CN209470780U - A kind of imaging detection chip of coupled optical antennas - Google Patents
A kind of imaging detection chip of coupled optical antennas Download PDFInfo
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- CN209470780U CN209470780U CN201920145458.4U CN201920145458U CN209470780U CN 209470780 U CN209470780 U CN 209470780U CN 201920145458 U CN201920145458 U CN 201920145458U CN 209470780 U CN209470780 U CN 209470780U
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Abstract
The utility model discloses a kind of imaging detection chips of coupled optical antennas, including optical antenna disposed in parallel and light-sensitive array, the array structure that optical antenna is made of multiple antenna elements for being spaced each other and being electrically connected, the array structure that light-sensitive array is made of multiple photosensitive members for being spaced each other and being electrically connected, optical antenna is identical with the array scale of light-sensitive array, the antenna element of optical antenna, and the photosensitive member of corresponding position is mutually aligned in vertical direction in light-sensitive array, the antenna element of optical antenna includes the Nano pointed cone that at least one top surface is electrically connected to each other.The imaging detection chip of the coupled optical antennas of the utility model has the advantages that imaging light collection efficiency is high, and significantly improves photoelectric sensitivity by integrated optics antenna and light-sensitive array, and be suitable for visible light and infrared spectral domain.
Description
Technical field
The utility model belongs to optical imagery detection technology field, more particularly, to a kind of coupled optical antennas at
As detection chip.
Background technique
Currently, photosensitive imaging array as light-sensitive detector, has obtained extremely wide application in every field.Often
The photosensitive imaging array seen includes photon detector and two kinds of thermal detector, and photon detector includes visible-light detector
(common is cmos device) and infrared detector (common is FPAs) two types.Visible-light detector is used primarily in civilian neck
Domain, detectable minimum optical power is also down to nanowatt grade；Infrared detector is used primarily in military domain, and cost is relatively high
It is high；Thermal detector is to absorb to generate the work of this hot-probing mode with photosignal based on low-grade fever.
However, there are some very important technical problems for existing photosensitive imaging array: the first, existing photosensitive imaging
Array is insufficient in the weak optical signal detectivity of micromicrowatt grade power for power；The second, photon detector can not detect simultaneously
Visible light and infrared light；Although third, thermal detector can detect visible light and infrared light simultaneously, its detectivity compares photon
At least one low magnitude of detector, and speed of detection is slow.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, the utility model provide a kind of coupled optical antennas at
As detection chip, it is intended that solving above-mentioned technical problem present in existing photosensitive imaging array, the coupling of the utility model
Close optical antenna imaging detection chip have the advantages that be imaged light collection efficiency it is high, and pass through integrated optics antenna with it is photosensitive
Array significantly improves photoelectric sensitivity, and is suitable for visible light and infrared spectral domain.
To achieve the above object, according to the one aspect of the utility model, a kind of imaging of coupled optical antennas is provided
Detection chip, including optical antenna disposed in parallel and light-sensitive array, optical antenna are spaced each other and are electrically connected by multiple
The array structure of antenna element composition, the array structure that light-sensitive array is made of multiple photosensitive members being spaced each other, neighboring photosensitive
It is divided between 50 to 500 nanometers between member, optical antenna is identical with the array scale of light-sensitive array, the antenna of optical antenna
The photosensitive member of corresponding position is mutually aligned in vertical direction in member and light-sensitive array, and the antenna element of optical antenna includes
The Nano pointed cone that at least one top surface is electrically connected to each other, the Nano pointed cone use pyramidal structure, and top surface is curved-surface structure, optics
One end of antenna and one end of light-sensitive array pass through metal contact wires respectively and are connected to external control signal.
Preferably, when the photosensitive imaging detection chip be used to detect weak optical signal, nanometer in each antenna element
The quantity of pointed cone is greater than 1, and these Nano pointed cones are evenly distributed.
Preferably, the numerical lower limits value of the Nano pointed cone must enable photosensitive member to generate effective signal output, receive
After the upper limit of the number value of rice pointed cone must make all Nano pointed cones in individual antenna member evenly distributed, the totality of the antenna element
Size cannot be greater than the size of single photosensitive member.
Preferably, the cross section of Nano pointed cone top surface is round, oval, triangle or polygon.
Preferably, a diameter of between 30 nanometers to 600 nanometers when the cross section of Nano pointed cone top surface is circle.
Preferably, the distance between the tip portion of Nano pointed cone and light-sensitive array top surface be 10 nanometers to 60 nanometers it
Between.
Preferably, the photosensitive imaging detection chip is encapsulated in inside chip carrier, and chip carrier is close to optical antenna
A side on be provided with optical window, be used to indicate the side and be provided with optical antenna, it is adjacent with optical window another on chip carrier
Electronics interface is provided on a side, for the photosensitive imaging detection chip to be accessed different optical paths in a manner of grafting
Structure.
Preferably, when the imaging detection chip is for detecting visible or infrared light for the moment, light-sensitive array uses light
Sub- detector, when the imaging detection chip is used for while detecting visible light and infrared light, light-sensitive array uses thermal detector.
In general, it can obtain down the above technical solutions conceived by the present invention are compared with the prior art,
Column the utility model has the advantages that
1, surface wave is collected by the resonance qualitly surface electromagnetic excitation of optical antenna due to the utility model, so as to reality
The amplification of existing micromicrowatt grade weak optical signal is collected, and detectivity is high；
2, when the light-sensitive array of the utility model uses thermal detector, optical antenna collects visible light and wide range is infrared
Light, therefore the detection chip of the utility model can detect visible light and wide range infrared light simultaneously, to realize the spy of wide range domain
It surveys；
3, when the light-sensitive array of the utility model uses photon type detection array, optical antenna collects visible light or infrared
The detection chip of light, the utility model can detect visible or infrared light with fast response speed.
4, the utility model passes through the coupling relevance of optical antenna surface electromagnetic wave and electric surface density wave, realization pair
The automatically controlled adjusting of its surface " state of cruising " electronics distribution density, and then the focus strength of receiving of its surface electromagnetic wave can be adjusted；
5, the utility model collects inclination imaging beam by optical antenna high-gain, is keeping photosensitive structure noise substantially
It is horizontal under the premise of this, it is photosensitive at the tip portion based on optical antenna, high-gain it can improve visible light and infrared light
Detectivity；
6, the utility model on the one hand can be by the amplitude of adjusting external control signal, and realizing has photosensitive first output
Imitate signal adjusting, on the other hand, can by change external control signal polarity, realize change optical antenna closing and
Working condition, therefore the utility model has intelligent feature；
7, due to the utility model use accurately controlled optical antenna, with high structure, electricity and
The stability of electro-optical parameters, therefore the utility model has the characteristics that control is with high accuracy；
8, since the main body of the utility model is the optical antenna and light-sensitive array being encapsulated in chip carrier, pass through setting
Electronics interface, be conveniently inserted, easily coupled with normal optical photoelectric mechanical structure matching in the optical path.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the imaging detection chip of the utility model coupled optical antennas in the optical path；
Fig. 2 is according to a kind of detailed signal of the imaging detection chip of the coupled optical antennas of embodiment of the utility model
Figure；
Fig. 3 is shown according to the detailed of imaging detection chip of the coupled optical antennas of the utility model another kind implementation
It is intended to；
Fig. 4 is the schematic diagram of optical antenna in the imaging detection chip of the utility model coupled optical antennas；
Fig. 5 is the schematic diagram of the antenna element in the utility model optical antenna including four Nano pointed cones；
Fig. 6 (a) to (e) is the schematic diagram of different structure used by Nano pointed cone in the utility model optical antenna；
Fig. 7 is the package structure diagram of the imaging detection chip of the utility model coupled optical antennas.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- optical antenna, 2- light-sensitive array, 4- optical window, 5- electronics interface.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below
The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
On multiple functions material (such as common metal or semiconduction germanium silicon) surface, pass through the radiation of visible or infrared light
Excitation, can generate this effect of resonance qualitly surface wave；The surface wave that is made of surface electromagnetic wave and electric surface density wave or
Surface phasmon, effective transport distance maximum on functional material surface can reach tens micro-meter scales, meanwhile, in special knot
The light field resonance qualitly accumulation that structure surface is realized can be realized the luminous intensity transition of more than five magnitudes or more；With above-mentioned surface light
Intensity significant changes are mutually echoed, and variation on a large scale is presented in surface electronic distribution density, at this point, by applying external bias
Electric field or magnetic field can be realized the fine modulation of surface electronic distribution density.The utility model is intended to greatly improve low cost
The photoelectric sensitivity of visible-light detector extends the Intensity response range to strong optical signalling or weak optical signal, reduces photosensitive
Elemental size, expanded matrix scale improve spatial resolution.
The utility model provides a kind of imaging detection chip of coupled optical antennas, passes through the resonance qualitly of optical antenna
Surface " state of cruising " electronics is compressed in the tip portion of Nano pointed cone, to significantly improve by focal imaging light wave to high-density
Photoelectric sensitivity.
Fig. 1 shows the configuration schematic diagram of the imaging detection chip of the utility model coupled optical antennas in the optical path, can be with
Target weak optical signal is seen after imaging optical system (it is usually exactly lens), the imaging beam incident light become inclined
In quick imaging detection chip.
One aspect according to the present utility model provides a kind of imaging detection chip of coupled optical antennas, including flat
The optical antenna 1 and light-sensitive array 2 of row setting, optical antenna 1 is by multiple antenna elements for being spaced each other and being electrically connected
The array structure of (Antenna cell) composition, light-sensitive array 2 are made of multiple photosensitive members for being spaced each other and being electrically connected
The shape of array structure, optical antenna 1 and light-sensitive array 2 is identical, array scale (the i.e. array included by array of the two
First quantity) it is just the same, and in the antenna element of optical antenna 1 and light-sensitive array 2 corresponding position photosensitive member in Vertical Square
It is mutually aligned upwards.One end of optical antenna 1 and one end of light-sensitive array 2 pass through metal contact wires respectively and are connected to external control
Signal Vs.
When the utility model is for detecting visible or infrared light for the moment, light-sensitive array 2 uses photon detector, and works as
When the utility model is used for while detecting visible light and infrared light, light-sensitive array 2 uses thermal detector.
By the way that optical antenna, the stability with high structure, electricity and electro-optical parameters is arranged, therefore this is practical
It is novel to have the characteristics that control is with high accuracy.
It is divided between 50 to 500 nanometers between neighboring photosensitive member.
The antenna element of optical antenna 1 includes the Nano pointed cone that at least one top surface is electrically connected to each other, which uses
Pyramidal structure, top surface are curved-surface structure, the cross section of the curved-surface structure can be round (shown in such as Fig. 6 (a)), ellipse,
Triangle (shown in such as Fig. 6 (b)), polygon (shown in such as Fig. 6 (c) to (e)).
Fig. 4 shows Nano pointed cone included in the utility model optical antenna, and the top of Nano pointed cone is each other by electricity
Connecting line realizes electrical connection, at the top of the Nano pointed cone is rectangle in figure, but it is understood that its mesh merely for the sake of signal
, do not constitute the limitation to the utility model Nano pointed cone top shape.
The distance between the tip portion of Nano pointed cone and light-sensitive array top surface (i.e. near field spacing) are 10 nanometers and receive to 60
Between rice.
Using the purpose of pyramidal structure, being will be after incident beam reaches antenna element, and the surface duct that is motivated is to taper
The tip of structure, and resonance qualitly is superimposed at tip, receives focusing to realize.
When the imaging detection chip of the utility model coupled optical antennas is used for weak optical signal (the i.e. function of optical signalling
Rate is micromicrowatt grade) detection when, antenna element needs to include being greater than a Nano pointed cone at this time, these Nano pointed cones are evenly distributed
(such as in a manner of equilateral triangle, rectangle, regular polygon etc.), and the particular number of the Nano pointed cone is by following two at this time
Restrictive condition is determined:
(1) the numerical lower limits value of the Nano pointed cone must enable photosensitive member to generate effective signal output；
(2) the upper limit of the number value of the Nano pointed cone must make all Nano pointed cones in individual antenna member evenly distributed
Afterwards, the overall dimension of the antenna element cannot be greater than the size of single photosensitive member.
The antenna element of the Nano pointed cone including four uniform arrangements (i.e. rectangular mode) is shown in FIG. 5.The Nano pointed cone
Top be rectangle, the distance between two adjacent Nano pointed cones of horizontal direction Db(i.e. with the sum of two Nano pointed cone length b
Db+ 2b) and the distance between two vertically adjacent Nano pointed cones DaWith the sum of two Nano pointed cone height a (i.e. Da+
2a), no more than the size of its corresponding photosensitive member.
In fig. 3, it can be seen that an antenna element includes 2 Nano pointed cones, it should be appreciated that it is merely for the sake of signal
Purpose does not constitute the quantity of the utility model Nano pointed cone and limits.
In Fig. 2, it can be seen that an antenna element only includes a Nano pointed cone, at this point, the utility model coupling optical
The imaging detection chip of antenna can be used for other optics in addition to weak optical signal (i.e. the power of optical signalling is micromicrowatt grade)
The detection of signal.
Explained below in conjunction with Fig. 2 and Fig. 3 working principle of the utility model is:
The weak lightwave signal of target (it can be visible light or infrared light) becomes after the imaging optical system by Fig. 1
At inclination imaging beam, obliquely when the antenna element surface of directive optical antenna, so that generation surface wave is motivated, surface wave quilt
Antenna element is oriented to the tip of Nano pointed cone, is realized by resonance superposition and receives focusing.By adjust external control signal (as Fig. 2 and
Light-sensitive array in Fig. 3 connects positive voltage, when top is grounded), the electron density wave on optical antenna surface can be adjusted, and then to receiving
Light wave is focused to be adjusted；When external control signal is reversely connected (i.e. polarity reversion), since generation surface wave can not be motivated at this time,
Optical antenna stops working.
Visible light and wide range infrared light, the utility model are collected since the utility model uses above-mentioned optical antenna
Detection chip can detect visible light and wide range infrared light simultaneously, thus realize wide range domain detection.
Further, surface wave is collected by the resonance qualitly surface electromagnetic excitation of optical antenna due to the utility model, from
And the amplification that can be realized micromicrowatt grade weak optical signal is collected, detectivity is high.
Further, the utility model is associated with by optical antenna surface electromagnetic wave with the coupling of electric surface density wave
Property, realize the automatically controlled adjusting to its surface " state of cruising " electronics distribution density, and then it is poly- to adjust receiving for its surface electromagnetic wave
Char strength.
Further, the utility model collects inclination imaging beam by optical antenna high-gain, is keeping photosensitive substantially
Structural noise is horizontal under the premise of this, photosensitive at the tip portion based on optical antenna, can improve visible light to high-gain
With the detectivity of infrared light.
Further, on the one hand the utility model can be realized by the amplitude of adjusting external control signal to photosensitive member
On the other hand the adjusting of the useful signal of output can be realized by the polarity of change external control signal and change optical antenna
Closing and working condition, therefore the utility model have intelligent feature.
Fig. 7 shows the encapsulation schematic diagram of the imaging detection chip of the utility model coupled optical antennas, it can be seen that whole
A photosensitive imaging detection chip is encapsulated in inside chip carrier, and chip carrier is arranged on a side of optical antenna 1
There is optical window 4, being used to indicate the side is to be provided with optical antenna 1, is set on another side adjacent with optical window 4 on chip carrier
It is equipped with electronics interface 5, for the photosensitive imaging detection chip of the utility model to be accessed different optical paths in a manner of grafting
Structure.
By be arranged electronics interface, it is conveniently inserted the utility model in the optical path, easily with normal optical photoelectric mechanical
Structure matching coupling.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (8)
1. a kind of imaging detection chip of coupled optical antennas, including optical antenna disposed in parallel and light-sensitive array, feature
It is,
The array structure that optical antenna is made of multiple antenna elements for being spaced each other and being electrically connected, light-sensitive array be by it is multiple that
This interval it is photosensitive member composition array structure, neighboring photosensitive member between be divided between 50 to 500 nanometers；
Optical antenna is identical with the array scale of light-sensitive array；
The photosensitive member of corresponding position is mutually aligned in vertical direction in the antenna element and light-sensitive array of optical antenna；
The antenna element of optical antenna includes the Nano pointed cone that at least one top surface is electrically connected to each other, which uses taper knot
Structure, top surface are curved-surface structure；
One end of optical antenna and one end of light-sensitive array pass through metal contact wires respectively and are connected to external control signal.
2. imaging detection chip according to claim 1, which is characterized in that when the imaging detection chip be used to detect
When weak optical signal, the quantity of Nano pointed cone is greater than 1 in each antenna element, and these Nano pointed cones are evenly distributed.
3. imaging detection chip according to claim 2, which is characterized in that
The numerical lower limits value of Nano pointed cone must enable photosensitive member to generate effective signal output；
After the upper limit of the number value of Nano pointed cone must make all Nano pointed cones in individual antenna member evenly distributed, the antenna element
Overall dimension cannot be greater than the size of single photosensitive member.
4. imaging detection chip according to claim 1, which is characterized in that the cross section of Nano pointed cone top surface be it is round,
Ellipse, triangle or polygon.
5. imaging detection chip according to claim 4, which is characterized in that when the cross section of Nano pointed cone top surface is round
When, it is a diameter of between 30 nanometers to 600 nanometers.
6. imaging detection chip according to claim 1, which is characterized in that the tip portion and light-sensitive array of Nano pointed cone
The distance between top surface is between 10 nanometers to 60 nanometers.
7. imaging detection chip according to claim 1, which is characterized in that
The imaging detection chip is encapsulated in inside chip carrier；
Chip carrier is provided with optical window on a side of optical antenna, is used to indicate the side and is provided with optical antenna；
It is provided with electronics interface on another side adjacent with optical window on chip carrier, for will be described in a manner of grafting
Imaging detection chip accesses different light channel structures.
8. imaging detection chip according to claim 1, which is characterized in that
When the imaging detection chip is for detecting visible or infrared light for the moment, light-sensitive array uses photon detector；
When the imaging detection chip is used for while detecting visible light and infrared light, light-sensitive array uses thermal detector.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920145458.4U CN209470780U (en) | 2019-01-28 | 2019-01-28 | A kind of imaging detection chip of coupled optical antennas |
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| CN201920145458.4U CN209470780U (en) | 2019-01-28 | 2019-01-28 | A kind of imaging detection chip of coupled optical antennas |
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| CN209470780U true CN209470780U (en) | 2019-10-08 |
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