CN207787974U - A kind of laser processing and focus fixing device based on CCD imagings - Google Patents
A kind of laser processing and focus fixing device based on CCD imagings Download PDFInfo
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- CN207787974U CN207787974U CN201721486781.5U CN201721486781U CN207787974U CN 207787974 U CN207787974 U CN 207787974U CN 201721486781 U CN201721486781 U CN 201721486781U CN 207787974 U CN207787974 U CN 207787974U
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Abstract
The utility model is related to technical field of laser processing, a kind of laser processing being imaged based on CCD and focus fixing device are in particular disclosed.The present apparatus includes laser, beam-expanding system, scanning galvanometer, beam splitting system, focus lamp and focusing system.Laser comes with instruction feux rouges.Beam splitting system be used to indicate feux rouges workpiece surface reflected light back into focusing system.Focusing system realizes focusing for judging focal position and controlling focus lamp position.The utility model utilizes the instruction feux rouges that laser carries, and being switched fast for machining state and focus state is realized by the beam splitting system of an adjustable angle；By directly adjusting focus lamp position change imaging definition, and then realize focusing.Not only small, simple in structure but also easily operated to processing light path impact, Focus accuracy is high；Scene fixed-focus can be achieved, substantially increase processing efficiency.
Description
Technical field
This application involves technical field of laser processing more particularly to a kind of laser processings and fixed-focus dress based on CCD imagings
It sets.
Background technology
It is machined compared to tradition, laser processing is used as a kind of noncontact procession, without " cutter " abrasion, without " cutting
Power " acts on workpiece, has many advantages, such as that energy is high, process velocity is fast, heat affected area is small.Therefore be widely used in mold manufacturing,
The industries such as automobile, aerospace, electronic circuit, power and energy and medical instruments and equipment manufacture.General laser processing system
In system, the light beam that laser is sent out needs just to can be used for processing after focus lamp converges at a bit (i.e. focus).Laser spot
With at a distance from working face be defocusing amount, which determine the sizes of working face laser power density.Defocusing amount selection is improper, not only can
Cause capacity usage ratio low, the waste of the energy；The quality of processing can also be influenced.Due to different materials to the absorptivity of laser not
Defocusing amount required by same, different processing technologies is also different, therefore during actual processing, to be carried out to the defocusing amount of system
It adjusts.
It determines defocusing amount, first has to the position for determining laser spot.Existing focal position determines that method is broadly divided into
Two classes：First, one is burnt on millboard or resin plate from low to high continuously near focal point with low-power continuous laser
Trace, the thickness for comparing cut change to determine the position of laser spot；Second is that with high power pulse laser near focal point by
It is low to high to get keyhole according to certain intervals on the steel plate, compare the size of keyhole to determine the position of laser spot.Above two
Kind of method it is complicated for operation, measurement accuracy is low, is not suitable for live focusing, greatly reduces processing efficiency.Especially for tool
There are the part of complex-curved structure or the processing environment of high temperature, high radiation, needs frequently to change defocusing amount and can not short distance
Focusing.
Chinese patent publication No. is that the patent of " 104128332 A of CN " discloses a kind of swashing with Focus tracking function
Light cleaning machine, Focus tracking system include focus measurement unit and feedback display unit, can measure and show that cleaning head is defeated
The distance between the laser spot gone out and workpiece value.But the utility model is to adjust laser power according to the focal length measured
Meet process requirements, focusing that can not be intuitive and convenient.Chinese patent publication No. is the patent disclosure of " 103056517 A of CN "
A kind of three-dimensional laser cleaning device, the device include one and are made of filter, micro-imaging lens, CCD and processor
Focal position adjustment device, it can be achieved that focal position of laser Field adjustment.But the utility model has the following disadvantages：When
It needs focus lamp exchanging position with focal position adjustment device in focussing process, system structure is complicated and is easily reduced original optical path
Stability；Second is that, it is difficult to when ensureing that micro-imaging lens are identical with the focal length of focus lamp, and focusing imaging optical path with plus
Work light path forms an angle, and causes the error on measuring.
Utility model content
This application provides a kind of laser processing and focus fixing devices, can not be intuitive and convenient to solve device in the prior art
And accurately focusing, while realizing focusing and the convenient switching of machining state.
In view of this, the utility model provides technical solution below：
A kind of laser processing and focus fixing device, include at least：Laser for emitting laser beam；For swashing to described
The beam-expanding system that light beam is expanded and collimated；For changing the scanning galvanometer of the position of the laser beam；For swashing described
The focus lamp that light beam is converged；The laser beam of the laser transmitting is expanded by the beam-expanding system and collimates it
Afterwards, and then change direction by the scanning galvanometer to be focused into the focus lamp 7；The laser is red with indicating
Light；
Described device further includes for judging focal position and controlling the focusing system for realizing focusing in the position of the focus lamp
System；For will indicate feux rouges workpiece surface reflected light back into focusing system beam splitting system；The beam splitting system setting
Between the scanning galvanometer and the focus lamp；The beam splitting system includes spectroscope and rotating mechanism；The spectroscope one
End is fixed on the rotating mechanism；
The instruction feux rouges passes sequentially through the beam-expanding system, scanning galvanometer, beam splitting system, focus lamp and reaches workpiece table
Face；
The instruction feux rouges enters the focusing system in the reflected light of workpiece surface by the spectroscope.
Further, the focusing system is made of optical filter, CCD, processor and displacement controller, the optical filter and
The central coaxial of the CCD is arranged, and is vertically arranged with the primary optical axis where the laser beam, the CCD and processor electricity
Connection, the processor are electrically connected with the displacement controller, and the displacement controller is used to adjust the position of the focus lamp.
Further, the spectroscope is rotated around one end of the rotating mechanism, and the rotation angle is 45 °.
Further, the spectroscope realizes that transflection, transflection ratio are 1 by plated film to instruction feux rouges:1.
Further, the laser is equipped with switch one and switch two；The switch one is described for emitting and closing
Indicate feux rouges；The switch two is for emitting and closing the laser beam.
Further, the optical filter only allows to indicate that feux rouges passes through.
Further, the beam splitting system has focus state and machining state；When the spectroscope rotate to primary optical axis
It is focus state when angle at 45 °；It is machining state when the spectroscope is parallel with primary optical axis.
Technical solution provided by the present application includes following advantageous effects：The utility model utilizes the finger that laser carries
Show feux rouges, will indicate that feux rouges is imaged in the reflected light of workpiece surface on CCD by the spectroscope of adjustable angle, adjust focus lamp
Position keep imaging most clear, focus is located at workpiece surface at this time, completes focusing.The beam splitting of instruction light is realized using spectroscope,
It is small, simple in structure to processing light path impact；Focus lamp position change imaging definition is directly adjusted, and then realizes focusing, is easy to
Operation, and precision is high；Machining state and focus state switch speed are fast, are independent of each other, and can carry out live focusing, substantially increase
Processing efficiency.
Description of the drawings
In order to illustrate more clearly of the technical solution of the application, letter will be made to attached drawing needed in the embodiment below
Singly introduce, it should be apparent that, for those of ordinary skills, without having to pay creative labor,
Other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram of a kind of laser processing and focus fixing device provided by the embodiments of the present application；
Fig. 2 is beam splitting system structural schematic diagram in a kind of laser processing provided by the embodiments of the present application and focus fixing device；
Fig. 3 is the flowage structure schematic diagram of a kind of laser processing and fixed-focus method provided by the embodiments of the present application；
Fig. 4 is the flow of the focusing system focussing process of a kind of laser processing provided by the embodiments of the present application and fixed-focus method
Structural schematic diagram.
Reference sign：
Wherein：1, laser；2, beam-expanding system；3, laser beam；4, scanning galvanometer；5, feux rouges is indicated；6, beam splitting system；7、
Focus lamp；8, focusing system；9, optical filter；10、CCD；11, processor；12, displacement controller；13, spectroscope；14, whirler
Structure；15, workpiece surface.
Specific implementation mode
The drawings herein are incorporated into the specification and forms part of this specification, and shows the implementation for meeting the application
Example, and the principle together with specification for explaining the application.
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, for those of ordinary skill in the art
Speech, without creative efforts, other drawings may also be obtained based on these drawings.
Embodiment one
Referring to Fig. 1, the utility model embodiment provides a kind of laser processing and focus fixing device, includes at least：For
Emit the laser 1 of laser beam 3；Beam-expanding system 2 for the laser beam 3 to be expanded and collimated；For changing described
The scanning galvanometer 4 of the position of laser beam；Focus lamp 7 for converging the laser beam 3；The laser transmitting swashs
After light beam 3 is expanded and collimated by the beam-expanding system 2, and then direction is changed by the scanning galvanometer 4 and enters institute
Focus lamp 7 is stated to be focused；The laser 1 is with instruction feux rouges 5；
Described device further includes for judging focal position and controlling the focusing system for realizing focusing in the position of the focus lamp 7
System 8；For will indicate feux rouges 5 workpiece surface 15 reflected light back into focusing system 8 beam splitting system 6；The light splitting system
System 6 is set between the scanning galvanometer 4 and the focus lamp 7；The beam splitting system 6 includes spectroscope 13 and rotating mechanism
14；13 one end of the spectroscope is fixed on the rotating mechanism 14；
The instruction feux rouges 5 passes sequentially through the beam-expanding system 2, scanning galvanometer 4, beam splitting system 6, focus lamp 7 and reaches work
Part surface 15；
The instruction feux rouges 5 enters the focusing system 8 in the reflected light of workpiece surface 15 by the spectroscope 13.
Specifically, position of the scanning galvanometer 4 for changing laser on x/y plane.Beam splitting system 6 will be for that will refer to
Show feux rouges 5 workpiece surface 15 reflected light back into focusing system 8.Focusing system 8 is for judging focal position and controlling poly-
Realize focusing in position of the burnt mirror 7 in z-axis.
In the present embodiment, the included instruction feux rouges 5 of the laser 1, the instruction feux rouges 5 are coaxial with laser beam 3.It is described
Beam-expanding system 2 is for expansion of laser light beam diameter and transforms it into directional light.
The structure of the accurate focus fixing device provided further below the utility model embodiment is introduced.
Referring to Fig. 1 and Fig. 2, beam splitting system 6 includes spectroscope 13 and rotating mechanism 14, and one as the utility model is excellent
Select embodiment, the spectroscope 13 semi-transparent semi-reflecting to instruction feux rouges 5, transflection ratio is 1:1, one end of which is fixed on rotating mechanisms 14
On, it can be rotated around rotary shaft (x-axis) angle at 45 °.Primary optical axis at 45 ° angle of the spectroscope 13 where with laser beam 3 when focusing,
Instruction feux rouges 5 for workpiece surface 15 to be reflected back is reflected into focusing system 8.
As a preferred embodiment of the utility model, the beam splitting system 6 has focus state and machining state；Work as institute
It is focus state when stating the rotation of spectroscope 13 to angle at 45 ° with primary optical axis；When the spectroscope 13 is parallel with primary optical axis, it is
Machining state.
As a preferred embodiment of the utility model, the laser 1 is equipped with switch one and switch two；It is described to open
One is closed for emitting and closing the instruction feux rouges 5；The switch two is for emitting and closing the laser beam 3.
Specifically, when being focused, the rotation of spectroscope 13 is extremely with primary optical axis angle at 45 °, and instruction feux rouges 5 is in workpiece table
The reflected light in face is imaged on CCD10.When workpiece surface 15 is located at 7 focal plane of focus lamp (plane where focus), it is imaged side
Edge is most clear, contrast highest.Otherwise, it is imaged edge blurry, contrast reduces.It is controlled and is focused by displacement controller 12 at this time
Mirror 7 moves up and down along the z-axis direction, until image is most clear, completes focusing.It is flat to minute surface and primary optical axis to rotate spectroscope 23
Row closes instruction feux rouges 5, so that laser 1 is emitted laser beam 3 and starts to process.
Particularly, in order to avoid laser beam 3 is by spectroscope 13, after the completion of focusing, the spectroscope 13 is rotated around x-axis
45 ° keep minute surface parallel with primary optical axis, into machining state.
This device provided in this embodiment utilizes the instruction feux rouges that laser carries, and passes through the light splitting of an adjustable angle
System realizes being switched fast for machining state and focus state.This device is not only small, simple in structure to processing light path impact,
And it is easily operated, Focus accuracy is high；Scene fixed-focus can be achieved, substantially increase processing efficiency.
Embodiment two
On the basis of embodiment one, the present embodiment emphasized describes a kind of laser processing provided by the utility model
With the composition and function of focusing system in focus fixing device.
The focusing system (8) is made of optical filter (9), CCD (10), processor (11) and displacement controller (12), institute
Optical filter (9) and the central coaxial setting of the CCD (10) are stated, is vertically arranged with the primary optical axis where the laser beam (3), institute
It states CCD to be electrically connected with the processor, the processor is electrically connected with the displacement controller, and the displacement controller is for adjusting
Save the position of the focus lamp.
Specifically, the optical filter 9 and with the CCD10 in same optical axis, and it is vertical with primary optical axis (z-axis).Work
The instruction feux rouges 5 of part surface reflection enters focusing system 8 after the reflection of spectroscope 13, and optical filter 9 filters out stray light, only allows to refer to
Show that feux rouges 5 passes through.Reflected light is imaged by optical filter 9 on CCD10, and processor 11 is handled and shown to image, is passed through
Displacement controller 12 adjusts position of the focus lamp 7 in z-axis, makes that imaging edge is most clear, contrast highest, and focus is located at this time
Workpiece surface 15 completes focusing.
As a preferred embodiment of the utility model, the optical filter only allows to indicate that feux rouges passes through.
Specifically, the optical filter 9 in the focusing system 8 only allows to indicate that feux rouges 5 passes through for filtering out stray light.
Reflected light can be preferably allowed to be imaged on CCD10 by optical filter 9 in this way.
In the present embodiment, device carry out accurate fixed-focus operation principle and process it is as follows：When being focused, spectroscope 13
Rotation extremely with primary optical axis angle at 45 °, indicates that feux rouges 5 is imaged in the reflected light of workpiece surface 15 on CCD10.When workpiece surface 15
When positioned at focal plane (focus where plane) of focus lamp 7, imaging edge is most clear, contrast highest.Otherwise, it is imaged edge mould
Paste, contrast reduce.It controls focus lamp 7 by displacement controller 12 at this time to move up and down along the z-axis direction, until image is most clear
Until, complete focusing.It is parallel with primary optical axis to minute surface to rotate spectroscope 13, closes instruction feux rouges 5, makes 1 shoot laser of laser
Beam 3 starts to process.
Integrated embodiment one and embodiment two, it is total to the two states course of work of this device provided by the utility model
Knot is as follows：Focus state：Adjusting rotating mechanism 14 makes spectroscope 13 and primary optical axis angle at 45 °.The instruction for opening laser is red
Light 5 passes sequentially through beam-expanding system 2, scanning galvanometer 4, beam splitting system 6, focus lamp 7 and reaches workpiece surface 15, reflection feux rouges mirror point
Light microscopic 13 enters focusing system 8 after reflecting, and processor 11 handled and shown to imaging on CCD 10, and to displacement control
Device 12 processed sends out position of the Signal Regulation focus lamp 7 in z-axis, completes to adjust when until being imaged most clear edge, contrast highest
It is burnt.
Into machining state：Control spectroscope 13 rotation of rotating mechanism 14 is sharp to, closing instruction feux rouges parallel with primary optical axis
Light device sends out laser and is processed.
To sum up, the present embodiment is based on CCD imaging techniques, and the instruction feux rouges carried using laser passes through adjustable angle
Spectroscope will indicate that feux rouges is imaged in the reflected light of workpiece surface on CCD, and adjust focus lamp makes imaging in the position in z-axis direction
Most clear, focus is located at workpiece surface at this time, completes focusing.
Embodiment three
As shown in figure 3, a kind of laser processing and fixed-focus method, it is characterised in that：Include the following steps：
Open the instruction red switch on laser；
Laser transmitting instruction feux rouges；
The instruction feux rouges is expanded and is collimated by beam-expanding system；
The instruction feux rouges, which is scanned through after galvanometer changes direction, enters beam splitting system；
The instruction feux rouges enters focus lamp and is focused；
The instruction feux rouges reaches workpiece surface；
The instruction feux rouges is reflected by spectroscope；
Instruction feux rouges after reflection enters focusing system；
The position that the focusing system adjusts focus lamp meets restriction and requires up to being imaged edge and contrast, completes tune
It is burnt；
Close the instruction red switch on laser；
Open the laser beam switch on laser；
Laser sends out laser beam；
Into machining state.
Specifically, the restriction requires to be to adjust focus lamp in Z during those skilled in the art operate according to routine experimentation
Position on axis, until imaging edge is most clear, contrast highest, as best focus state completes focusing.
Laser processing provided in this embodiment is as follows with the operation principle of fixed-focus method：
Focus state：Adjusting rotating mechanism 14 makes spectroscope 13 and primary optical axis angle at 45 °.The instruction for opening laser is red
Light 5 passes sequentially through beam-expanding system 2, scanning galvanometer 4, beam splitting system 6, focus lamp 7 and reaches workpiece surface 15, reflection feux rouges mirror point
Light microscopic 13 enters focusing system 8 after reflecting, focusing system 8 adjusts position of the focus lamp 7 in z-axis, until imaging edge is most clear
Focusing is completed when clear, contrast highest.
Into machining state：Control spectroscope 13 rotation of rotating mechanism 14 is sharp to, closing instruction feux rouges parallel with primary optical axis
Light device sends out laser and is processed.
Example IV
On the basis of embodiment three, the present embodiment focuses on to describe the step ' position of the focusing system adjusting focus lamp
Until imaging edge and contrast meet restriction and require, focusing is completed '.
As shown in figure 4, step ' the focusing system adjusts the position of focus lamp until imaging edge and contrast symbol
Close to limit and require, complete focusing ' in, further include step：
Instruction feux rouges after reflection filters out stray light by optical filter；
The instruction feux rouges is imaged on CCD；
Processor is handled and is shown to the imaging；
The processor sends out the position of Signal Regulation focus lamp to displacement controller,
The position that displacement controller adjusts focus lamp meets restriction and requires up to being imaged edge and contrast, completes to focus.
Specifically, instruction feux rouges enters focusing system 8, the processor in focusing system 8 after the reflection of spectroscope 13
Imaging is handled and is shown on 11 couples of CCD 10, and sends out Signal Regulation focus lamp 7 in z-axis to displacement controller 12
Position, until imaging edge is most clear, contrast highest when complete focusing.
Integrated embodiment three and example IV, a kind of laser machine are based on CCD imaging techniques with fixed-focus method, utilize laser
The included instruction feux rouges of device realizes machining state by the beam splitting system of an adjustable angle and the quick of focus state cuts
It changes；By directly adjusting focus lamp position change imaging definition, and then realize focusing.Not only, knot small to processing light path impact
Structure is simple, and easily operated, and Focus accuracy is high；Scene fixed-focus can be achieved, substantially increase processing efficiency.
It should be noted that the relational terms of such as " first " and " second " or the like be used merely to an entity or
Operation is distinguished with another entity or operation, and without necessarily requiring or implying between these entities or operation, there are any
This actual relationship or sequence.Moreover, the terms "include", "comprise" or its any other variant be intended to it is non-exclusive
Property include but also include not having so that article or equipment including a series of elements include not only those elements
The other element being expressly recited, or further include for elements inherent to such a process, method, article, or device.Do not having
There is the element limited by sentence "including a ..." in the case of more limiting, it is not excluded that in the mistake for including the element
There is also other identical elements in journey, method, article or equipment.
The above is only the specific implementation mode of the application, is made skilled artisans appreciate that or realizing this Shen
Please.Various modifications to these embodiments will be apparent to one skilled in the art, as defined herein
General Principle can in other embodiments be realized in the case where not departing from spirit herein or range.Therefore, the application
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest range caused.
It should be understood that the application is not limited to the content for being described above and being shown in the accompanying drawings, and can
To carry out various modifications and change without departing from the scope.Scope of the present application is only limited by the accompanying claims.
Claims (7)
1. a kind of laser processing and focus fixing device based on CCD imagings, include at least：Laser for emitting laser beam；
Beam-expanding system for the laser beam to be expanded and collimated；For changing the scanning galvanometer of the position of the laser beam；
Focus lamp for converging the laser beam；The laser beam of the laser transmitting is expanded by the beam-expanding system
After beam and collimation, and then direction is changed by the scanning galvanometer and is focused into the focus lamp；It is characterized in that：Institute
Laser is stated with instruction feux rouges；
Described device further includes for judging focal position and controlling the focusing system for realizing focusing in the position of the focus lamp；With
In will indicate feux rouges workpiece surface reflected light back into focusing system beam splitting system；The beam splitting system is set to described
Between scanning galvanometer and the focus lamp；The beam splitting system includes spectroscope and rotating mechanism；Described spectroscope one end is fixed
On the rotating mechanism；
The instruction feux rouges passes sequentially through the beam-expanding system, scanning galvanometer, beam splitting system, focus lamp and reaches workpiece surface；
The instruction feux rouges enters the focusing system in the reflected light of workpiece surface by the spectroscope.
2. a kind of laser processing and focus fixing device based on CCD imagings according to claim 1, it is characterised in that：It is described
Focusing system is made of optical filter, CCD, processor and displacement controller, and the central coaxial of the optical filter and the CCD are set
It sets, is vertically arranged with the primary optical axis where the laser beam, the CCD is electrically connected with the processor, the processor and institute
Rheme shift controller is electrically connected, and the displacement controller is used to adjust the position of the focus lamp.
3. a kind of laser processing and focus fixing device based on CCD imagings according to claim 1, it is characterised in that：It is described
Spectroscope is rotated around one end of the rotating mechanism, and rotation angle is 45 °.
4. a kind of laser processing and focus fixing device based on CCD imagings according to claim 1, it is characterised in that：It is described
Spectroscope realizes that transflection, transflection ratio are 1 by plated film to instruction feux rouges:1.
5. a kind of laser processing and focus fixing device based on CCD imagings according to claim 2, it is characterised in that：It is described
Laser is equipped with switch one and switch two；The switch one is for emitting and closing the instruction feux rouges；The switch two is used
In emitting and close the laser beam.
6. a kind of laser processing and focus fixing device based on CCD imagings according to claim 2, it is characterised in that：It is described
Optical filter only allows to indicate that feux rouges passes through.
7. a kind of laser processing and focus fixing device based on CCD imagings according to claim 3, it is characterised in that：It is described
Beam splitting system has focus state and machining state；It is focus state when the spectroscope is rotated to angle at 45 ° with primary optical axis；
It is machining state when the spectroscope is parallel with primary optical axis.
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| CN201721486781.5U CN207787974U (en) | 2017-11-09 | 2017-11-09 | A kind of laser processing and focus fixing device based on CCD imagings |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721486781.5U CN207787974U (en) | 2017-11-09 | 2017-11-09 | A kind of laser processing and focus fixing device based on CCD imagings |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107598364A (en) * | 2017-11-09 | 2018-01-19 | 云南电网有限责任公司临沧供电局 | A kind of Laser Processing and focus fixing device and method based on CCD imagings |
| CN111590207A (en) * | 2020-06-15 | 2020-08-28 | 深圳信息职业技术学院 | Laser polishing method and laser polishing device |
| CN112828448A (en) * | 2020-12-31 | 2021-05-25 | 武汉华工激光工程有限责任公司 | Three-dimensional scanning imaging processing equipment and method based on galvanometer |
| CN117443858A (en) * | 2023-12-26 | 2024-01-26 | 合肥国镜仪器科技有限公司 | Cleaning method and cleaning system for cold field electron source |
-
2017
- 2017-11-09 CN CN201721486781.5U patent/CN207787974U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107598364A (en) * | 2017-11-09 | 2018-01-19 | 云南电网有限责任公司临沧供电局 | A kind of Laser Processing and focus fixing device and method based on CCD imagings |
| CN111590207A (en) * | 2020-06-15 | 2020-08-28 | 深圳信息职业技术学院 | Laser polishing method and laser polishing device |
| CN112828448A (en) * | 2020-12-31 | 2021-05-25 | 武汉华工激光工程有限责任公司 | Three-dimensional scanning imaging processing equipment and method based on galvanometer |
| CN117443858A (en) * | 2023-12-26 | 2024-01-26 | 合肥国镜仪器科技有限公司 | Cleaning method and cleaning system for cold field electron source |
| CN117443858B (en) * | 2023-12-26 | 2024-03-05 | 合肥国镜仪器科技有限公司 | Cleaning method and cleaning system for cold field electron source |
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