CN112683200A - Sputtering rotating target straightness inspection device - Google Patents
Sputtering rotating target straightness inspection device Download PDFInfo
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- CN112683200A CN112683200A CN202011427993.2A CN202011427993A CN112683200A CN 112683200 A CN112683200 A CN 112683200A CN 202011427993 A CN202011427993 A CN 202011427993A CN 112683200 A CN112683200 A CN 112683200A
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- base
- transmission rod
- fixing base
- fixing seat
- support column
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Abstract
The invention discloses a straightness detection device for a sputtering rotary target, relates to the technical field of sputtering rotary target detection, and aims to solve the problem that the circle center of the existing rotary target and the center of a detection device are not in the same straight line, so that detection deviation is easy to occur. The utility model discloses a portable electronic device, including base, first fixing base, second fixing base, support column, installation pole, electric putter, infrared probe, regulation chamber, first fixing base and second fixing base, the inside of base is provided with the regulation chamber, first fixing base and second fixing base are installed respectively to the intermediate position department of base upper end, and first fixing base and second fixing base use the central line of base to be the symmetric distribution as the axis, the outside of first fixing base and second fixing base is provided with rotatory target, the fixed support column that is provided with in one side of base upper end, the inside slip of support column is provided with movable post, and the upper end of movable post extends to the top of support column, one side of activity post upper end is provided with the.
Description
Technical Field
The invention relates to the technical field of sputtering rotary target detection, in particular to a device for inspecting the straightness of a sputtering rotary target.
Background
The film coating target is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, a multi-arc ion plating system or other types of film coating systems under proper process conditions, along with the continuous development and progress of the film coating target, the rotary target with smaller loss rate is put into use, the magnetron rotary target is positioned at two ends like the magnetic field, a loop is formed, the magnetic field is strong, and thus, the magnetron sputtering gathers more free electrons to form a stronger self-sustaining discharge phenomenon. Correspondingly, sputtering is easy, the sputtering rate is enhanced, so the sputtering rate is higher than that of other places, the utilization rate of a common planar target is about 1/2 of that of a rotary target, the utilization rate of the rotary target is about 60 percent, the straightness of the rotary target is very important, and the rotary target cannot be normally used when deviation occurs, so the factory cost is greatly increased, and therefore, the machined rotary target base tube needs to be subjected to straightness inspection.
However, the existing rotating target straightness detection device is poor in flexibility, cannot be flexibly adjusted according to the diameter of the rotating target, and is prone to causing the situation that the circle center of the rotating target and the center of the detection device are not in the same straight line, so that detection deviation is prone to occurring, and therefore the existing requirement is not met.
Disclosure of Invention
The invention aims to provide a device for inspecting the straightness of a sputtering rotating target material, which aims to solve the problem that the circle center of the rotating target material and the center of a detection device in the background technology are not in the same straight line, so that detection deviation is easy to occur.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a rotatory target straightness accuracy verifying attachment sputters, includes the base, the inside of base is provided with adjusts the chamber, first fixing base and second fixing base are installed respectively to the intermediate position department of base upper end, and just first fixing base and second fixing base use the central line of base to be the symmetric distribution as the axis, the outside of first fixing base and second fixing base is provided with rotatory target, the fixed support column that is provided with in one side of base upper end, the inside slip of support column is provided with movable post, and the upper end of activity post extends to the top of support column, one side of activity post upper end is provided with the installation pole, electric putter is installed to the lower extreme of installation pole, electric putter's below is provided with the installation head, infrared probe is installed to the both sides of installation head.
Preferably, the inside of adjusting the chamber is provided with first transfer line and second transfer line respectively, and the second transfer line is located the below of first transfer line, the lower extreme fixed connection of first transfer line and first fixing base, and the upper end and the base sliding connection of first transfer line, the second transfer line passes through connecting rod fixed connection with the second fixing base, and the lower extreme of second transfer line passes through slide rail sliding connection with the regulation chamber, the inboard of first transfer line and second transfer line all is provided with the tooth's socket, install the gear between first transfer line and the second transfer line, and the gear is connected with the tooth's socket meshing, the second regulating wheel is installed to the intermediate position department of base front end, and the one end and the gear fixed connection of second regulating wheel.
Preferably, a servo motor is fixedly installed between the electric push rod and the installation head, an output shaft of the servo motor is in transmission connection with the installation head through a coupler, and the infrared probes are symmetrically distributed by taking a central line of the installation head as an axis.
Preferably, a first adjusting wheel is installed on one side of the supporting column, one end of the first adjusting wheel penetrates through the supporting column to be attached to the movable column, and the first adjusting wheel is in threaded fit with the supporting column.
Preferably, a display screen is installed on the other side of the upper end of the base and is electrically connected with the infrared probe.
Preferably, the upper end of the base is provided with a scale mark.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention is characterized in that the base is internally provided with an adjusting cavity, when a rotating target material is fixed, the rotating target material is inserted along the outer walls of a first fixed seat and a second fixed seat, so that the bottom of the rotating target material is wrapped on the first fixed seat and the second fixed seat, at the moment, a second adjusting wheel is rotated, one end of the second adjusting wheel drives a gear to rotate, the upper end and the lower end of the gear are respectively provided with a first transmission rod and a second transmission rod, tooth grooves on the first transmission rod and the second transmission rod are meshed with the gear, therefore, when the second adjusting wheel is rotated, the first transmission rod and the second transmission rod respectively move along straight lines in opposite directions, the center of the gear and the central point between the first fixed seat and the second fixed seat are positioned on the same vertical line, the two fixed seats always keep the same distance as the central point of the gear while moving, and the second adjusting wheel is rotated clockwise, the fixing seat is fixed inside the rotary target, and the position of the target is adjusted simultaneously, so that the circle center of the rotary target and the circle center of the electric push rod are on the same straight line.
2. The invention is characterized in that a servo motor with two infrared probes is arranged at the lower end of an electric push rod, when the straightness of the inner wall of a rotating target material is detected, the electric push rod and the infrared probes are respectively started to enable the infrared probes to slowly enter the rotating target material, infrared rays emitted by the infrared probes are reflected by the inner wall of the rotating target material, the infrared probes can receive reflected light rays at the same time, so that the calculation of the distance can be realized, the straightness detection of the inner wall of the rotating target material is completed along with the continuous descending of the infrared probes, when the two infrared probes are started at the same time, the infrared probes can detect the distance between the inner wall and the infrared probes at different transverse positions by starting the servo motor, if the distance difference between the two infrared probes exceeds a preset value, the inner wall of the target material in the, by the mode, the detection accuracy of the straightness of the rotary target is improved on the premise of high-efficiency detection.
3. According to the invention, the slidable movable column is arranged in the support column, and the fixing strength of the movable column in the support column can be controlled under the action of friction force between the first adjusting wheel and the support column by rotating the first adjusting wheel, so that the movable column is convenient to be matched with the electric push rod to carry out detection work in the rotary target.
Drawings
FIG. 1 is a schematic view of the overall internal structure of the present invention;
FIG. 2 is an overall side view of the present invention;
FIG. 3 is a top view of the present invention;
FIG. 4 is a partial enlarged view of area A of the present invention;
fig. 5 is a side view of the connection structure of the transmission rod and the gear of the invention.
In the figure: 1. a base; 2. an adjustment chamber; 3. a support pillar; 4. a movable post; 5. mounting a rod; 6. an electric push rod; 7. rotating the target material; 8. a tooth socket; 9. a first fixed seat; 10. a second fixed seat; 11. a first drive lever; 12. a second transmission rod; 13. a connecting rod; 14. a gear; 15. a first regulating wheel; 16. a display screen; 17. a second regulating wheel; 18. scale marking; 19. a servo motor; 20. an infrared probe; 21. and (5) mounting the head.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-5, an embodiment of the present invention is shown: the utility model provides a rotatory target straightness accuracy verifying attachment sputters, including base 1, base 1's inside is provided with adjusts chamber 2, first fixing base 9 and second fixing base 10 are installed respectively to the intermediate position department of base 1 upper end, and first fixing base 9 and second fixing base 10 use base 1's central line to be the symmetric distribution as the axis, the outside of first fixing base 9 and second fixing base 10 is provided with rotatory target 7, one side of base 1 upper end is fixed and is provided with support column 3, the inside slip of support column 3 is provided with movable post 4, and the upper end of movable post 4 extends to the top of support column 3, one side of movable post 4 upper end is provided with installation pole 5, electric putter 6 is installed to the lower extreme of installation pole 5, electric putter 6's below is provided with installation head 21, infrared probe 20 is installed to the both sides of installation head.
Further, a first transmission rod 11 and a second transmission rod 12 are respectively arranged inside the adjusting cavity 2, the second transmission rod 12 is positioned below the first transmission rod 11, the first transmission rod 11 is fixedly connected with the lower end of the first fixed seat 9, the upper end of the first transmission rod 11 is slidably connected with the base 1, the second transmission rod 12 is fixedly connected with the second fixed seat 10 through a connecting rod 13, the lower end of the second transmission rod 12 is slidably connected with the adjusting cavity 2 through a sliding rail, tooth spaces 8 are respectively arranged on the inner sides of the first transmission rod 11 and the second transmission rod 12, a gear 14 is arranged between the first transmission rod 11 and the second transmission rod 12, the gear 14 is meshed with the tooth spaces 8, a second adjusting wheel 17 is arranged at the middle position of the front end of the base 1, one end of the second adjusting wheel 17 is fixedly connected with the gear 14, and by this way, on one hand, flexible adjustment can be performed according to the diameter length of the rotary target 7, on the other hand, the circle center of the rotary target 7 and the center of the detection device can be ensured to be on the same straight line in the adjusting process, so that the detection precision is improved.
Furthermore, a servo motor 19 is fixedly installed between the electric push rod 6 and the mounting head 21, an output shaft of the servo motor 19 is in transmission connection with the mounting head 21 through a coupler, the infrared probes 20 are symmetrically distributed by taking a central line of the mounting head 21 as an axis, infrared rays emitted by the infrared probes 20 are reflected by the inner wall of the rotating target 7, the infrared probes 20 can receive the reflected rays at the same time, and therefore distance calculation can be achieved, and detection of straightness of the inner wall of the rotating target 7 can be completed along with continuous descending of the infrared probes 20.
Further, first regulating wheel 15 is installed to one side of support column 3, and the one end of first regulating wheel 15 passes support column 3 and the laminating of activity post 4 mutually, and first regulating wheel 15 and 3 screw-thread fit of support column, through rotating first regulating wheel 15, can control the fixed strength of activity post 4 in support column 3 inside under the effect of frictional force at it and support column 3 to be convenient for cooperate with electric putter 6.
Further, a display screen 16 is installed on the other side of the upper end of the base 1, the display screen 16 is electrically connected with the infrared probe 20, and the display screen 16 is used for displaying the detection numerical value.
Further, the upper end of base 1 is provided with scale mark 18, and scale mark 18 can the convenient to use person further judge the centre of a circle distance.
The working principle is as follows: when the target fixing device is used, when the rotating target 7 is fixed, the rotating target 7 is inserted into the outer walls of the first fixing seat 9 and the second fixing seat 10, so that the bottom of the rotating target 7 is wrapped on the first fixing seat 9 and the second fixing seat 10, at the moment, the second adjusting wheel 17 is rotated, one end of the second adjusting wheel 17 drives the gear 14 to rotate, the tooth grooves 8 on the first transmission rod 11 and the second transmission rod 12 are meshed with the gear 14, the first transmission rod 11 and the second transmission rod 12 respectively move linearly and synchronously in opposite directions while the second adjusting wheel 17 is rotated, the center of the gear 14 and the center point between the first fixing seat 9 and the second fixing seat 10 are positioned on the same vertical line, so that the two fixing seats always keep the same distance as the center point of the gear 14 while moving, and the fixing seats fix the rotating target 7 by clockwise rotating the second adjusting wheel 17, simultaneously, the position of the target material is adjusted, so that the circle center of the rotary target material 7 and the circle center of the electric push rod 6 are on the same straight line, when the straightness of the inner wall of the rotary target material 7 is detected, the electric push rod 6 and the infrared probe 20 are respectively started, so that the infrared probe 20 slowly enters the rotary target material 7, infrared rays emitted by the infrared probe 20 are reflected by the inner wall of the rotary target material 7, the infrared probe 20 can simultaneously receive the reflected light rays, thereby realizing distance calculation, the straightness of the inner wall of the rotary target material 7 is detected along with the continuous descending of the infrared probe 20, when the two infrared probes 20 are started simultaneously, the infrared probes 20 can detect the distance between the inner wall and the infrared probe 20 at different transverse positions by starting the servo motor 19, if the distance difference between the two infrared probes 20 exceeds a preset value, this indicates that the inner wall of the rotating target 7 is not concentric in this region.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a rotatory target straightness accuracy verifying attachment sputters, includes base (1), its characterized in that: an adjusting cavity (2) is arranged in the base (1), a first fixing seat (9) and a second fixing seat (10) are respectively installed at the middle position of the upper end of the base (1), the first fixing seat (9) and the second fixing seat (10) are symmetrically distributed by taking the central line of the base (1) as an axis, a rotating target (7) is arranged outside the first fixing seat (9) and the second fixing seat (10), a supporting column (3) is fixedly arranged on one side of the upper end of the base (1), a movable column (4) is slidably arranged inside the supporting column (3), the upper end of the movable column (4) extends to the upper side of the supporting column (3), an installing rod (5) is arranged on one side of the upper end of the movable column (4), an electric push rod (6) is installed at the lower end of the installing rod (5), an installing head (21) is arranged below the electric push rod (6), the two sides of the mounting head (21) are provided with infrared probes (20).
2. The sputtering rotary target straightness inspection device according to claim 1, wherein: the inner part of the adjusting cavity (2) is respectively provided with a first transmission rod (11) and a second transmission rod (12), the second transmission rod (12) is positioned below the first transmission rod (11), the first transmission rod (11) is fixedly connected with the lower end of the first fixing seat (9), the upper end of the first transmission rod (11) is connected with the base (1) in a sliding manner, the second transmission rod (12) is fixedly connected with the second fixing seat (10) through a connecting rod (13), the lower end of the second transmission rod (12) is connected with the adjusting cavity (2) through a sliding rail in a sliding manner, tooth grooves (8) are arranged on the inner sides of the first transmission rod (11) and the second transmission rod (12), a gear (14) is installed between the first transmission rod (11) and the second transmission rod (12), the gear (14) is connected with the tooth grooves (8) in a meshing manner, a second adjusting wheel (17) is installed at the middle position of the front end of the base (1), and one end of the second adjusting wheel (17) is fixedly connected with the gear (14).
3. The sputtering rotary target straightness inspection device according to claim 1, wherein: a servo motor (19) is fixedly installed between the electric push rod (6) and the mounting head (21), an output shaft of the servo motor (19) is in transmission connection with the mounting head (21) through a coupler, and the infrared probes (20) are symmetrically distributed by taking the center line of the mounting head (21) as an axis.
4. The sputtering rotary target straightness inspection device according to claim 1, wherein: first regulating wheel (15) is installed to one side of support column (3), and the one end of first regulating wheel (15) passes support column (3) and laminates mutually with activity post (4), first regulating wheel (15) and support column (3) screw-thread fit.
5. The sputtering rotary target straightness inspection device according to claim 1, wherein: display screen (16) are installed to the opposite side of base (1) upper end, and display screen (16) and infrared probe (20) electric connection.
6. The sputtering rotary target straightness inspection device according to claim 1, wherein: the upper end of the base (1) is provided with a scale mark (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011427993.2A CN112683200A (en) | 2020-12-07 | 2020-12-07 | Sputtering rotating target straightness inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011427993.2A CN112683200A (en) | 2020-12-07 | 2020-12-07 | Sputtering rotating target straightness inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112683200A true CN112683200A (en) | 2021-04-20 |
Family
ID=75446623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011427993.2A Withdrawn CN112683200A (en) | 2020-12-07 | 2020-12-07 | Sputtering rotating target straightness inspection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112683200A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204788279U (en) * | 2015-05-11 | 2015-11-18 | 基迈克材料科技（苏州）有限公司 | Sputter rotatory target straightness accuracy verifying attachment |
| CN209541649U (en) * | 2019-03-22 | 2019-10-25 | 株洲火炬安泰新材料有限公司 | A kind of cylinder target detecting tool |
| CN211527300U (en) * | 2020-03-18 | 2020-09-18 | 宁波江丰电子材料股份有限公司 | Workpiece for detecting straightness of inner surface of rotary target |
-
2020
- 2020-12-07 CN CN202011427993.2A patent/CN112683200A/en not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204788279U (en) * | 2015-05-11 | 2015-11-18 | 基迈克材料科技（苏州）有限公司 | Sputter rotatory target straightness accuracy verifying attachment |
| CN209541649U (en) * | 2019-03-22 | 2019-10-25 | 株洲火炬安泰新材料有限公司 | A kind of cylinder target detecting tool |
| CN211527300U (en) * | 2020-03-18 | 2020-09-18 | 宁波江丰电子材料股份有限公司 | Workpiece for detecting straightness of inner surface of rotary target |
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Application publication date: 20210420 |
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| WW01 | Invention patent application withdrawn after publication |