CN207828407U - 一种真空镀膜用集成腔室 - Google Patents
一种真空镀膜用集成腔室 Download PDFInfo
- Publication number
- CN207828407U CN207828407U CN201721734153.4U CN201721734153U CN207828407U CN 207828407 U CN207828407 U CN 207828407U CN 201721734153 U CN201721734153 U CN 201721734153U CN 207828407 U CN207828407 U CN 207828407U
- Authority
- CN
- China
- Prior art keywords
- chamber
- hermatic door
- vacuum coating
- partition board
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721734153.4U CN207828407U (zh) | 2017-12-13 | 2017-12-13 | 一种真空镀膜用集成腔室 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721734153.4U CN207828407U (zh) | 2017-12-13 | 2017-12-13 | 一种真空镀膜用集成腔室 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN207828407U true CN207828407U (zh) | 2018-09-07 |
Family
ID=63386072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201721734153.4U Active CN207828407U (zh) | 2017-12-13 | 2017-12-13 | 一种真空镀膜用集成腔室 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN207828407U (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107858666A (zh) * | 2017-12-13 | 2018-03-30 | 北京创昱科技有限公司 | 一种真空镀膜用集成腔室 |
CN109487201A (zh) * | 2019-01-09 | 2019-03-19 | 周俊满 | 一种金属工件渗碳炉 |
CN109681652A (zh) * | 2018-12-21 | 2019-04-26 | 东泰高科装备科技有限公司 | 门阀组件及真空镀膜设备 |
CN112775388A (zh) * | 2021-01-29 | 2021-05-11 | 诸暨虹茂重工机械有限公司 | 用于锻造加热炉的旋转组件 |
CN113754302A (zh) * | 2020-10-27 | 2021-12-07 | 湖南旗滨节能玻璃有限公司 | 玻璃镀膜传送***及方法 |
CN114134465A (zh) * | 2021-11-24 | 2022-03-04 | 成都中建材光电材料有限公司 | 一种提高光伏组件用蒸镀设备稼动率的方法和装置 |
CN114412752A (zh) * | 2022-03-28 | 2022-04-29 | 常州铭赛机器人科技股份有限公司 | 分段式真空作业设备及其使用方法 |
CN115612981A (zh) * | 2021-07-16 | 2023-01-17 | 鑫天虹(厦门)科技有限公司 | 双层式遮蔽构件及具有双层式遮蔽构件的薄膜沉积机台 |
-
2017
- 2017-12-13 CN CN201721734153.4U patent/CN207828407U/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107858666A (zh) * | 2017-12-13 | 2018-03-30 | 北京创昱科技有限公司 | 一种真空镀膜用集成腔室 |
CN109681652A (zh) * | 2018-12-21 | 2019-04-26 | 东泰高科装备科技有限公司 | 门阀组件及真空镀膜设备 |
CN109487201A (zh) * | 2019-01-09 | 2019-03-19 | 周俊满 | 一种金属工件渗碳炉 |
CN113754302A (zh) * | 2020-10-27 | 2021-12-07 | 湖南旗滨节能玻璃有限公司 | 玻璃镀膜传送***及方法 |
CN112775388A (zh) * | 2021-01-29 | 2021-05-11 | 诸暨虹茂重工机械有限公司 | 用于锻造加热炉的旋转组件 |
CN115612981A (zh) * | 2021-07-16 | 2023-01-17 | 鑫天虹(厦门)科技有限公司 | 双层式遮蔽构件及具有双层式遮蔽构件的薄膜沉积机台 |
CN114134465A (zh) * | 2021-11-24 | 2022-03-04 | 成都中建材光电材料有限公司 | 一种提高光伏组件用蒸镀设备稼动率的方法和装置 |
CN114412752A (zh) * | 2022-03-28 | 2022-04-29 | 常州铭赛机器人科技股份有限公司 | 分段式真空作业设备及其使用方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN207828407U (zh) | 一种真空镀膜用集成腔室 | |
CN107858666A (zh) | 一种真空镀膜用集成腔室 | |
CN202597725U (zh) | 一种料封式翻板阀 | |
CN209937218U (zh) | 高效蒸养釜 | |
CN108120242A (zh) | 一种用于生产聚合氯化铝的滚筒烘干设备 | |
CN109132036A (zh) | 一种具有降温及除杂功能的编织袋封口装置 | |
CN209209908U (zh) | 一种中部下料的风动溜槽装置 | |
CN115321035B (zh) | 一种集装箱及制氢*** | |
CN215487695U (zh) | 一种新型节能双翻板锁风阀 | |
JP5749397B2 (ja) | 高炉の装入装置用の扉及びバルブアッセンブリ | |
CN206027672U (zh) | 耐真空、耐高温衬氟设备 | |
CN208991701U (zh) | 一种侧拉门密封式工业微波烘干设备 | |
CN209977296U (zh) | 一种用于飞灰输送的新型插板阀 | |
CN211594251U (zh) | 一种新型锁风装置 | |
CN208761024U (zh) | 一种具有降温及除杂功能的编织袋封口装置 | |
CN208075281U (zh) | 集成冷冻站及空调*** | |
CN209726891U (zh) | 一种钢铁厂余热回收利用装置 | |
CN210623625U (zh) | 一种大型高温高真空双闸板阀 | |
CN106995874A (zh) | 一种立式真空炉用自动吊挂工装 | |
CN207261681U (zh) | 电液推杆控制的通风蝶阀 | |
CN201739528U (zh) | 双驱动冲管阀 | |
CN206839399U (zh) | 水循环控制装置及包含其的焊接机器人 | |
CN212404014U (zh) | 一种复合炉熄焦设备兰炭密封出料*** | |
CN219670596U (zh) | 用于锂矿石的焙烧装置 | |
CN207864662U (zh) | 一种新型双层双门锁风卸灰阀锁风密封装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP03 | Change of name, title or address |
Address after: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: BEIJING CHUANGYU TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191125 Address after: 518112 Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen yongshenglong Technology Co.,Ltd. Address before: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210302 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen, Guangdong 518112 Patentee before: Shenzhen yongshenglong Technology Co.,Ltd. |
|
TR01 | Transfer of patent right |