CN207488699U - Cover structure and shield packaging container - Google Patents
Cover structure and shield packaging container Download PDFInfo
- Publication number
- CN207488699U CN207488699U CN201721493168.6U CN201721493168U CN207488699U CN 207488699 U CN207488699 U CN 207488699U CN 201721493168 U CN201721493168 U CN 201721493168U CN 207488699 U CN207488699 U CN 207488699U
- Authority
- CN
- China
- Prior art keywords
- protective film
- cover structure
- fixing component
- framework
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 44
- 230000001681 protective effect Effects 0.000 claims abstract description 110
- 239000012790 adhesive layer Substances 0.000 claims abstract description 54
- 239000010408 film Substances 0.000 description 104
- 230000015572 biosynthetic process Effects 0.000 description 6
- -1 polyethylene terephthalate Polymers 0.000 description 6
- 239000003292 glue Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920002678 cellulose Polymers 0.000 description 3
- 239000001913 cellulose Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004425 Makrolon Substances 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packages (AREA)
Abstract
The utility model provides the cover structure that can be reliably removed protective film from adhesive layer when being taken out from accommodating container and shield packaging container.Cover structure (1) includes framework (2), shield film (3) and protective film (4).Shape of the framework in main view is rectangle, has adhesive layer (24) in its back side side end face.Shield film is located at the positive side end face of framework, covers the inside of framework.Protective film has the multiple remaining sides (5) for being pasted onto adhesive layer to protect the protection portion of adhesive layer (41) and be integrated with protection portion setting.Multiple remaining sides are formed towards the external of framework and extend.Have when more than multiple remaining at least one in：Base end part (51), end (511) are connected with protection portion；And anchor portion (52), it is connected with the end (512) of base end part.The width (W2) in anchor portion is more than the width (W1) of base end part.
Description
Technical field
The utility model is related to shield (Japaneses：ペ リ Network Le) tectosome, shield packaging container and fixing means.
Background technology
In the manufacturing process for forming LSI, the thin film transistor (TFT) of flat-panel monitor, colour filter etc., need to photomask, mark
Line piece (hereinafter referred to as " photomask etc. ") it is dust-proof.As dust-proof means, the tectosome for being referred to as cover structure is widely used.
Cover structure is usually made of framework and polymeric membrane (hereinafter referred to as " shield film ").Shield film is, for example, by nitre
Transparent film below 10 μm of the thickness of the formation such as cellulose, cellulose derivative, fluoropolymer.Cover structure with
The end face of framework is pasted shield film and is formed using the mode of the inside of shield film covering framework.In the other end of framework
Face is equipped with that cover structure is made to be bonded in the adhesive layer of photomask etc..
Such cover structure supplies usually from the producer of the cover structure to the producer of photomask etc..Light is covered
Cover structure is fixed on photomask etc. by the producer of mould etc. by the way that adhesive layer is made to be bonded in photomask etc..Thus, shield
The producer of tectosome is in order to maintain the bonding force of adhesive layer to be used as stopping until for it, with the bonding protective film on adhesive layer
The state protected supplies cover structure to the producer of photomask etc..The producer of photomask etc. by will supply come
The protective film of cover structure remove and expose the adhesive layer of framework, so as to which cover structure is made to be glued on adhesive layer
Together in photomask etc..
In addition, about cover structure, its damage, foreign matter are attached to shield film etc. in order to prevent, are received with being sealed in
The state received in container is conveyed.Cover structure needs that framework, shield film is made not to store in contact with accommodating container
The inside of container is securely fixed.
For such requirement, propose cover structure is fixed on storage using fixing tape in patent document 1
The structure of container.In detail, in this configuration, multiple remaining side (Japaneses are formed on protective film：Give as security さ え generations), by with
Mode across remaining side and the pallet of accommodating container pastes fixing tape, so as to which the protective film of cover structure is fixed on
Pallet.When taking out cover structure from accommodating container, to cover structure applied force so that it is detached from pallet.As a result, can
Enough in a state that protective film is still fixed on pallet, remove protective film from adhesive layer and expose the adhesive layer of framework.That is, energy
It is enough carried out at the same time from accommodating container and takes out cover structure and stripping protective film.
When taking out cover structure from accommodating container, need by cover structure can be made from the side that pallet detaches
Formula, (below should so as to form the end for starting to remove first between adhesive layer and protective film to cover structure applied force
End is referred to as " peel tip ").After peel tip is formed, by applied force further to cover structure, make in protective film
The range of auto-adhesive layer stripping expands from peel tip, so as to which protective film is whole from adhesive layer stripping.
Existing technical literature
Patent document
Patent document 1：International Publication No. 2006/59388
Utility model content
Utility model will solve the problems, such as
In the structure proposed in patent document 1, applying larger power to cover structure to form peel tip
When, remaining side, which can be acted on, makes it from power as fixing tape extraction.When being extracted out on remaining side from fixing tape, it is impossible to which keeping will
When protective film is fixed on the state of accommodating container, this problem cannot be removed by protective film from adhesive layer by existing.
In addition, with the enlargement of display in recent years, there are the tendencies that also maximize of framework of cover structure.Cause
And when being intended to apply larger power to cover structure so as to form peel tip, it is possible to lead to the deformation of framework.In detail
It says, when taking out cover structure from accommodating container, the power and self-insurance cuticula that it be made to detach from pallet can be applied to framework and born
Reaction force, it is possible to make framework generate flexure.
Make cover structure reliably solid in this way, existing in previous cover structure and its fixing means and being difficult to take into account
It is scheduled on the inside of accommodating container and easily takes out cover structure this problem.
The utility model be in view of this problem and complete, its purpose is to provide when being taken out from accommodating container
Cover structure, shield packaging container and its fixing means that can reliably remove protective film from adhesive layer.
The solution to the problem
It is that inventor of the utility model etc. has made intensive studies to take out shield structure from accommodating container as a result, completing
The utility model that can be reliably removed protective film from adhesive layer when making body.
That is, the utility model is as follows.
(1)
A kind of cover structure, which is characterized in that
Including：
Framework, shape during main view are rectangle, have adhesive layer in the back side side end face of the framework；
Shield film is located at the positive side end face of the framework, covers the inside of the framework；And
Protective film has the protection portion for being pasted onto the adhesive layer to protect the adhesive layer and is set with the protection portion
The multiple remaining sides being integrated,
The multiple remaining side is formed towards the external of the framework and extends,
Have when more than the multiple remaining at least one in：Base end part, the one end of the base end part and the protection portion phase
Connection；And anchor portion, the anchor portion are connected with the other end of the base end part,
The width in the anchor portion is more than the width of the base end part.
(2)
According to the cover structure described in (1), which is characterized in that
The anchor portion is in a manner of the direction extension vertical along the direction extended with the remaining side with the anchor portion
It is formed.
(3)
According to the cover structure described in (1) or (2), which is characterized in that
The width of the other end of the base end part becomes larger with being gone from the protection portion towards the anchor portion.
(4)
According to the cover structure described in any one of (1)~(3), which is characterized in that
The anchor portion is formed with slit, which extends along the direction that the remaining side with the anchor portion is extended.
(5)
According to the cover structure described in any one of (1)~(4), which is characterized in that
The width dimensions of the base end part are more than 40% width dimensions in the anchor portion.
(6)
According to the cover structure described in any one of (1)~(5), which is characterized in that
The width dimensions of the base end part are less than 90% width dimensions in the anchor portion.
(7)
According to the cover structure described in (6), which is characterized in that
The width dimensions of the base end part are less than 80% width dimensions in the anchor portion.
(8)
According to the cover structure described in (6), which is characterized in that
The width dimensions of the base end part are less than 70% width dimensions in the anchor portion.
(9)
According to the cover structure described in (6), which is characterized in that
The width dimensions of the base end part are less than 60% width dimensions in the anchor portion.
(10)
According to the cover structure described in any one of (1)~(9), which is characterized in that
The width dimensions of the base end part are below 60mm.
(11)
According to the cover structure described in (10), which is characterized in that
The width dimensions of the base end part are below 40mm.
(12)
According to the cover structure described in (11), which is characterized in that
The width dimensions of the base end part are below 30mm.
(13)
According to the cover structure described in (12), which is characterized in that
The width dimensions of the base end part are below 20mm.
(14)
A kind of shield packaging container, it is described including the cover structure described in any one of (1)~(13) and for storing
The accommodating container of cover structure, the shield packaging container be characterized in that,
With for the base end part to be fixed on to the fixing component of the accommodating container.
(15)
Shield packaging container according to (14), which is characterized in that
Protective film, positioned at the multiple remaining adjacent remaining in while between part be not secured to the storage and hold
Device,
Protective film, the part for being not secured to the accommodating container between adjacent remaining side length is
More than 200mm.
(16)
Shield packaging container according to (15), which is characterized in that
Protective film, positioned at the multiple remaining adjacent remaining in while between part be not secured to the storage and hold
Device,
Protective film, the part for being not secured to the accommodating container between adjacent remaining side length is
More than 410mm.
(17)
A kind of shield packaging container, the accommodating container including cover structure and for storing the cover structure should
Shield packaging container is characterized in that,
The cover structure includes：
Framework, shape during main view are rectangle；
Shield film is located at a face of the framework, covers the inside of the framework；
Adhesive layer is located at another face of the framework；And
Protective film is pasted onto the face of that side opposite with the face equipped with the framework of the adhesive layer,
The protective film has the remaining side prominent to the outside of the protective film,
The remaining lateral dominance is fixed on the shield packaging container with fixing component,
1 of the protective film while, using it is described remaining while the fixing component be fixed on the shield packaging container
Partial combined length ratio shared in the length on 1 side of the protective film is more than 1.0% and less than 7.0%.
(18)
Shield packaging container according to (17), which is characterized in that
1 of the protective film while, using it is described remaining while the fixing component be fixed on the shield packaging container
Partial combined length ratio shared in the length on 1 side of the protective film is more than 1.0% and less than 4.0%.
(19)
A kind of shield packaging container, the accommodating container including cover structure and for storing the cover structure should
Shield packaging container is characterized in that,
The cover structure includes：
Framework, shape during main view are rectangle；
Shield film is located at a face of the framework, covers the inside of the framework；
Adhesive layer is located at another face of the framework；And
Protective film is pasted onto the face of that side opposite with the face equipped with the framework of the adhesive layer,
The protective film have to the outside of the protective film it is prominent the more than the 1st at~the more than 3,
The lateral dominance of more than the 1st side~the more than the 3rd is fixed on the shield packaging container with the fixing component of the 1st fixing component~the 3rd,
1st fixing component, the 2nd fixing component and the 3rd fixing component are along the same of the framework
A side is set according to the sequence of the 1st fixing component, the 2nd fixing component and the 3rd fixing component,
Described more than the 1st while, it is described more than the 2nd while and the more than the 3rd edge the same side of the framework according to described
More than the 1st while, it is described more than the 2nd while and the more than the 3rd side sequence setting,
Protective film, the part between the 1st fixing component and the 2nd fixing component be not secured to the accommodating container,
Protective film, the part between the 2nd fixing component and the 3rd fixing component be not secured to the accommodating container,
The protective film, between the 1st fixing component and the 2nd fixing component be not secured to it is described storage hold
The length of the part of device and the protective film, be not secured to institute between the 2nd fixing component and the 3rd fixing component
The length for stating the part of accommodating container is more than 200mm,
The minimum widith on the more than the 2nd side be 60mm hereinafter,
The shield packaging container is fixed in the minimum widith part on the more than the 2nd side using the 2nd fixing component.
(20)
Shield packaging container according to (19), which is characterized in that
The minimum widith on the more than the 2nd side is below 40mm.
(21)
Shield packaging container according to (20), which is characterized in that
The minimum widith on the more than the 2nd side is below 30mm.
(22)
Shield packaging container according to (21), which is characterized in that
The minimum widith on the more than the 2nd side is below 20mm.
(23)
According to the shield packaging container described in any one of (19)~(22), which is characterized in that
The protective film, between the 1st fixing component and the 2nd fixing component be not secured to it is described storage hold
The length of the part of device and the protective film, be not secured to institute between the 2nd fixing component and the 3rd fixing component
The length for stating the part of accommodating container is more than 250mm.
(24)
Shield packaging container according to (23), which is characterized in that
The protective film, between the 1st fixing component and the 2nd fixing component be not secured to it is described storage hold
The length of the part of device and the protective film, be not secured to institute between the 2nd fixing component and the 3rd fixing component
The length for stating the part of accommodating container is more than 300mm.
The effect of utility model
According to the utility model, being capable of providing can reliably shell protective film from adhesive layer when being taken out from accommodating container
From cover structure, shield packaging container and its fixing means.
Description of the drawings
Fig. 1 is the front view for the cover structure for representing the 1st embodiment.
Fig. 2 is the sectional view in the II-II sections for representing Fig. 1.
Fig. 3 is the enlarged drawing in the III portions of Fig. 1.
Fig. 4 is the enlarged drawing in the III portions of Fig. 1.
Fig. 5 is the enlarged drawing of the cover structure of the 2nd embodiment.
Fig. 6 (A) is the appearance that fixing tape is pasted with when representing for cover structure to be fixed on the pallet of accommodating container
Figure, Fig. 6 (B) is represented after fixing tape is pasted, the figure of appearance that the movable part turned over returns as shown by the arrows,
Fig. 6 (C) is to represent that the power for acting on protective film draws the figure in the direction on the remaining side of protective film.
Reference sign
1st, 10, cover structure；2nd, framework；24th, adhesive layer；3rd, shield film；4th, protective film；41st, protection portion；5th, 6 it is, remaining
Side；51st, 61, base end part；52nd, 62, anchor portion；63rd, slit；8th, fixing tape (fixing component)；9th, accommodating container.
Specific embodiment
Hereinafter, it is described with reference to the embodiment of the utility model.It is right in the drawings in order to be readily appreciated that explanation
Identical inscape marks identical reference numeral as much as possible, and the repetitive description thereof will be omitted.
1st embodiment
First, illustrate the summary of the cover structure 1 of the 1st embodiment referring to Figures 1 and 2.Fig. 1 is to represent hood structure
The front view of body 1.Fig. 2 is the sectional view in the II-II sections for representing Fig. 1.Fig. 1 shows the supports for being fixed on aftermentioned accommodating container 9
The cover structure 1 of disk 91, and the diagram of the lid 92 of accommodating container 9 is omitted.
The cover structure 1 is to carry out dust-proof equipment to photomask etc. in a photolithographic process.Cover structure 1 includes frame
Body 2, shield film 3 and protective film 4.
As shown in Figure 1, there are two long side component 21 and two short side components 22 for the tool of framework 2.Long side component 21 and short side structure
Part 22 is formed by aluminium alloy, and is the rodlike component linearly extended.Two long side components 21 are mutual spaced apartly
Configured in parallel, equally, two short side components 22 also ground spaced apart configured in parallel mutually.The end of long side component 21 and short side structure
The end of part 22 connects in a manner that long side component 21 and short side component 22 are substantially at right angles mutually.The shape of framework 2 exists as a result,
It is rectangular during main view.The size of framework 2 is what the size based on photomask etc. determined.For example, the length of long side component 21 is
More than 1700mm, the length of short side component 22 is more than 1500mm, opening area 1000cm2More than.
In addition, for easy understanding, as shown in Figure 1, being set as X using the direction for being extended the long side component 21 of framework 2
The direction that short side component 22 is extended is set as Y-direction, the direction orthogonal with X-direction and Y-direction is set as Z-direction by direction
Orthogonal coordinates illustrate.It is also shown in the attached drawing after Fig. 2 and Fig. 2 and the corresponding coordinate of the orthogonal coordinates.
As shown in Fig. 2, it is equipped with adhesive layer 24 in the end face of the -Z direction side of framework 2.Adhesive layer 24 is in the complete cycle of the end face
In the range of be configured.As described later, adhesive layer 24 is used to be bonded to photomask etc..
Shield film 3 is, for example, the film formed by nitrocellulose, cellulose derivative, fluoropolymer etc..Shield film 3
Thickness by 10 μm hereinafter, it is formed to make the light that light source is sent out in a photolithographic process fully to transmit.As shown in Fig. 2,
Shield film 3 is adhered to the end face of the Z-direction side of framework 2 by bonding agent 23, and covers the inside of framework 2.
Protective film 4 is formed such as the resin material as polyethylene terephthalate, polyethylene.Protective film 4 is thickness
For 30 μm~500 μm or so of film, there is flexibility.
As shown in Figure 1, protective film 4 has 1 protection portion 41 and 8 remaining sides 5.Protection portion 41 is in corresponding with framework 2
Frame shape.Remaining side 5 is formed in a manner of being extended radially from the periphery of protection portion 41.That is, each remaining side 5 is spaced apart mutually
Compartment of terrain is configured, and is formed as self-shield portion 41 and protrudes.
As shown in Fig. 2, protective film 4 is pasted on the adhesive layer 24 of framework 2 in protection portion 41.Adhesive layer 24 is substantially as a result,
Complete cycle protected portion 41 is covered, and dust can be prevented to be attached to adhesive layer 24.It is covered to protect by using protection portion 41
Protect the bonding force of adhesive layer 24.In addition, by removing protective film 4 and exposing adhesive layer 24, so as to play protected to
This bonding force.Adhesive layer 24 is bonded in by protection portion 41, so as to the side that each remaining side 5 is made to extend with the outside towards framework 2
Formula is configured.
The cover structure 1 formed as above explanation is conveyed with the state being sealed in accommodating container 9.It connects
It, illustrates the summary of accommodating container 9 referring to Figures 1 and 2.
As shown in Fig. 2, accommodating container 9 has pallet 91 and lid 92.Pallet 91 and lid 92 are for example by poly terephthalic acid second
The resin materials such as diol ester, acrylonitrile-butadiene-styrene (ABS), acrylic acid, makrolon, polyvinyl chloride are formed.91 He of pallet
92 respective end of lid is clamped, and be fixed relative to each other in z-direction by clip 93.The central portion of pallet 91 and lid 92
It separates and sets with gap in z-direction.The gap is the storage space 90 being configured for cover structure 1.
The cover structure 1 being configured in storage space 90 is fixed on pallet 91.The fixed of cover structure 1 uses fixation
With fixing components such as bands 8.Fixing tape 8 is in belt shape, such as can be by polyethylene, polypropylene, polyethylene terephthalate
The resin materials such as ester, polyvinyl chloride, non-woven fabrics are formed.The glue with adhesiveness is equipped in the one side of fixing tape 8.The glue example
Glue, the polyvinyl alcohol of acrylic acid series such as may be used.
Cover structure 1 is configured at the stationary plane 911 in the central portion protuberance of pallet 91.Fixing tape 8 makes equipped with glue
Facing towards 911 side of stationary plane, and as illustrated in fig. 1 with across the side on the remaining side 5 of protective film 4 and the stationary plane 911 of pallet 91
Formula is pasted.Cover structure 1 is fixed on the stationary plane 911 of pallet 91 across protective film 4 as a result,.
Cover structure 1 fixed so is only in contact in protective film 4 with accommodating container 9.That is, it is not necessary to make framework
2nd, shield film 3 is in contact with accommodating container 9.Thus, it, will not be by shaking when conveying is accommodated with the accommodating container 9 of cover structure 1
It is dynamic that framework 2, shield film 3 and 9 phase of accommodating container is caused to rub.New dust will not be generated in storage space 90 as a result,.
The operation that cover structure 1 is taken out from accommodating container 9 carries out in the environment that maintain higher air cleanliness.
In this context, clip 93 is dismantled from the end of pallet 91 and lid 92 first.Secondly, lid 92 is made to leave pallet 91, makes to be fixed on
The cover structure 1 of pallet 91 exposes.Also, defined jig is fixed on the framework 2 of cover structure 1 and pallet 91, and
And using the jig to framework 2 to Z-direction applied force.That is, to framework 2 in a manner of making cover structure 1 from the separation of pallet 91
Applied force.
The protective film 4 being pasted onto on the adhesive layer 24 of framework 2 is also acted in a manner of it is made to be detached from pallet 91 as a result,
Effectively.It is but solid due to being pasted in a manner of the stationary plane 911 across the remaining side 5 of protective film 4 and pallet 91 as aforementioned
Surely band 8 is used, therefore protective film 4 is still fixed on stationary plane 911.As a result, so that the adhesive layer 24 of framework 2 and protective film 4
The mode that protection portion 41 detaches acts on effectively.The power intensively acts on portion in the complete cycle of protection portion 41, being formed with remaining side 5
Position.
As a result, form peel tip (not shown) in the near sites for being formed with remaining side 5.After peel tip is formed, lead to
It crosses to 2 further applied force of framework, the range so as to remove in the protection portion 41 of protective film 4, auto-adhesive layer 24 expands
Greatly, and make protective film 4 is whole to be removed from adhesive layer 24.
Be carried out at the same time in this way from accommodating container 9 take out cover structure 1 (state after wherein, protective film 4 is removed) and
Protective film 4 is removed.By removing protective film 4, so as to play the bonding force of adhesive layer 24, cover structure can be made
1 is bonded in photomask etc. in adhesive layer 24.The cover structure 1 covers the picture figure for being formed in photomask etc. using shield film 3
Case.Photomask etc. is carried out thereby, it is possible in a photolithographic process dust-proof.
Using the cover structure 1, pasting fixed use in a manner of across the remaining side 5 of protective film 4 and accommodating container 9
Band 8, so as to which cover structure 1 is fixed on accommodating container 9.8 remaining sides 5 are with being pasted onto on the adhesive layer 24 of framework 2
The setting of protection portion 41 is integrated, and the outside for being formed towards framework 2 extends radially.By making remaining side 5 with such
Mode extends, so as to guarantee for remaining side 5 to be fixed on the range of accommodating container 9.As a result, it is possible to reliably by shield
Tectosome 1 is fixed on accommodating container 9.
In addition, 8 remaining sides 5 are formed in a manner of being extended radially by the outside towards framework 2, so as to part
Side 5 more than ground formation.Protective film 4 between adjacent remaining side 5,5 is simultaneously not secured to accommodating container 9.In the shield to forming in this way
Tectosome 1 is in a manner of making it from the separation of accommodating container 9 during applied force, and between adhesive layer 24 and protective film 4, power is intensively made
It is used to form the position on side 5 of having a surplus.As a result, when taking out cover structure 1 from accommodating container 9, it is able to easily form stripping
From end.
In addition, in order to easily form peel tip, adjacent remaining side 5, the distance between 5 (is not secured to receive in protective film 4
Receive container 9 part length) it is longer if preferably, be preferably set to more than 200mm, be preferably set to more than 250mm, preferably
It is set as more than 300mm, is preferably set to more than 350mm, be preferably set to more than 400mm, is preferably set to more than 410mm,
Be preferably set to more than 420mm, be preferably set to more than 430mm, be preferably set to more than 440mm, be preferably set to 450mm with
On, more than 460mm is preferably set to, is preferably set to more than 470mm, is preferably set to more than 480mm, is preferably set to
More than 490mm is preferably set to more than 500mm, is preferably set to more than 520mm, is preferably set to more than 540mm, preferably sets
It is set to more than 560mm, is preferably set to more than 580mm, is preferably set to more than 600mm.The upper limit is not particularly limited, should
Distance or below 2000mm, or below 1500mm.
In order to easily form peel tip, it is preferable that relative to one of protective film 4 while it is remaining while it is 5 less.If relative to
One of protective film 4 while it is remaining while it is less, then when cover structure 1 is made to be detached from pallet 91, protective film 4 is moved upward,
The position obliquely stretched relative to mask adhesive be formed with it is multiple, so as to which stripping be made to become easy.
By one of protective film 4 while length be set as Lp, by one of protective film 4 while on the remaining side 5 of utilization fixation
When the combined length that component is fixed on the part of shield packaging container is set as La, the value of La/Lp is preferably 7.0% hereinafter, preferably
6.0% hereinafter, preferably 5.0% hereinafter, preferably less than 4.0%.As long as the lower limit of the value of La/Lp is can be by protective film 4
It is fixed in the range of accommodating container 9, just there is no particular limitation, or more than 1.0%, or more than 2.0%.
That is, according to above structure, can cover structure 1 be reliably fixed on accommodating container 9, and make to hold from storage
Device 9 takes out cover structure 1 and becomes easy.
However, if power is made intensively to act on the position for being formed with remaining side 5, which is possible to from 8 quilt of fixing tape
Extraction, so as to keep protective film 4 being fixed on the state of accommodating container 9.If it cannot keep protective film 4 being fixed on storage
The state of container 9, then when taking out cover structure 1 from accommodating container 9, it is impossible to which protective film 4 is removed from adhesive layer 24.
For such a problem, in cover structure 1, by working hard in shape on the remaining side 5 of protective film 4, from
And the situation that remaining side 5 is prevented to be extracted from fixing tape 8.Then, with reference to Fig. 3 and Fig. 4 explain in detail more than side 5.Fig. 3 and figure
4 be the enlarged drawing in the III portions of Fig. 1.Power when Fig. 3 represents to take out not yet is applied to the state of cover structure 1, and Fig. 4 expressions take
Force when spending just is being applied to the state of cover structure 1.
As aforementioned, protective film 4 has 8 remaining sides 5, and the basic configuration on each remaining side 5 is identical.Thus, in this definition graph 1
III portions shown in 1 remaining side 5, omit with others more than 5 relevant explanation of side.Remaining side 5 has base end part 51 and anchor portion 52.
One end 511 of base end part 51 is connected with protection portion 41.Base end part 51 is to be connected from the base end part 51
Protection portion 41 is substantially hung down along the direction (being X-direction in the example shown in Fig. 3) extended with the protection portion 41 along framework 2
The mode of straight direction (being Y-direction in the example shown in Fig. 3) extension is formed.The width dimensions of base end part 51 are (shown in Fig. 3
Example in be size in X-direction) W1 is about 15mm.In addition, the length L1 that 51 self-shield portion 41 of base end part protrudes is about
20mm。
Anchor portion 52 is connected with the end 512 of base end part 51.Anchor portion 52 along with the remaining side 5 with the anchor portion 52 to be prolonged
Vertical direction (the being X-direction in the example shown in Fig. 3) extension in the direction (being Y-direction in the example shown in Fig. 3) stretched
Mode is formed.Width dimensions (being the size in the X-direction in the example shown in Fig. 3) W2 in anchor portion 52 is about 30mm.In addition, anchor
The length L2 that portion 52 is protruded from the end of base end part 51 512 is about 5mm.
From the aspect of easy formation peel tip, the width in anchor portion 52 is more than the width of base end part 51.In addition, base end part
The size W1 of 51 width is more than the 10% size W2 of the width in anchor portion 52.The size W1 of the width of base end part 51 can also
More than the 20% size W2 of width for anchor portion 52, or more than 30%, or more than 40%.Also, cardinal extremity
The width of the end 512 in portion 51 becomes larger with being gone from protection portion 41 towards anchor portion 52.
In addition, from the aspect of easy formation peel tip, the size W1 of the width of base end part 51 is preferably anchor portion 52
The 90% of the size W2 of width is hereinafter, preferably 80% hereinafter, preferably 70% hereinafter, preferably less than 60%.
In addition, from the aspect of easy formation peel tip, the smaller words of size W1 of the width of base end part 51 are preferable, excellent
Be selected as 60mm hereinafter, preferably 55mm hereinafter, preferably 50mm hereinafter, preferably 45mm hereinafter, preferably 40mm hereinafter, it is preferred that
For 35mm hereinafter, preferably 30mm hereinafter, preferably 25mm hereinafter, preferably 20mm hereinafter, preferably 15mm hereinafter, preferably
Below 10mm.The lower limit of size W1 is not particularly limited, as long as in more than 3mm, or more than 5mm.
In addition, formed from the aspect of peel tip from easy, it is preferred that the size W2 of the width in anchor portion 52 is more than cardinal extremity
The width in portion 51.The size W2 of the width in anchor portion 52 may be more than 10mm, or more than 20mm, or 30mm
More than, or more than 40mm, or more than 50mm, or more than 60mm, or more than 70mm.
In the pallet 91 that cover structure 1 is fixed on to accommodating container 9, it is pasted with fixing tape as shown in Figure 3
8.Fixing tape 8 is pasted in a manner of the base end part 51 across remaining side 5 and the stationary plane 911 of pallet 91.In detail, Gu
It is fixed to cross base end part 51 in X direction with band 8, and the central portion of fixing tape 8 is pasted onto base end part 51, the two of fixing tape 8
End is pasted onto stationary plane 911.Fixing tape 8 is with the end 81 of its Y-direction side and the end 521 of the -Y direction side in anchor portion 52
Between be spaced apart predetermined distance or the mode that is abutted with end 521 is configured.
From accommodating container 9 take out cover structure 1 when, if by make cover structure 1 from pallet 91 detach in a manner of pair
2 applied force of framework then also acts on effectively the protective film 4 being pasted onto on the adhesive layer 24 of framework 2.Arrow F11 in the power such as Fig. 4
It is shown to be acted in a manner of the remaining side 5 of protective film 4 is drawn to -Y direction like that.
If protective film 4 is moved to -Y direction, as shown in figure 4, the end 521 in anchor portion 52 and the end of fixing tape 8
Portion 81 abuts against.Anchor portion 52 is born in the end 81 of its 521 self-retaining band 8 of end as shown in arrow F12 as a result,
Power.Remaining side 5 overcomes the power acted in a manner that it to be extracted out from fixing tape 8 under the action of the power shown in arrow F12.
The situation that as a result, it is possible to remaining side 5 is prevented to be extracted from fixing tape 8.
Anchor portion 52 is formed as extending along the vertical direction in the direction extended with the remaining side with the anchor portion 52.According to this
Structure, can expand the range of the abutting of end 81 of anchor portion 52 and fixing tape 8, and be reliably prevented remaining side 5 from fixing tape 8
The situation being extracted.
In addition, the width of the end 512 of base end part 51 becomes larger with being gone from protection portion 41 towards anchor portion 52.According to
The structure, the stress concentration that the end 512 of base end part 51 can be mitigated between the anchor portion 52 that is connected with the end 512.Its
As a result, even if in the case of in a manner of making cover structure 1 from the separation of pallet 91 to 2 applied force of framework, can also prevent
The end 512 and anchor portion 52 of base end part 51 are broken.
In addition, the size W1 of the width of base end part 51 is more than the 40% size W2 of the width in anchor portion 52.According to the knot
Structure, in the case where pasting fixing tape 8 in a manner of across base end part 51 and accommodating container 9, even if so that cover structure 1
The mode detached from accommodating container 9 also can prevent base end part 51 to be broken 1 applied force of cover structure.As a result, from receipts
When container 9 of receiving takes out cover structure 1, it can keep reliably being fixed on protective film 4 state of accommodating container 9.
2nd embodiment
Then, the cover structure 10 of the 2nd embodiment is illustrated with reference to Fig. 5 and Fig. 6 (A), Fig. 6 (B), Fig. 6 (C).Fig. 5 and
Fig. 6 (A), Fig. 6 (B), Fig. 6 (C) are the enlarged drawings of cover structure 10, represent the III portions phase with Fig. 1 in cover structure 10
When position.
Cover structure 10 is used for the dust-proof of photomask etc. in a same manner as in the first embodiment.The remaining side 6 of cover structure 10
Shape it is different from the 1st embodiment.To portion in the structure of cover structure 10, identical with the structure of the 1st embodiment
Minute mark notes identical reference numeral, and description is omitted as appropriate.
The remaining side 6 of cover structure 10 has base end part 61 and anchor portion 62.
One end 611 of base end part 61 is connected with protection portion 41.Base end part 61 is to be connected from the base end part 61
Protection portion 41 is substantially hung down along the direction (being X-direction in the example as shown in fig. 5) extended with the protection portion 41 along framework 2
The mode of straight direction (being Y-direction in the example as shown in fig. 5) extension is formed.
Anchor portion 62 is connected with the end 612 of base end part 61.Anchor portion 62 along with the remaining side 6 with the anchor portion 62 to be prolonged
Vertical direction (the being X-direction in the example as shown in fig. 5) extension in the direction (being Y-direction in the example as shown in fig. 5) stretched
Mode is formed.
In addition, anchor portion 62 is formed, there are two slits 63.Each slit 63 from the end 622 of the -Y direction side in anchor portion 62 along
Direction (the being Y-direction in the example as shown in fig. 5) extension that remaining side 6 with the anchor portion 62 is extended.Two slits 63 are spaced apart
It is extended parallel to one another with the compartment of terrain of the degree of same size of base end part 61.Anchor portion 62 is by forming the slit 63, so as to such as
Two movable parts 621 can be turned over like that shown in arrow A1 in Fig. 5, return to the movable part turned over 621.
In the pallet 91 that cover structure 10 is fixed on to accommodating container 9, fixed use is pasted as shown in Fig. 6 (A)
Band 8.In a state that the movable part 621 on remaining side 6 is turned over like that as indicated by arrow a 2, fixing tape 8 is with across base end part 61
It is pasted with the mode of the stationary plane 911 of pallet 91.In detail, fixing tape 8 crosses base end part 61 in X direction, and
The central portion of fixing tape 8 is pasted onto base end part 61, and the both ends of fixing tape 8 are pasted onto stationary plane 911.
After fixing tape 8 is pasted, the movable part 621 turned over is returned as shown in arrow A3 in Fig. 6 (B).As a result,
It is configured between fixing tape 8 and stationary plane 911 relative to base end part 61, movable part 621 is configured is leaning on Z side than fixing tape 8
To the position of side.At this point, fixing tape 8 is spaced apart between the end 81 of its Y-direction side and the end 631 of each slit 63 between regulation
It is configured every or with the mode that abuts of end 631.
From accommodating container 9 take out cover structure 10 when, if by make cover structure 1 from pallet 91 detach in a manner of pair
2 applied force of framework then also acts on effectively the protective film 4 being pasted onto on the adhesive layer 24 of framework 2.Arrow in the power such as Fig. 6 (C)
It is acted in a manner of the remaining side 6 of protective film 4 is drawn to -Y direction like that shown in F21.
If protective film 4 is moved to -Y direction, the end 631 of each slit 63 offsets with the end 81 of fixing tape 8
It connects.Anchor portion 62 is born in the end 81 of 631 self-retaining band 8 of the end of each slit 63 as shown in arrow F22 as a result,
Power.Remaining side 6 overcomes the power acted in a manner that it to be extracted out from fixing tape 8 under the action of the power shown in arrow F22.
The situation that as a result, it is possible to remaining side 6 is prevented to be extracted from fixing tape 8.
Embodiments described above is used to make the understanding of the utility model to become easy, is not used to explain this with limiting
Utility model.Each element and its configuration, material, condition, shape and size that embodiment has etc. are not limited to example
The mode shown can be changed suitably.It is furthermore it is possible to the structure represented in various embodiments is local each other
Ground is replaced or combination.
Such as the through-hole of base end part 51 can also be penetrated through along Z-direction in the formation of the central portion of the base end part 51 on remaining side 5, remaining
The central portion of the base end part 61 on side 6 forms the through-hole along Z-direction perforation base end part 61.The shape of through-hole can be set as circle, four
Side shape etc. is variously-shaped.In this case, the fixing tape 8 for being pasted onto base end part 51,61 is pasted onto pallet 91 by the through-hole
Stationary plane 911.That is, fixing tape 8, which is not only its both ends, is pasted onto stationary plane 911, central portion is also pasted onto
Stationary plane 911.According to the structure, can protective film 4 be more reliably fixed on stationary plane 911.
In addition, fixing component is not limited to fixing tape 8, screw, bolt etc. can also be used.But from easy shape
Into from the aspect of peel tip, fixing tape is ideal.
In addition, both 3 or more remaining sides can be equipped in 1 of, framework along 1 of protective film 4,4 can also be equipped with
A above remaining side, can also be equipped with 5 or more remaining sides, can also be equipped with 6 or more remaining sides.
In addition, both 3 or more fixing components can be equipped in 1 of, framework along 1 of protective film 4, can also set
There are 4 or more fixing components, 5 or more fixing components can also be equipped with, 6 or more fixing components can also be equipped with.
Claims (24)
1. a kind of cover structure, which is characterized in that
Including：
Framework, shape during main view are rectangle, have adhesive layer in the back side side end face of the framework；
Shield film is located at the positive side end face of the framework, covers the inside of the framework；And
Protective film has the protection portion for being pasted onto the adhesive layer to protect the adhesive layer and is set as one with the protection portion
Multiple remaining sides of body,
The multiple remaining side is formed towards the external of the framework and extends,
Have when more than the multiple remaining at least one in：Base end part, the one end of the base end part are connected with the protection portion
It connects；And anchor portion, the anchor portion are connected with the other end of the base end part,
The width in the anchor portion is more than the width of the base end part.
2. cover structure according to claim 1, which is characterized in that
The anchor portion is formed in a manner of the direction extension vertical along the direction extended with the remaining side with the anchor portion.
3. cover structure according to claim 1 or 2, which is characterized in that
The width of the other end of the base end part becomes larger with being gone from the protection portion towards the anchor portion.
4. cover structure according to claim 1 or 2, which is characterized in that
The anchor portion is formed with slit, which extends along the direction that the remaining side with the anchor portion is extended.
5. cover structure according to claim 1 or 2, which is characterized in that
The width dimensions of the base end part are more than 40% width dimensions in the anchor portion.
6. cover structure according to claim 1 or 2, which is characterized in that
The width dimensions of the base end part are less than 90% width dimensions in the anchor portion.
7. cover structure according to claim 6, which is characterized in that
The width dimensions of the base end part are less than 80% width dimensions in the anchor portion.
8. cover structure according to claim 6, which is characterized in that
The width dimensions of the base end part are less than 70% width dimensions in the anchor portion.
9. cover structure according to claim 6, which is characterized in that
The width dimensions of the base end part are less than 60% width dimensions in the anchor portion.
10. cover structure according to claim 1 or 2, which is characterized in that
The width dimensions of the base end part are below 60mm.
11. cover structure according to claim 10, which is characterized in that
The width dimensions of the base end part are below 40mm.
12. cover structure according to claim 11, which is characterized in that
The width dimensions of the base end part are below 30mm.
13. cover structure according to claim 12, which is characterized in that
The width dimensions of the base end part are below 20mm.
14. a kind of shield packaging container, including the cover structure described in claims 1 or 2 and for storing the shield structure
The accommodating container of body is made, which is characterized in that,
With for the base end part to be fixed on to the fixing component of the accommodating container.
15. shield packaging container according to claim 14, which is characterized in that
Protective film, positioned at the multiple remaining adjacent remaining in while between part be not secured to the accommodating container,
Protective film, the part for being not secured to the accommodating container between adjacent remaining side length is 200mm
More than.
16. shield packaging container according to claim 15, which is characterized in that
Protective film, positioned at the multiple remaining adjacent remaining in while between part be not secured to the accommodating container,
Protective film, the part for being not secured to the accommodating container between adjacent remaining side length is 410mm
More than.
17. a kind of shield packaging container, the accommodating container including cover structure and for storing the cover structure, the shield
Cover packaging container is characterized in that,
The cover structure includes：
Framework, shape during main view are rectangle；
Shield film is located at a face of the framework, covers the inside of the framework；
Adhesive layer is located at another face of the framework；And
Protective film is pasted onto the face of that side opposite with the face equipped with the framework of the adhesive layer,
The protective film has the remaining side prominent to the outside of the protective film,
The remaining lateral dominance is fixed on the shield packaging container with fixing component,
1 of the protective film while, using it is described remaining while the fixing component be fixed on the part of the shield packaging container
Combined length ratio shared in the length on 1 side of the protective film be more than 1.0% and less than 7.0%.
18. shield packaging container according to claim 17, which is characterized in that
1 of the protective film while, using it is described remaining while the fixing component be fixed on the part of the shield packaging container
Combined length ratio shared in the length on 1 side of the protective film be more than 1.0% and less than 4.0%.
19. a kind of shield packaging container, the accommodating container including cover structure and for storing the cover structure, the shield
Cover packaging container is characterized in that,
The cover structure includes：
Framework, shape during main view are rectangle；
Shield film is located at a face of the framework, covers the inside of the framework；
Adhesive layer is located at another face of the framework；And
Protective film is pasted onto the face of that side opposite with the face equipped with the framework of the adhesive layer,
The protective film have to the outside of the protective film it is prominent the more than the 1st while, the more than the 2nd while, the more than the 3rd side,
Described more than the 1st while, the more than the 2nd while, the more than the 3rd lateral dominance is fixed on the 1st fixing component, the 2nd fixing component, the 3rd fixing component
The shield packaging container,
1st fixing component, the 2nd fixing component and the 3rd fixing component along the framework same side
It is set according to the sequence of the 1st fixing component, the 2nd fixing component and the 3rd fixing component,
Described more than the 1st while, it is described more than the 2nd while and the more than the 3rd edge the same side of the framework according to the described more than the 1st
While, it is described more than the 2nd while and the more than the 3rd side sequence setting,
Protective film, the part between the 1st fixing component and the 2nd fixing component be not secured to the accommodating container,
Protective film, the part between the 2nd fixing component and the 3rd fixing component be not secured to the accommodating container,
The protective film, be not secured to the accommodating container between the 1st fixing component and the 2nd fixing component
Partial length and the protective film, be not secured to the receipts between the 2nd fixing component and the 3rd fixing component
The length of part of container received is more than 200mm,
The minimum widith on the more than the 2nd side be 60mm hereinafter,
The shield packaging container is fixed in the minimum widith part on the more than the 2nd side using the 2nd fixing component.
20. shield packaging container according to claim 19, which is characterized in that
The minimum widith on the more than the 2nd side is below 40mm.
21. shield packaging container according to claim 20, which is characterized in that
The minimum widith on the more than the 2nd side is below 30mm.
22. shield packaging container according to claim 21, which is characterized in that
The minimum widith on the more than the 2nd side is below 20mm.
23. the shield packaging container according to claim 19 or 20, which is characterized in that
The protective film, be not secured to the accommodating container between the 1st fixing component and the 2nd fixing component
Partial length and the protective film, be not secured to the receipts between the 2nd fixing component and the 3rd fixing component
The length of part of container received is more than 250mm.
24. shield packaging container according to claim 23, which is characterized in that
The protective film, be not secured to the accommodating container between the 1st fixing component and the 2nd fixing component
Partial length and the protective film, be not secured to the receipts between the 2nd fixing component and the 3rd fixing component
The length of part of container received is more than 300mm.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016221017 | 2016-11-11 | ||
| JP2016-221017 | 2016-11-11 | ||
| JP2017199687A JP7017900B2 (en) | 2016-11-11 | 2017-10-13 | Pellicle structure, pellicle storage and fixing method |
| JP2017-199687 | 2017-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207488699U true CN207488699U (en) | 2018-06-12 |
Family
ID=62238254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721493168.6U Active CN207488699U (en) | 2016-11-11 | 2017-11-10 | Cover structure and shield packaging container |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7017900B2 (en) |
| KR (1) | KR102084479B1 (en) |
| CN (1) | CN207488699U (en) |
| TW (1) | TWI652544B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10768534B2 (en) | 2018-08-14 | 2020-09-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photolithography apparatus and method and method for handling wafer |
| KR102171608B1 (en) | 2020-06-15 | 2020-10-29 | (주)코스모에프에이시스템 | Apparatus for attaching adhesive tape |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1138598A (en) * | 1997-07-23 | 1999-02-12 | Mitsui Chem Inc | Pellicle and its housing case |
| JP4497845B2 (en) * | 2003-06-04 | 2010-07-07 | 旭化成イーマテリアルズ株式会社 | Large pellicle storage method |
| CN101073033A (en) | 2004-12-02 | 2007-11-14 | 旭化成电子材料元件株式会社 | Method of housing large pellicle |
| JP5269438B2 (en) * | 2007-03-13 | 2013-08-21 | 旭化成イーマテリアルズ株式会社 | Protective film for large pellicle and storage method for large pellicle |
| KR101191055B1 (en) * | 2007-07-06 | 2012-10-15 | 아사히 가세이 이-매터리얼즈 가부시키가이샤 | Frame of large pellicle and grasping method of frame |
| JP2010060992A (en) * | 2008-09-05 | 2010-03-18 | Asahi Kasei E-Materials Corp | Large pellicle structure and large pellicle housing structure |
-
2017
- 2017-10-13 JP JP2017199687A patent/JP7017900B2/en active Active
- 2017-11-09 KR KR1020170148440A patent/KR102084479B1/en active IP Right Grant
- 2017-11-10 CN CN201721493168.6U patent/CN207488699U/en active Active
- 2017-11-10 TW TW106138937A patent/TWI652544B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180053245A (en) | 2018-05-21 |
| TWI652544B (en) | 2019-03-01 |
| KR102084479B1 (en) | 2020-03-04 |
| TW201820030A (en) | 2018-06-01 |
| JP7017900B2 (en) | 2022-02-09 |
| JP2018084806A (en) | 2018-05-31 |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240327 Address after: Tokyo, Japan Patentee after: MITSUI CHEMICALS, Inc. Country or region after: Japan Address before: Tokyo, Japan Patentee before: ASAHI KASEI Kabushiki Kaisha Country or region before: Japan |