isomorphic modes of double cross coupling type piezoelectric vibrator and working mode thereof - Google Patents
Planar ultrasonic motor driven by isomorphic modes of double cross coupling type piezoelectric vibrator and working mode thereof Download PDFInfo
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- CN107834893B CN107834893B CN201711119607.1A CN201711119607A CN107834893B CN 107834893 B CN107834893 B CN 107834893B CN 201711119607 A CN201711119607 A CN 201711119607A CN 107834893 B CN107834893 B CN 107834893B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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Abstract
The invention relates to a planar ultrasonic motor driven by a double cross coupling type piezoelectric vibrator in the same bending vibration mode and a working mode thereof. The vibrator assembly is in double cross coupling configuration, is composed of a double cross base body and piezoelectric ceramic excitation assembly components, is fixed on the support assembly through screws, is arranged between vertical plates on two sides of the support assembly, is positioned in two sliding plates of the rotor assembly, and is connected with the rotor assembly through driving feet of the vibrator assembly. The rotor assembly consists of an upper sliding plate and a lower sliding plate, and the two sliding plates are respectively connected with eight driving feet on the top surface and the bottom surface of the vibrator assembly. The support component is connected with the vibrator component through the baffle block and is fixed through screws at four corners of the bottom plate. The motor synthesizes two-phase elliptical tracks running along xOz and yOz surfaces on the driving feet of the longitudinal rods and the transverse rods of the vibrator assembly by utilizing resonance of 3-phase modes such as out-of-plane symmetrical bending vibration, in-plane bending vibration of the longitudinal rods and in-plane bending vibration of the transverse rods of the vibrator assembly, and the motor pushes the mover assembly to slide along x and y directions by utilizing the two-phase elliptical tracks and by means of friction coupling action between the vibrator assembly and the mover assembly so that the mover assembly has precise movement and quick response characteristics. The motor adopts a plurality of driving feet to push the rotor, so that the output density and the speed can be multiplied, and the operation of the motor is more stable.
Description
Technical Field
The invention relates to a planar ultrasonic motor driven by the same-shape bending vibration mode of a double-cross coupling type piezoelectric vibrator, and belongs to the technical fields of ultrasonic motors and planar motors.
Technical Field
The ultrasonic motor is a novel power component which utilizes the inverse piezoelectric effect of piezoelectric materials to excite the elastic body to slightly vibrate in an ultrasonic way, and drives the active cell to produce controllable and usable macroscopic mechanical movement by means of the friction coupling effect between the elastic body and the active cell. The device has a series of advantages of high power density, quick response, small size, light weight, flexible structure, no mechanical noise, electromagnetic compatibility, power-off self-locking and the like, and has wide application prospect in the fields of high-end manufacturing equipment, IC photoetching, cell operation, fine chemical engineering and the like. Ultrasonic motors are available in a variety of motor types including rotary, linear, planar, multi-degree of freedom, and the like. In recent years, in order to better meet the requirements of small-sized precise driving application in the high-precision tip fields of aerospace, precise ultra-precise machining and the like, a great deal of investment and manpower in developing rotary type and linear ultrasonic motor research are carried out in many scientific and technological development countries in the world, and a great breakthrough is made. It can be said that the technology of rotary-type and linear-type ultrasonic motors is becoming well established nowadays, and in particular rotary motors have been put into industrial production and application. In contrast, planar ultrasonic motors have complex kinematics, dynamics and electromechanical coupling characteristics in the interior, so that internal technical conflicts are greatly increased, accurate mathematical modeling is difficult, and moreover, the motors have small difficulty and challenges in driving consistency and motion control, and have high requirements on experience of designers. This all has resulted in the heretofore known planar ultrasonic motor technology being significantly retarded from rotary and linear ultrasonic motors. However, considering that the planar ultrasonic motor has numerous occasions with precise and ultra-precise two/three-dimensional planar positioning requirements, such as high-end numerical control equipment driving, IC manufacturing, micro-assembly, biomedical operation, biochip manufacturing, micro-switch control, large-concentration printed circuit board coupling, point crystal, optical fiber butting and the like, the planar ultrasonic motor has the advantage and application prospect that other types of motors are difficult to replace, so that the research on the planar ultrasonic motor is very necessary.
So far, the academic world has also conducted a small amount of planar ultrasonic motor research and correspondingly introduced some motor prototypes, for example, korean HONG developed a planar motor by exciting a longitudinal and four bending mode of a rectangular plate vibrator composed of stainless steel and a piezoelectric ceramic plate to synthesize a two-phase ellipse, and the moving speed of the planar motor was 100mm/s. However, the motor auxiliary devices are more and the structure is complex; the pole type plane motor is developed based on the two-phase orthogonal four-order bending vibration of the variable cross-section pole, the motor speed is 190mm/s, and the thrust is 19N; chen Weishan a high-speed planar motor driven by a piezoelectric concentrator is developed, and the speed of the motor reaches 960mm/s; li Chaodong the rotor of the motor can move along two diagonal lines of the rectangular frame, but the motor power is not large; jin Gumei a rod-type planar motor with a speed of 145mm/s and a thrust of 4.3N was developed. The types of existing planar ultrasonic motors are also limited in terms of the motor conditions that have been deduced, and their performance is widely separated from the wide range of applications. Nevertheless, the advantages of the motor are continuously revealed and have attracted more and more attention from a plurality of students at home and abroad and the industry. The invention is suitable for the background, aims at the important requirements of the fields of advanced manufacturing and national economy development at present, and provides a planar ultrasonic motor driven by the homomorphic mode of a double-cross-shaped coupled vibrator for better advancing the development of the planar ultrasonic motor technology. Other motors with similar principles and structures as the present invention are not seen at home and abroad.
Disclosure of Invention
The invention aims at providing a plane ultrasonic motor driven by three-phase bending vibration modes such as transverse rod in-plane bending vibration, longitudinal rod in-plane bending vibration, out-of-plane symmetrical bending vibration and the like of a double-cross coupling type metal elastic structure, wherein the resolution of the movement position of the motor can reach a micron level, has millisecond response speed, can generate higher running speed, can output larger thrust, and has wide application prospect in the applications of precise movement positioning of a plane working device, precise driving of a microminiature servo actuating mechanism and the like.
In view of the above object, the present invention adopts the following technical scheme: the device comprises a vibrator assembly, a rotor assembly and a support assembly, and is characterized in that the rotor assembly consists of an upper sliding plate, a lower sliding plate and an upright post; the support assembly consists of a bottom plate, a vertical plate, a partition plate, a strip-shaped connecting block and balls; the vibrator assembly is arranged between the support assembly and the rotor assembly, and is respectively connected with an upper sliding plate and a lower sliding plate of the rotor assembly through driving feet on the upper surface and the lower surface of the vibrator assembly and is connected to the support assembly through screws; the support assembly is connected with the rotor assembly through balls in the bottom plate of the support assembly and is connected with the vibrator assembly through the partition plate block.
The vibrator assembly comprises a double-cross-shaped matrix and a piezoelectric ceramic excitation assembly. The double cross-shaped matrix is formed by connecting two cross plates with the same structure through an intermediate connecting rod, the two cross plates are composed of two cross rods with the same shape and size and longitudinal rods, and threaded holes are formed at two ends of the intermediate connecting rod for connecting the two cross plates. The piezoelectric ceramic excitation assembly consists of longitudinal rod in-plane bending vibration excitation ceramic, transverse rod in-plane bending vibration excitation ceramic and out-of-plane bending vibration excitation ceramic, and the piezoelectric ceramic plates are respectively adhered to two side surfaces of the longitudinal rod and two sides of the transverse rod on the two cross metal plates, and the front and back surfaces of the transverse rod and the longitudinal rod. The ends of each cross rod and each longitudinal rod are respectively provided with a driving foot, the heights of the driving feet are higher than the thickness of the out-of-plane bending vibration excitation ceramic plate, in particular, the driving feet on the front face of the upper cross plate are connected with the upper sliding plate of the rotor assembly, and the driving feet on the back face of the lower cross plate are connected with the lower sliding plate of the rotor assembly.
The rotor assembly comprises an upper sliding plate, a lower sliding plate and an upright post, wherein the two sliding plates are respectively connected to two ends of the upright post through screws, the upper sliding plate and the lower sliding plate are respectively connected with a driving foot on the upper surface of the upper cross plate and a driving foot on the lower surface of the lower cross plate, and the lower sliding plate is connected with the support assembly through balls to form a rolling pair.
The support assembly comprises vertical plates, cover plates, bottom plates, partition plates, strip-shaped connecting blocks, balls and disc springs, wherein the two vertical plates are connected to two ends of the strip-shaped connecting blocks and are fixed to two sides of the bottom plates by screws; the strip-shaped connecting blocks are connected with the partition plates through screws, and stator mounting threaded holes are formed in the front side and the rear side of the partition plates and used for fixing the vibrator assembly; a disc spring is pressed between the cover plate and the bottom plate, a ball groove is formed in the cover plate to accommodate balls, and the balls are in point contact with the lower sliding plate; the bottom plate is connected to the base at four corners by screws.
The planar ultrasonic motor driven by the homomorphic modes of the double cross coupling type piezoelectric vibrator is characterized in that: the vibration device takes an out-of-plane symmetrical bending vibration mode, a longitudinal rod in-plane bending vibration mode and a transverse rod in-plane bending vibration mode of a vibrator assembly as working modes, and combines elliptical tracks advancing along xOz and yOz surfaces on longitudinal rods and transverse rod driving feet of an upper cross plate and a lower cross plate of a double-cross base body respectively by exciting resonance of three-phase modes so as to push a rotor assembly to do plane motion. In the three-phase working mode vibration, out-of-plane symmetrical bending vibration realizes dynamic contact and separation between the rotor assembly and the vibrator assembly, and longitudinal rod in-plane bending vibration and transverse rod in-plane bending vibration respectively drive the rotor assembly to move along the x direction and the y direction;
the out-of-plane symmetric flexural vibration mode vibration is excited by the inverse piezoelectric effect. When the motor works, a specific simple harmonic voltage is applied to the external bending vibration excitation piezoelectric ceramics, so that the transverse rods and the longitudinal rods on the two cross plates of the excitation vibrator assembly generate external symmetrical bending vibration mode movement, and the longitudinal rods and the transverse rods vibrate in opposite directions, so that driving feet on the longitudinal rods and the transverse rods are alternately contacted and separated with the mover assembly.
The longitudinal rod in-plane bending vibration mode vibration is excited by the inverse piezoelectric effect. When the motor works, a specific simple harmonic voltage is applied to the in-plane bending vibration excitation piezoelectric ceramics on the longitudinal rods, so that the two longitudinal rods do in-phase bending vibration along the x direction in the cross plate surfaces where the two longitudinal rods are positioned, and the longitudinal rods are driven to drive the feet to push the rotor assembly to slide along the x direction;
the transverse rod in-plane bending vibration mode vibration is excited by the inverse piezoelectric effect. When the motor works, a specific simple harmonic voltage is applied to the in-plane bending vibration excitation piezoelectric ceramics on the cross rods, so that the two cross rods do in-phase bending vibration along y in the cross plate surfaces where the two cross rods are positioned, and the cross rods are driven to drive the foot to push the mover assembly to slide along y direction.
The invention has the main technical effects that: 1. the double cross coupling type piezoelectric vibrator is adopted to drive the planar motor rotor, so that the motor can realize precise planar motion, and the repeated positioning precision of the motor can reach the micron and submicron level; 2. the motor directly pushes the rotor by adopting the double cross vibrator, so that the motion error, large inertia and structural complexity caused by the composite plane motion of the linear motor are avoided, and the response speed and the response efficiency of the motor can be improved; 3. the motor adopts a multi-foot synchronous driving mode to drive the rotor, so that the output density and the running stability of the motor can be greatly improved. 4. The motor rotor can multiply increase the motor power because the upper sliding plate and the lower sliding plate are pushed simultaneously.
Description of the drawings:
FIG. 1 is a three-dimensional assembly structure illustration of a planar ultrasonic motor of the present invention;
FIG. 2 is a schematic diagram showing the structural composition of a vibrator assembly according to the present invention;
FIG. 3 is a schematic diagram showing the structural composition of a mover assembly according to the present invention;
FIG. 4 is a schematic view showing the structural composition of the support assembly of the present invention;
FIG. 5 is a schematic diagram of the cross bar in-plane bending vibration mode of operation of the planar ultrasonic motor of the present invention;
FIG. 6 is a schematic diagram of the longitudinal rod in-plane bending vibration mode of operation of the planar ultrasonic motor of the present invention;
FIG. 7 is a schematic diagram I of an out-of-plane symmetric bending vibration mode of operation of the planar ultrasonic motor of the present invention;
FIG. 8 is a second schematic diagram of an out-of-plane symmetric bending vibration mode of operation of the planar ultrasonic motor of the present invention;
FIG. 9 is a diagram showing the position of the piezoelectric ceramic and its piezoelectric polarization and power supply configuration in the motor of the present invention;
FIG. 10 is a diagram showing the position of piezoelectric ceramic and its piezoelectric polarization and power supply configuration in the motor according to the present invention;
FIG. 11 shows a first step of the double cross piezoelectric vibrator pushing the mover to perform planar motion in one vibration period;
FIG. 12 is a second step of the double cross piezoelectric vibrator pushing the mover to perform a planar motion in one vibration period;
FIG. 13 shows a third step of the double cross piezoelectric vibrator pushing the mover to perform planar motion in one vibration period;
fig. 14 shows a fourth step of the double cross piezoelectric vibrator pushing the mover to perform a planar motion in one vibration period.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
as shown in fig. 1 to 4, the planar ultrasonic motor driven by the homomorphic mode of the double cross-shaped coupled piezoelectric vibrator comprises a vibrator assembly 1, a rotor assembly 2 and a support assembly 3. The vibrator assembly 1 is composed of a double-cross base body 11 and a piezoelectric ceramic assembly 12, and is characterized in that the double-cross base body 11 is composed of two cross plates 111 and 112 with the same structural dimension and a connecting rod 113, screw holes 114 are drilled at two ends of the connecting rod 113, and the cross plates 111 and 112 are respectively connected to two ends of the connecting rod 113 by screws; the cross plate 111 is composed of a cross bar 1111 and a vertical bar 1112, and the cross plate 112 is composed of a cross bar 1121 and a vertical bar 1122; the cross bars 1111, 1121, the longitudinal bars 1112, 1122 are square and long, 4 driving feet 115 are arranged on the upper surfaces of the cross bars 1111, 1112, and 4 driving feet 115 are also arranged on the lower surfaces of the cross bars 1121, 1122; the top surface of each driving foot 115 is coated with a wear-resistant material with a large friction coefficient, and the two groups of driving feet 115 are respectively connected with an upper sliding plate and a lower sliding plate on the rotor assembly 2.
The piezoelectric ceramic assembly 12 includes an out-of-plane flexural vibration excitation ceramic 121, a longitudinal rod in-plane flexural vibration excitation ceramic 122, and a transverse rod in-plane flexural vibration excitation ceramic 123. The out-of-plane bending vibration excitation ceramic 121 is composed of 16 piezoelectric ceramic plates, and the ceramic plates are respectively adhered to the front and back surfaces of the cross plates 111 and 112; the longitudinal rod surface bending vibration excitation ceramic 122 consists of 8 piezoelectric ceramic plates and is respectively adhered to the two side surfaces of the longitudinal rods 1112 and 1122; the cross bar in-plane bending vibration excitation ceramic 123 is also composed of 8 piezoelectric ceramic plates, which are respectively adhered to the two side surfaces of the cross bars 1111, 1121.
The rotor assembly 2 comprises an upper sliding plate 21, a lower sliding plate 22 and a stand column 23, wherein the stand column 23 is square-bar-shaped. A pre-tightening spring bolt 24 is arranged between the upright post 23 and the upper sliding plate 21, and the pre-tightening spring bolt 24 can be used for adjusting the distance between the upper sliding plate 21 and the lower sliding plate 22 so as to achieve the aim of adjusting the pre-compression between the vibrator assembly 1 and the rotor assembly 2; the upper slide plate 22 is connected to the upper end of the upright 23 by a screw, the upper slide plate 21 is connected to the driving foot 115 on the upper surface of the cross plate 111, the lower slide plate 22 is connected to the lower end of the upright 23 by a screw, and the lower slide plate 22 is connected to the driving foot 115 on the lower surface of the cross plate 112.
The support assembly 3 comprises a vertical plate 31, a bottom plate 32, a cover plate 33, a partition plate block 34, balls 35, a strip-shaped connecting block 36 and a disc spring 37; two vertical plates 31 are connected to two ends of the strip-shaped connecting block 36 and are fixed to two sides of the bottom plate 32 by screws; the strip-shaped connecting blocks 36 are connected with the diaphragm blocks 34 through screws, and stator mounting threaded holes 341 are formed in the front side and the rear side of the diaphragm blocks 34 so as to fix the vibrator assembly 1; a disc spring 37 is pressed between the cover plate 33 and the bottom plate 32, a ball groove is further formed in the cover plate 33 to accommodate the ball 35, the ball 35 is in point contact with the lower sliding plate, and a counter bore is formed in the center of the cover plate 33; the center of the base plate 32 is provided with a threaded hole, and the base plate 32 is connected to the base at four corners with screws 38.
The planar ultrasonic motor driven by the homomorphic modes of the double cross-shaped coupled piezoelectric vibrator takes modes such as out-of-plane symmetrical bending vibration, longitudinal rod in-plane bending vibration, transverse rod in-plane bending vibration and the like of the vibrator assembly 1 as working modes, and when the planar ultrasonic motor works, elliptical tracks running along xOz and yOz surfaces are respectively synthesized on the driving foot 115 of the vibrator assembly 1 by exciting the working mode vibration and utilizing vibration coupling, so that the mover assembly 2 is pushed to move along the x and y directions. In the three-phase working mode vibration, dynamic contact and separation of the sub-component 2 and the vibrator component 1 are realized through out-of-plane symmetrical bending vibration; the bending vibration in the longitudinal rod surface and the bending vibration in the transverse rod surface respectively push the rotor component 2 to slide along the x direction and the y direction.
The out-of-plane symmetric flexural vibration mode vibration is excited by the inverse piezoelectric effect. When the motor works, simple harmonic excitation voltage is introduced into the out-of-plane bending vibration excitation ceramic 121, so that the mover assembly 1 is excited to vibrate in the out-of-plane symmetrical bending vibration mode to make the vertical rod 1112 and the transverse rod 1111 vibrate along the method (or z) direction of the cross plate 111, thereby enabling the driving foot 115 of the cross plate 111 to dynamically contact and separate from the upper slide plate 21, and the normal vibration direction of the vertical rod 1112 and the transverse rod 1111 is just opposite, so that the driving foot 115 on the vertical rod 1112 and the transverse rod 1111 alternately contact with the upper slide plate 21. In addition, the out-of-plane symmetric flexural vibration mode vibration of the mover assembly 1 also vibrates the vertical bars 1122 and the horizontal bars 1121 in the normal (or z) direction of the cross plate 112, and the driving feet 115 of the cross plate 112 are dynamically contacted and separated from the lower slide plate 22, and also because the vertical bars 1122 and the horizontal bars 1121 vibrate in the opposite direction in the normal direction, the driving feet 115 of the vertical bars 1122 and the horizontal bars 1112 are alternately contacted with the lower slide plate 22.
The longitudinal rod in-plane bending vibration mode vibration is excited by the inverse piezoelectric effect. When the motor works, simple harmonic excitation voltage is introduced to the vertical rod in-plane bending vibration excitation ceramic 122, so that the excitation rotor assembly 1 is subjected to vertical rod bending vibration mode vibration, and the vertical rods 1112 and 1122 vibrate in the x direction in the cross plate surfaces where the vertical rods 1112 and 1122 are positioned, so that the driving feet 115 on the vertical rods respectively push the upper slide plate 21 and the lower slide plate 22 to slide in the x direction in the same direction.
The transverse rod in-plane bending vibration mode vibration is excited based on the inverse piezoelectric effect. When the motor works, simple harmonic excitation voltage is introduced to the transverse rod in-plane bending vibration excitation ceramic group 123, so that longitudinal rod bending vibration mode vibration of the rotor assembly 1 is excited, the transverse rods 1111 and 1121 vibrate in the y direction in the cross plate surfaces where the transverse rods 1111 and 1121 are positioned, and the two rod driving feet 115 respectively push the upper slide plate 21 and the lower slide plate 22 to slide in the y direction.
Examples: the planar ultrasonic motor driven by the homomorphic mode of the double cross-shaped coupled piezoelectric vibrator comprises a vibrator assembly 1, a rotor assembly 2 and a support assembly 3, and is shown in figures 1 to 4. The support assembly 3 is connected with the lower slide plate 22 of the rotor assembly 2 through the balls 35 arranged on the cover plate 33 to form a rolling friction pair; the vibrator assembly 1 is positioned between two vertical plates of the support assembly 3, is arranged between an upper sliding plate 21 and a lower sliding plate 22 of the rotor assembly 2, and is respectively connected with the upper sliding plate 21 and the lower sliding plate 22 of the rotor assembly 2 through driving feet 115 at the upper surface and the lower surface of the vibrator assembly; the vibrator assembly 1 is connected with the support assembly 3 through screws 343.
As shown in fig. 1 and 2, the vibrator assembly 1 includes a double-cross-shaped base 11 and a piezoelectric ceramic assembly 12, wherein the double-cross-shaped base 11 is composed of two cross plates 111 and 112 with identical structural dimensions and a connecting rod 113, screw holes 114 are processed at two ends of the connecting rod 113, and the cross plates 111 and 112 are respectively connected at two ends of the vertically arranged connecting rod 113 by screws; the cross plates 111 and 112 are respectively composed of square column bar-shaped cross bars 1111, vertical bars 1112, cross bars 1121 and vertical bars 1122; a through hole is formed in the center of the double cross base 11 to fix the double cross base with the seat assembly 3.
The piezoelectric ceramic component 12 includes an out-of-plane bending vibration excitation ceramic 121, a vertical rod in-plane bending vibration excitation ceramic 122, and a horizontal rod in-plane bending vibration excitation ceramic 123, which are respectively adhered to the front and back surfaces of the cross plates 111, 112, the left and right side surfaces of the vertical rods 1112, 1122, and the upper and lower surfaces of the horizontal rods 1111, 1121. The upper surface of the cross plate 111 and the lower surface of the cross plate 112 are respectively provided with a driving foot 115, and the height of the driving foot 115 is larger than the thickness of the piezoelectric ceramic sheet 12; the driving feet 115 arranged on the front and back sides of the double cross base 11 are respectively connected with the upper slide plate 21 and the lower slide plate 22 of the rotor assembly and are used for driving the lower slide plate 22 and the upper slide plate 21 to synchronously move; the top of the driving foot 115 is coated with a wear-resistant material with a large friction coefficient, such as polyvinylidene fluoride-based friction material, so as to increase the friction driving force between the driving foot 115 and the upper and lower sliding plates 21 and 22, thereby improving the thrust and the service life of the motor.
As shown in fig. 1 and 3, the mover assembly 2 is composed of an upper slide plate 21, a lower slide plate 22 and a stand column 23, wherein the upper slide plate 21 and the lower slide plate 22 are square plates, and the upper slide plate 21 and the lower slide plate 22 are connected through the stand column 23; the upper slide plate 21 is also provided with a pre-tightening spring bolt 24, and the pre-tightening spring is used for adjusting the distance between the upper slide plate 21 and the lower slide plate 22. The upright post 23 is connected with the lower slide plate 22 through a screw; the upper slide plate 21 and the lower slide plate 22 are respectively connected with driving feet 115 on the front surface and the back surface of the vibrator assembly 1; the lower slide plate 22 is connected to the cover plate 33 via balls 35, and the vibrator assembly 2 and the mover assembly 2 are connected to each other as a rolling pair.
As shown in fig. 1 and 4, the support assembly 3 includes a vertical plate 31, a bottom plate 32, a cover plate 33, a partition plate block 34, balls 35, a bar-shaped connecting block 36 and a disc spring 37, wherein the vertical plate 31 is connected to two sides of the upper surface of the bottom plate 32 by screws, the bar-shaped connecting block 36 connects the vertical plate 31 on two sides with the partition plate block 34 in the middle by screws 311 and 342, the partition plate block 34 is in a square frame shape, screw holes 341 are arranged at the centers of the front side and the rear side of the partition plate block 34, and screw holes 114 at the centers of connecting rods 113 of the vibrator assembly 1 are connected by screws 343 so as to fix the vibrator assembly 1; the surface of the cover plate 33 facing the lower slide plate 22 is provided with a spherical groove which is internally provided with a ball 35, and the ball 35 and the lower slide plate 22 form a rolling pair; a disc spring 37 is mounted between the cover plate 33 and the bottom plate 32. The pre-pressure between the vibrator assembly 1 and the mover group can be adjusted by adjusting the tightness degree of the disc spring 37.
As shown in fig. 5 to 8, the planar ultrasonic motor of the present invention excites resonance or near resonance of three-phase specific vibration operation modes of the vibrator assembly 1 by using the piezoelectric ceramic assembly 12, so as to drive the driving feet 115 disposed on the front and back sides of the cross plates 111, 112 of the vibrator assembly to respectively make elliptical motions along the xOz and yOz planes, and further drive the upper and lower sliding plates 21, 22 to slide along the x and y directions by means of friction coupling between the driving feet and the upper and lower sliding plates 21, 22 of the mover assembly 2, respectively, so as to drive the mover assembly 2 to make planar motions. The three-phase vibration working modes include a longitudinal rod in-plane bending vibration mode of the two longitudinal rods 1112 and 1122 of the double-cross base body 11 along the respective cross plate surfaces, a transverse rod 1111 and a transverse rod 1121 along the respective cross plate surface transverse rod in-plane bending vibration mode and an out-of-plane symmetrical bending vibration mode along the normal direction of the two cross plate surfaces, wherein the out-of-plane symmetrical bending vibration mode vibration realizes dynamic contact and separation between the rotor assembly 2 and the vibrator assembly 1, and the longitudinal rod in-plane bending vibration mode and the transverse rod in-plane bending vibration mode respectively realize driving of the rotor assembly 2 along the x and y directions.
In order to synthesize an elliptical path along the xOz and yOz planes on the driving foot, the natural frequencies of the three-phase operation modes of the vibrator assembly 1 are required to be as close to or equal to each other as possible, and in order to prevent excessive mechanical noise generated during operation of the motor, particularly in order to enable the motor to output a large speed, the three-phase mode frequencies are required to be consistent and in the ultrasonic frequency domain by reasonably configuring the structural dimensions of the vibrator assembly 1.
As shown in fig. 5 to 8, the piezoelectric ceramic module 12 is composed of three sets of ceramic plates, i.e., an out-of-plane bending vibration excitation ceramic 121, a vertical rod in-plane bending vibration excitation ceramic 122, and a horizontal rod in-plane bending vibration excitation ceramic 123. The piezoelectric ceramic component 12 comprises 32 high-performance PZT8 piezoelectric ceramic plates, and the polarization direction of each ceramic plate is perpendicular to the bonding surface. The three groups of piezoelectric ceramic plates are respectively used for exciting three-phase working vibration modes such as out-of-plane bending vibration, in-plane bending vibration of a longitudinal rod, in-plane bending vibration of a transverse rod and the like of the vibrator assembly 1.
As shown in fig. 5 to 8, the out-of-plane bending vibration excitation ceramic 121 includes 16 high-performance piezoelectric ceramic sheets, which are respectively adhered to the front surface of the cross plate 111 and the back surface of the cross plate 112 and are respectively mounted at the peaks and troughs of the out-of-plane symmetrical bending vibration operation mode shapes of the cross bar 1111, the cross bar 1121, the vertical bar 1112 and the vertical bar 1122.
As shown in fig. 5 to 8, the in-plane bending vibration excitation ceramics 122 of the vertical rod is composed of 8 high-performance piezoelectric ceramics, and the ceramics are respectively adhered to the left and right sides of the vertical rod 1112 and the vertical rod 1122 and are respectively installed at the positions of 4 wave crests and 4 wave troughs of the in-plane second-order bending vibration mode of the vertical rod 1112 and the vertical rod 1122.
As shown in fig. 5 to 8, the cross rod in-plane bending vibration excitation ceramic set 123 is composed of 8 high-performance piezoelectric ceramic plates, which are respectively adhered to the front and rear sides of the cross rod 1111 and the cross rod 1121, and are respectively installed at the 4 wave crests and the 4 wave troughs of the cross rod 1111 and the cross rod 1121 in-plane second-order bending vibration.
As shown in fig. 5 to 10, in order to excite the out-of-plane symmetrical bending vibration operation mode vibration of the vibrator assembly 1, it is necessary to perform reasonable polarization power supply configuration for the out-of-plane bending vibration excitation ceramics 121, and this requires: the out-of-plane bending vibration excitation ceramics 121 adhered to the front surface of the vertical rod 1112, the back surface of the vertical rod 1122, the front surface of the cross rod 1121 and the back surface of the cross rod 1111 are polarized along the direction away from the adhering surface; the out-of-plane bending vibration excitation ceramic group 121 adhered to the back surface of the vertical rod 1112, the front surface of the vertical rod 1122, the front surface of the cross rod 1111 and the back surface of the cross rod 1121 is polarized along the direction pointing to the adhered surface; in addition, it is also required that electrodes bonded to the double cross substrate 11 of the vibrator assembly of each ceramic plate are grounded, and cosine excitation voltage U is required to be applied to electrodes facing away from the double cross substrate 11 1 cosωt。
As shown in fig. 5 to 10, in order to effectively excite the bending vibration mode vibration in the longitudinal beam surface of the vibrator assembly 1, the bending vibration excitation ceramics 122 in the longitudinal beam surface needs to be reasonably polarized and power-supplied. For this purpose, all of the in-plane bending vibration excitation ceramics 122 disposed on the left side of the vertical bars 1112 and 1122 are polarized in the direction toward the double-cross base 11, and the in-plane bending vibration excitation ceramics 122 disposed on the right side of the vertical bars 1112 and 1122 are polarized in the direction away from the double-cross base 11. In addition, electrodes bonded to the double-cross substrate 11 of each ceramic plate in the out-of-plane bending vibration excitation ceramic 121 are required to be grounded, and sinusoidal excitation voltage U is required to be applied to the electrodes facing away from the double-cross substrate 11 2 sinωt。
As shown in fig. 5 to 10, in order to effectively excite the transverse rod in-plane bending vibration working mode vibration of the vibrator assembly 1, reasonable polarization power supply configuration is required to be performed on the transverse rod in-plane bending vibration excitation ceramics 123. For this purpose, all in-plane bending vibration excitation ceramics 123 disposed on the front sides of the cross bars 1111, 1121 are polarized in the direction toward the double cross base 11, and in-plane bending vibration excitation ceramics 123 disposed on the rear sides of the cross bars 1111, 1121 are polarized in the direction away from the double cross base 11. In addition, electrodes bonded with the double-cross substrate 11 in the out-of-plane cross bar bending vibration excitation ceramic 123 are required to be grounded, and sinusoidal excitation voltage U is applied to electrodes facing away from the double-cross substrate 11 3 sinωt。
As shown in fig. 11-14, the two-phase elliptical track of the driving foot 115 along the xOz plane and yOz is formed by introducing three-phase same-frequency simple harmonic voltages with 90 ° phase difference on the vibrator assembly, and after exciting the three-phase working modes of the stator, respectively coupling the out-of-plane bending vibration with the in-plane bending vibration of the longitudinal rod and the in-plane bending vibration of the transverse rod. If one vibration period T of the stator is equally divided into four periods, the elliptical track is formed through the following four stages:
as shown in fig. 11 (Step 1), in the period of 0 to T/4, the out-of-plane symmetrical bending vibration of the vibrator assembly 1 and the in-plane bending vibration of the vertical rod deform the vertical rod 1112 from the out-of-plane zero bending and in-plane maximum right bending state to the out-of-plane maximum upward bending and in-plane zero bending state, so that the driving foot 115 on the vertical rod 1112 keeps in contact with the upper slide plate 21, and the driving foot 115 moves from B1 to B2, thereby pushing the mover assembly 2 to move one Step in the x direction; at the same time, the out-of-plane symmetrical bending vibration and the cross bar in-plane bending vibration of the vibrator assembly 1 deform the cross bar 1111 from the out-of-plane zero bending and in-plane maximum backward bending state to the out-of-plane maximum downward bending and in-plane zero bending state, so that the driving foot 115 on the cross bar 1111 is not contacted with the upper slide plate and moves from A1 to A2.
As shown in fig. 12 (Step 2), in the period of T/4 to T/2, the out-of-plane symmetrical bending vibration and the in-plane bending vibration of the vertical rod of the vibrator assembly 1 deform the vertical rod 1112 from the out-of-plane maximum upper bending and in-plane zero bending state to the out-of-plane zero bending and in-plane maximum left bending state, so that the driving foot 115 on the vertical rod 1112 keeps in contact with the upper slide plate 21, and the driving foot 115 moves from B2 to B3, thereby pushing the mover assembly 2 to move further along the x direction; at the same time, the out-of-plane symmetrical bending vibration and the cross bar in-plane bending vibration of the vibrator assembly 1 deform the cross bar 1111 from the out-of-plane maximum downward bending state to the out-of-plane zero bending state and the in-plane maximum forward bending state, so that the upper driving foot 115 of the cross bar 1111 is not contacted with the upper slide plate and moves from A2 to A3.
As shown in fig. 13 (Step 3), in the period of T/2 to 3T/4, the out-of-plane symmetrical bending vibration and the in-plane bending vibration of the vertical rod of the vibrator assembly 1 deform the vertical rod 1112 from the out-of-plane zero bending and the in-plane maximum left bending state to the out-of-plane maximum down bending and the in-plane zero bending state, so that the driving foot 115 of the vertical rod 1112 is out of contact with the upper slide plate 21 and is moved from B3 to B4; at the same time, the out-of-plane symmetrical bending vibration and the cross bar in-plane bending vibration of the vibrator assembly 1 deform the cross bar 1111 from the out-of-plane zero bending state and the in-plane maximum forward bending state to the out-of-plane maximum upward bending state and the in-plane zero bending state, so that the driving foot 115 on the cross bar 1111 contacts with the upper slide plate and the driving foot 115 moves from A3 to A3, thereby pushing the mover assembly 2 to slide one step along the y direction;
as shown in fig. 14 (Step 4), in the period of 3T/4 to T, the out-of-plane symmetrical bending vibration and the in-plane bending vibration of the vertical rod of the vibrator assembly 1 deform the vertical rod 1112 from the out-of-plane maximum downward bending and the in-plane zero bending state to the out-of-plane zero bending and the in-plane maximum rightward bending state, so that the driving foot 115 of the vertical rod 1112 is not in contact with the upper slide plate 21, but the line from B4 to B1; at the same time, the out-of-plane symmetrical bending vibration and the cross bar in-plane bending vibration deform the cross bar 1111 from the out-of-plane maximum upward bending and in-plane zero bending state to the out-of-plane zero bending and in-plane maximum backward bending state, so that the driving foot 115 of the cross bar 1111 keeps in contact with the upper slide plate 21 and moves from A4 to A1, thereby pushing the mover assembly 2 to slide further along the y direction.
As shown in fig. 11 to 14, each time the vibrator assembly 1 completes one of the above-described vibration cycles T, the driving foot 115 of the vertical bar 1112 completes the elliptical trajectory through B1-B2-B3-B4, and the driving foot 115 of the horizontal bar 1111 completes the elliptical trajectory through A1-A2-A3-A4, thereby pushing the mover assembly 2 to move in the x-direction and the y-direction by two steps, respectively. As the vibrator assembly 1 repeats the above-described vibration cycle, the upper slider 21 is pushed forward in the x-direction and the y-direction. If the phase relation between the out-of-plane bending vibration and the driving voltage of the in-plane bending vibration of the longitudinal rod and the longitudinal vibration mode of the transverse rod is reversed, the moving direction of the rotor assembly is reversed.
As shown in fig. 9 to 14, since the polarization of the out-of-plane bending vibration excitation ceramics on the vertical rod 1122 and the vertical rod 1112 are opposite to each other in the case of the power supply arrangement, the out-of-plane bending vibration situation of the vertical rod 1122 after the vertical rod 1122 is energized is opposite to the vertical rod 1112; because the piezoelectric polarization and the power supply configuration at the two sides of the vertical rod 1122 are completely the same as those of the vertical rod 1112, the in-plane bending vibration of the vertical rod 1122 is completely the same as that of the vertical rod 1112, and thus, the travelling track of the driving foot 115 of the vertical rod 1122 is just opposite to the moving track of the driving foot 115 on the vertical rod 1112, so that the driving feet 115 on the vertical rod 1112 and the vertical rod 1122 can synchronously and respectively push the upper slide plate 21 and the lower slide plate 22 to slide along the x direction, and the upper slide plate 21 and the lower slide plate 22 are fixedly connected into a whole, so that the 4 driving feet 115 on the two vertical rods can jointly push the rotor assembly to move along the x direction, thereby being beneficial to increasing the speed of the motor and improving the running stability of the motor by power. Likewise, the polarization of the out-of-plane bending vibration excitation ceramics on the cross bar 1121 and the cross bar 1111 is opposite to that of the power supply configuration, so that the out-of-plane bending vibration condition of the cross bar 1121 is opposite to that of the cross bar 1111 after the cross bar 1121 is energized; because the piezoelectric polarization and power supply configurations on both sides of the cross bar 1121 are identical to those of the vertical bar cross bar 1111, the in-plane bending vibration of the cross bar 1121 is identical to that of the cross bar 1111, and thus the travelling track of the driving foot 115 of the cross bar 1121 is just opposite to that of the driving foot 115 on the cross bar 1111, so that the driving feet 115 on the cross bar 1121 and the cross bar 1111 can synchronously and respectively push the upper slide plate 21 and the lower slide plate 22 to slide along y, and also because the upper slide plate 21 and the lower slide plate 22 are fixedly connected into a whole, the 4 driving feet 115 on the two cross bars can jointly push the mover assembly to move along y direction.
Claims (3)
1. The planar ultrasonic motor driven by the homomorphic mode of the double-cross-shaped coupled piezoelectric vibrator comprises a vibrator assembly, a rotor assembly and a support assembly, and is characterized in that the vibrator assembly comprises a double-cross-shaped matrix and a piezoelectric ceramic excitation assembly, the double-cross-shaped matrix is formed by connecting two cross plates with the same structure through a middle connecting rod, the two cross plates are composed of two cross rods and two longitudinal rods with the same size, and threaded holes are formed in two ends of the middle connecting rod for connecting the two cross plates; the piezoelectric ceramic excitation assembly consists of a longitudinal rod in-plane bending vibration excitation ceramic sheet, a transverse rod in-plane bending vibration excitation ceramic sheet and an out-of-plane bending vibration excitation ceramic sheet, and the piezoelectric ceramic sheets are respectively adhered to two side surfaces of the longitudinal rod and two sides of the transverse rod on two cross metal plates, and the front and back surfaces of the transverse rod and the longitudinal rod; the end parts of each cross rod and each longitudinal rod are provided with driving feet; the rotor assembly comprises an upper sliding plate, a lower sliding plate and an upright post, wherein the upper sliding plate and the lower sliding plate are respectively connected to two ends of the upright post through screws, the upper sliding plate and the lower sliding plate are respectively connected with a driving foot at the top surface of the upper cross plate and a driving foot at the bottom surface of the lower cross plate, and the lower sliding plate is connected with the support assembly through balls to form a rolling pair; the support assembly consists of a bottom plate, a vertical plate, a partition plate, a strip-shaped connecting block and balls; the vibrator assembly is arranged between the support assembly and the rotor assembly, and is respectively connected with an upper sliding plate and a lower sliding plate of the rotor assembly through driving feet on the top surface and the bottom surface of the vibrator assembly and is connected to the support assembly through screws; the support assembly is connected with the rotor assembly through balls in the bottom plate of the support assembly and is connected with the vibrator assembly through the partition plate block.
2. The planar ultrasonic motor driven by the homomorphic mode of the double cross-shaped coupled piezoelectric vibrator according to claim 1, wherein: the support assembly comprises vertical plates, cover plates, bottom plates, partition plates, strip-shaped connecting blocks, balls and disc springs, wherein the two vertical plates are connected to two ends of the strip-shaped connecting blocks and are fixed to two sides of the bottom plates by screws; the strip-shaped connecting blocks are connected with the partition plates through screws, and stator mounting threaded holes are formed in the front side and the rear side of the partition plates and used for fixing the vibrator assembly; a disc spring is pressed between the cover plate and the bottom plate, a ball groove is formed in the cover plate to accommodate balls, and the balls are in point contact with the lower sliding plate; the base plate is connected with the base by screws at four corners.
3. The working mode of the planar ultrasonic motor driven by the homomorphic modes of the double-cross-shaped coupled piezoelectric vibrator according to claim 1, wherein the out-of-plane symmetrical bending vibration mode, the in-plane bending vibration mode of a longitudinal rod and the in-plane bending vibration mode of a transverse rod of the vibrator assembly are selected as working vibration modes, and by exciting the resonance effect of the three-phase modes, elliptical tracks running along xOz and yOz surfaces are respectively synthesized on driving feet on the longitudinal rod and the transverse rod of the vibrator assembly, and the mover assembly is pushed to move along the x and y directions according to the elliptical tracks; in the three-phase mode, the out-of-plane symmetrical bending vibration mode realizes the dynamic contact and separation between the rotor component and the vibrator component, and the longitudinal rod in-plane bending vibration mode and the transverse rod in-plane bending vibration mode are respectively used for pushing the rotor component to slide along the x direction and the y direction;
the out-of-plane symmetrical bending vibration mode vibration is excited by using a reverse piezoelectric effect, when the motor works, simple harmonic voltage is applied to out-of-plane bending vibration excitation piezoelectric ceramics, and transverse rods and longitudinal rods in two cross plates of the vibrator assembly are excited to move according to the vibration mode of the out-of-plane symmetrical bending vibration mode, so that the longitudinal rods and the transverse rods always vibrate in opposite directions, and driving feet of the longitudinal rods and the transverse rods alternately contact and separate with the mover assembly;
the longitudinal rod in-plane bending vibration mode is excited by using an inverse piezoelectric effect, and when the motor works, simple harmonic voltage is applied to piezoelectric ceramics excited by the longitudinal rod in-plane bending vibration to enable the two longitudinal rods to do in-phase bending vibration along the x direction in the cross plate surfaces where the two longitudinal rods are positioned, so that the longitudinal rods are driven to drive the feet to push the mover assembly to move along the x direction;
the transverse rod in-plane bending vibration mode is excited by using an inverse piezoelectric effect, and when the motor operates, simple harmonic voltage is applied to the transverse rod in-plane bending vibration excitation piezoelectric ceramic, so that two transverse rods do in-phase bending vibration along the y direction in the cross plate surfaces where the two transverse rods are positioned, and the transverse rods are driven to drive the feet to push the rotor assembly to move along the y direction.
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