CN109781033A - A kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour - Google Patents
A kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour Download PDFInfo
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Abstract
The invention discloses a kind of deep ultraviolet structure light precise detection devices of transparent material reconstructing 3 D contour.The present invention includes deep ultraviolet fringe projection system and deep ultraviolet imaging system, wherein deep ultraviolet fringe projection system includes wide range deep ultraviolet LED light source, narrowband ultraviolet band filter plate, collimating and beam expanding system, one-dimensional deep ultraviolet lateral shear grating and expands microscope group, and wide range deep ultraviolet LED light source and narrowband ultraviolet band filter plate constitute ultraviolet source unit；Deep ultraviolet imaging system is made of imaging len and deep ultraviolet CCD.The present invention realizes high-precision shape changing detection to the bend glass surface tri-dimensional profile of transparent material, it overcomes traditional visible structure radiant and penetrates the drawbacks of transparent material obscures upper and lower surface pattern deformation, the zigzag striped bring error for avoiding digit explosure sinusoidal grating from generating, realizes the Accurate Reconstruction to large scale bend glass three-D profile.
Description
Technical field
The invention belongs to machine vision structure light precise detection technology fields, and in particular to a kind of to apply in measurement transparent material
The deep ultraviolet structure light detection imaging system of matter three-D profile.
Background technique
The use of transparent material a great variety in national defence, industrialization and daily life: small transparent into various camera lenses
Optical element, the big protective glass and various display screens for arriving such as aircraft, automobile cabin.It is all as mentioned above with various
The free form surface element of bright material has been widely used in daily scientific research, in life, right with science and technology and industrialized development
The testing requirements of such as surface deformation of the protective glass of aircraft, automobile cabin also increasingly improve.But these glass contours bases
On this be free form surface and area is larger, and the method that spherical surface can not be detected with optical interference obtains deformation quantity.At present both at home and abroad
Detection to similar complex outline is mostly used structured light projection, the fringe-like structures light between bright dark phase can be generated with projector,
And realized in conjunction with the method for monocular or binocular vision, but these methods are generally used for all kinds of nontransparent diffusing reflection materials
Material can obtain deformation data using scattering imaging.For the surface deformation structure light detection of transparent material, in face, shape information is obtained
Take there are two key difficulties: first is that large-area transparent material smoother can only catoptric imaging, and upper and lower surface is reflected into
As the deformation of upper and lower surface can be obscured to the single piece of information for being unable to get upper surface together, while the reflection of transparent material
Rate is very low, thus CCD obtain be upper and lower surface mixing Weak Information, fringe contrast is very poor, as shown in Figure 2；Second is that producing
The form of fringe-like structures light between raw bright dark phase has projector or grating, and the substantially visible photo structure that projector generates
The catoptric imaging of light, upper and lower surface can obscure the deformation of upper and lower surface together, thus upper and lower surface equally cannot be distinguished
Information.Furthermore grid photo-etching technology is to be realized using digital technology, therefore structure light is radiated on testee that grid can be presented
Laciniation, cannot achieve high-precision detect, as shown in Fig. 3 (a).These are the bottleneck of transparent material shape changing detection, institute
To be still within blank for the research of the high-precision optical three-D profile detection of transparent material object at present both at home and abroad, this is with regard to big
The limitation that transparent material is applied in scientific research and industrialization field is limited to greatly.The invention proposes a kind of transparent materials thus
The deep ultraviolet structure light accurate detecting method of reconstructing 3 D contour.
Summary of the invention
The purpose of the present invention is being directed to the blank of the prior art, a kind of the dark purple of transparent material reconstructing 3 D contour is proposed
External structure light precise detection device.It has been put forward for the first time using deep ultraviolet band structure optical detection system to transparent material bend glass
Surface tri-dimensional profile realizes high-precision shape changing detection.
The technical solution adopted by the present invention to solve the technical problems is specific as follows:
The present invention includes deep ultraviolet fringe projection system and deep ultraviolet imaging system, wherein deep ultraviolet fringe projection system packet
It is horizontal to include wide range deep ultraviolet LED light source (S0), narrowband ultraviolet band filter plate (S1), collimating and beam expanding system (S2), one-dimensional deep ultraviolet
It to shearing grating (S3) and expands microscope group (S5), and wide range deep ultraviolet LED light source (S0) and narrowband ultraviolet band filter plate (S1)
Constitute ultraviolet source unit；Deep ultraviolet imaging system is made of imaging len (S7) and deep ultraviolet CCD (S8)；
It is dark purple that narrowband is obtained in broadband light injection narrowband ultraviolet band filter plate (S1) that deep ultraviolet LED light source (S0) issues
Outer light, narrowband deep ultraviolet light by being incident on one-dimensional lateral shear grating (S3) after collimating and beam expanding system (S2) with directional light,
Diffraction two wavefront of formation are identical but have the duplication wavefront at certain inclination angle, form interference items in two duplication wavefront overlapping regions
Line forms the deep ultraviolet band structure with stable period by expanding microscope group (S5) again as fringe structure light, fringe structure light
Light；On deep ultraviolet band project structured light to the reference platform (S6) for being placed with transparent material measured object (S9), and utilize deep ultraviolet
Imaging system, which receives, passes through the modulated deforming stripe image of object height.
It is provided with grating phase changer (S4) on the one-dimensional lateral shear grating (S3), to realize to dark purple external wave
The rotation of segment structure light and phase shift operation.
Since the diffractional field that diffraction is formed only has the diffraction light of+1 and -1 diffraction time, two duplication wavefront overlapping regions
Interference fringe is formed as fringe structure light.
The one-dimensional lateral shear grating (S3) includes one-dimensional amplitude grating (G1) and one-dimensional phase grating (G2)；It is one-dimensional
Amplitude grating (G1) meets transmitance by the way of a series of random codeds | cos (π x/d) | distribution, wherein d is described
One-dimensional lateral shear light (G3) grid cycle；One-dimensional phase grating (G2) etching depth in the region rect (2x/d) * comb (x/d)
Meet λ/2 h=(n-1), so that etch areas light wave and non-etch areas phase difference are π, wherein λ is optical source wavelength, and n is molten stone
English refractive index.
The one-dimensional lateral shear grating (S3), screen periods range are 100 microns to 500 microns, corresponding interference
Every millimeter of demand pairs of striped are 4lp/mm to 20lp/mm.
The central wavelength for the broadband light that the deep ultraviolet LED light source (S0) issues is 280nm, bandwidth is ± 10nm.
The present invention has the beneficial effect that:
For the present invention in order to obtain the deformation data of large-area transparent material upper surface, innovative proposing utilizes LED deep
Ultraviolet band light, which, which only passes through quartz glass, to transmit, and cannot transmit by other transparent material time, externally
Boundary is mainly shown as the reflex of upper surface, is thus obtained with the upper surface reflected light of transparent material, obtains upper surface
Deformation data.Meanwhile structure light, the direction x in diffractive light field are generated using one-dimensional deep ultraviolet lateral shear grating interference technology
Only+1 can produce in the preceding overlapping region formation interference of two diffracted waves with -1 two diffraction time and meet trigonometric function such as
Interference fringe shape structure light between the bright dark phase of sine wave, as shown in Fig. 3 (b).The structure light is due to being that interference technique is formed
Interference fringe, so high-precision shape changing detection may be implemented without any zigzag.
In conclusion no matter carrying out the high-precision three-dimensional contour detecting technical research of transparent material to precision glass manufacturing industry
Development or structured light technique promotion all have important historic meaning, will at home and abroad the detection field generate it is huge
Technology leap.
The present invention is proposed to realize and be detected to the accurate three-D profile of transparent substance to be measured, so that it is visible to breach traditional type
Structure light can not carry out the bottleneck of Accurate Reconstruction, research and detecting instrument development to related scientific issues are completed to transparent substance
Institute's root problem important in inhibiting to be solved.
Detailed description of the invention
The contour detecting light path system of deep ultraviolet band structural light three-dimensional shown in Fig. 1 mechanism top view；
Fig. 2 is the collected transparent glass visible light fringe projection figure of CCD
Fig. 3 (a) is the bar graph that conventional sinusoidal Grating Digital photoetching technique is formed；
Fig. 3 (b) is the interference fringe picture that one-dimensional lateral shear grating generates；
Fig. 4 is the one-dimensional lateral shear grating stereo schematic diagram based on luminous flux constraint；
Fig. 5 (a) be pitch be 120um one-dimensional lateral shear grating in amplitude grating transmitance distribution map；
Fig. 5 (b) be pitch be 120um one-dimensional lateral shear grating in phase grating phase delay distribution map；
Fig. 6 is the instrumentation plan of deep ultraviolet band structure optical detection system；
Fig. 7 is that Quality Map obtains flow chart；
Fig. 8 is three-dimensionalreconstruction algorithm flow chart；
Fig. 9 show the measuring process of the reconstruct of the transparent material profile based on deep ultraviolet band structure light；
Figure 10 show reference platform (S6) the phase shift figure being distributed along the vertical direction；
Figure 11 show reference platform (S6) the phase shift figure being distributed in the horizontal direction；
Figure 12 show the modulation phase shift figure being distributed along the vertical direction；
Figure 13 show the modulation phase shift figure being distributed in the horizontal direction；
Figure 14 show deep ultraviolet structure light to transparent convex curved face object three-dimensionalreconstruction result figure.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The present invention cannot penetrate the deep ultraviolet light source of transparent glass by the way that traditional visible structure light to be transformed into, in conjunction with tradition
Phase solution method realize and transparent material bend glass surface tri-dimensional profile realized using the phase unwrapping mode of optimization
High-precision detects.
1. as shown in Figure 1, including deep ultraviolet fringe projection system and deep ultraviolet imaging system, wherein deep ultraviolet fringe projection
System includes wide range deep ultraviolet LED light source (S0), narrowband ultraviolet band filter plate (S1), collimating and beam expanding system (S2), one-dimensional depth
It ultraviolet lateral shear grating (S3) and expands microscope group (S5), and wide range deep ultraviolet LED light source (S0) and the filtering of narrowband ultraviolet band
Piece (S1) constitutes ultraviolet source unit；Deep ultraviolet imaging system is made of imaging len (S7) and deep ultraviolet CCD (S8)；
It is first 280nm by central wavelength, the deep ultraviolet LED light source that bandwidth is ± 10nm according to light source outgoing sequence
(S0) broadband light issued injects the narrowband deep ultraviolet light for obtaining that wavelength is 280nm in narrowband ultraviolet band filter plate (S1), leads to
It crosses after collimating and beam expanding system (S2) and is incident on the one-dimensional lateral shear grating (S3) that pitch is 200 microns with directional light, diffraction
It is identical but have the duplication wavefront at certain inclination angle to form two wavefront, forms interference fringes in two duplication wavefront overlapping regions and makees
For detection system fringe structure light, as shown in Fig. 3 (b).The all with stablizing of suitable dimension is formed by expanding microscope group (S5) again
The deep ultraviolet band structure light of phase is projected and is placed on the reference platform (S6) of transparent substance to be measured (S9), and using by being imaged
The deep ultraviolet imaging system of lens (S7) and deep ultraviolet CCD (S8) composition, which receives, passes through the modulated deforming stripe figure of object height
Picture.Meanwhile grating phase changer (S4) is added on one-dimensional lateral shear grating (S3) and can be realized to deep ultraviolet band structure
The rotation of light and phase shift operation.
Wherein, as shown in figure 4, the one-dimensional lateral shear grating (S3) is by one-dimensional amplitude grating (G1) and one-dimensional phase light
Grid (G2) composition.One-dimensional amplitude grating (G1) uses a series of small pixels in a manner of random coded transmitance to be met |
Cos (π x/d) | distribution, wherein d is one-dimensional lateral shear light (G3) grid cycle；One-dimensional phase grating (G2) is in transparent molten stone
Etching depth meets λ/2 h=(n-1) in the region English substrate rect (2x/d) * comb (x/d) so that etch areas light wave with not
Etch areas phase difference is π, and wherein λ is optical source wavelength, and n is fused quartz refractive index.
The one-dimensional lateral shear grating (S3), screen periods range are 100 microns to 500 microns, corresponding interference
Every millimeter of demand pairs of striped are 4lp/mm to 20lp/mm.
It is illustrated in figure 6 the two-dimensional measurement schematic diagram of deep ultraviolet band structure light.Deep ultraviolet fringe projection system is by aforementioned
Wide range deep ultraviolet LED light source (S0) and narrowband ultraviolet band filter plate (S1) constitute ultraviolet light source system, collimator and extender system
System (S2), one-dimensional deep ultraviolet lateral shear grating (S3) and expand microscope group (S5) composition；Deep ultraviolet imaging system is by imaging len
(S7) it is formed with deep ultraviolet CCD (S8).In Fig. 6, C1And C2Respectively deep ultraviolet fringe projection system and deep ultraviolet imaging system
Optical center, with reference to platform (S6) be diffusing reflection surface.Deep ultraviolet fringe projection system projects deep ultraviolet light to reference platform (S6)
Grizzly bar line forms grating fringe image；Assuming that being incident upon the A with reference to platform (S6) when not placing transparent substance to be measured (S9)
Light beam at point reflects and images in the certain point P in deep ultraviolet imaging system image planes, corresponding light intensity are as follows:
I (x, y)=A (x, y)+B (x, y) cos [φ (x, y)] (1)
Wherein, A (x,y) it is background light intensity, B (x, y) is intetference-fit strengthening, and φ (x, y) is initial phase distribution.?
After placing transparent substance to be measured (S9) on platform (S6), images in the light beam in camera image planes at P point and become in object
The light beam of the M point reflection on surface, this Shu Guang are incident upon when not placing transparent substance to be measured (S9) with reference to the B on platform (S6)
Point, corresponding light intensity become:
Wherein Δ φ (x, y) is that caused phase difference after object is put on reference platform (S6).
At this point gained fringe phase by A point on original reference platform (S6) phase, by transparent substance to be measured
(S9) phase being modulated at B point can establish the pass between phase and transparent substance to be measured (S9) height according to the variation of phase
System.In fig. 6, it is supposed that the optical center of deep ultraviolet fringe projection system and the optical center of deep ultraviolet imaging system and reference platform (S6)
Vertical range is respectively h1And h2.Then the height at transparent substance (S9) M point to be measured and the relationship between AB two o'clock phase difference are such as
Shown in lower formula:
Wherein, φA(x, y) is the phase value of imaging plane a certain picture point when not placing transparent substance to be measured (S9)；φB(x,
Y) after to place transparent substance (S9) to be measured, the phase value at same picture point；θ1And θ2Respectively A point and deep ultraviolet fringe projection
The angle of system optical center, A point and deep ultraviolet imaging system optical center can be calculated by system calibrating；F is the biography of grating fringe
Broadcast frequency；α is transparent substance to be measured (S9) surface normal and the angle with reference to platform (S6) normal, and tan α can characterize to be measured transparent
The gradient of object (S9) at this point has gradient distribution in the direction x and the direction y for curved face object.
By formula (3) it is found that in order to obtain the true altitude of transparent substance to be measured (S9), first has to progress phase demodulating and ask
Solve the phase value size modulated by grating fringe.Since curved face object has gradient distribution in the direction x and y, it is therefore desirable to adopt
Collection is along the striped being both vertically as well as horizontally distributed.By taking vertical direction as an example, using the method for four step phase shifts, by deep ultraviolet CCD points
Cai Ji not be put on the reference platform (S6) of 4 outs of phase transparent substance to be measured (S9) and 4 outs of phase be put into
Grating fringe image after surveying transparent substance (S9), striped light distribution can indicate are as follows:
Wherein, i=0,1 is expressed as with reference to not being put into transparent substance to be measured (S9) on platform (S6) and be put into be measured
Bright object (S9)；J=1,2,3,4 respectively indicate four phase shifts, and corresponding phase value isφ (x, y) is absolute
Phase value.
Thus it calculates to refer to and is not put into transparent substance to be measured (S9) on platform (S6) and is put into transparent substance to be measured (S9)
Phase value is respectively as follows:
Wherein, φ0(x, y) and φ1(x, y) respectively indicate with reference to be not put on platform (S6) transparent substance to be measured (S9) and
It is put into the phase value of transparent substance to be measured (S9).Since what is utilized is that arctan function solves, phase is wrapped phase herein,
There is jump in its curve, what is obtained is phase package figure.
After obtaining package image, carries out unpacking and operate to obtain accurate continuous phase value.The present invention is guided using quality
Algorithm, for acquisition process as shown in fig. 7, being sorted according to the reliability of pixel, better quality value in image is wrapped up in preferential expansion
Pixel, the rear pixel that lower quality is unfolded, so that phase unwrapping error is limited in low quality region, to effectively avoid error
Accumulation and transmitting.
Next, the pin-hole model using camera demarcates the outer ginseng and internal reference of deep ultraviolet imaging system.Deep ultraviolet
The relationship of CCD pixel point and world coordinate system corresponding points are as follows:
WhereinThe as internal reference of camera, [R T] are the outer ginseng of camera, (xw,yw,zw) it is spatial point
World coordinates, (xc,yc,zc) it is coordinate of the spatial point under camera coordinates system, (u, v) is spatial point in CCD camera imaging plane
On image pixel coordinates, (u0,v0) it is principal point coordinate, fx、fyU, v axis direction part of the body cavity above the diaphragm housing the heart and lungs respectively on image pixel coordinates
Away from corresponding pixel value.In addition, should also calibrate the distortion factor of camera, image is corrected, to eliminate actual camera
Non-linear effects.
In formula (3), it is thus necessary to determine that system parameter be θ1And θ2.By demarcating deep ultraviolet fringe projection system optical center
With the position of deep ultraviolet imaging system optical center, the vertical range h of itself and reference platform (S6) is calculated1And h2And the coordinate of A point,
To acquire and calculate tan θ according to tangent function1With tan θ2。
In formula (3), unknown parameter has z (x, y) and α.It is one between the gradient tan α and height z (x, y) of α characterization
The relationship of rank partial differential:
Wherein, gx(x, y) and gy(x, y) respectively indicates the gradient in the direction x and the direction y, corresponds to tan α in the x and y direction
Component.Therefore, by integrating to gradient, it can get the height of transparent substance to be measured (S9).As shown in figure 8, using changing
Generation strategy, it is first assumed that elemental height 0 substitutes into formula (3) and calculates first group of gradient data, then, using integration method,
Reconstruction obtains new height, then new height is substituted into formula (3) and calculates second group of gradient data.The rest may be inferred, Zhi Daoxiang
The difference in height that neighbour reconstructs twice is less than threshold condition, to obtain final tested surface shape.
In an iterative process, Southwell Zonal Wave-front Reconstructions method, the calculation are used by the integral algorithm that gradient restores height
The calculation formula of method are as follows:
Wherein, xm,n, ym,n, zm,nWithRespectively indicate corresponding three-dimensional coordinate and corresponding gradient at point (m, n).
Southwell zonal wavefront reconstruction is strong to the rejection ability of noise, can preferably avoid the noise in integral process tired
Product, thus with the 3D shape of higher accuracy resumption object.
So far, the true phase information and system calibrating parameter obtained according to above-mentioned steps, deep ultraviolet CCD can be shot
Two-dimensional image coordinate be converted into two-dimentional real world coordinates of the practical transparent substance (S9) to be measured on reference platform (S6), by
Relationship between absolute phase and gradient and height calculates the corresponding true altitude value of transparent substance to be measured (S9), thus
Complete the three-dimensionalreconstruction of transparent substance.
Embodiment
The face type of the transparent substance to be measured (S9) of embodiment is convex curved surface, a diameter of 30mm.Deep ultraviolet LED light source
(S0) broadband light that central wavelength is 280nm, bandwidth is ± 10nm is issued, obtaining wavelength through deep ultraviolet band optical filter (S1) is
The narrowband deep ultraviolet light of 280nm forms directional light by collimating and beam expanding system (S2), and being incident on pitch is 200 microns one-dimensional
On lateral shear grating (S3), interference fringe is generated as detection system fringe structure light, then formed by expanding microscope group (S5)
The deep ultraviolet band structure light with stable period of suitable dimension, projects the reference platform for being placed with transparent substance to be measured (S9)
(S6) it on, and is received using the deep ultraviolet imaging system being made of imaging len (S7) and deep ultraviolet CCD (S8) by object height
Spend modulated deforming stripe image.Meanwhile rotation of grating phase changer (S4) realization to structure light is added on optical grating construction
Turn and phase shift operation.
Based on the above detection device, by process as shown in Figure 9, to the specific of the transparent convex curved face object three-D profile of detection
Operating procedure is as follows:
Step 1: successively adjusting the grating phase changer (S4) in deep ultraviolet band structure optical detection system shown in Fig. 1, make
It obtains grating fringe image to be distributed along the vertical direction, and moves the phase of 0, pi/2, π, 3 pi/2s along the vertical direction, and utilize deep ultraviolet
Imaging system acquisition phase shift is respectively reference platform (S6) the bar graph I of 4 width outs of phase of 0, pi/2, π, 3 pi/2sp01、Ip02、
Ip03、Ip04, as shown in Figure 10.
Step 2: adjusting grating phase changer (S4) and be rotated by 90 °, so that grating fringe image is distributed in the horizontal direction, press
According to the phase-moving method of step 1, the reference platform (S6) that 4 phase shifts being distributed in the horizontal direction are 0, pi/2, π, 3 pi/2s is acquired respectively
Bar graph Is01、Is02、Is03、Is04, as shown in figure 11.
Step 3: being put into transparent substance to be measured on reference platform (S6), according to the method for step 1 and step 2, adjust light
Grid phase changer (S4) so that grating fringe image is distributed with horizontal direction along the vertical direction respectively, and acquires corresponding phase shift
For 0, pi/2, π, 3 pi/2s phase modulation figure Ip11、Ip12、Ip13、Ip14And Is11、Is12、Is13、Is14, as shown in Figures 12 and 13.
Step 4: phase solution.According to formula (5) and formula (6), collected edge is both vertically as well as horizontally divided respectively
The reference mesa stripe image of cloth and the stripe pattern that tested transparent substance is placed on reference platform carry out phase solution respectively,
Obtain the corresponding wrapped phase along the presence being both vertically as well as horizontally distributed jump.
Step 5: phase unwrapping.Process is obtained according to Quality Map as shown in Figure 8, using Quality Map guiding phase unwrapping
The phase of high quality pixel is preferentially unfolded in order, is unfolded to step 3 wrapped phase obtained, respectively obtains for algorithm
The true phase that the edge of consecutive variations is both vertically as well as horizontally distributed.
Step 6: system calibrating.
Firstly, the gridiron pattern uncalibrated image of several different positions and poses is shot using deep ultraviolet CCD (S8), to deep ultraviolet CCD
(S8) it is demarcated, determines the internal reference A of deep ultraviolet CCD (S8)c, outer ginseng kcAnd distortion factor, it is solved by formula (7) to be measured
Two-dimensional points coordinate (X, Y) of the bright object (S9) on reference platform, and image is rectified using resulting distortion factor is demarcated
Just；
Secondly, calibrating deep ultraviolet fringe projection system optical center, deep ultraviolet imaging system optical center, with reference to the object of platform (S6)
The world coordinates position of position and A point is managed, deep ultraviolet fringe projection system optical center, deep ultraviolet imaging system optical center and ginseng are calculated
The vertical range of platform (S6) is examined, to calculate tan θ1With tan θ2；
Step 7: assuming that elemental height z (x, y)=0 calculates first group of gradient data according to formula (3).Then, sharp
It is integrated with Southwell Zonal Wave-front Reconstructions method, is rebuild according to formula (9) and obtain new height.And so on, until adjacent two
The difference in height of secondary reconstruct is less than threshold condition, to obtain final tested surface shape.As a result as shown in figure 14, the root mean square of reconstruction
Error is about 0.1157mm.
Step 8: in conjunction with elevation information of the obtained measured object transparent substance of restructing algorithm under image coordinate system of step 7
System calibrating as a result, final solve transparent substance to be measured accurate three-dimensional wheel under world coordinate system in Z and step 6
Wide information (X, Y, Z).
Claims (6)
1. a kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour, which is characterized in that the device packet
Deep ultraviolet fringe projection system and deep ultraviolet imaging system are included, wherein deep ultraviolet fringe projection system includes wide range deep ultraviolet LED
Light source (S0), narrowband ultraviolet band filter plate (S1), collimating and beam expanding system (S2), one-dimensional deep ultraviolet lateral shear grating (S3) and
It expands microscope group (S5), and wide range deep ultraviolet LED light source (S0) and narrowband ultraviolet band filter plate (S1) constitute ultraviolet source unit；
Deep ultraviolet imaging system is made of imaging len (S7) and deep ultraviolet CCD (S8)；
The broadband light that deep ultraviolet LED light source (S0) issues is injected in narrowband ultraviolet band filter plate (S1) and obtains narrowband deep ultraviolet
Light, narrowband deep ultraviolet light are spread out by being incident on one-dimensional lateral shear grating (S3) after collimating and beam expanding system (S2) with directional light
It penetrates that form two wavefront identical but have the duplication wavefront at certain inclination angle, forms interference fringes in two duplication wavefront overlapping regions
As fringe structure light, fringe structure light forms the deep ultraviolet band structure with stable period by expanding microscope group (S5) again
Light；On deep ultraviolet band project structured light to the reference platform (S6) for being placed with transparent material measured object (S9), and utilize deep ultraviolet
Imaging system, which receives, passes through the modulated deforming stripe image of object height.
2. a kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour according to claim 1,
It is characterized in that grating phase changer (S4) is provided on one-dimensional lateral shear grating (S3), to realize to deep ultraviolet band knot
The rotation of structure light and phase shift operation.
3. a kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour according to claim 2,
It is characterized in that the one-dimensional lateral shear grating (S3), including one-dimensional amplitude grating (G1) and one-dimensional phase grating (G2)；
One-dimensional amplitude grating (G1) uses a series of small pixels in a manner of random coded transmitance to be met | cos (π x/d) | point
Cloth, wherein d is one-dimensional lateral shear light (G3) grid cycle；One-dimensional phase grating (G2) is in transparent fused quartz substrate rect
Etching depth meets λ/2 h=(n-1) in the region (2x/d) * comb (x/d), so that etch areas light wave and non-etch areas phase
Potential difference is π, and wherein λ is deep ultraviolet light source wavelength, and n is fused quartz refractive index.
4. a kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour as claimed in claim 3, special
Sign is that the screen periods range of one-dimensional lateral shear grating (S3) is 100 microns to 500 microns, corresponding every millimeter of interference fringe
Demand pairs are 4lp/mm to 20lp/mm.
5. a kind of deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour as claimed in claim 4, special
Sign is that the central wavelength for the broadband light that deep ultraviolet LED light source (S0) is issued is 280nm, bandwidth is ± 10nm.
6. a kind of reality of the deep ultraviolet structure light precise detection device of transparent material reconstructing 3 D contour as described in claim 1-5
Existing method, it is characterised in that include the following steps:
Step 1: the grating phase changer (S4) in deep ultraviolet fringe projection system is successively adjusted, so that grating fringe is along vertical side
To distribution, and the phase of 0, pi/2, π, 3 pi/2s is moved along the vertical direction, and be respectively using the acquisition phase shift of deep ultraviolet imaging system
0, the reference mesa stripe figure I of 4 width outs of phase of pi/2, π, 3 pi/2sp01、Ip02、Ip03、Ip04；
Step 2: adjusting grating phase changer (S4) and be rotated by 90 °, so that grating fringe is distributed in the horizontal direction, and along level side
4 width that phase shift is respectively 0, pi/2, π, 3 pi/2s are acquired to the mobile 0, phase of pi/2, π, 3 pi/2s, and using deep ultraviolet imaging system
The reference mesa stripe figure I of out of phases01、Is02、Is03、Is04；
Step 3: being put into transparent substance to be measured (S9) on reference platform (S6), according to step 1 and step 2, adjust grating phase shift
Device (S4) so that grating fringe image respectively along the vertical direction with horizontal direction be distributed, and acquire corresponding phase shift be 0, π/
2, the phase modulation figure I of π, 3 pi/2sp11、Ip12、Ip13、Ip14And Is11、Is12、Is13、Is14；
Step 4: phase solution；According to formula (5) and formula (6), collected edge is both vertically as well as horizontally distributed respectively
The bar graph that transparent substance to be measured (S9) is placed with reference to mesa stripe figure and on reference platform carries out phase solution respectively, obtains
The corresponding wrapped phase along the presence being both vertically as well as horizontally distributed jump；
Wherein, φ0(x, y) and φ1(x, y), which is respectively indicated, not to be put into transparent substance to be measured (S9) and is put into be measured in reference planes
The phase value of transparent substance (S9)；
Step 5: phase unwrapping；
Using the algorithm of Quality Map guiding phase unwrapping, the phase of high quality pixel is preferentially unfolded in order, step 3 is obtained
Wrapped phase be unfolded, respectively obtain the true phase that is both vertically as well as horizontally distributed of edge of consecutive variations；
Step 6: system calibrating；
Firstly, shoot the gridiron pattern uncalibrated image of several different positions and poses using deep ultraviolet CCD (S8), to deep ultraviolet CCD (S8) into
Rower is fixed, determines internal reference, outer ginseng and the distortion factor of deep ultraviolet CCD (S8), solves transparent substance to be measured (S9) by formula (3)
Two-dimensional points coordinate (X, Y) on reference platform, and image is corrected using resulting distortion factor is demarcated；
Secondly, calibrating deep ultraviolet fringe projection system optical center, deep ultraviolet imaging system optical center, with reference to the physical bit of platform (S6)
It sets and the world coordinates position of A point, calculating deep ultraviolet fringe projection system optical center, deep ultraviolet imaging system optical center and reference is flat
The vertical range of platform (S6), to calculate tan θ1With tan θ2；
The A point refers to when not placing transparent substance to be measured (S9), and deep ultraviolet fringe projection system is incident upon with reference to platform (S6)
On point；
The θ1And θ2The angle of respectively A point and deep ultraviolet fringe projection system optical center, deep ultraviolet imaging system optical center；
DescribedThe as internal reference of camera, [R T] are the outer ginseng of camera, (xw,yw,zw) be spatial point the world
Coordinate, (xc,yc,zc) it is coordinate of the spatial point under camera coordinates system, (u, v) is spatial point on CCD camera imaging plane
Image pixel coordinates, (u0,v0) it is principal point coordinate, fx、fyFocal length pair in u, v axis direction respectively on image pixel coordinates
The pixel value answered；
Step 7: assuming that elemental height z (x, y)=0 calculates first group of gradient data according to formula (4)；Then it utilizes
Southwell Zonal Wave-front Reconstructions method Integration reconstructions obtain new height；And so on, until the adjacent difference in height reconstructed twice
Less than threshold condition, to obtain final tested surface shape；
Wherein, φA(x, y) is the phase value for not placing a certain picture point of transparent substance to be measured (S9) imaging plane；φB(x, y) is to put
It sets transparent substance to be measured (S9), the phase value at same picture point；F is the frequencies of propagation of grating fringe；α is transparent substance to be measured
(S9) surface normal and the angle with reference to platform (S6) surface normal, tan α can characterize the gradient of measured object at this point, for
For curved face object, there is gradient distribution in the direction x and the direction y；
Step 8: elevation information Z of the transparent substance to be measured (S9) obtained according to the restructing algorithm of step 7 under image coordinate system,
In conjunction in step 6 system calibrating as a result, final solve transparent substance to be measured accurate three-D profile under world coordinate system
Information (X, Y, Z).
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