CN209991948U - Deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction - Google Patents
Deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction Download PDFInfo
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- CN209991948U CN209991948U CN201920269416.1U CN201920269416U CN209991948U CN 209991948 U CN209991948 U CN 209991948U CN 201920269416 U CN201920269416 U CN 201920269416U CN 209991948 U CN209991948 U CN 209991948U
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Abstract
The utility model discloses a dark ultraviolet structure light precision detection device of three-dimensional profile reconsitution of transparent material. The utility model discloses a dark ultraviolet stripe projection system and dark ultraviolet imaging system, wherein dark ultraviolet stripe projection system includes wide-spectrum dark ultraviolet LED light source, narrowband ultraviolet band filter plate, collimation beam expanding system, one-dimensional dark ultraviolet transverse shear grating and beam expander group, and wide-spectrum dark ultraviolet LED light source and narrowband ultraviolet band filter plate constitute the ultraviolet light source unit; the deep ultraviolet imaging system consists of an imaging lens and a deep ultraviolet CCD. The utility model discloses realize high accuracy deformation detection to transparent material's curved surface glass surface three-dimensional profile, overcome traditional visible structure light source and penetrated transparent material and obscure the drawback of upper and lower surface morphology deformation, the error that the cockscomb structure stripe of avoiding the sinusoidal grating of digital exposure to produce brought has realized the accurate reconsitution to jumbo size curved surface glass three-dimensional profile.
Description
Technical Field
The utility model belongs to the technical field of machine vision structured light precision measurement, concretely relates to dark ultraviolet structured light precision measurement device of three-dimensional profile reconsitution of transparent material.
Background
Transparent materials are used in various categories in national defense, industrialization and daily life: small to transparent optical elements in various lenses, large to protective glass of aircraft and automobile cabins, various display screens and the like. Free-form surface elements made of various transparent materials such as those mentioned above have been widely used in daily research and daily life, and with the development of technology and industrialization, the requirements for detecting surface deformation of protective glass of aircraft and automobile cabins have been increasing. However, these glass profiles are basically free-form surfaces and have large areas, and the deformation amount cannot be obtained by a method of detecting a spherical surface by optical interference. At present, the similar complex contour detection and the multi-purpose structured light projection are performed at home and abroad, stripe structured light with alternate brightness and darkness can be generated by a projector, and the method is realized by combining monocular or binocular vision methods, but the methods are generally used for various non-transparent diffuse reflection materials, and the deformation information can be acquired by adopting scattering imaging. For the optical detection of the surface deformation structure of the transparent material, two key difficulties exist in the acquisition of surface shape information: firstly, large-area transparent materials are smooth and only can be subjected to reflection imaging, the deformation of the upper surface and the deformation of the lower surface can be mixed together by the reflection imaging of the upper surface and the lower surface, single information of the upper surface cannot be obtained, and meanwhile, the reflectivity of the transparent materials is very low, so that the CCD obtains weak information mixed with the upper surface and the lower surface, and the contrast of stripes is very poor; and secondly, the form of generating light with alternate bright and dark stripe-shaped structures is provided with a projector or a grating, the projector basically generates visible light structural light, and the deformation of the upper surface and the deformation of the lower surface are mixed together by the reflection imaging of the upper surface and the lower surface, so that the information of the upper surface and the lower surface cannot be distinguished. Furthermore, the grating lithography technology is implemented by using a digital technology, so that structured light irradiated on an object to be detected can present a grid saw-toothed structure, and high-precision detection cannot be achieved, as shown in fig. 2 (a). These are bottlenecks in deformation detection of transparent materials, so that research on high-precision optical three-dimensional contour detection of transparent materials at home and abroad is still blank, and the application limitation of the transparent materials in the fields of scientific research and industrialization is greatly limited. Therefore, the utility model provides a dark ultraviolet structure light precision measurement method of three-dimensional profile reconsitution of transparent material.
Disclosure of Invention
The utility model aims at the blank of prior art, provide a dark ultraviolet structure light precision detection device of three-dimensional profile reconstruction of transparent material. The method provides a method for realizing high-precision deformation detection on the three-dimensional profile of the surface of the curved glass made of the transparent material by using a deep ultraviolet waveband structured light detection system for the first time.
The utility model provides a technical scheme that its technical problem adopted specifically as follows:
the utility model discloses a dark ultraviolet stripe projection system and dark ultraviolet imaging system, wherein dark ultraviolet stripe projection system includes wide-spectrum dark ultraviolet LED light source (S0), narrowband ultraviolet band filter plate (S1), collimation beam expanding system (S2), one-dimensional dark ultraviolet transverse shear grating (S3) and beam expander group (S5), and wide-spectrum dark ultraviolet LED light source (S0) and narrowband ultraviolet band filter plate (S1) constitute the ultraviolet light source unit; the deep ultraviolet imaging system consists of an imaging lens (S7) and a deep ultraviolet CCD (S8);
broadband light emitted by a deep ultraviolet LED light source (S0) is incident into a narrow band ultraviolet band filter plate (S1) to obtain narrow band deep ultraviolet light, the narrow band deep ultraviolet light passes through a collimation beam expanding system (S2) and then is incident on a one-dimensional deep ultraviolet transverse shear grating (S3) as parallel light, two replication wavefronts which are completely the same in wavefront and have a certain inclination angle are formed through diffraction, interference fringes are formed in the overlapping area of the two replication wavefronts to serve as stripe structure light, and the stripe structure light forms the deep ultraviolet band structure light with a stable period through a beam expanding lens group (S5); the deep ultraviolet waveband structured light is projected on a reference platform (S6) which is provided with a measured object (S9) made of transparent materials, and a deep ultraviolet imaging system is used for receiving a deformed stripe image modulated by the height of an object.
The one-dimensional deep ultraviolet transverse shearing grating (S3) is provided with a grating phase shift device (S4), so that the rotation and phase shift operation of the deep ultraviolet waveband structured light is realized.
Since the diffraction field formed by diffraction is only diffraction light of +1 and-1 diffraction orders, the overlapped area of the two copied wavefronts forms interference fringes as fringe structure light.
The one-dimensional deep ultraviolet transverse shear grating (S3) comprises a one-dimensional amplitude grating (G1) and a one-dimensional phase grating (G2); the one-dimensional amplitude grating (G1) adopts a series of random coding modes to ensure that the transmittance satisfies | cos (π x/d) | distribution, wherein d is the period of the one-dimensional transverse shear grating (G3); the one-dimensional phase grating (G2) is etched in a rect (2x/d) × comb (x/d) area to a depth h ═ λ/2(n-1), so that the phase difference between an etched area light wave and an unetched area is π, wherein λ is the light source wavelength, and n is the refractive index of fused silica.
The grating period range of the one-dimensional deep ultraviolet transverse shearing grating (S3) is 100-500 microns, and the corresponding line logarithm of interference fringes per millimeter is 4-20 lp/mm.
The center wavelength of the broadband light emitted by the deep ultraviolet LED light source (S0) is 280nm, and the bandwidth is +/-10 nm.
The utility model discloses beneficial effect as follows:
the utility model discloses an acquire the deformation information of large tracts of land transparent material upper surface, the novelty proposed utilizes LED deep ultraviolet wave band light, and this wave band light only can see through quartz glass and can't transmit, and light can not transmit when passing through other transparent materials, mainly shows the reflection phenomenon of upper surface to external, just can obtain transparent material's upper surface reverberation from this, obtains upper surface shape information. Meanwhile, structured light is generated by utilizing a one-dimensional deep ultraviolet transverse shear grating interference technology, the x direction in a diffraction light field of the structured light is only two diffraction orders of +1 and-1, interference is formed in the overlapping area of two diffraction wavefronts, and interference strip-shaped structured light with alternate brightness and darkness meeting a trigonometric function such as a sine wave can be generated, as shown in fig. 2 (b). The structured light is interference fringes formed by an interference technology, so that the structured light has no sawtooth shape and can realize high-precision deformation detection.
In conclusion, the development of the high-precision three-dimensional contour detection technology for the transparent material has important historical significance for the development of precision glass manufacturing industry and the improvement of structured light technology, and will generate great technical leap in the detection field at home and abroad.
The utility model provides a realize detecting the accurate three-dimensional profile of transparent object that awaits measuring to broken through the bottleneck that traditional type visible structure light can't carry out accurate reconsitution to transparent object, had the significance to the research of accomplishing relevant scientific problem and the required fundamental problem that solves of detecting instrument development.
Drawings
FIG. 1 is a top view of a deep ultraviolet band structured light three-dimensional profile detection optical path system mechanism;
FIG. 2(a) is a fringe pattern formed by conventional sinusoidal grating digital lithography;
FIG. 2(b) is a diagram of interference fringes produced by a one-dimensional transverse shearing grating;
fig. 3 is a perspective view of a one-dimensional transverse shear grating based on light flux constraints.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
The utility model discloses a be transformed into the dark ultraviolet light source that can not pierce through transparent glass with traditional visible structure light, combine traditional phase place solution method, adopt the phase place expansion mode of optimizing, realize realizing the high accuracy detection to transparent material curved surface glass surface three-dimensional profile.
As shown in fig. 1, the system comprises a deep ultraviolet stripe projection system and a deep ultraviolet imaging system, wherein the deep ultraviolet stripe projection system comprises a wide-spectrum deep ultraviolet LED light source (S0), a narrow-band ultraviolet band filter (S1), a collimation beam expanding system (S2), a one-dimensional deep ultraviolet transverse shear grating (S3) and a beam expander set (S5), and the wide-spectrum deep ultraviolet LED light source (S0) and the narrow-band ultraviolet band filter (S1) form an ultraviolet light source unit; the deep ultraviolet imaging system consists of an imaging lens (S7) and a deep ultraviolet CCD (S8);
according to the light source emitting sequence, firstly, broadband light emitted by a deep ultraviolet LED light source (S0) with the central wavelength of 280nm and the bandwidth of +/-10 nm is emitted into a narrow band ultraviolet band filter (S1) to obtain narrow band deep ultraviolet light with the wavelength of 280nm, the narrow band deep ultraviolet light passes through a collimation and beam expansion system (S2), then the narrow band deep ultraviolet light is emitted to a one-dimensional deep ultraviolet transverse shearing grating (S3) with the grating pitch of 200 microns as parallel light, two replication wave fronts which are completely the same but have a certain inclination angle are formed through diffraction, and interference fringes are formed in the overlapping area of the two replication wave fronts to serve as the fringe structure light of a detection system, as shown in figure 2 (b. And forming deep ultraviolet waveband structured light with a stable period and a proper size through a beam expander set (S5), projecting the light onto a reference platform (S6) on which a transparent object to be detected (S9) is placed, and receiving a deformed stripe image subjected to height modulation of the object by using a deep ultraviolet imaging system consisting of an imaging lens (S7) and a deep ultraviolet CCD (S8). Meanwhile, the grating phase shift device (S4) is added on the one-dimensional deep ultraviolet transverse shearing grating (S3) to realize the rotation and phase shift operation of the deep ultraviolet waveband structured light.
As shown in FIG. 3, the one-dimensional deep ultraviolet transverse shear grating (S3) is composed of a one-dimensional amplitude grating (G1) and a one-dimensional phase grating (G2). The one-dimensional amplitude grating (G1) adopts a series of tiny pixels to ensure that the transmittance satisfies | cos (π x/d) | distribution in a random coding mode, wherein d is the period of the one-dimensional transverse shear grating (G3); the one-dimensional phase grating (G2) is etched in a region of a transparent fused silica substrate rect (2x/d) × comb (x/d) to a depth h ═ lambda/2 (n-1), so that the phase difference between an etched region light wave and an unetched region is pi, wherein lambda is the wavelength of a light source, and n is the refractive index of the fused silica.
The grating period range of the one-dimensional deep ultraviolet transverse shearing grating (S3) is 100-500 microns, and the corresponding line logarithm of interference fringes per millimeter is 4-20 lp/mm.
Claims (5)
1. The device is characterized by comprising a deep ultraviolet stripe projection system and a deep ultraviolet imaging system, wherein the deep ultraviolet stripe projection system comprises a wide-spectrum deep ultraviolet LED light source (S0), a narrow-band ultraviolet band filter (S1), a collimation beam expanding system (S2), a one-dimensional deep ultraviolet transverse shear grating (S3) and a beam expanding lens group (S5), and the wide-spectrum deep ultraviolet LED light source (S0) and the narrow-band ultraviolet band filter (S1) form an ultraviolet light source unit; the deep ultraviolet imaging system consists of an imaging lens (S7) and a deep ultraviolet CCD (S8);
broadband light emitted by a deep ultraviolet LED light source (S0) is incident into a narrow band ultraviolet band filter plate (S1) to obtain narrow band deep ultraviolet light, the narrow band deep ultraviolet light passes through a collimation beam expanding system (S2) and then is incident on a one-dimensional deep ultraviolet transverse shear grating (S3) as parallel light, two replication wavefronts which are completely the same in wavefront and have a certain inclination angle are formed through diffraction, interference fringes are formed in the overlapping area of the two replication wavefronts to serve as stripe structure light, and the stripe structure light forms the deep ultraviolet band structure light with a stable period through a beam expanding lens group (S5); the deep ultraviolet waveband structured light is projected on a reference platform (S6) which is provided with a measured object (S9) made of transparent materials, and a deep ultraviolet imaging system is used for receiving a deformed stripe image modulated by the height of an object.
2. The deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction as claimed in claim 1, characterized in that the one-dimensional deep ultraviolet transverse shearing grating (S3) is provided with a grating phase shift device (S4), thereby realizing rotation and phase shift operation of the deep ultraviolet waveband structured light.
3. The deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction as claimed in claim 2, wherein the one-dimensional deep ultraviolet transverse shear grating (S3) comprises a one-dimensional amplitude grating (G1) and a one-dimensional phase grating (G2); the one-dimensional amplitude grating (G1) adopts a series of tiny pixels to ensure that the transmittance satisfies | cos (π x/d) | distribution in a random coding mode, wherein d is the period of the one-dimensional transverse shear grating (G3); the one-dimensional phase grating (G2) is etched in a region of a transparent fused quartz substrate rect (2x/d) × comb (x/d) to a depth h ═ lambda/2 (n-1), so that the phase difference between an etched region light wave and an unetched region is pi, wherein lambda is the wavelength of a deep ultraviolet light source, and n is the refractive index of the fused quartz.
4. The deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction as claimed in claim 3, characterized in that the grating period range of the one-dimensional deep ultraviolet transverse shear grating (S3) is 100 microns to 500 microns, and the corresponding interference fringe logarithm per millimeter is 4lp/mm to 20 lp/mm.
5. The deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction as claimed in claim 4, characterized in that the center wavelength of the broadband light emitted by the deep ultraviolet LED light source (S0) is 280nm, and the bandwidth is ± 10 nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781033A (en) * | 2019-03-04 | 2019-05-21 | 杭州晶耐科光电技术有限公司 | A kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour |
| CN112066912A (en) * | 2020-11-16 | 2020-12-11 | 中国空气动力研究与发展中心低速空气动力研究所 | Synchronous measurement method and measurement device for three-dimensional surface profile and surface pressure of model |
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2019
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781033A (en) * | 2019-03-04 | 2019-05-21 | 杭州晶耐科光电技术有限公司 | A kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour |
| CN109781033B (en) * | 2019-03-04 | 2020-11-06 | 杭州晶耐科光电技术有限公司 | Deep ultraviolet structured light precision detection device for transparent material three-dimensional contour reconstruction |
| CN112066912A (en) * | 2020-11-16 | 2020-12-11 | 中国空气动力研究与发展中心低速空气动力研究所 | Synchronous measurement method and measurement device for three-dimensional surface profile and surface pressure of model |
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