CN209282181U - 一种晶圆倒片机的盘和盘盖分离装置 - Google Patents
一种晶圆倒片机的盘和盘盖分离装置 Download PDFInfo
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112420581A (zh) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | 一种自动下片机 |
CN112420578A (zh) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | 一种晶圆自动下片用取放装置 |
CN113299576A (zh) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | 一种薄膜机械分离装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113299576A (zh) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | 一种薄膜机械分离装置 |
CN112420581A (zh) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | 一种自动下片机 |
CN112420578A (zh) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | 一种晶圆自动下片用取放装置 |
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Address after: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Forsyte Robot Co.,Ltd. Address before: Room 305-308, Kaike International Building, Area A, 1801 Hongmei Road, Xuhui District, Shanghai, 2003 Patentee before: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. |
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Address after: 201712 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Fosaite Technology Co.,Ltd. Country or region after: China Address before: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee before: Shanghai Forsyte Robot Co.,Ltd. Country or region before: China |
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