CN209541649U - A kind of cylinder target detecting tool - Google Patents
A kind of cylinder target detecting tool Download PDFInfo
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- CN209541649U CN209541649U CN201920372042.6U CN201920372042U CN209541649U CN 209541649 U CN209541649 U CN 209541649U CN 201920372042 U CN201920372042 U CN 201920372042U CN 209541649 U CN209541649 U CN 209541649U
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- cylinder target
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- detecting tool
- pedestal
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Abstract
The utility model belongs to target detection device technical field, disclose a kind of cylinder target detecting tool, including pedestal, the pedestal is hollow structure, the first dynamical system and the first transmission system are fixedly installed with inside it, first dynamical system is motor, first transmission system includes the speed reducer with motor output axis connection, the speed reducer is connected with the column spinner being vertically arranged by sprocket wheel, the column spinner extends pedestal, and as axis of rotation, being horizontally arranged on the column spinner has rotating platform, clamping device is additionally provided on the rotating platform；Detection device is also fixedly installed on the pedestal.The utility model structure is simple, easy to use, has filled up the technological gap in terms of cylinder target detecting tool, can either guarantee to fix cylinder target in detection process well, and can also detect the depth of parallelism and flatness of cylinder target simultaneously.
Description
Technical field
The utility model relates to target detection device technical field more particularly to a kind of cylinder target detecting tools.
Background technique
Target is exactly the target material of high speed lotus energy particle bombardment, is divided by manufacture craft, and target has electric arc target, sputtering
Target, vapor deposition target etc..Target is machined, its flatness, the depth of parallelism and surface quality is made to reach semiconductor product
The requirement of product production.In the related technology, deformation and vibration are easy to appear when the target larger and relatively thin to size is processed and
It is dynamic, it causes target plane degree, the depth of parallelism and surface quality poor, influences the production of Subsequent semiconductor product.Therefore, target is in life
It is typically necessary process after testing during production, target is needed to fix before target detection, to facilitate detection.
But the fixed device fixed effect of target in the prior art is bad, and fixation procedure is cumbersome, therefore is fixing
Cheng Zhong requires a great deal of time.On the other hand, target shape is varied, and has not yet to see suitable for cylinder target
Detecting tool relevant report, in particular for detecting the depth of parallelism of cylinder target and the device of flatness simultaneously.
Summary of the invention
For deficiency existing for cylinder target detecting tool in the prior art, the purpose of this utility model is to provide one kind
Cylinder target detecting tool.The detecting tool has filled up the technological gap in terms of cylinder target detecting tool, can either guarantee
Cylinder target is fixed in detection process well, and the depth of parallelism and flatness of cylinder target can also be detected simultaneously.
The purpose of this utility model is achieved through the following technical solutions:
A kind of cylinder target detecting tool, including pedestal, the pedestal are hollow structure, inside be fixedly installed with the
One dynamical system and the first transmission system, first dynamical system be motor, first transmission system include with it is electronic
Machine exports the speed reducer of axis connection, and the speed reducer is connected with the column spinner being vertically arranged, the column spinner by sprocket wheel
Extend pedestal, and as axis of rotation, being horizontally arranged on the column spinner has rotating platform, also sets up on the rotating platform
There is clamping device, for fixing cylinder target；It is also fixedly installed with detection device on the pedestal, for detecting cylinder target simultaneously
The flatness and the depth of parallelism of material.
Preferably, cavity is offered on the rotating platform, the inside cavity is equipped with the second dynamical system and second
Transmission system, second dynamical system be servo motor, second transmission system include sequentially connected first belt pulley,
The two sides inner wall of second belt pulley and screw rod, the screw rod and the cavity is rotatablely connected；
Sliding slot is offered at the top of the rotating platform, the sliding slot offers a hole on the side inner wall far from opening,
Described clamping device one end is sheathed on screw rod by axle sleeve, and the other end passes through a hole and is placed in sliding slot, can be in the second power train
It is moved freely along the chute under regiment commander is dynamic.
It is further preferred that the clamping device includes two link blocks, two described link block one end pass through axis respectively
External threading is sheathed on screw rod, and the other end is through hole and is fixedly installed with sliding block, and the inner wall of the sliding block and sliding slot, which slides, to be connected
It connects, loading plate is extended to outside sliding slot and be fixedly installed at the top of two sliding blocks, the top of the loading plate is fixedly mounted
There is fixture block, two fixture blocks and cylinder target shape are adapted.
It is further preferred that offer two sections of screw threads on the screw rod, and two sections of screw threads is oppositely oriented, on the screw rod
Fixing sleeve is set there are four limited block.
It is further preferred that the bottom of the sliding block is embedded with multiple balls in distributed rectangular, multiple balls are and sliding slot
Inner wall roll connection.
The utility model passes through pedestal, cavity, servo motor, the first belt pulley, circular trough, screw rod, the second belt pulley, axis
Set, sliding slot, hole, link block, sliding block, loading plate and fixture block match, in use, the target detected will be needed to be placed into two
Between a fixture block, servo motor is opened, the output shaft of servo motor drives the first pulley rotation, the first belt rotation when rotating
Screw rod rotation is driven when driving second the second pulley rotation of pulley rotation by belt when dynamic, and two are driven when screw rod rotates
Axle sleeve is mobile, by opening up two sections of screw threads on screw rod, and two sections of screw threads oppositely oriented effect so that screw rod in rotation, two
A axle sleeve is to do movement close to each other, drives link block mobile when axle sleeve is mobile, and band movable slider is in cunning when link block is mobile
Sliding in slot drives loading plate mobile when sliding block slides, loading plate drives two fixture blocks close to each other, until the target that is fixedly clamped
Material.
Preferably, the detection device is set on the position that can detecte cylinder target by bracket, the detection
Device includes the first detection device and second detection device, and the detection device is amesdial or dial gauge.
It is further preferred that the bracket is in inverted "L" shape, including column and cross bar, the column is the vertical of inverted "L" shape
Part, the cross bar are the lateral part of inverted "L" shape, and the bracket is fixed on pedestal by one end of column, and column is another
End is fixedly connected with cross bar, and the cross bar is placed in above cylinder target, and first detection device is set on column, can be along vertical
Column is moved freely in vertical direction, and the second detection device is set on cross bar.
Preferably, the rotating platform bottom is also equipped in two circle annular brace inside and outside concentric circles distribution, for branch
Rotating platform is supportted, the rotation of rotating platform on the base is maintained.
It is further preferred that the inner ring annular brace is circumferentially equally distributed ball set, the ball set and base
Seating face is rolling friction.
It is further preferred that the outer ring annular brace is that circumferentially equally distributed several idler wheels, the idler wheel roll
Direction is the tangential direction of rotating platform circumference.
Compared with prior art, the beneficial effects of the utility model are as follows:
The utility model structure is simple, easy to use, and quickly target to be detected can be fixed, and operation is very
It is easy, saves the time.
The utility model passes through the mutual cooperation of rotating platform, detection device and clamping device, ensure that in detection process
The fixed effect of cylinder target, moreover it is possible to effectively and accurately simultaneously the detector depth of parallelism and flatness, filled up cylinder target detection
Technological gap in terms of tooling.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the enlarged structure schematic diagram of part A in Fig. 1；
Fig. 3 is the diagrammatic side-view cross-sectional structural schematic diagram of the utility model.
Wherein, 1- pedestal, 100- cylinder target, 2- motor, 3- speed reducer, 4- column spinner, 5- rotating platform, 6- chamber
Body, 7- servo motor, the first belt pulley of 8-, the second belt pulley of 9-, 10- screw rod, 11- circular trough, 12- axle sleeve, 13- sliding slot, 14-
Hole, 15- link block, 16- sliding block, 17- loading plate, 18- fixture block, the first detection device of 19-, 20- second detection device, 21-
Bracket, 211- column, 212- cross bar, 22- inner ring annular brace, the outer ring 23- annular brace.
Specific embodiment
To facilitate the understanding of the present invention, present invention work more comprehensively, is meticulously described below in conjunction with embodiment, but this hair
Bright protection scope is not limited to embodiment in detail below.
Unless otherwise defined, all technical terms used hereinafter and the normally understood meaning of those skilled in the art
It is identical.Technical term used herein is intended merely to the purpose of description specific embodiment, it is no intended to limit of the invention
Protection scope.
For convenience of description, it is exemplified below heretofore described primary raw material as follows, unless stated otherwise its preparation side
Method is commercially available.
Embodiment 1
As shown in Fig. 1 ~ 3, the utility model provides a kind of cylinder target detecting tool, including pedestal 1, and pedestal 1 is interior
Hollow structure, inside be fixed with the first dynamical system and the first transmission system, the first dynamical system in the present embodiment is preferably
Motor 2, wherein the motor 2 of the present embodiment is automatically controlled to use wireless remote control mode by electric control system controls；First transmission system
Speed reducer 3 including exporting axis connection with motor 2, speed reducer 3 is driven by sprocket wheel, and is connected with the rotation being vertically arranged
Rotary column 4,4 other end of column spinner extend pedestal 1, and as axis of rotation, and being horizontally arranged on column spinner 4 has rotating platform 5, revolve
Turn to be additionally provided with clamping device and detection device on platform 5, is respectively used to fixed cylinder target 100 and detection cylinder target 100
Flatness, the depth of parallelism.
As shown in Fig. 2, offering cavity 6 in the present embodiment on rotating platform 5, the second dynamical system is installed inside cavity 6
It unites and the second transmission system, the second dynamical system is preferably servo motor 7 in the present embodiment, and servo motor 7 is fixedly installed in chamber
In the bottom interior wall of body 6, the second transmission system includes sequentially connected first belt pulley 8, the second belt pulley 9 and screw rod 10,
In, it is fixedly installed with the first belt pulley 8 on the output shaft of servo motor 7, offers circular trough on the two sides inside of cavity 6
11, the same screw rod 10 is rotatably equipped in two circular troughs 11, and fixing sleeve is equipped with the second belt pulley 9, screw rod 10 on screw rod 10
Upper thread bush is set there are two axle sleeve 12, and the top of rotating platform 5 is also provided with sliding slot 13, side inner wall of the sliding slot 13 far from opening
On offer a hole 14；Clamping device in the present embodiment, one end are sheathed on screw rod 10 by axle sleeve 12, and the other end passes through item
Hole 14 is placed in sliding slot 13,13 can be moved freely along the chute under the drive of the second transmission system.
The clamping device of the present embodiment includes two link blocks 15, and two 15 one end of link block pass through 12 screw thread of axle sleeve respectively
It is arranged on screw rod 10, the other end is through hole 14 and is fixedly installed with sliding block 16, and the inner wall of sliding block 16 and sliding slot 13, which slides, to be connected
It connects, the top of two sliding blocks 16 extends to outside sliding slot 13 and be fixedly installed with loading plate 17, and the top of loading plate 17 is fixedly mounted
There is fixture block 18.
As shown in figure 3, the first belt pulley 8 and the second belt pulley 9 are wound with same root belt, two sections are offered on screw rod 10
Screw thread, and two sections of screw threads is oppositely oriented, fixing sleeve is set there are four limited block on screw rod 10, two fixture blocks 18 it is close to each other one
Side can also be fixedly installed with rubber antiskid pad, and the bottom of sliding block 16 is embedded with multiple balls in distributed rectangular, and multiple balls are equal
It rolling and connects with the inner wall of sliding slot 13, bearing is also provided in circular trough 11, the inner ring fixation of bearing is set on screw rod 10,
The outer ring of bearing is fixedly connected with the inner wall of circular trough 11.
The working principle of the fixed cylinder target of the detecting tool of the utility model is as follows:
In use, the target detected will be needed to be placed between two fixture blocks, servo motor, the output of servo motor are opened
Axis drives the first pulley rotation when rotating, and when the first pulley rotation passes through belt second the second belt of pulley rotation of drive
Screw rod rotation is driven when wheel rotation, drives two axle sleeves mobile when screw rod rotates, by opening up two sections of screw threads, and two sections on screw rod
The oppositely oriented effect of screw thread is so that screw rod is in rotation, and two axle sleeves are to do movement close to each other, when axle sleeve is mobile
Drive link block mobile, band movable slider slides in sliding slot when link block is mobile, drives loading plate mobile when sliding block slides, carrying
It is close to each other that strip moves two fixture blocks, until the target that is fixedly clamped.
The detection device of the present embodiment is set on the position that can detecte cylinder target 100 by bracket 21, including
First detection device 19 and second detection device 20, the first detection device 19 and second detection device 20 in the present embodiment are thousand
Divide table or dial gauge, the preferably higher amesdial of precision；Wherein, bracket 21 is in inverted "L" shape, including column 211 and cross bar
212, column 211 is the vertical section of inverted "L" shape, and cross bar 212 is the lateral part of inverted "L" shape, and bracket 21 passes through column 211
One end is fixed on pedestal 1, and 211 other end of column is fixedly connected with cross bar 212, and cross bar 212 is placed in 100 top of cylinder target,
First detection device 19 is set on column 211, can be moved freely along column 211 in vertical direction, probe and cylinder target
100 side wall contact, for detecting the depth of parallelism of 100 side wall of cylinder target, second detection device 20 is set on cross bar 212,
It is contacted at the top of the probe of second detection device 20 and cylinder target 100, for detecting the flatness of cylinder target 100.
The present embodiment carries out fixed cylinder target on the rotating platform by the detection device being fixed on pedestal 1
Detection, the utility model structure is simple, easy to use, and quickly target to be detected can be fixed, and operates ten partial volumes
Easily, the time is saved.
In order to rotate rotating platform 5 preferably on pedestal 1, the detecting tool of the present embodiment is in 5 bottom of rotating platform
It is also equipped with the inside and outside two circles annular brace in concentric circles distribution, rotating platform 5 is used to support and maintains rotating platform 5 in pedestal
It is rotated on 1；In the present embodiment, the preferably circumferentially equally distributed ball set of inner ring annular brace 22, ball set and pedestal 1
Surface is rolling friction, reducing friction resistance, the preferably circumferentially equally distributed several idler wheels of outer ring annular brace 23, idler wheel
Rotating direction is 5 tangent to periphery direction of rotating platform, wherein idler wheel can be preferably Universal wheel structure in the present embodiment, can be with
Freely adjust rotating direction.
In the present embodiment, the top of pedestal 1 is fixedly mounted two-direction switch, the model KCD1-101 of two-direction switch, suitable
Switch, servo motor 7 and external power supply are successively electrically connected by conducting wire and constitute closed circuit.
The course of work of detecting tool provided by the utility model is as follows:
S1. cylinder target is fixed using above-mentioned clamping device；
S2. the first detection device and second detection device are installed respectively, guarantees the probe and circle of the first detection device
Cylinder target side wall contact, the probe of second detection device and cylinder target top contact；
S3. remote controler starting motor is pressed, motor drives rotating platform rotation, rotation to certain point (random choosing
Take), motor is closed, stops rotating, records the reading of the first detection device and second detection device at this time respectively；
S4. it is different in cylinder target to record the first detection device and second detection device respectively for the process for repeating step S3
The reading that position measures；
S5. the reading of more above-mentioned all records, if within the scope of permissible error, illustrate cylinder target flatness and
The depth of parallelism is all satisfied requirement；Conversely, being then unsatisfactory for.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (10)
1. a kind of cylinder target detecting tool, including pedestal, which is characterized in that the pedestal is hollow structure, internal solid
Dingan County is equipped with the first dynamical system and the first transmission system, and first dynamical system is motor, first transmission system
Including the speed reducer with motor output axis connection, the speed reducer is connected with the column spinner being vertically arranged by sprocket wheel,
The column spinner extends pedestal, and as axis of rotation, and being horizontally arranged on the column spinner has rotating platform, the rotary flat
Clamping device is additionally provided on platform, for fixing cylinder target；It is also fixedly installed with detection device on the pedestal, for simultaneously
Detect the flatness and the depth of parallelism of cylinder target.
2. cylinder target detecting tool according to claim 1, which is characterized in that offer chamber on the rotating platform
Body, the inside cavity are equipped with the second dynamical system and the second transmission system, and second dynamical system is servo motor, institute
Stating the second transmission system includes sequentially connected first belt pulley, the second belt pulley and screw rod, the screw rod and the cavity
The rotation connection of two sides inner wall；
Sliding slot is offered at the top of the rotating platform, the sliding slot offers a hole on the side inner wall far from opening, described
Clamping device one end is sheathed on screw rod by axle sleeve, and the other end passes through a hole and is placed in sliding slot, can be in the second transmission system band
It is moved freely along the chute under dynamic.
3. cylinder target detecting tool according to claim 2, which is characterized in that the clamping device includes two connections
Block, two described link block one end pass through sleeve thread respectively and are sheathed on screw rod, and the other end is through hole and is fixedly installed with
The inner wall of sliding block, the sliding block and sliding slot is slidably connected, and extends to outside sliding slot and is fixedly installed at the top of two sliding blocks
Loading plate, fixture block is fixedly installed at the top of the loading plate, and two fixture blocks and cylinder targeting shape are adapted.
4. cylinder target detecting tool according to claim 3, which is characterized in that offer two sections of spiral shells on the screw rod
Line, and two sections of screw threads is oppositely oriented, fixing sleeve sets that there are four limited blocks on the screw rod.
5. cylinder target detecting tool according to claim 4, which is characterized in that the bottom of the sliding block is in embedded with multiple
The ball of distributed rectangular, multiple balls are rolled with the inner wall of sliding slot and are connected.
6. cylinder target detecting tool according to claim 1, which is characterized in that the detection device is arranged by bracket
In on the position that can detecte cylinder target, the detection device includes the first detection device and second detection device, described
Detection device is amesdial or dial gauge.
7. cylinder target detecting tool according to claim 6, which is characterized in that the bracket is in inverted "L" shape, including vertical
Column and cross bar, the column are the vertical section of inverted "L" shape, and the cross bar is the lateral part of inverted "L" shape, and the bracket passes through
One end of column is fixed on pedestal, and the column other end is fixedly connected with cross bar, and the cross bar is placed in above cylinder target, described
First detection device is set on column, can be moved freely along column in vertical direction, the second detection device is set to cross
On bar.
8. cylinder target detecting tool according to claim 1, which is characterized in that the rotating platform bottom is also equipped with
In two circle annular braces inside and outside concentric circles distribution, it is used to support rotating platform, maintains the rotation of rotating platform on the base.
9. cylinder target detecting tool according to claim 8, which is characterized in that the inner ring annular brace is circumferentially
Equally distributed ball set, the ball set and base-plates surface are rolling friction.
10. cylinder target detecting tool according to claim 8, which is characterized in that the outer ring annular brace is along circle
All equally distributed several idler wheels, the idler wheel rotating direction are the tangential direction of rotating platform circumference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920372042.6U CN209541649U (en) | 2019-03-22 | 2019-03-22 | A kind of cylinder target detecting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920372042.6U CN209541649U (en) | 2019-03-22 | 2019-03-22 | A kind of cylinder target detecting tool |
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| Publication Number | Publication Date |
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| CN209541649U true CN209541649U (en) | 2019-10-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920372042.6U Active CN209541649U (en) | 2019-03-22 | 2019-03-22 | A kind of cylinder target detecting tool |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112683200A (en) * | 2020-12-07 | 2021-04-20 | 苏州科亿嘉新技术开发有限公司 | Sputtering rotating target straightness inspection device |
| CN113529393A (en) * | 2021-06-30 | 2021-10-22 | 李锦萍 | Preparation device of wire guide wheel carbon fiber cloth for polycrystalline silicon cutting wire |
-
2019
- 2019-03-22 CN CN201920372042.6U patent/CN209541649U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112683200A (en) * | 2020-12-07 | 2021-04-20 | 苏州科亿嘉新技术开发有限公司 | Sputtering rotating target straightness inspection device |
| CN113529393A (en) * | 2021-06-30 | 2021-10-22 | 李锦萍 | Preparation device of wire guide wheel carbon fiber cloth for polycrystalline silicon cutting wire |
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