CN209372222U - A kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation - Google Patents
A kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation Download PDFInfo
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- CN209372222U CN209372222U CN201920146111.1U CN201920146111U CN209372222U CN 209372222 U CN209372222 U CN 209372222U CN 201920146111 U CN201920146111 U CN 201920146111U CN 209372222 U CN209372222 U CN 209372222U
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Abstract
The utility model discloses a kind of photosensitive imaging detection chips based on sophisticated electronic fluorescent excitation, including optical antenna disposed in parallel, phosphor film layer, and light-sensitive array, the array structure that optical antenna is made of multiple antenna elements for being spaced each other and being electrically connected, the array structure that phosphor film layer is made of multiple fluorescent film members for being spaced each other and being electrically connected, the array structure that light-sensitive array is made of multiple photosensitive members being spaced each other, optical antenna, phosphor film layer, and the shape and array scale of light-sensitive array are all the same, the antenna element of optical antenna, the fluorescence membrane element of corresponding position in phosphor film layer, and the photosensitive member of corresponding position is mutually aligned in vertical direction in light-sensitive array, the antenna element of optical antenna includes the Nano pointed cone that at least one top surface is electrically connected to each other.The utility model realizes that incident light amplification and infrared light to visible light spectrum are converted by the electronics controlled emissions and fluorescent excitation of Nano pointed cone, to significantly improve detectivity.
Description
Technical field
The utility model belongs to optical imagery detection technology field, is based on sophisticated electronic fluorescence more particularly, to one kind
The photosensitive imaging detection chip of excitation.
Background technique
Currently, photosensitive imaging array as light-sensitive detector, has obtained extremely wide application in every field.Often
The photosensitive imaging array seen includes photon detector and two kinds of thermal detector, and photon detector includes visible-light detector
(common is cmos device) and infrared detector (common is FPAs) two types.Visible-light detector is used primarily in civilian neck
Domain, detectable minimum optical power is also down to nanowatt grade；Infrared detector is used primarily in military domain, and cost is relatively high
It is high；Thermal detector is to absorb to generate the work of this hot-probing mode with photosignal based on low-grade fever.
However, there are some very important technical problems for existing photosensitive imaging array: the first, photon detector can not
Visible light and wide range infrared light are detected simultaneously；Although second, thermal detector can detect visible light and infrared light simultaneously, it is detected
At least one low magnitude of remolding sensitivity photon detector, and speed of detection is slow；Third, existing photosensitive imaging array are directed to power
It is insufficient in the weak optical signal detectivity of micromicrowatt grade power.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, the utility model provides a kind of based on sophisticated electronic fluorescence
The photosensitive imaging detection chip of excitation, it is intended that above-mentioned technical problem present in existing photosensitive imaging array is solved, and
The photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation of the utility model has high excellent of imaging light collection efficiency
Point, and realize incident light amplification and infrared light to visible light spectrum by the electronics controlled emissions of Nano pointed cone and fluorescent excitation
Conversion, to significantly improve detectivity, and extends spectral response range.
To achieve the above object, it according to the one aspect of the utility model, provides a kind of sharp based on sophisticated electronic fluorescence
The photosensitive imaging detection chip encouraged, including optical antenna disposed in parallel, phosphor film layer and light-sensitive array, optical antenna be
The array structure being made of multiple antenna elements for being spaced each other and being electrically connected, phosphor film layer are spaced each other and are electrically connected by multiple
Fluorescent film member composition array structure, the array structure that light-sensitive array is made of multiple photosensitive members being spaced each other, optics
Antenna, the shape of phosphor film layer and light-sensitive array and array scale are all the same, and the size of phosphor film layer and light-sensitive array is complete
It is identical, corresponding position in the fluorescence membrane element and light-sensitive array of corresponding position in the antenna element of optical antenna, phosphor film layer
Photosensitive member be mutually aligned in vertical direction, the antenna element of optical antenna includes the nanometer that at least one top surface is electrically connected to each other
Pointed cone, the Nano pointed cone use pyramidal structure, and top surface is curved-surface structure, and fluorescence membrane element is directed toward at the tip position of Nano pointed cone,
One end of optical antenna and one end of phosphor film layer pass through metal contact wires respectively and are connected to external control signal.
Preferably, when the photosensitive imaging detection chip be used to detect weak optical signal, nanometer in each antenna element
The quantity of pointed cone is greater than 1, and these Nano pointed cones are evenly distributed.
Preferably, the numerical lower limits value of the Nano pointed cone must enable photosensitive member to generate effective signal output, receive
After the upper limit of the number value of rice pointed cone must make all Nano pointed cones in individual antenna member evenly distributed, the totality of the antenna element
Size cannot be greater than the size of single photosensitive member.
Preferably, the cross section of Nano pointed cone top surface is round, oval, triangle or polygon.
Preferably, a diameter of between 30 nanometers to 600 nanometers when the cross section of Nano pointed cone top surface is circle.
Preferably, the distance between the tip position and the top surface of phosphor film layer of Nano pointed cone are 150 nanometers to 700 nanometers
Between, the distance between bottom surface and light-sensitive array top surface of phosphor film layer are adjacent phosphor films between 100 nanometers to 800 nanometers
It is divided between 50 to 500 nanometers between member.
Preferably, the photosensitive imaging detection chip is encapsulated in inside chip carrier, and chip carrier is close to optical antenna
A side on be provided with optical window, be used to indicate the side and be provided with optical antenna, it is adjacent with optical window another on chip carrier
Electronics interface is provided on a side, for the photosensitive imaging detection chip to be accessed different optical paths in a manner of grafting
Structure.
In general, it can obtain down the above technical solutions conceived by the present invention are compared with the prior art,
Column the utility model has the advantages that
1, visible light and wide range infrared light are collected since the utility model uses optical antenna, the utility model
Detection chip can detect visible light and wide range infrared light simultaneously, to realize the detection of wide range domain；
2, surface wave is collected by the resonance qualitly surface electromagnetic excitation of optical antenna due to the utility model, so as to reality
The amplification of existing micromicrowatt grade weak optical signal is collected, and detectivity is high；
3, the utility model realizes quick response and wave spectrum conversion by using the mode of Electron Excitation fluorescence；
4, the utility model passes through the coupling relevance of optical antenna surface electromagnetic wave and electric surface density wave, realization pair
The automatically controlled adjusting of its surface " state of cruising " electronics distribution density, and then the focus strength of receiving of its surface electromagnetic wave can be adjusted.
5, the utility model collects inclination imaging beam by optical antenna high-gain, is keeping photosensitive structure noise substantially
It is horizontal under the premise of this, the strong fluorescence excitation of the tip position outgoing electron based on optical antenna with it is photosensitive, thus high-gain
The detectivity of ground raising visible light and infrared light.
6, the utility model on the one hand can be by the amplitude of adjusting external control signal, and realizing has photosensitive first output
Imitate signal adjusting, on the other hand, can by change external control signal polarity, realize change optical antenna closing and
Working condition, therefore the utility model has intelligent feature.
7, due to the utility model use accurately controlled optical antenna, with high structure, electricity and
The stability of electro-optical parameters, therefore the utility model has the characteristics that control is with high accuracy.
8, since the main body of the utility model is the optical antenna being encapsulated in chip carrier, phosphor film layer and photosensitive battle array
Column, by the electronics interface of setting, are conveniently inserted in the optical path, easily couple with normal optical photoelectric mechanical structure matching.
Detailed description of the invention
Fig. 1 is that the configuration of photosensitive imaging detection chip of the utility model based on sophisticated electronic fluorescent excitation in the optical path is shown
It is intended to；
Fig. 2 is to detect core according to a kind of photosensitive imaging based on sophisticated electronic fluorescent excitation of embodiment of the utility model
The detailed maps of piece；
Fig. 3 is the photosensitive imaging detection based on sophisticated electronic fluorescent excitation according to the utility model another kind implementation
The detailed maps of chip；
Fig. 4 is signal of the utility model based on optical antenna in the photosensitive imaging detection chip of sophisticated electronic fluorescent excitation
Figure；
Fig. 5 is the schematic diagram of the antenna element in the utility model optical antenna including four Nano pointed cones；
Fig. 6 (a) to (e) is the schematic diagram of different structure used by Nano pointed cone in the utility model optical antenna；
Fig. 7 is the encapsulating structure signal of photosensitive imaging detection chip of the utility model based on sophisticated electronic fluorescent excitation
Figure.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- optical antenna, 2- phosphor film layer, 3- light-sensitive array, 5- optical window, 6- electronics interface.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below
The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
On multiple functions material (such as common metal or semiconduction germanium silicon) surface, pass through the radiation of visible or infrared light
Excitation, can generate this effect of resonance qualitly surface wave；The surface wave that is made of surface electromagnetic wave and electric surface density wave or
Surface phasmon, effective transport distance maximum on functional material surface can reach tens micro-meter scales, meanwhile, in special knot
The light field resonance qualitly accumulation that structure surface is realized can be realized the luminous intensity transition of more than five magnitudes or more；With above-mentioned surface light
Intensity significant changes are mutually echoed, and variation on a large scale is presented in surface electronic distribution density, at this point, by applying external bias
Electric field or magnetic field can be realized the in vitro transmitting of the fine modulation and surface electronic of surface electronic distribution density, when these electricity
Son hits fluorescent material, and excitation generates stronger visible ray spectral domain fluorescence, it will be able to realize incident light amplification and infrared extremely may be used
Light-exposed frequency spectrum conversion.Meanwhile in order to greatly improve the photoelectric sensitivity of the visible-light detector of low cost, infrared light is turned
It changes to visible ray spectral domain and executes photodetection, the Intensity response range to strong optical signalling or weak optical signal can be extended, contract
Small photosensitive elemental size, expanded matrix scale improve spatial resolution.
The utility model provides a kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation, passes through optics
Surface " state of cruising " electronics is compressed in the tip position of Nano pointed cone by the resonance qualitly focal imaging light wave of antenna to high-density,
And by the way that from tip position launching electronics to phosphor film layer, excitation fluorescence executes photoelectric conversion.
Fig. 1 shows the configuration of photosensitive imaging detection chip of the utility model based on sophisticated electronic fluorescent excitation in the optical path
Schematic diagram, it can be seen that target weak optical signal after imaging optical system (it is usually exactly lens), become inclined at
As light beam is injected in photosensitive imaging detection chip.
One aspect according to the present utility model provides a kind of photosensitive imaging detection based on sophisticated electronic fluorescent excitation
Chip, including optical antenna disposed in parallel 1, phosphor film layer 2 and light-sensitive array 3, optical antenna 1 be by it is multiple to each other
Every and electrical connection antenna element (Antenna cell) composition array structure, phosphor film layer 2 be by it is multiple be spaced each other and electricity
The array structure of the fluorescent film member composition of connection, the array structure that light-sensitive array 3 is made of multiple photosensitive members being spaced each other,
The shape of optical antenna 1, phosphor film layer 2 and light-sensitive array 3 is identical, the complete phase of the size of phosphor film layer 2 and light-sensitive array 3
Together, the array scale (i.e. array elements quantity included by array) of three is just the same, and the antenna element of optical antenna 1, fluorescence
The photosensitive member of corresponding position is mutual in vertical direction in the fluorescence membrane element and light-sensitive array 3 of corresponding position in film layer 2
Alignment.One end of optical antenna 1 and one end of phosphor film layer 2 pass through metal contact wires respectively and are connected to external control signal Vs.
By the way that optical antenna, the stability with high structure, electricity and electro-optical parameters is arranged, therefore this is practical
It is novel to have the characteristics that control is with high accuracy.
It is divided between 50 to 500 nanometers between adjacent phosphor membrane element.
The antenna element of optical antenna 1 includes the Nano pointed cone that at least one top surface is electrically connected to each other, which uses
Pyramidal structure, top surface are curved-surface structure, and fluorescence membrane element is directed toward at the tip position of Nano pointed cone, and the cross section of the curved-surface structure can
To be round (shown in such as Fig. 6 (a)), ellipse, triangle (shown in such as Fig. 6 (b)), polygon (shown in such as Fig. 6 (c) to (e)).
Fig. 4 shows Nano pointed cone included in the utility model optical antenna, and the top of Nano pointed cone is each other by electricity
Connecting line realizes electrical connection, at the top of the Nano pointed cone be in figure it is round, but it is understood that its mesh merely for the sake of signal
, do not constitute the limitation to the utility model Nano pointed cone top shape.
The distance between tip position and the top surface of phosphor film layer of Nano pointed cone are between 150 nanometers to 700 nanometers, glimmering
The distance between bottom surface and light-sensitive array top surface of light film layer are between 100 nanometers to 800 nanometers.
Using the purpose of pyramidal structure, being will be after incident beam reaches antenna element, and the surface duct that is motivated is to taper
The tip of structure, and resonance qualitly is superimposed at tip, receives focusing to realize.
When the utility model is used for weak optical signal (i.e. based on the photosensitive imaging detection chip of sophisticated electronic fluorescent excitation
The power of optical signalling be micromicrowatt grade) detection when, at this time antenna element need include be greater than a Nano pointed cone, these nanometer of point
Evenly distributed (such as in a manner of equilateral triangle, rectangle, regular polygon etc.) is bored, and the particular number of the Nano pointed cone is at this time
It is determined by following two restrictive condition:
(1) the numerical lower limits value of the Nano pointed cone must enable photosensitive member to generate effective signal output；
(2) the upper limit of the number value of the Nano pointed cone must make all Nano pointed cones in individual antenna member evenly distributed
Afterwards, the overall dimension of the antenna element cannot be greater than the size of single photosensitive member.
The antenna element of the Nano pointed cone including four uniform arrangements (i.e. rectangular mode) is shown in FIG. 5.The Nano pointed cone
Top be round, a diameter of between 30 nanometers to 600 nanometers, the top center of two adjacent Nano pointed cones of horizontal direction
The distance between DbAnd the distance between vertically adjacent top center of two Nano pointed cones DaSize cannot surpass
Cross the size of its corresponding photosensitive member.
In fig. 3, it can be seen that an antenna element includes 2 Nano pointed cones, it should be appreciated that it is merely for the sake of signal
Purpose does not constitute the quantity of the utility model Nano pointed cone and limits.
In Fig. 2, it can be seen that an antenna element only includes a Nano pointed cone, at this point, the utility model is based on tip
The photosensitive imaging detection chip of electronic fluorescent excitation can be used for except weak optical signal (i.e. the power of optical signalling be micromicrowatt grade) with
The detection of other outer optical signallings.
Explained below in conjunction with Fig. 2 and Fig. 3 working principle of the utility model is:
Target weak optical signal (it can be visible light or infrared light) becomes after the imaging optical system by Fig. 1
At inclination imaging beam, obliquely when the antenna element surface of directive optical antenna, excitation generates surface wave, and surface wave is by antenna
The tip of member guiding Nano pointed cone, is realized by resonance superposition and receives focusing.By adjusting external control signal (when in Fig. 2 and Fig. 3
Phosphor film layer connect positive voltage, when top is grounded), electronics is overflowed from the tip of Nano pointed cone and directive fluorescence membrane element, is hitting
Visible light is issued after fluorescence membrane element, after the photosensitive member of each of radiation of visible light light-sensitive array being emitted from fluorescence membrane element, output
Effective photosignal；When external control signal is reversely connected (i.e. polarity reversion), since generation surface wave, light can not be motivated at this time
Antenna is learned to stop working.In the above-mentioned course of work, on the one hand the effect of fluorescence membrane element is to issue visible light (containing near-infrared
Light), it is on the other hand the wave spectrum conversion realized from infrared light to visible light.
Visible light and wide range infrared light, the utility model are collected since the utility model uses above-mentioned optical antenna
Detection chip can detect visible light and wide range infrared light simultaneously, thus realize wide range domain detection.
Further, surface wave is collected by the resonance qualitly surface electromagnetic excitation of optical antenna due to the utility model, from
And the amplification that can be realized micromicrowatt grade weak optical signal is collected, detectivity is high.
Further, the utility model realizes quick response and wave spectrum turns by using the mode of Electron Excitation fluorescence
It changes.
Further, the utility model is associated with by optical antenna surface electromagnetic wave with the coupling of electric surface density wave
Property, realize the automatically controlled adjusting to its surface " state of cruising " electronics distribution density, and then it is poly- to adjust receiving for its surface electromagnetic wave
Char strength.
Further, the utility model collects inclination imaging beam by optical antenna high-gain, is keeping photosensitive substantially
Structural noise is horizontal under the premise of this, the strong fluorescence excitation of the tip position outgoing electron based on optical antenna with it is photosensitive, from
And high-gain improve the detectivity of visible light and infrared light.
Further, on the one hand the utility model can be realized by the amplitude of adjusting external control signal to photosensitive member
On the other hand the adjusting of the useful signal of output can be realized by the polarity of change external control signal and change optical antenna
Closing and working condition, therefore the utility model have intelligent feature.
Fig. 7 shows the encapsulation signal of photosensitive imaging detection chip of the utility model based on sophisticated electronic fluorescent excitation
Figure, it can be seen that entire photosensitive imaging detection chip is encapsulated in inside chip carrier, chip carrier close to optical antenna 1 one
Optical window 5 is provided on a side, being used to indicate the side is to be provided with optical antenna 1, adjacent with optical window 5 another on chip carrier
It is provided with electronics interface 6 on one side, for connecing the photosensitive imaging detection chip of the utility model in a manner of grafting
Enter different light channel structures.
By be arranged electronics interface, it is conveniently inserted the utility model in the optical path, easily with normal optical photoelectric mechanical
Structure matching coupling.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (7)
1. a kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation, including optical antenna disposed in parallel, fluorescence
Film layer and light-sensitive array, which is characterized in that
The array structure that optical antenna is made of multiple antenna elements for being spaced each other and being electrically connected, phosphor film layer be by it is multiple that
The array structure of the fluorescent film member of this interval and electrical connection composition, light-sensitive array are made of multiple photosensitive members being spaced each other
Array structure；
Optical antenna, the shape of phosphor film layer and light-sensitive array and array scale are all the same；
Phosphor film layer is identical with the size of light-sensitive array；
Corresponding position in the fluorescence membrane element and light-sensitive array of corresponding position in the antenna element of optical antenna, phosphor film layer
Photosensitive member be mutually aligned in vertical direction；
The antenna element of optical antenna includes the Nano pointed cone that at least one top surface is electrically connected to each other, which uses taper knot
Structure, top surface are curved-surface structure, and fluorescence membrane element is directed toward at the tip position of Nano pointed cone；
One end of optical antenna and one end of phosphor film layer pass through metal contact wires respectively and are connected to external control signal.
2. photosensitive imaging detection chip according to claim 1, which is characterized in that when the photosensitive imaging detection chip quilt
When for detecting weak optical signal, the quantity of Nano pointed cone is greater than 1 in each antenna element, and these Nano pointed cones are uniform
Arrangement.
3. photosensitive imaging detection chip according to claim 2, which is characterized in that
The numerical lower limits value of the Nano pointed cone must enable photosensitive member to generate effective signal output；
After the upper limit of the number value of Nano pointed cone must make all Nano pointed cones in individual antenna member evenly distributed, the antenna element
Overall dimension cannot be greater than the size of single photosensitive member.
4. photosensitive imaging detection chip according to claim 1, which is characterized in that the cross section of Nano pointed cone top surface is round
Shape, ellipse, triangle or polygon.
5. photosensitive imaging detection chip according to claim 4, which is characterized in that when the cross section of Nano pointed cone top surface is
It is a diameter of between 30 nanometers to 600 nanometers when round.
6. photosensitive imaging detection chip according to claim 1, which is characterized in that
The distance between tip position and the top surface of phosphor film layer of Nano pointed cone are between 150 nanometers to 700 nanometers；
The distance between bottom surface and light-sensitive array top surface of phosphor film layer are between 100 nanometers to 800 nanometers；
It is divided between 50 to 500 nanometers between adjacent phosphor membrane element.
7. photosensitive imaging detection chip according to claim 1, which is characterized in that
The photosensitive imaging detection chip is encapsulated in inside chip carrier；
Chip carrier is provided with optical window on a side of optical antenna, is used to indicate the side and is provided with optical antenna；
It is provided with electronics interface on another side adjacent with optical window on chip carrier, for will be described in a manner of grafting
Photosensitive imaging detection chip accesses different light channel structures.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920146111.1U CN209372222U (en) | 2019-01-28 | 2019-01-28 | A kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920146111.1U CN209372222U (en) | 2019-01-28 | 2019-01-28 | A kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation |
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| CN209372222U true CN209372222U (en) | 2019-09-10 |
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| CN201920146111.1U Active CN209372222U (en) | 2019-01-28 | 2019-01-28 | A kind of photosensitive imaging detection chip based on sophisticated electronic fluorescent excitation |
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